JP2002280846A5 - - Google Patents
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- Publication number
- JP2002280846A5 JP2002280846A5 JP2001072619A JP2001072619A JP2002280846A5 JP 2002280846 A5 JP2002280846 A5 JP 2002280846A5 JP 2001072619 A JP2001072619 A JP 2001072619A JP 2001072619 A JP2001072619 A JP 2001072619A JP 2002280846 A5 JP2002280846 A5 JP 2002280846A5
- Authority
- JP
- Japan
- Prior art keywords
- amplifier
- terminal
- microwave circuit
- signal
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001072619A JP2002280846A (ja) | 2001-03-14 | 2001-03-14 | マイクロ波回路 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001072619A JP2002280846A (ja) | 2001-03-14 | 2001-03-14 | マイクロ波回路 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002280846A JP2002280846A (ja) | 2002-09-27 |
| JP2002280846A5 true JP2002280846A5 (enExample) | 2004-09-02 |
Family
ID=18930178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001072619A Abandoned JP2002280846A (ja) | 2001-03-14 | 2001-03-14 | マイクロ波回路 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002280846A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006287817A (ja) * | 2005-04-04 | 2006-10-19 | Tokyo Electron Ltd | マイクロ波発生装置、マイクロ波供給装置、プラズマ処理装置及びマイクロ波発生方法 |
-
2001
- 2001-03-14 JP JP2001072619A patent/JP2002280846A/ja not_active Abandoned
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