JP2002280846A - マイクロ波回路 - Google Patents

マイクロ波回路

Info

Publication number
JP2002280846A
JP2002280846A JP2001072619A JP2001072619A JP2002280846A JP 2002280846 A JP2002280846 A JP 2002280846A JP 2001072619 A JP2001072619 A JP 2001072619A JP 2001072619 A JP2001072619 A JP 2001072619A JP 2002280846 A JP2002280846 A JP 2002280846A
Authority
JP
Japan
Prior art keywords
terminal
amplifier
output
directional coupler
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2001072619A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002280846A5 (enExample
Inventor
Hideki Takasu
英樹 高須
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2001072619A priority Critical patent/JP2002280846A/ja
Publication of JP2002280846A publication Critical patent/JP2002280846A/ja
Publication of JP2002280846A5 publication Critical patent/JP2002280846A5/ja
Abandoned legal-status Critical Current

Links

Landscapes

  • Microwave Amplifiers (AREA)
JP2001072619A 2001-03-14 2001-03-14 マイクロ波回路 Abandoned JP2002280846A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001072619A JP2002280846A (ja) 2001-03-14 2001-03-14 マイクロ波回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001072619A JP2002280846A (ja) 2001-03-14 2001-03-14 マイクロ波回路

Publications (2)

Publication Number Publication Date
JP2002280846A true JP2002280846A (ja) 2002-09-27
JP2002280846A5 JP2002280846A5 (enExample) 2004-09-02

Family

ID=18930178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001072619A Abandoned JP2002280846A (ja) 2001-03-14 2001-03-14 マイクロ波回路

Country Status (1)

Country Link
JP (1) JP2002280846A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006106945A1 (ja) * 2005-04-04 2006-10-12 Tokyo Electron Limited マイクロ波発生装置及びマイクロ波発生方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006106945A1 (ja) * 2005-04-04 2006-10-12 Tokyo Electron Limited マイクロ波発生装置及びマイクロ波発生方法
JP2006287817A (ja) * 2005-04-04 2006-10-19 Tokyo Electron Ltd マイクロ波発生装置、マイクロ波供給装置、プラズマ処理装置及びマイクロ波発生方法

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