DE69924325T2 - Gasgefüllter Rückstreuelektronendetektor für Rasterelektronenmikroskop unter kontrollierter Umgebung - Google Patents

Gasgefüllter Rückstreuelektronendetektor für Rasterelektronenmikroskop unter kontrollierter Umgebung Download PDF

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Publication number
DE69924325T2
DE69924325T2 DE69924325T DE69924325T DE69924325T2 DE 69924325 T2 DE69924325 T2 DE 69924325T2 DE 69924325 T DE69924325 T DE 69924325T DE 69924325 T DE69924325 T DE 69924325T DE 69924325 T2 DE69924325 T2 DE 69924325T2
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DE
Germany
Prior art keywords
electron
sample
detector
backscattered
signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69924325T
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German (de)
English (en)
Other versions
DE69924325D1 (de
Inventor
Ralph Knowles
A. Thomas HARDT
D. Peter SMITH
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
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FEI Co
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Filing date
Publication date
Application filed by FEI Co filed Critical FEI Co
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Publication of DE69924325D1 publication Critical patent/DE69924325D1/de
Publication of DE69924325T2 publication Critical patent/DE69924325T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69924325T 1998-01-29 1999-01-18 Gasgefüllter Rückstreuelektronendetektor für Rasterelektronenmikroskop unter kontrollierter Umgebung Expired - Lifetime DE69924325T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15362 1998-01-29
US09/015,362 US5945672A (en) 1998-01-29 1998-01-29 Gaseous backscattered electron detector for an environmental scanning electron microscope
PCT/IB1999/000056 WO1999039367A1 (en) 1998-01-29 1999-01-18 Gaseous backscattered electron detector for an environmental scanning electron microscope

Publications (2)

Publication Number Publication Date
DE69924325D1 DE69924325D1 (de) 2005-04-28
DE69924325T2 true DE69924325T2 (de) 2005-09-08

Family

ID=21770969

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69924325T Expired - Lifetime DE69924325T2 (de) 1998-01-29 1999-01-18 Gasgefüllter Rückstreuelektronendetektor für Rasterelektronenmikroskop unter kontrollierter Umgebung

Country Status (6)

Country Link
US (1) US5945672A (enExample)
EP (1) EP0970503B1 (enExample)
JP (1) JP2002516647A (enExample)
AU (1) AU753825B2 (enExample)
DE (1) DE69924325T2 (enExample)
WO (1) WO1999039367A1 (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL124333A0 (en) * 1998-05-05 1998-12-06 El Mul Technologies Ltd Charges particle detector
DE19828476A1 (de) * 1998-06-26 1999-12-30 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät
GB0005717D0 (en) * 2000-03-09 2000-05-03 Univ Cambridge Tech Scanning electron microscope
FR2806527B1 (fr) 2000-03-20 2002-10-25 Schlumberger Technologies Inc Colonne a focalisation simultanee d'un faisceau de particules et d'un faisceau optique
AUPQ932200A0 (en) * 2000-08-11 2000-08-31 Danilatos, Gerasimos Daniel Environmental scanning electron microscope
JP2003068241A (ja) * 2000-11-08 2003-03-07 Seiko Instruments Inc 走査型電子線装置
EP1340241B1 (en) * 2000-12-01 2011-05-18 Yeda Research And Development Co., Ltd. Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope
DE60118070T2 (de) * 2001-09-04 2006-08-17 Advantest Corp. Partikelstrahlgerät
GB2391696B (en) * 2002-05-31 2005-12-21 Leo Electron Microscopy Ltd Improvements in or relating to particle detectors
WO2003104846A2 (en) 2002-06-05 2003-12-18 Quantomix Ltd. A sample enclosure for a scanning electron microscope and methods of use thereof
IL150056A0 (en) * 2002-06-05 2002-12-01 Yeda Res & Dev Low-pressure chamber for scanning electron microscopy in a wet environment
JP4616938B2 (ja) 2002-09-18 2011-01-19 エフ・イ−・アイ・カンパニー 環境走査電子顕微鏡および検出器
US20070125947A1 (en) * 2003-02-20 2007-06-07 David Sprinzak Sample enclosure for a scanning electron microscope and methods of use thereof
JP4636897B2 (ja) * 2005-02-18 2011-02-23 株式会社日立ハイテクサイエンスシステムズ 走査電子顕微鏡
KR20080032195A (ko) * 2005-08-18 2008-04-14 전자빔기술센터 주식회사 전자 칼럼용 디텍터 및 디텍팅 방법
JP5075375B2 (ja) * 2006-08-11 2012-11-21 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
EP2109873B1 (en) * 2007-02-06 2017-04-05 FEI Company High pressure charged particle beam system
EP2105944A1 (en) 2008-03-28 2009-09-30 FEI Company Environmental cell for a particle-optical apparatus
US7791020B2 (en) * 2008-03-31 2010-09-07 Fei Company Multistage gas cascade amplifier
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification
US9679741B2 (en) 2010-11-09 2017-06-13 Fei Company Environmental cell for charged particle beam system
EP2487703A1 (en) 2011-02-14 2012-08-15 Fei Company Detector for use in charged-particle microscopy
EP2518755B1 (en) 2011-04-26 2014-10-15 FEI Company In-column detector for particle-optical column
EP2555220A1 (en) * 2011-08-03 2013-02-06 Fei Company Charged particle detector system comprising a conversion electrode
EP2682978B1 (en) * 2012-07-05 2016-10-19 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Contamination reduction electrode for particle detector
CN112106168B (zh) 2018-05-22 2024-04-16 株式会社日立高新技术 带电粒子束装置及带电粒子束装置的检测器位置调整方法
US11626267B2 (en) * 2021-04-28 2023-04-11 Applied Materials Israel Ltd. Back-scatter electrons (BSE) imaging with a SEM in tilted mode using cap bias voltage

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2921151C2 (de) * 1979-05-25 1982-12-02 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum Nachweis von in einem Abtast-Elektronenstrahlmikroskop von einer Probe ausgehenden Rückstreuelektronen
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
US4720633A (en) * 1986-01-17 1988-01-19 Electro-Scan Corporation Scanning electron microscope for visualization of wet samples
WO1988001099A1 (en) * 1986-08-01 1988-02-11 Electro-Scan Corporation Multipurpose gaseous detector device for electron microscopes
US5250808A (en) * 1987-05-21 1993-10-05 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal system for an environmental scanning electron microscope
US4897545A (en) * 1987-05-21 1990-01-30 Electroscan Corporation Electron detector for use in a gaseous environment
US4785182A (en) * 1987-05-21 1988-11-15 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
US4823006A (en) * 1987-05-21 1989-04-18 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope
US4880976A (en) * 1987-05-21 1989-11-14 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
US4857743A (en) * 1988-08-04 1989-08-15 Electroscan Corporation Disposable spray aperture
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope

Also Published As

Publication number Publication date
EP0970503B1 (en) 2005-03-23
JP2002516647A (ja) 2002-06-04
WO1999039367A1 (en) 1999-08-05
AU1778399A (en) 1999-08-16
EP0970503A1 (en) 2000-01-12
AU753825B2 (en) 2002-10-31
US5945672A (en) 1999-08-31
DE69924325D1 (de) 2005-04-28

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