JP2002503871A - 面積の大きい無音放電励起ラジエータ - Google Patents

面積の大きい無音放電励起ラジエータ

Info

Publication number
JP2002503871A
JP2002503871A JP2000531860A JP2000531860A JP2002503871A JP 2002503871 A JP2002503871 A JP 2002503871A JP 2000531860 A JP2000531860 A JP 2000531860A JP 2000531860 A JP2000531860 A JP 2000531860A JP 2002503871 A JP2002503871 A JP 2002503871A
Authority
JP
Japan
Prior art keywords
discharge
electrode
radiator
electrodes
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000531860A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002503871A5 (enExample
Inventor
ギオヴァニ アントニオ フォッギアト
レオニド ヴィ ヴェリコフ
ラルフ エフ マンリケ
アシュラフ アール カーン
Original Assignee
クエスター テクノロジー インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by クエスター テクノロジー インコーポレイテッド filed Critical クエスター テクノロジー インコーポレイテッド
Publication of JP2002503871A publication Critical patent/JP2002503871A/ja
Publication of JP2002503871A5 publication Critical patent/JP2002503871A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
    • H01J61/0672—Main electrodes for low-pressure discharge lamps characterised by the construction of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/26—Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/305—Flat vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp
    • H01J61/526—Heating or cooling particular parts of the lamp heating or cooling of electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2437—Multilayer systems

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2000531860A 1998-02-12 1999-02-10 面積の大きい無音放電励起ラジエータ Pending JP2002503871A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/022,507 US6049086A (en) 1998-02-12 1998-02-12 Large area silent discharge excitation radiator
US09/022,507 1998-02-12
PCT/US1999/002948 WO1999041767A1 (en) 1998-02-12 1999-02-10 Large area silent discharge excitation radiator

Publications (2)

Publication Number Publication Date
JP2002503871A true JP2002503871A (ja) 2002-02-05
JP2002503871A5 JP2002503871A5 (enExample) 2006-03-30

Family

ID=21809943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000531860A Pending JP2002503871A (ja) 1998-02-12 1999-02-10 面積の大きい無音放電励起ラジエータ

Country Status (6)

Country Link
US (1) US6049086A (enExample)
EP (1) EP1055251A4 (enExample)
JP (1) JP2002503871A (enExample)
KR (1) KR100647883B1 (enExample)
AU (1) AU2762799A (enExample)
WO (1) WO1999041767A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006134705A (ja) * 2004-11-05 2006-05-25 Harison Toshiba Lighting Corp 誘電体バリア放電ランプを用いた光照射装置
JP2017004930A (ja) * 2015-06-05 2017-01-05 パナソニックＩｐマネジメント株式会社 プラズマ生成装置

