JP2002516647A - 環境走査型電子顕微鏡用の気体後方散乱電子検出器 - Google Patents
環境走査型電子顕微鏡用の気体後方散乱電子検出器Info
- Publication number
- JP2002516647A JP2002516647A JP53908599A JP53908599A JP2002516647A JP 2002516647 A JP2002516647 A JP 2002516647A JP 53908599 A JP53908599 A JP 53908599A JP 53908599 A JP53908599 A JP 53908599A JP 2002516647 A JP2002516647 A JP 2002516647A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- sample
- backscattered
- detector
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007613 environmental effect Effects 0.000 title claims abstract description 33
- 238000001514 detection method Methods 0.000 claims abstract description 21
- 238000010894 electron beam technology Methods 0.000 claims description 24
- 230000003321 amplification Effects 0.000 claims description 23
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 23
- 230000009977 dual effect Effects 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910001922 gold oxide Inorganic materials 0.000 claims 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 1
- 239000000395 magnesium oxide Substances 0.000 claims 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims 1
- 230000005684 electric field Effects 0.000 abstract description 5
- 238000002389 environmental scanning electron microscopy Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000003116 impacting effect Effects 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 76
- 239000007789 gas Substances 0.000 description 54
- 230000003287 optical effect Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 230000000877 morphologic effect Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000004626 scanning electron microscopy Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 125000003821 2-(trimethylsilyl)ethoxymethyl group Chemical group [H]C([H])([H])[Si](C([H])([H])[H])(C([H])([H])[H])C([H])([H])C(OC([H])([H])[*])([H])[H] 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003636 conditioned culture medium Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000002609 medium Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2602—Details
- H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
- H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/015,362 | 1998-01-29 | ||
| US09/015,362 US5945672A (en) | 1998-01-29 | 1998-01-29 | Gaseous backscattered electron detector for an environmental scanning electron microscope |
| PCT/IB1999/000056 WO1999039367A1 (en) | 1998-01-29 | 1999-01-18 | Gaseous backscattered electron detector for an environmental scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002516647A true JP2002516647A (ja) | 2002-06-04 |
| JP2002516647A5 JP2002516647A5 (enExample) | 2006-05-18 |
Family
ID=21770969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53908599A Pending JP2002516647A (ja) | 1998-01-29 | 1999-01-18 | 環境走査型電子顕微鏡用の気体後方散乱電子検出器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5945672A (enExample) |
| EP (1) | EP0970503B1 (enExample) |
| JP (1) | JP2002516647A (enExample) |
| AU (1) | AU753825B2 (enExample) |
| DE (1) | DE69924325T2 (enExample) |
| WO (1) | WO1999039367A1 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010114081A (ja) * | 2008-11-04 | 2010-05-20 | Fei Co | ガス増幅を使用した走査透過電子顕微鏡 |
| US7755045B2 (en) | 2006-08-11 | 2010-07-13 | Hitachi High-Technologies Corporation | Scanning electron microscope |
| JP2024515821A (ja) * | 2021-04-28 | 2024-04-10 | アプライド マテリアルズ イスラエル リミテッド | キャップバイアス電圧を使用した傾斜モードのｓｅｍによる後方散乱電子（ｂｓｅ）撮像 |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL124333A0 (en) * | 1998-05-05 | 1998-12-06 | El Mul Technologies Ltd | Charges particle detector |
| DE19828476A1 (de) * | 1998-06-26 | 1999-12-30 | Leo Elektronenmikroskopie Gmbh | Teilchenstrahlgerät |
| GB0005717D0 (en) * | 2000-03-09 | 2000-05-03 | Univ Cambridge Tech | Scanning electron microscope |
| FR2806527B1 (fr) | 2000-03-20 | 2002-10-25 | Schlumberger Technologies Inc | Colonne a focalisation simultanee d'un faisceau de particules et d'un faisceau optique |
| AUPQ932200A0 (en) * | 2000-08-11 | 2000-08-31 | Danilatos, Gerasimos Daniel | Environmental scanning electron microscope |
| JP2003068241A (ja) * | 2000-11-08 | 2003-03-07 | Seiko Instruments Inc | 走査型電子線装置 |
| EP1340241B1 (en) * | 2000-12-01 | 2011-05-18 | Yeda Research And Development Co., Ltd. | Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
| DE60118070T2 (de) * | 2001-09-04 | 2006-08-17 | Advantest Corp. | Partikelstrahlgerät |
| GB2391696B (en) * | 2002-05-31 | 2005-12-21 | Leo Electron Microscopy Ltd | Improvements in or relating to particle detectors |
| WO2003104846A2 (en) | 2002-06-05 | 2003-12-18 | Quantomix Ltd. | A sample enclosure for a scanning electron microscope and methods of use thereof |
| IL150056A0 (en) * | 2002-06-05 | 2002-12-01 | Yeda Res & Dev | Low-pressure chamber for scanning electron microscopy in a wet environment |
