JP2002261014A5 - - Google Patents

Download PDF

Info

Publication number
JP2002261014A5
JP2002261014A5 JP2001363030A JP2001363030A JP2002261014A5 JP 2002261014 A5 JP2002261014 A5 JP 2002261014A5 JP 2001363030 A JP2001363030 A JP 2001363030A JP 2001363030 A JP2001363030 A JP 2001363030A JP 2002261014 A5 JP2002261014 A5 JP 2002261014A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001363030A
Other languages
Japanese (ja)
Other versions
JP2002261014A (ja
JP4131101B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001363030A priority Critical patent/JP4131101B2/ja
Priority claimed from JP2001363030A external-priority patent/JP4131101B2/ja
Publication of JP2002261014A publication Critical patent/JP2002261014A/ja
Publication of JP2002261014A5 publication Critical patent/JP2002261014A5/ja
Application granted granted Critical
Publication of JP4131101B2 publication Critical patent/JP4131101B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001363030A 2001-11-28 2001-11-28 窒化物半導体素子の製造方法 Expired - Fee Related JP4131101B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001363030A JP4131101B2 (ja) 2001-11-28 2001-11-28 窒化物半導体素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001363030A JP4131101B2 (ja) 2001-11-28 2001-11-28 窒化物半導体素子の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5604797A Division JP3292083B2 (ja) 1997-03-11 1997-03-11 窒化物半導体基板の製造方法及び窒化物半導体素子の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008098853A Division JP5012629B2 (ja) 2008-04-07 2008-04-07 窒化物半導体素子の製造方法

Publications (3)

Publication Number Publication Date
JP2002261014A JP2002261014A (ja) 2002-09-13
JP2002261014A5 true JP2002261014A5 (https=) 2005-08-25
JP4131101B2 JP4131101B2 (ja) 2008-08-13

Family

ID=19173442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001363030A Expired - Fee Related JP4131101B2 (ja) 2001-11-28 2001-11-28 窒化物半導体素子の製造方法

Country Status (1)

Country Link
JP (1) JP4131101B2 (https=)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4895466B2 (ja) * 2002-10-29 2012-03-14 日亜化学工業株式会社 窒化物半導体素子およびその製造方法
KR100550491B1 (ko) 2003-05-06 2006-02-09 스미토모덴키고교가부시키가이샤 질화물 반도체 기판 및 질화물 반도체 기판의 가공 방법
JP2005268581A (ja) 2004-03-19 2005-09-29 Matsushita Electric Ind Co Ltd 窒化ガリウム系化合物半導体発光素子
US7846757B2 (en) 2005-06-01 2010-12-07 The Regents Of The University Of California Technique for the growth and fabrication of semipolar (Ga,A1,In,B)N thin films, heterostructures, and devices
JP5194334B2 (ja) 2004-05-18 2013-05-08 住友電気工業株式会社 Iii族窒化物半導体デバイスの製造方法
KR100682880B1 (ko) * 2005-01-07 2007-02-15 삼성코닝 주식회사 결정 성장 방법
KR100682879B1 (ko) 2005-01-07 2007-02-15 삼성코닝 주식회사 결정 성장 방법
JP4656410B2 (ja) 2005-09-05 2011-03-23 住友電気工業株式会社 窒化物半導体デバイスの製造方法
DE602006008256D1 (de) 2005-12-15 2009-09-17 Lg Electronics Inc LED mit vertikaler Struktur und deren Herstellungsverfahren
KR100808197B1 (ko) * 2006-07-06 2008-02-29 엘지전자 주식회사 수직형 발광 소자 및 그 제조방법
US8357243B2 (en) 2008-06-12 2013-01-22 Sixpoint Materials, Inc. Method for testing group III-nitride wafers and group III-nitride wafers with test data
TWI487817B (zh) 2008-02-25 2015-06-11 Sixpoint Materials Inc 用於製造第iii族氮化物晶圓之方法及第iii族氮化物晶圓
JP5128335B2 (ja) * 2008-03-26 2013-01-23 古河電気工業株式会社 GaN系半導体基板、その製造方法および半導体素子
EP2291551B1 (en) 2008-06-04 2018-04-25 SixPoint Materials, Inc. High-pressure vessel for growing group iii nitride crystals and method of growing group iii nitride crystals using high-pressure vessel and group iii nitride crystal
WO2009149299A1 (en) 2008-06-04 2009-12-10 Sixpoint Materials Methods for producing improved crystallinty group iii-nitride crystals from initial group iii-nitride seed by ammonothermal growth
WO2010060034A1 (en) 2008-11-24 2010-05-27 Sixpoint Materials, Inc. METHODS FOR PRODUCING GaN NUTRIENT FOR AMMONOTHERMAL GROWTH
JP2009078972A (ja) * 2009-01-07 2009-04-16 Sumitomo Electric Ind Ltd 窒化物半導体単結晶基板とその合成方法
WO2010129718A2 (en) 2009-05-05 2010-11-11 Sixpoint Materials, Inc. Growth reactor for gallium-nitride crystals using ammonia and hydrogen chloride
WO2010150809A1 (ja) 2009-06-24 2010-12-29 日亜化学工業株式会社 窒化物半導体発光ダイオード
KR102062381B1 (ko) * 2012-11-30 2020-01-03 서울바이오시스 주식회사 질화물 반도체층 성장 방법 및 질화물 반도체 소자 제조 방법
WO2016020990A1 (ja) * 2014-08-05 2016-02-11 株式会社サイオスク 窒化物半導体テンプレート及び発光素子
JP6727186B2 (ja) * 2017-12-28 2020-07-22 日機装株式会社 窒化物半導体素子の製造方法
JP7216270B2 (ja) * 2018-09-28 2023-02-01 日亜化学工業株式会社 半導体発光素子

Similar Documents

Publication Publication Date Title
BE2022C531I2 (https=)
BE2022C547I2 (https=)
BE2022C502I2 (https=)
BE2017C059I2 (https=)
BE2017C055I2 (https=)
BE2017C032I2 (https=)
BE2015C046I2 (https=)
BE2014C052I2 (https=)
BE2014C036I2 (https=)
BE2011C034I2 (https=)
IN2004KN00093A (https=)
JP2002158675A5 (https=)
JP2002108562A5 (https=)
JP2002052272A5 (https=)
BE2014C006I2 (https=)
BE2017C050I2 (https=)
BRPI0204884A2 (https=)
CH1379220H1 (https=)
BE2014C008I2 (https=)
BE2016C021I2 (https=)
JP2002261014A5 (https=)
JP2002239251A5 (https=)
BRPI0101486B8 (https=)
BE2012C051I2 (https=)
DE50214256D1 (https=)