JP2002280846A5 - - Google Patents

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Publication number
JP2002280846A5
JP2002280846A5 JP2001072619A JP2001072619A JP2002280846A5 JP 2002280846 A5 JP2002280846 A5 JP 2002280846A5 JP 2001072619 A JP2001072619 A JP 2001072619A JP 2001072619 A JP2001072619 A JP 2001072619A JP 2002280846 A5 JP2002280846 A5 JP 2002280846A5
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JP
Japan
Prior art keywords
amplifier
terminal
microwave circuit
signal
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2001072619A
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Japanese (ja)
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JP2002280846A (en
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Publication date
Application filed filed Critical
Priority to JP2001072619A priority Critical patent/JP2002280846A/en
Priority claimed from JP2001072619A external-priority patent/JP2002280846A/en
Publication of JP2002280846A publication Critical patent/JP2002280846A/en
Publication of JP2002280846A5 publication Critical patent/JP2002280846A5/ja
Abandoned legal-status Critical Current

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Description

【０００９】
【課題を解決するために手段】
本発明は、第１ないし第４の端子を有し、第１端子に第１信号が入力し、第２端子に第１増幅器の一端が接続され、第３端子に第２増幅器の一端が接続され、第４端子が抵抗を介して接地された第１方向性結合器と、第１ないし第４の端子を有し、第１端子から前記第１信号が出力し、第２端子に前記第２増幅器の他端が接続され、第３端子に前記第１増幅器の他端が接続された第２方向性結合器とを具備したマイクロ波回路において、入力端および第１出力端、第２出力端を有しその入力端が前記第２の方向性結合器の第４端子に接続され、第１出力端から第２信号が出力するスイッチ回路と、このスイッチ回路の第２出力端に接続された抵抗とを設けたことを特徴としている。[0009]
[Means for solving the problem]
The present invention has first to fourth terminals, the first signal is input to the first terminal, one end of the first amplifier is connected to the second terminal, and one end of the second amplifier is connected to the third terminal. The fourth terminal has a first directional coupler grounded via a resistor, and first to fourth terminals, and the first signal is outputted from the first terminal and the second terminal is connected to the second terminal. In a microwave circuit including a second directional coupler in which the other end of the two amplifiers is connected and the other end of the first amplifier is connected to the third terminal, the input end, the first output end, and the second output A switch circuit having an end connected to the fourth terminal of the second directional coupler and having the first output end output a second signal , and connected to the second output end of the switch circuit It is characterized in that a resistance is provided.

Claims (4)

第１ないし第４の端子を有し、第１端子に第１信号が入力し、第２端子に第１増幅器の一端が接続され、第３端子に第２増幅器の一端が接続され、第４端子が抵抗を介して接地された第１方向性結合器と、第１ないし第４の端子を有し、第１端子から前記第１信号が出力し、第２端子に前記第２増幅器の他端が接続され、第３端子に前記第１増幅器の他端が接続された第２方向性結合器とを具備したマイクロ波回路において、入力端および第１出力端、第２出力端を有しその入力端が前記第２の方向性結合器の第４端子に接続され、第１出力端から第２信号が出力するスイッチ回路と、このスイッチ回路の第２出力端に接続された抵抗とを設けたことを特徴とするマイクロ波回路。A first signal is input to the first terminal, one end of the first amplifier is connected to the second terminal, one end of the second amplifier is connected to the third terminal, and the fourth signal has the first to fourth terminals. It has a first directional coupler whose terminal is grounded via a resistor, and first to fourth terminals, the first signal is outputted from the first terminal, and the other of the second amplifier is outputted to the second terminal. A microwave circuit comprising an end connected and a second directional coupler connected to the third terminal and the other end of the first amplifier, the microwave circuit having an input end, a first output end, and a second output end its input end connected to the fourth terminal of said second directional coupler, a switch circuit the second signal is outputted from the first output terminal, and a resistor connected to the second output of the switch circuit A microwave circuit characterized by being provided. 第１増幅器および第２増幅器が同じ特性である請求項１記載のマイクロ波回路。The microwave circuit according to claim 1, wherein the first amplifier and the second amplifier have the same characteristics. 第１増幅器および第２増幅器に印加するバイアス電圧の大きさを切り替えできるバイアス回路を設けた請求項１記載のマイクロ波回路。The microwave circuit according to claim 1, further comprising a bias circuit capable of switching the magnitude of the bias voltage applied to the first amplifier and the second amplifier. スイッチ回路の入力端と第１出力端が接続された第１状態から前記入力端と第２出力端が接続された第２状態への切り替えと、第１増幅器および第２増幅器に印加するバイアス電圧の大きさの切り替えとを連動させるバイアス制御装置を設けた請求項１記載のマイクロ波回路。Switching from a first state in which the input end of the switch circuit and the first output end are connected to a second state in which the input end and the second output end are connected, and a bias voltage applied to the first amplifier and the second amplifier The microwave circuit according to claim 1, further comprising: a bias control device for interlocking with switching of the size of.
JP2001072619A 2001-03-14 2001-03-14 Microwave circuit Abandoned JP2002280846A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001072619A JP2002280846A (en) 2001-03-14 2001-03-14 Microwave circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001072619A JP2002280846A (en) 2001-03-14 2001-03-14 Microwave circuit

Publications (2)

Publication Number Publication Date
JP2002280846A JP2002280846A (en) 2002-09-27
JP2002280846A5 true JP2002280846A5 (en) 2004-09-02

Family

ID=18930178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001072619A Abandoned JP2002280846A (en) 2001-03-14 2001-03-14 Microwave circuit

Country Status (1)

Country Link
JP (1) JP2002280846A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006287817A (en) * 2005-04-04 2006-10-19 Tokyo Electron Ltd Microwave generating device, microwave supplying device, plasma treatment device and microwave generating method

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