| JP4616938B2 (ja) | 2002-09-18 | 2011-01-19 | エフ・イ−・アイ・カンパニー | 環境走査電子顕微鏡および検出器 |
| US20070125947A1 (en) * | 2003-02-20 | 2007-06-07 | David Sprinzak | Sample enclosure for a scanning electron microscope and methods of use thereof |
| JP4636897B2 (ja) * | 2005-02-18 | 2011-02-23 | 株式会社日立ハイテクサイエンスシステムズ | 走査電子顕微鏡 |
| KR20080032195A (ko) * | 2005-08-18 | 2008-04-14 | 전자빔기술센터 주식회사 | 전자 칼럼용 디텍터 및 디텍팅 방법 |
| EP2109873B1 (en) * | 2007-02-06 | 2017-04-05 | FEI Company | High pressure charged particle beam system |
| EP2105944A1 (en) | 2008-03-28 | 2009-09-30 | FEI Company | Environmental cell for a particle-optical apparatus |
| US7791020B2 (en) * | 2008-03-31 | 2010-09-07 | Fei Company | Multistage gas cascade amplifier |
| US9679741B2 (en) | 2010-11-09 | 2017-06-13 | Fei Company | Environmental cell for charged particle beam system |
| EP2487703A1 (en) | 2011-02-14 | 2012-08-15 | Fei Company | Detector for use in charged-particle microscopy |
| EP2518755B1 (en) | 2011-04-26 | 2014-10-15 | FEI Company | In-column detector for particle-optical column |
| EP2555220A1 (en) * | 2011-08-03 | 2013-02-06 | Fei Company | Charged particle detector system comprising a conversion electrode |
| EP2682978B1 (en) * | 2012-07-05 | 2016-10-19 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Contamination reduction electrode for particle detector |
| CN112106168B (zh) | 2018-05-22 | 2024-04-16 | 株式会社日立高新技术 | 带电粒子束装置及带电粒子束装置的检测器位置调整方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2921151C2 (de) * | 1979-05-25 | 1982-12-02 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Vorrichtung zum Nachweis von in einem Abtast-Elektronenstrahlmikroskop von einer Probe ausgehenden Rückstreuelektronen |
| AU534811B2 (en) * | 1979-07-03 | 1984-02-16 | Unisearch Limited | Atmospheric scanning electron microscope |
| US4720633A (en) * | 1986-01-17 | 1988-01-19 | Electro-Scan Corporation | Scanning electron microscope for visualization of wet samples |
| WO1988001099A1 (en) * | 1986-08-01 | 1988-02-11 | Electro-Scan Corporation | Multipurpose gaseous detector device for electron microscopes |
| US5250808A (en) * | 1987-05-21 | 1993-10-05 | Electroscan Corporation | Integrated electron optical/differential pumping/imaging signal system for an environmental scanning electron microscope |
| US4897545A (en) * | 1987-05-21 | 1990-01-30 | Electroscan Corporation | Electron detector for use in a gaseous environment |
| US4785182A (en) * | 1987-05-21 | 1988-11-15 | Electroscan Corporation | Secondary electron detector for use in a gaseous atmosphere |
| US4823006A (en) * | 1987-05-21 | 1989-04-18 | Electroscan Corporation | Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope |
| US4880976A (en) * | 1987-05-21 | 1989-11-14 | Electroscan Corporation | Secondary electron detector for use in a gaseous atmosphere |
| US4857743A (en) * | 1988-08-04 | 1989-08-15 | Electroscan Corporation | Disposable spray aperture |
| US5362964A (en) * | 1993-07-30 | 1994-11-08 | Electroscan Corporation | Environmental scanning electron microscope |
| US5412211A (en) * | 1993-07-30 | 1995-05-02 | Electroscan Corporation | Environmental scanning electron microscope |
-
1998
- 1998-01-29 US US09/015,362 patent/US5945672A/en not_active Expired - Lifetime
-
1999
- 1999-01-18 EP EP99900089A patent/EP0970503B1/en not_active Expired - Lifetime
- 1999-01-18 DE DE69924325T patent/DE69924325T2/de not_active Expired - Lifetime
- 1999-01-18 JP JP53908599A patent/JP2002516647A/ja active Pending
- 1999-01-18 WO PCT/IB1999/000056 patent/WO1999039367A1/en not_active Ceased
- 1999-01-18 AU AU17783/99A patent/AU753825B2/en not_active Ceased
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7755045B2 (en) | 2006-08-11 | 2010-07-13 | Hitachi High-Technologies Corporation | Scanning electron microscope |
| JP2010114081A (ja) * | 2008-11-04 | 2010-05-20 | Fei Co | ガス増幅を使用した走査透過電子顕微鏡 |
| JP2024515821A (ja) * | 2021-04-28 | 2024-04-10 | アプライド マテリアルズ イスラエル リミテッド | キャップバイアス電圧を使用した傾斜モードのｓｅｍによる後方散乱電子（ｂｓｅ）撮像 |
| JP7775333B2 (ja) | 2021-04-28 | 2025-11-25 | アプライド マテリアルズ イスラエル リミテッド | キャップバイアス電圧を使用した傾斜モードのｓｅｍによる後方散乱電子（ｂｓｅ）撮像 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0970503B1 (en) | 2005-03-23 |
| WO1999039367A1 (en) | 1999-08-05 |
| AU1778399A (en) | 1999-08-16 |
| EP0970503A1 (en) | 2000-01-12 |
| AU753825B2 (en) | 2002-10-31 |
| US5945672A (en) | 1999-08-31 |
| DE69924325T2 (de) | 2005-09-08 |
| DE69924325D1 (de) | 2005-04-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060119 |
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| A72 | Notification of change in name of applicant |
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| A977 | Report on retrieval |
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| A601 | Written request for extension of time |
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