DE69924325D1 - Gasgefülter rückstrevelektronendetektor für rasterelektronenmikroskop unterkontrollierter umgebung - Google Patents

Gasgefülter rückstrevelektronendetektor für rasterelektronenmikroskop unterkontrollierter umgebung

Info

Publication number
DE69924325D1
DE69924325D1 DE69924325T DE69924325T DE69924325D1 DE 69924325 D1 DE69924325 D1 DE 69924325D1 DE 69924325 T DE69924325 T DE 69924325T DE 69924325 T DE69924325 T DE 69924325T DE 69924325 D1 DE69924325 D1 DE 69924325D1
Authority
DE
Germany
Prior art keywords
gas
controlled environment
under controlled
electronic microscope
return track
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69924325T
Other languages
English (en)
Other versions
DE69924325T2 (de
Inventor
Ralph Knowles
A Hardt
D Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
FEI Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEI Co filed Critical FEI Co
Application granted granted Critical
Publication of DE69924325D1 publication Critical patent/DE69924325D1/de
Publication of DE69924325T2 publication Critical patent/DE69924325T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69924325T 1998-01-29 1999-01-18 Gasgefüllter Rückstreuelektronendetektor für Rasterelektronenmikroskop unter kontrollierter Umgebung Expired - Lifetime DE69924325T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15362 1998-01-29
US09/015,362 US5945672A (en) 1998-01-29 1998-01-29 Gaseous backscattered electron detector for an environmental scanning electron microscope
PCT/IB1999/000056 WO1999039367A1 (en) 1998-01-29 1999-01-18 Gaseous backscattered electron detector for an environmental scanning electron microscope

Publications (2)

Publication Number Publication Date
DE69924325D1 true DE69924325D1 (de) 2005-04-28
DE69924325T2 DE69924325T2 (de) 2005-09-08

Family

ID=21770969

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69924325T Expired - Lifetime DE69924325T2 (de) 1998-01-29 1999-01-18 Gasgefüllter Rückstreuelektronendetektor für Rasterelektronenmikroskop unter kontrollierter Umgebung

Country Status (6)

Country Link
US (1) US5945672A (de)
EP (1) EP0970503B1 (de)
JP (1) JP2002516647A (de)
AU (1) AU753825B2 (de)
DE (1) DE69924325T2 (de)
WO (1) WO1999039367A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL124333A0 (en) * 1998-05-05 1998-12-06 El Mul Technologies Ltd Charges particle detector
DE19828476A1 (de) * 1998-06-26 1999-12-30 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät
GB0005717D0 (en) * 2000-03-09 2000-05-03 Univ Cambridge Tech Scanning electron microscope
FR2806527B1 (fr) 2000-03-20 2002-10-25 Schlumberger Technologies Inc Colonne a focalisation simultanee d'un faisceau de particules et d'un faisceau optique
AUPQ932200A0 (en) * 2000-08-11 2000-08-31 Danilatos, Gerasimos Daniel Environmental scanning electron microscope
JP2003068241A (ja) * 2000-11-08 2003-03-07 Seiko Instruments Inc 走査型電子線装置
CN1511332A (zh) * 2000-12-01 2004-07-07 Ү���о�����չ���޹�˾ 采用扫描电子显微镜在非真空环境下检验样品的装置和方法
EP1288996B1 (de) * 2001-09-04 2006-03-22 Advantest Corporation Teilchenstrahlgerät
ATE524821T1 (de) * 2002-05-31 2011-09-15 Zeiss Carl Smt Ltd Verbesserungen in einem teilchendetektor
JP2005529341A (ja) 2002-06-05 2005-09-29 クアントミックス・リミテッド サンプルを含む流体のｓｅｍ検査のための方法
IL150056A0 (en) * 2002-06-05 2002-12-01 Yeda Res & Dev Low-pressure chamber for scanning electron microscopy in a wet environment
EP1540692B1 (de) 2002-09-18 2013-11-06 Fei Company Teilchenoptische einrichtung und detektionsmittel
US20070125947A1 (en) * 2003-02-20 2007-06-07 David Sprinzak Sample enclosure for a scanning electron microscope and methods of use thereof
JP4636897B2 (ja) * 2005-02-18 2011-02-23 株式会社日立ハイテクサイエンスシステムズ 走査電子顕微鏡
CN101243532B (zh) * 2005-08-18 2012-01-18 电子线技术院株式会社 用于电子柱的检测器及用于电子柱的电子检测方法
JP5075375B2 (ja) * 2006-08-11 2012-11-21 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
US8921811B2 (en) * 2007-02-06 2014-12-30 Fei Company High pressure charged particle beam system
EP2105944A1 (de) 2008-03-28 2009-09-30 FEI Company "Environmental Cell" für eine TeilchenoptischeVorrichtung
US7791020B2 (en) * 2008-03-31 2010-09-07 Fei Company Multistage gas cascade amplifier
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification
US9679741B2 (en) 2010-11-09 2017-06-13 Fei Company Environmental cell for charged particle beam system
EP2487703A1 (de) 2011-02-14 2012-08-15 Fei Company Detektor zur Verwendung in der Mikroskopie mit geladenen Teilchen
EP2518755B1 (de) 2011-04-26 2014-10-15 FEI Company In-Column-Detektor für eine teilchenoptische Säule
EP2555220A1 (de) * 2011-08-03 2013-02-06 Fei Company Detektionssystem für geladene Teilchen mit einer Wandlerelektrode
EP2682978B1 (de) * 2012-07-05 2016-10-19 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Verunreinigungsverringerungselektrode für Partikeldetektor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2921151C2 (de) * 1979-05-25 1982-12-02 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum Nachweis von in einem Abtast-Elektronenstrahlmikroskop von einer Probe ausgehenden Rückstreuelektronen
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
US4720633A (en) * 1986-01-17 1988-01-19 Electro-Scan Corporation Scanning electron microscope for visualization of wet samples
JPH0687410B2 (ja) * 1986-08-01 1994-11-02 エレクトロ‐スキャン コーポレーション 走査電子顕微鏡及び試料の表面を電子顕微鏡的に像形成する方法
US4823006A (en) * 1987-05-21 1989-04-18 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope
US4897545A (en) * 1987-05-21 1990-01-30 Electroscan Corporation Electron detector for use in a gaseous environment
US4880976A (en) * 1987-05-21 1989-11-14 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
US5250808A (en) * 1987-05-21 1993-10-05 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal system for an environmental scanning electron microscope
US4785182A (en) * 1987-05-21 1988-11-15 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
US4857743A (en) * 1988-08-04 1989-08-15 Electroscan Corporation Disposable spray aperture
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope

