JP2002141768A5 - - Google Patents
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- Publication number
- JP2002141768A5 JP2002141768A5 JP2000336136A JP2000336136A JP2002141768A5 JP 2002141768 A5 JP2002141768 A5 JP 2002141768A5 JP 2000336136 A JP2000336136 A JP 2000336136A JP 2000336136 A JP2000336136 A JP 2000336136A JP 2002141768 A5 JP2002141768 A5 JP 2002141768A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- film thickness
- thickness
- order mode
- normalized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000336136A JP2002141768A (ja) | 2000-11-02 | 2000-11-02 | 表面弾性波素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000336136A JP2002141768A (ja) | 2000-11-02 | 2000-11-02 | 表面弾性波素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002141768A JP2002141768A (ja) | 2002-05-17 |
| JP2002141768A5 true JP2002141768A5 (enExample) | 2004-11-11 |
Family
ID=18811759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000336136A Pending JP2002141768A (ja) | 2000-11-02 | 2000-11-02 | 表面弾性波素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002141768A (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005117313A (ja) | 2003-10-07 | 2005-04-28 | Fujitsu Ltd | 圧電素子およびタッチパネル装置 |
| KR100802882B1 (ko) * | 2005-11-18 | 2008-02-13 | 후지쯔 가부시끼가이샤 | 압전 소자, 그 제조 방법 및 터치 패널 장치 |
| JP2008125131A (ja) * | 2008-02-08 | 2008-05-29 | Murata Mfg Co Ltd | 表面波装置及びその製造方法 |
| JP5283972B2 (ja) * | 2008-05-28 | 2013-09-04 | 太陽誘電株式会社 | 弾性表面波デバイス |
| CN112953440B (zh) * | 2021-02-09 | 2023-10-24 | 广东广纳芯科技有限公司 | 谐振器和谐振器的制造方法 |
| CN112953441B (zh) * | 2021-02-09 | 2023-10-24 | 广东广纳芯科技有限公司 | 谐振器和谐振器的制造方法 |
| CN112953445B (zh) * | 2021-04-13 | 2023-09-15 | 广东广纳芯科技有限公司 | 谐振器和谐振器的制造方法 |
| WO2023048191A1 (ja) * | 2021-09-24 | 2023-03-30 | 株式会社村田製作所 | フィルタ装置 |
-
2000
- 2000-11-02 JP JP2000336136A patent/JP2002141768A/ja active Pending
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