JP2002182219A - 液晶装置の製造装置 - Google Patents
液晶装置の製造装置Info
- Publication number
- JP2002182219A JP2002182219A JP2000383804A JP2000383804A JP2002182219A JP 2002182219 A JP2002182219 A JP 2002182219A JP 2000383804 A JP2000383804 A JP 2000383804A JP 2000383804 A JP2000383804 A JP 2000383804A JP 2002182219 A JP2002182219 A JP 2002182219A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- substrate
- coating
- foreign matter
- liquid crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 59
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 239000000758 substrate Substances 0.000 claims abstract description 127
- 238000000576 coating method Methods 0.000 claims abstract description 116
- 239000011248 coating agent Substances 0.000 claims abstract description 114
- 239000007788 liquid Substances 0.000 claims abstract description 46
- 230000007547 defect Effects 0.000 claims description 43
- 238000003384 imaging method Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 25
- 238000004140 cleaning Methods 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 19
- 239000000126 substance Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 6
- 239000010408 film Substances 0.000 description 42
- 238000001444 catalytic combustion detection Methods 0.000 description 25
- 229920001721 polyimide Polymers 0.000 description 15
- 239000004642 Polyimide Substances 0.000 description 14
- 239000003566 sealing material Substances 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 7
- 230000002950 deficient Effects 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002952 polymeric resin Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 101000857682 Homo sapiens Runt-related transcription factor 2 Proteins 0.000 description 1
- 102100025368 Runt-related transcription factor 2 Human genes 0.000 description 1
- 101100214491 Solanum lycopersicum TFT3 gene Proteins 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Coating Apparatus (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000383804A JP2002182219A (ja) | 2000-12-18 | 2000-12-18 | 液晶装置の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000383804A JP2002182219A (ja) | 2000-12-18 | 2000-12-18 | 液晶装置の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002182219A true JP2002182219A (ja) | 2002-06-26 |
| JP2002182219A5 JP2002182219A5 (enrdf_load_stackoverflow) | 2004-12-24 |
Family
ID=18851390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000383804A Withdrawn JP2002182219A (ja) | 2000-12-18 | 2000-12-18 | 液晶装置の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002182219A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101846819B (zh) * | 2009-03-27 | 2012-05-30 | 比亚迪股份有限公司 | 液晶显示器制造中丝印网痕的检测方法 |
| KR20150014205A (ko) * | 2013-07-29 | 2015-02-06 | 세메스 주식회사 | 기판 처리 공정을 녹화하는 녹화 장치 및 방법, 그리고 그를 이용한 기판 처리 장치 |
| CN108957865A (zh) * | 2018-08-02 | 2018-12-07 | 张家港康得新光电材料有限公司 | 一种显示面板的制作方法及显示面板 |
-
2000
- 2000-12-18 JP JP2000383804A patent/JP2002182219A/ja not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101846819B (zh) * | 2009-03-27 | 2012-05-30 | 比亚迪股份有限公司 | 液晶显示器制造中丝印网痕的检测方法 |
| KR20150014205A (ko) * | 2013-07-29 | 2015-02-06 | 세메스 주식회사 | 기판 처리 공정을 녹화하는 녹화 장치 및 방법, 그리고 그를 이용한 기판 처리 장치 |
| KR102099104B1 (ko) * | 2013-07-29 | 2020-04-09 | 세메스 주식회사 | 기판 처리 공정을 녹화하는 녹화 장치 및 방법, 그리고 그를 이용한 기판 처리 장치 |
| CN108957865A (zh) * | 2018-08-02 | 2018-12-07 | 张家港康得新光电材料有限公司 | 一种显示面板的制作方法及显示面板 |
| CN108957865B (zh) * | 2018-08-02 | 2022-10-14 | 张家港康得新光电材料有限公司 | 一种显示面板的制作方法及显示面板 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040116 |
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| A977 | Report on retrieval |
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| A131 | Notification of reasons for refusal |
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| A761 | Written withdrawal of application |
Effective date: 20060728 Free format text: JAPANESE INTERMEDIATE CODE: A761 |