Also Published As

Publication number Publication date
US5945672A (en) 1999-08-31
JP2002516647A (ja) 2002-06-04
DE69924325T2 (de) 2005-09-08
AU753825B2 (en) 2002-10-31
AU1778399A (en) 1999-08-16
WO1999039367A1 (en) 1999-08-05
EP0970503B1 (de) 2005-03-23
EP0970503A1 (de) 2000-01-12

Similar Documents

Publication Publication Date Title
DE69924325D1 (de) Gasgefülter rückstrevelektronendetektor für rasterelektronenmikroskop unterkontrollierter umgebung
DE69942486D1 (de) Grabenisolation für mikromechanische bauelemente
DE69711619T2 (de) Ausgabeverfahren für absorbierende artikel
DE69900343D1 (de) Abschirmeinrichtung
NO994610L (no) Bearbeidingsinstrument for prøveinnretninger
DE69910644D1 (de) Mikrometer
DE69923038D1 (de) Verbindungsvorrichtung für metalische Gitterelementen
DE69828258D1 (de) Geneigte Gleitvorrichtung für vertikale Schubladen
DE69907851T2 (de) Mikrometer
DE59902488D1 (de) Verteilvorrichtung für stückgut
DE69925789D1 (de) Bauteil für Bremsen
DE69928106D1 (de) Detektor für ionisierende strahlung
DE69902955T4 (de) Microtome
ID28840A (id) Pengujian
DE69922742D1 (de) Partikelfalle für Turbomaschinen
DE69714486T2 (de) Detektorschaltung für Substrat-Potential
DE69808682D1 (de) Multi-Adhäsion Teststrecke
DE69804161D1 (de) Bauteil für Halbleiterapparatur
DK199900104A (da) Glideskinne
DE59709071D1 (de) Elektromagnetische Abschirmung für Gebäude
ATA210998A (de) Lärmschutzeinrichtng für gleisanlagen
DE29813401U1 (de) Einhausung für Müllcontainer
DE29803152U1 (de) Schaltgerät für explosionsgefährdete Einsatzorte
FIU980597U0 (fi) Tarkastuskaivo
DE29802942U1 (de) Installationseinrichtung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition