AU2762799A - Large area silent discharge excitation radiator - Google Patents

Large area silent discharge excitation radiator

Info

Publication number
AU2762799A
AU2762799A AU27627/99A AU2762799A AU2762799A AU 2762799 A AU2762799 A AU 2762799A AU 27627/99 A AU27627/99 A AU 27627/99A AU 2762799 A AU2762799 A AU 2762799A AU 2762799 A AU2762799 A AU 2762799A
Authority
AU
Australia
Prior art keywords
large area
silent discharge
discharge excitation
excitation radiator
radiator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU27627/99A
Other languages
English (en)
Inventor
Giovanni Antonio Foggiato
Ashraf R. Khan
Ralph F. Manriquez
Leonid V. Velikov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon USA Inc
Original Assignee
Quester Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quester Technology Inc filed Critical Quester Technology Inc
Publication of AU2762799A publication Critical patent/AU2762799A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
    • H01J61/0672—Main electrodes for low-pressure discharge lamps characterised by the construction of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/26—Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/305—Flat vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp
    • H01J61/526—Heating or cooling particular parts of the lamp heating or cooling of electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2437—Multilayer systems

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
AU27627/99A 1998-02-12 1999-02-10 Large area silent discharge excitation radiator Abandoned AU2762799A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09022507 1998-02-12
US09/022,507 US6049086A (en) 1998-02-12 1998-02-12 Large area silent discharge excitation radiator
PCT/US1999/002948 WO1999041767A1 (en) 1998-02-12 1999-02-10 Large area silent discharge excitation radiator

Publications (1)

Publication Number Publication Date
AU2762799A true AU2762799A (en) 1999-08-30

Family

ID=21809943

Family Applications (1)

Application Number Title Priority Date Filing Date
AU27627/99A Abandoned AU2762799A (en) 1998-02-12 1999-02-10 Large area silent discharge excitation radiator

Country Status (6)

Country Link
US (1) US6049086A (enExample)
EP (1) EP1055251A4 (enExample)
JP (1) JP2002503871A (enExample)
KR (1) KR100647883B1 (enExample)
AU (1) AU2762799A (enExample)
WO (1) WO1999041767A1 (enExample)

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DE10005156A1 (de) * 2000-02-07 2001-08-09 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Flache Gasentladungslampe mit Abstandselementen
JP4095758B2 (ja) * 2000-06-29 2008-06-04 株式会社荏原製作所 オゾン発生装置
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US7380756B1 (en) 2003-11-17 2008-06-03 The United States Of America As Represented By The Secretary Of The Air Force Single dielectric barrier aerodynamic plasma actuation
US20070119828A1 (en) * 2003-12-08 2007-05-31 Ngk Insulators , Ltd. Plasma generating electrode, its manufacturing method, and plasma reactor
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US20090039757A1 (en) * 2005-04-22 2009-02-12 Hiroyoshi Ohshima Excimer Lamp
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KR100820370B1 (ko) * 2007-05-02 2008-04-08 (주)엠아이에프피디 대향 전극 구조를 갖는 면광원 장치 및 그 제조 방법
WO2009076535A1 (en) * 2007-12-13 2009-06-18 Academia Sinica System and method for performing charge-monitoring mass spectrometry
CN103250470A (zh) * 2010-12-09 2013-08-14 韩国科学技术院 等离子体发生器
DE102011000261A1 (de) * 2011-01-21 2012-07-26 Hochschule für angewandte Wissenschaft und Kunst Fachhochschule Hildesheim/Holzminden/Göttingen Dielektrische Koplanarentladungsquelle für eine Oberflächenbehandlung unter Atmosphärendruck
US9220162B2 (en) * 2011-03-09 2015-12-22 Samsung Electronics Co., Ltd. Plasma generating apparatus and plasma generating method
KR101241049B1 (ko) 2011-08-01 2013-03-15 주식회사 플라즈마트 플라즈마 발생 장치 및 플라즈마 발생 방법
KR101246191B1 (ko) 2011-10-13 2013-03-21 주식회사 윈텔 플라즈마 장치 및 기판 처리 장치
DE102013103670A1 (de) * 2013-04-11 2014-10-30 Dritte Patentportfolio Beteiligungsgesellschaft Mbh & Co.Kg HF-Lampe mit dielektrischem Wellenleiter
JP6726865B2 (ja) * 2015-06-05 2020-07-22 パナソニックＩｐマネジメント株式会社 プラズマ生成装置
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Also Published As

Publication number Publication date
KR20010040954A (ko) 2001-05-15
JP2002503871A (ja) 2002-02-05
WO1999041767A1 (en) 1999-08-19
KR100647883B1 (ko) 2006-12-13
EP1055251A1 (en) 2000-11-29
US6049086A (en) 2000-04-11
EP1055251A4 (en) 2005-02-16

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase