JP2002249873A5 - - Google Patents

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Publication number
JP2002249873A5
JP2002249873A5 JP2001045983A JP2001045983A JP2002249873A5 JP 2002249873 A5 JP2002249873 A5 JP 2002249873A5 JP 2001045983 A JP2001045983 A JP 2001045983A JP 2001045983 A JP2001045983 A JP 2001045983A JP 2002249873 A5 JP2002249873 A5 JP 2002249873A5
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JP
Japan
Prior art keywords
sputter cleaning
film forming
substrate
plasma
sputter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001045983A
Other languages
English (en)
Japanese (ja)
Other versions
JP4436987B2 (ja
JP2002249873A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001045983A priority Critical patent/JP4436987B2/ja
Priority claimed from JP2001045983A external-priority patent/JP4436987B2/ja
Publication of JP2002249873A publication Critical patent/JP2002249873A/ja
Publication of JP2002249873A5 publication Critical patent/JP2002249873A5/ja
Application granted granted Critical
Publication of JP4436987B2 publication Critical patent/JP4436987B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001045983A 2001-02-22 2001-02-22 成膜方法及び装置 Expired - Fee Related JP4436987B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001045983A JP4436987B2 (ja) 2001-02-22 2001-02-22 成膜方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001045983A JP4436987B2 (ja) 2001-02-22 2001-02-22 成膜方法及び装置

Publications (3)

Publication Number Publication Date
JP2002249873A JP2002249873A (ja) 2002-09-06
JP2002249873A5 true JP2002249873A5 (enExample) 2008-01-17
JP4436987B2 JP4436987B2 (ja) 2010-03-24

Family

ID=18907686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001045983A Expired - Fee Related JP4436987B2 (ja) 2001-02-22 2001-02-22 成膜方法及び装置

Country Status (1)

Country Link
JP (1) JP4436987B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013011072A1 (de) * 2013-07-03 2015-01-08 Oerlikon Trading Ag, Trübbach Targetpräparation

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