JP2002516647A5 - - Google Patents
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- Publication number
- JP2002516647A5 JP2002516647A5 JP1999539085A JP53908599A JP2002516647A5 JP 2002516647 A5 JP2002516647 A5 JP 2002516647A5 JP 1999539085 A JP1999539085 A JP 1999539085A JP 53908599 A JP53908599 A JP 53908599A JP 2002516647 A5 JP2002516647 A5 JP 2002516647A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/015,362 | 1998-01-29 | ||
| US09/015,362 US5945672A (en) | 1998-01-29 | 1998-01-29 | Gaseous backscattered electron detector for an environmental scanning electron microscope |
| PCT/IB1999/000056 WO1999039367A1 (en) | 1998-01-29 | 1999-01-18 | Gaseous backscattered electron detector for an environmental scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002516647A JP2002516647A (ja) | 2002-06-04 |
| JP2002516647A5 true JP2002516647A5 (enExample) | 2006-05-18 |
Family
ID=21770969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53908599A Pending JP2002516647A (ja) | 1998-01-29 | 1999-01-18 | 環境走査型電子顕微鏡用の気体後方散乱電子検出器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5945672A (enExample) |
| EP (1) | EP0970503B1 (enExample) |
| JP (1) | JP2002516647A (enExample) |
| AU (1) | AU753825B2 (enExample) |
| DE (1) | DE69924325T2 (enExample) |
| WO (1) | WO1999039367A1 (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL124333A0 (en) * | 1998-05-05 | 1998-12-06 | El Mul Technologies Ltd | Charges particle detector |
| DE19828476A1 (de) * | 1998-06-26 | 1999-12-30 | Leo Elektronenmikroskopie Gmbh | Teilchenstrahlgerät |
| GB0005717D0 (en) * | 2000-03-09 | 2000-05-03 | Univ Cambridge Tech | Scanning electron microscope |
| FR2806527B1 (fr) | 2000-03-20 | 2002-10-25 | Schlumberger Technologies Inc | Colonne a focalisation simultanee d'un faisceau de particules et d'un faisceau optique |
| AUPQ932200A0 (en) * | 2000-08-11 | 2000-08-31 | Danilatos, Gerasimos Daniel | Environmental scanning electron microscope |
| JP2003068241A (ja) * | 2000-11-08 | 2003-03-07 | Seiko Instruments Inc | 走査型電子線装置 |
| EP1340241B1 (en) * | 2000-12-01 | 2011-05-18 | Yeda Research And Development Co., Ltd. | Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
| DE60118070T2 (de) * | 2001-09-04 | 2006-08-17 | Advantest Corp. | Partikelstrahlgerät |
| GB2391696B (en) * | 2002-05-31 | 2005-12-21 | Leo Electron Microscopy Ltd | Improvements in or relating to particle detectors |
| WO2003104846A2 (en) | 2002-06-05 | 2003-12-18 | Quantomix Ltd. | A sample enclosure for a scanning electron microscope and methods of use thereof |
| IL150056A0 (en) * | 2002-06-05 | 2002-12-01 | Yeda Res & Dev | Low-pressure chamber for scanning electron microscopy in a wet environment |
| JP4616938B2 (ja) | 2002-09-18 | 2011-01-19 | エフ・イ−・アイ・カンパニー | 環境走査電子顕微鏡および検出器 |
| US20070125947A1 (en) * | 2003-02-20 | 2007-06-07 | David Sprinzak | Sample enclosure for a scanning electron microscope and methods of use thereof |
| JP4636897B2 (ja) * | 2005-02-18 | 2011-02-23 | 株式会社日立ハイテクサイエンスシステムズ | 走査電子顕微鏡 |
| KR20080032195A (ko) * | 2005-08-18 | 2008-04-14 | 전자빔기술센터 주식회사 | 전자 칼럼용 디텍터 및 디텍팅 방법 |
| JP5075375B2 (ja) * | 2006-08-11 | 2012-11-21 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
| EP2109873B1 (en) * | 2007-02-06 | 2017-04-05 | FEI Company | High pressure charged particle beam system |
| EP2105944A1 (en) | 2008-03-28 | 2009-09-30 | FEI Company | Environmental cell for a particle-optical apparatus |