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DE10005156A1 (de) * 2000-02-07 2001-08-09 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Flache Gasentladungslampe mit Abstandselementen
JP4095758B2 (ja) * 2000-06-29 2008-06-04 株式会社荏原製作所 オゾン発生装置
US20020067130A1 (en) * 2000-12-05 2002-06-06 Zoran Falkenstein Flat-panel, large-area, dielectric barrier discharge-driven V(UV) light source
US6597003B2 (en) * 2001-07-12 2003-07-22 Axcelis Technologies, Inc. Tunable radiation source providing a VUV wavelength planar illumination pattern for processing semiconductor wafers
US6646256B2 (en) * 2001-12-18 2003-11-11 Agilent Technologies, Inc. Atmospheric pressure photoionization source in mass spectrometry
US20030157000A1 (en) * 2002-02-15 2003-08-21 Kimberly-Clark Worldwide, Inc. Fluidized bed activated by excimer plasma and materials produced therefrom
KR20030075472A (ko) * 2002-03-19 2003-09-26 현대자동차주식회사 플라즈마 반응기 및 그 제조방법과 플라즈마 반응기가채용된 차량의 배기가스 저감장치
US7380756B1 (en) 2003-11-17 2008-06-03 The United States Of America As Represented By The Secretary Of The Air Force Single dielectric barrier aerodynamic plasma actuation
JPWO2005055678A1 (ja) * 2003-12-08 2007-12-06 日本碍子株式会社 プラズマ発生電極及びその製造方法、並びにプラズマ反応器
FR2864746B1 (fr) * 2003-12-29 2006-05-19 Brandt Ind Electrode pour la generation de plasma de decharge a barriere dielectrique
KR100595052B1 (ko) 2004-04-22 2006-06-30 옥도영 액정디스플레이의 백라이트
US20060006804A1 (en) * 2004-07-06 2006-01-12 Lajos Reich Dielectric barrier discharge lamp
KR100605261B1 (ko) * 2004-08-10 2006-07-28 삼성전자주식회사 면광원유닛 및 이를 가지는 액정표시장치
KR100639876B1 (ko) * 2004-09-21 2006-10-30 미래산업 주식회사 평판형 형광램프의 가스 주입구 구조 및 평판형형광램프의 가스 주입구 성형 방법
KR20080002851A (ko) * 2005-04-22 2008-01-04 호야 칸데오 옵트로닉스 가부시키가이샤 엑시머 램프
FR2889886A1 (fr) * 2005-08-19 2007-02-23 Saint Gobain Lampe uv plane a decharge coplanaire et utilisations
US7495396B2 (en) 2005-12-14 2009-02-24 General Electric Company Dielectric barrier discharge lamp
JP2007234437A (ja) * 2006-03-02 2007-09-13 Trinc:Kk プラズマ放電式除電器
KR100820370B1 (ko) * 2007-05-02 2008-04-08 (주)엠아이에프피디 대향 전극 구조를 갖는 면광원 장치 및 그 제조 방법
JP5477295B2 (ja) * 2007-12-13 2014-04-23 アカデミア シニカ 電荷監視質量分析を行うためのシステムおよび方法
WO2012077843A1 (ko) * 2010-12-09 2012-06-14 한국과학기술원 플라즈마 발생 장치
DE102011000261A1 (de) * 2011-01-21 2012-07-26 Hochschule für angewandte Wissenschaft und Kunst Fachhochschule Hildesheim/Holzminden/Göttingen Dielektrische Koplanarentladungsquelle für eine Oberflächenbehandlung unter Atmosphärendruck
US9220162B2 (en) * 2011-03-09 2015-12-22 Samsung Electronics Co., Ltd. Plasma generating apparatus and plasma generating method
KR101241049B1 (ko) 2011-08-01 2013-03-15 주식회사 플라즈마트 플라즈마 발생 장치 및 플라즈마 발생 방법
KR101246191B1 (ko) 2011-10-13 2013-03-21 주식회사 윈텔 플라즈마 장치 및 기판 처리 장치
DE102013103670A1 (de) * 2013-04-11 2014-10-30 Dritte Patentportfolio Beteiligungsgesellschaft Mbh & Co.Kg HF-Lampe mit dielektrischem Wellenleiter
EP3648145B1 (en) * 2018-11-05 2022-01-05 Xylem Europe GmbH Vacuum ultraviolet excimer lamp with an inner axially symmetric wire electrode
DE102019202479B4 (de) * 2019-02-25 2021-12-02 Osram Gmbh Elektrodenanordnung für eine entladungslampe, gasentladungslampe, schutzfolie und verfahren zum bereitstellen einer schutzfolie an einer elektrodenanordnung

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006134705A (ja) * 2004-11-05 2006-05-25 Harison Toshiba Lighting Corp 誘電体バリア放電ランプを用いた光照射装置
JP2017004930A (ja) * 2015-06-05 2017-01-05 パナソニックＩｐマネジメント株式会社 プラズマ生成装置

Also Published As

Publication number Publication date
AU2762799A (en) 1999-08-30
KR20010040954A (ko) 2001-05-15
WO1999041767A1 (en) 1999-08-19
EP1055251A1 (en) 2000-11-29
US6049086A (en) 2000-04-11
EP1055251A4 (en) 2005-02-16
KR100647883B1 (ko) 2006-12-13

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