JP2002189177A5 - - Google Patents

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Publication number
JP2002189177A5
JP2002189177A5 JP2000385619A JP2000385619A JP2002189177A5 JP 2002189177 A5 JP2002189177 A5 JP 2002189177A5 JP 2000385619 A JP2000385619 A JP 2000385619A JP 2000385619 A JP2000385619 A JP 2000385619A JP 2002189177 A5 JP2002189177 A5 JP 2002189177A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000385619A
Other versions
JP2002189177A (ja
JP4512262B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2000385619A priority Critical patent/JP4512262B2/ja
Priority claimed from JP2000385619A external-priority patent/JP4512262B2/ja
Priority to US10/021,652 priority patent/US6721112B2/en
Publication of JP2002189177A publication Critical patent/JP2002189177A/ja
Priority to US10/783,476 priority patent/US7450324B2/en
Publication of JP2002189177A5 publication Critical patent/JP2002189177A5/ja
Application granted granted Critical
Publication of JP4512262B2 publication Critical patent/JP4512262B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000385619A 2000-12-19 2000-12-19 光学素子駆動装置 Expired - Fee Related JP4512262B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000385619A JP4512262B2 (ja) 2000-12-19 2000-12-19 光学素子駆動装置
US10/021,652 US6721112B2 (en) 2000-12-19 2001-12-12 Mirrors drive device
US10/783,476 US7450324B2 (en) 2000-12-19 2004-02-20 Mirrors drive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000385619A JP4512262B2 (ja) 2000-12-19 2000-12-19 光学素子駆動装置

Publications (3)

Publication Number Publication Date
JP2002189177A JP2002189177A (ja) 2002-07-05
JP2002189177A5 true JP2002189177A5 (ja) 2008-02-14
JP4512262B2 JP4512262B2 (ja) 2010-07-28

Family

ID=18852850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000385619A Expired - Fee Related JP4512262B2 (ja) 2000-12-19 2000-12-19 光学素子駆動装置

Country Status (2)

Country Link
US (2) US6721112B2 (ja)
JP (1) JP4512262B2 (ja)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4217217B2 (ja) * 2002-12-11 2009-01-28 オリンパス株式会社 光学素子の支持装置およびその製造方法、製造装置
JP2010172190A (ja) * 2002-12-27 2010-08-05 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ
JP4088188B2 (ja) * 2003-04-07 2008-05-21 セイコーエプソン株式会社 プロジェクタ
US7194153B1 (en) * 2003-05-26 2007-03-20 Omron Corporation Optical switch device
WO2005057917A1 (en) * 2003-12-11 2005-06-23 Lg Electronics, Inc. Actuator for improvement of resolution
KR20050113327A (ko) * 2004-05-27 2005-12-02 엘지전자 주식회사 해상도 향상 장치
KR20050118510A (ko) * 2004-06-14 2005-12-19 엘지전자 주식회사 디스플레이기기의 해상도 향상 장치 및 그 구동방법
JP2006195083A (ja) * 2005-01-12 2006-07-27 Sharp Corp 光走査装置
JP2008084508A (ja) * 2006-09-29 2008-04-10 Mitsumi Electric Co Ltd 光ピックアップ
CN102369153B (zh) 2009-03-31 2014-12-31 富士通株式会社 微可动元件阵列及通信设备
US20120182764A1 (en) * 2011-01-13 2012-07-19 Sarah Anne Mitchell Indoor illumination system
US9715107B2 (en) * 2012-03-22 2017-07-25 Apple Inc. Coupling schemes for gimbaled scanning mirror arrays
WO2013168385A1 (ja) * 2012-05-07 2013-11-14 パナソニック株式会社 光学反射素子
WO2014063737A1 (en) 2012-10-25 2014-05-01 Lemoptix Sa A mems device
CN103984091A (zh) * 2013-11-21 2014-08-13 苏州浩创信息科技有限公司 一种扫描器摆镜装置
EP2902148B1 (en) * 2013-11-25 2019-08-28 Preco, Inc. High density galvo housing for use with multiple laser beams ; galvo system and laser beam processing system with such housing
EP3006975A3 (en) * 2014-10-08 2016-05-25 Optotune AG Device for tilting an optical element, particularly a mirror
US9784838B1 (en) 2014-11-26 2017-10-10 Apple Inc. Compact scanner with gimbaled optics
US9835853B1 (en) 2014-11-26 2017-12-05 Apple Inc. MEMS scanner with mirrors of different sizes
US9798135B2 (en) 2015-02-16 2017-10-24 Apple Inc. Hybrid MEMS scanning module
US9897801B2 (en) 2015-09-30 2018-02-20 Apple Inc. Multi-hinge mirror assembly
US9703096B2 (en) 2015-09-30 2017-07-11 Apple Inc. Asymmetric MEMS mirror assembly
US10488652B2 (en) 2016-09-21 2019-11-26 Apple Inc. Prism-based scanner
RU2666224C1 (ru) * 2017-03-15 2018-09-06 Самсунг Электроникс Ко., Лтд. Система сканирования для лидара, основанного на отражателе с магнитной подвеской
CN108227181B (zh) * 2017-12-08 2020-06-16 华为技术有限公司 一种阵列转镜的光束扫描装置
WO2019160431A1 (ru) 2018-02-14 2019-08-22 Константин Александрович ШАВРИН Устройство и способ записи информации на магнитный носитель информации
KR102705224B1 (ko) 2019-08-18 2024-09-11 애플 인크. 광의 빔들을 스캐닝하기 위한 디바이스 및 방법
US20210173177A1 (en) * 2019-12-05 2021-06-10 Panasonic Automotive Systems Company Of America, Division Of Panasonic Corporation Of North America Magnetic mirror movement
JP7437177B2 (ja) * 2020-02-12 2024-02-22 スタンレー電気株式会社 光走査装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2748899B2 (ja) * 1995-09-26 1998-05-13 日本電気株式会社 光ヘッド装置
JP4112060B2 (ja) 1998-01-27 2008-07-02 オリンパス株式会社 光学系可動部の支持装置
JPH11219537A (ja) * 1998-02-02 1999-08-10 Olympus Optical Co Ltd 光ピックアップ
US6962830B1 (en) * 1999-03-09 2005-11-08 The Regents Of The University Of California Global mechanical stop
US6424759B1 (en) * 1999-10-12 2002-07-23 Primawave Photonics, Inc. Mechanically actuated MXN optical switch matrix
JP2001235690A (ja) * 2000-02-22 2001-08-31 Mitsubishi Electric Corp 光スイッチ
JP4105842B2 (ja) * 2000-07-17 2008-06-25 日立電線株式会社 光スイッチ
JP3716740B2 (ja) * 2000-11-22 2005-11-16 オムロン株式会社 マトリクス光スイッチ

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