| US7791020B2 (en) * | 2008-03-31 | 2010-09-07 | Fei Company | Multistage gas cascade amplifier |
| US8299432B2 (en) * | 2008-11-04 | 2012-10-30 | Fei Company | Scanning transmission electron microscope using gas amplification |
| US9679741B2 (en) | 2010-11-09 | 2017-06-13 | Fei Company | Environmental cell for charged particle beam system |
| EP2487703A1 (en) | 2011-02-14 | 2012-08-15 | Fei Company | Detector for use in charged-particle microscopy |
| EP2518755B1 (en) | 2011-04-26 | 2014-10-15 | FEI Company | In-column detector for particle-optical column |
| EP2555220A1 (en) * | 2011-08-03 | 2013-02-06 | Fei Company | Charged particle detector system comprising a conversion electrode |
| EP2682978B1 (en) * | 2012-07-05 | 2016-10-19 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Contamination reduction electrode for particle detector |
| CN112106168B (zh) | 2018-05-22 | 2024-04-16 | 株式会社日立高新技术 | 带电粒子束装置及带电粒子束装置的检测器位置调整方法 |
| US11626267B2 (en) * | 2021-04-28 | 2023-04-11 | Applied Materials Israel Ltd. | Back-scatter electrons (BSE) imaging with a SEM in tilted mode using cap bias voltage |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2921151C2 (de) * | 1979-05-25 | 1982-12-02 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Vorrichtung zum Nachweis von in einem Abtast-Elektronenstrahlmikroskop von einer Probe ausgehenden Rückstreuelektronen |
| AU534811B2 (en) * | 1979-07-03 | 1984-02-16 | Unisearch Limited | Atmospheric scanning electron microscope |
| US4720633A (en) * | 1986-01-17 | 1988-01-19 | Electro-Scan Corporation | Scanning electron microscope for visualization of wet samples |
| WO1988001099A1 (en) * | 1986-08-01 | 1988-02-11 | Electro-Scan Corporation | Multipurpose gaseous detector device for electron microscopes |
| US5250808A (en) * | 1987-05-21 | 1993-10-05 | Electroscan Corporation | Integrated electron optical/differential pumping/imaging signal system for an environmental scanning electron microscope |
| US4897545A (en) * | 1987-05-21 | 1990-01-30 | Electroscan Corporation | Electron detector for use in a gaseous environment |
| US4785182A (en) * | 1987-05-21 | 1988-11-15 | Electroscan Corporation | Secondary electron detector for use in a gaseous atmosphere |
| US4823006A (en) * | 1987-05-21 | 1989-04-18 | Electroscan Corporation | Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope |
| US4880976A (en) * | 1987-05-21 | 1989-11-14 | Electroscan Corporation | Secondary electron detector for use in a gaseous atmosphere |
| US4857743A (en) * | 1988-08-04 | 1989-08-15 | Electroscan Corporation | Disposable spray aperture |
| US5362964A (en) * | 1993-07-30 | 1994-11-08 | Electroscan Corporation | Environmental scanning electron microscope |
| US5412211A (en) * | 1993-07-30 | 1995-05-02 | Electroscan Corporation | Environmental scanning electron microscope |
-
1998
- 1998-01-29 US US09/015,362 patent/US5945672A/en not_active Expired - Lifetime
-
1999
- 1999-01-18 EP EP99900089A patent/EP0970503B1/en not_active Expired - Lifetime
- 1999-01-18 DE DE69924325T patent/DE69924325T2/de not_active Expired - Lifetime
- 1999-01-18 JP JP53908599A patent/JP2002516647A/ja active Pending
- 1999-01-18 WO PCT/IB1999/000056 patent/WO1999039367A1/en not_active Ceased
- 1999-01-18 AU AU17783/99A patent/AU753825B2/en not_active Ceased