JP2002170860A5 - - Google Patents
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- Publication number
- JP2002170860A5 JP2002170860A5 JP2000364239A JP2000364239A JP2002170860A5 JP 2002170860 A5 JP2002170860 A5 JP 2002170860A5 JP 2000364239 A JP2000364239 A JP 2000364239A JP 2000364239 A JP2000364239 A JP 2000364239A JP 2002170860 A5 JP2002170860 A5 JP 2002170860A5
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- JP
- Japan
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000364239A JP3699348B2 (ja) | 2000-11-30 | 2000-11-30 | 駆動部隔離foupオープナ |
US09/977,394 US6824344B2 (en) | 2000-11-30 | 2001-10-16 | Drive-section-isolated FOUP opener |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000364239A JP3699348B2 (ja) | 2000-11-30 | 2000-11-30 | 駆動部隔離foupオープナ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005064626A Division JP4237714B2 (ja) | 2005-03-08 | 2005-03-08 | 駆動部隔離foupオープナ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002170860A JP2002170860A (ja) | 2002-06-14 |
JP2002170860A5 true JP2002170860A5 (ja) | 2005-07-28 |
JP3699348B2 JP3699348B2 (ja) | 2005-09-28 |
Family
ID=18835220
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000364239A Expired - Fee Related JP3699348B2 (ja) | 2000-11-30 | 2000-11-30 | 駆動部隔離foupオープナ |
Country Status (2)
Country | Link |
---|---|
US (1) | US6824344B2 (ja) |
JP (1) | JP3699348B2 (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8348583B2 (en) * | 1999-10-19 | 2013-01-08 | Rorze Corporation | Container and loader for substrate |
JP3581310B2 (ja) * | 2000-08-31 | 2004-10-27 | Tdk株式会社 | 防塵機能を備えた半導体ウェーハ処理装置 |
KR20020071827A (ko) * | 2002-08-23 | 2002-09-13 | 코리아테크노(주) | 후프오프너의 도어홀더 리프팅장치 |
KR100468437B1 (ko) * | 2002-08-23 | 2005-01-27 | 코리아테크노(주) | 후프 오프너의 후프도어 개폐장치 |
KR20020070951A (ko) * | 2002-08-23 | 2002-09-11 | 코리아테크노(주) | 후프오프너의 도어홀더 전후진 이송장치 |
DE10250353B4 (de) * | 2002-10-25 | 2008-04-30 | Brooks Automation (Germany) Gmbh | Einrichtung zur Detektion von übereinander mit einem bestimmten Abstand angeordneten Substraten |
US7537425B2 (en) * | 2002-12-30 | 2009-05-26 | Tdk Corporation | Wafer processing apparatus having dust proof function |
US7255524B2 (en) * | 2003-04-14 | 2007-08-14 | Brooks Automation, Inc. | Substrate cassette mapper |
JP4027837B2 (ja) * | 2003-04-28 | 2007-12-26 | Tdk株式会社 | パージ装置およびパージ方法 |
JP2005026513A (ja) * | 2003-07-03 | 2005-01-27 | Tokyo Electron Ltd | 処理装置 |
JP4597708B2 (ja) * | 2005-02-25 | 2010-12-15 | 平田機工株式会社 | Foupオープナ |
US8118535B2 (en) * | 2005-05-18 | 2012-02-21 | International Business Machines Corporation | Pod swapping internal to tool run time |
JP4713424B2 (ja) | 2006-08-24 | 2011-06-29 | 川崎重工業株式会社 | オープナ側ドア駆動機構 |
JP4438966B2 (ja) * | 2007-11-29 | 2010-03-24 | Tdk株式会社 | 収容容器の蓋開閉システム及び当該システムを用いた基板処理方法 |
JP2013143425A (ja) * | 2012-01-10 | 2013-07-22 | Tokyo Electron Ltd | 基板処理システム及び基板位置矯正方法 |
AT13194U1 (de) * | 2012-03-21 | 2013-08-15 | Vat Holding Ag | Ventil |
KR101404621B1 (ko) | 2012-11-05 | 2014-06-09 | 우범제 | 밀폐형 도어장치와 흄 제거장치를 갖춘 사이드 스토레이지 |
JP6260109B2 (ja) * | 2013-05-16 | 2018-01-17 | シンフォニアテクノロジー株式会社 | ロードポート装置 |
US11355371B2 (en) * | 2018-04-02 | 2022-06-07 | Bum Je WOO | Wafer storage container |
CN113474267B (zh) * | 2019-02-22 | 2022-09-20 | 村田机械株式会社 | 盖开闭装置 |
CN110931406B (zh) * | 2019-11-18 | 2022-10-21 | 北京北方华创微电子装备有限公司 | 升降门及槽式清洗机 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2868645B2 (ja) * | 1991-04-19 | 1999-03-10 | 東京エレクトロン株式会社 | ウエハ搬送装置、ウエハの傾き検出方法、およびウエハの検出方法 |
US5308993A (en) * | 1993-03-28 | 1994-05-03 | Avalon Engineering, Inc. | Semiconductor wafer cassette mapper having dual vertical column of light emitting apertures and a single vertical column of light receiving apertures |
US5905302A (en) * | 1996-11-18 | 1999-05-18 | Applied Materials, Inc. | Loadlock cassette with wafer support rails |
JP3380147B2 (ja) | 1997-11-13 | 2003-02-24 | 大日本スクリーン製造株式会社 | 基板処理装置 |
US6013920A (en) * | 1997-11-28 | 2000-01-11 | Fortrend Engineering Coirporation | Wafer-mapping load post interface having an effector position sensing device |
EP0959495B1 (en) | 1997-12-01 | 2013-07-03 | Rorze Corporation | Container and loader for substrate |
US6082951A (en) * | 1998-01-23 | 2000-07-04 | Applied Materials, Inc. | Wafer cassette load station |
US6281516B1 (en) * | 1998-07-13 | 2001-08-28 | Newport Corporation | FIMS transport box load interface |
US6042324A (en) * | 1999-03-26 | 2000-03-28 | Asm America, Inc. | Multi-stage single-drive FOUP door system |
US6396072B1 (en) * | 1999-06-21 | 2002-05-28 | Fortrend Engineering Corporation | Load port door assembly with integrated wafer mapper |
US6641350B2 (en) * | 2000-04-17 | 2003-11-04 | Hitachi Kokusai Electric Inc. | Dual loading port semiconductor processing equipment |
JP2002184831A (ja) * | 2000-12-11 | 2002-06-28 | Hirata Corp | Foupオープナ |
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2000
- 2000-11-30 JP JP2000364239A patent/JP3699348B2/ja not_active Expired - Fee Related
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2001
- 2001-10-16 US US09/977,394 patent/US6824344B2/en not_active Expired - Lifetime