JP2002365182A5 - - Google Patents
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- Publication number
- JP2002365182A5 JP2002365182A5 JP2001176475A JP2001176475A JP2002365182A5 JP 2002365182 A5 JP2002365182 A5 JP 2002365182A5 JP 2001176475 A JP2001176475 A JP 2001176475A JP 2001176475 A JP2001176475 A JP 2001176475A JP 2002365182 A5 JP2002365182 A5 JP 2002365182A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- charged particle
- particle beam
- sample preparation
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001176475A JP3778008B2 (ja) | 2001-06-12 | 2001-06-12 | 試料作製装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001176475A JP3778008B2 (ja) | 2001-06-12 | 2001-06-12 | 試料作製装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005362596A Division JP4135013B2 (ja) | 2005-12-16 | 2005-12-16 | 試料作製装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002365182A JP2002365182A (ja) | 2002-12-18 |
| JP2002365182A5 true JP2002365182A5 (fi) | 2005-11-04 |
| JP3778008B2 JP3778008B2 (ja) | 2006-05-24 |
Family
ID=19017454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001176475A Expired - Lifetime JP3778008B2 (ja) | 2001-06-12 | 2001-06-12 | 試料作製装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3778008B2 (fi) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4942180B2 (ja) | 2006-02-28 | 2012-05-30 | エスアイアイ・ナノテクノロジー株式会社 | 試料作製装置 |
| CN106783494B (zh) * | 2016-12-06 | 2018-07-06 | 北京工业大学 | 一种透射电镜样品杆真空存储与测试装置 |
| JP7217298B2 (ja) | 2021-01-08 | 2023-02-02 | 日本電子株式会社 | 試料ホルダーおよび荷電粒子線装置 |
| JP7267318B2 (ja) | 2021-01-08 | 2023-05-01 | 日本電子株式会社 | 荷電粒子線装置 |
| JP7267316B2 (ja) * | 2021-01-08 | 2023-05-01 | 日本電子株式会社 | 試料ホルダーおよび荷電粒子線装置 |
| CN113325022B (zh) * | 2021-07-08 | 2022-11-04 | 上海科技大学 | 一种准原位光电子能谱测试装置及其测试方法 |
-
2001
- 2001-06-12 JP JP2001176475A patent/JP3778008B2/ja not_active Expired - Lifetime
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