JP2002198357A - 半導体製造装置のクリーニングガス及びクリーニング方法 - Google Patents

半導体製造装置のクリーニングガス及びクリーニング方法

Info

Publication number
JP2002198357A
JP2002198357A JP2000397269A JP2000397269A JP2002198357A JP 2002198357 A JP2002198357 A JP 2002198357A JP 2000397269 A JP2000397269 A JP 2000397269A JP 2000397269 A JP2000397269 A JP 2000397269A JP 2002198357 A JP2002198357 A JP 2002198357A
Authority
JP
Japan
Prior art keywords
cleaning
gas
manufacturing apparatus
semiconductor manufacturing
cleaning gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000397269A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002198357A5 (enExample
Inventor
Shuji Yoshida
修二 吉田
Hiromoto Ono
博基 大野
Toshio Oi
敏夫 大井
Kotaro Tanaka
耕太郎 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP2000397269A priority Critical patent/JP2002198357A/ja
Priority to TW090117438A priority patent/TWI291201B/zh
Priority to HK03104036.5A priority patent/HK1051934B/xx
Priority to KR10-2002-7003222A priority patent/KR100485743B1/ko
Priority to US10/088,306 priority patent/US20030056388A1/en
Priority to AU2001271063A priority patent/AU2001271063A1/en
Priority to CNB018020372A priority patent/CN1214444C/zh
Priority to PCT/JP2001/006164 priority patent/WO2002007194A2/en
Publication of JP2002198357A publication Critical patent/JP2002198357A/ja
Publication of JP2002198357A5 publication Critical patent/JP2002198357A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP2000397269A 2000-07-18 2000-12-27 半導体製造装置のクリーニングガス及びクリーニング方法 Pending JP2002198357A (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2000397269A JP2002198357A (ja) 2000-12-27 2000-12-27 半導体製造装置のクリーニングガス及びクリーニング方法
TW090117438A TWI291201B (en) 2000-07-18 2001-07-17 Cleaning gas for semiconductor production equipment
HK03104036.5A HK1051934B (en) 2000-07-18 2001-07-17 Cleaning gas for semiconductor production equipment
KR10-2002-7003222A KR100485743B1 (ko) 2000-07-18 2001-07-17 반도체 생산 설비용 세정 가스
US10/088,306 US20030056388A1 (en) 2000-07-18 2001-07-17 Cleaning gas for semiconductor production equipment
AU2001271063A AU2001271063A1 (en) 2000-07-18 2001-07-17 Cleaning gas for semiconductor production equipment
CNB018020372A CN1214444C (zh) 2000-07-18 2001-07-17 用于半导体生产设备的净化气
PCT/JP2001/006164 WO2002007194A2 (en) 2000-07-18 2001-07-17 Cleaning gas for semiconductor production equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000397269A JP2002198357A (ja) 2000-12-27 2000-12-27 半導体製造装置のクリーニングガス及びクリーニング方法

Publications (2)

Publication Number Publication Date
JP2002198357A true JP2002198357A (ja) 2002-07-12
JP2002198357A5 JP2002198357A5 (enExample) 2004-08-05

Family

ID=18862413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000397269A Pending JP2002198357A (ja) 2000-07-18 2000-12-27 半導体製造装置のクリーニングガス及びクリーニング方法

Country Status (1)

Country Link
JP (1) JP2002198357A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003021653A1 (en) * 2001-08-30 2003-03-13 Research Institute Of Innovative Technology For The Earth Plasma cleaning gas and plasma cleaning method
WO2017159511A1 (ja) * 2016-03-16 2017-09-21 日本ゼオン株式会社 プラズマエッチング方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003021653A1 (en) * 2001-08-30 2003-03-13 Research Institute Of Innovative Technology For The Earth Plasma cleaning gas and plasma cleaning method
US7322368B2 (en) 2001-08-30 2008-01-29 Asahi Glass Co Ltd Plasma cleaning gas and plasma cleaning method
WO2017159511A1 (ja) * 2016-03-16 2017-09-21 日本ゼオン株式会社 プラズマエッチング方法
CN108780749A (zh) * 2016-03-16 2018-11-09 日本瑞翁株式会社 等离子体蚀刻方法
CN108780749B (zh) * 2016-03-16 2022-10-14 日本瑞翁株式会社 等离子体蚀刻方法

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