JP2002134585A - ワーク搬送装置 - Google Patents

ワーク搬送装置

Info

Publication number
JP2002134585A
JP2002134585A JP2000324128A JP2000324128A JP2002134585A JP 2002134585 A JP2002134585 A JP 2002134585A JP 2000324128 A JP2000324128 A JP 2000324128A JP 2000324128 A JP2000324128 A JP 2000324128A JP 2002134585 A JP2002134585 A JP 2002134585A
Authority
JP
Japan
Prior art keywords
arm
motor
output shaft
transfer device
arm member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000324128A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002134585A5 (enExample
Inventor
Takenori Hirakawa
武則 平川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirata Corp
Original Assignee
Hirata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corp filed Critical Hirata Corp
Priority to JP2000324128A priority Critical patent/JP2002134585A/ja
Publication of JP2002134585A publication Critical patent/JP2002134585A/ja
Publication of JP2002134585A5 publication Critical patent/JP2002134585A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP2000324128A 2000-10-24 2000-10-24 ワーク搬送装置 Pending JP2002134585A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000324128A JP2002134585A (ja) 2000-10-24 2000-10-24 ワーク搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000324128A JP2002134585A (ja) 2000-10-24 2000-10-24 ワーク搬送装置

Publications (2)

Publication Number Publication Date
JP2002134585A true JP2002134585A (ja) 2002-05-10
JP2002134585A5 JP2002134585A5 (enExample) 2007-11-22

Family

ID=18801706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000324128A Pending JP2002134585A (ja) 2000-10-24 2000-10-24 ワーク搬送装置

Country Status (1)

Country Link
JP (1) JP2002134585A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004179660A (ja) * 2002-11-25 2004-06-24 Boc Group Inc:The 半導体製造システム
KR100914738B1 (ko) * 2007-08-03 2009-08-31 세메스 주식회사 웨이퍼 이송 로봇을 구비하는 반도체 제조 설비 및 그의웨이퍼 이송 방법
JP2020011303A (ja) * 2018-07-13 2020-01-23 株式会社安川電機 搬送ロボットおよびロボットシステム
CN115126841A (zh) * 2022-07-22 2022-09-30 沈阳新松机器人自动化股份有限公司 一种应用于真空机械手立柱的升降轴装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10100083A (ja) * 1996-09-27 1998-04-21 Tokico Ltd 工業用ロボット
JPH10128692A (ja) * 1996-10-28 1998-05-19 Yaskawa Electric Corp 多関節ロボット
JPH11198070A (ja) * 1998-01-12 1999-07-27 Shin Meiwa Ind Co Ltd 搬送装置
JPH11216691A (ja) * 1998-02-03 1999-08-10 Hitachi Ltd フロッグレッグ形ロボット並びに処理装置および処理方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10100083A (ja) * 1996-09-27 1998-04-21 Tokico Ltd 工業用ロボット
JPH10128692A (ja) * 1996-10-28 1998-05-19 Yaskawa Electric Corp 多関節ロボット
JPH11198070A (ja) * 1998-01-12 1999-07-27 Shin Meiwa Ind Co Ltd 搬送装置
JPH11216691A (ja) * 1998-02-03 1999-08-10 Hitachi Ltd フロッグレッグ形ロボット並びに処理装置および処理方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004179660A (ja) * 2002-11-25 2004-06-24 Boc Group Inc:The 半導体製造システム
KR100914738B1 (ko) * 2007-08-03 2009-08-31 세메스 주식회사 웨이퍼 이송 로봇을 구비하는 반도체 제조 설비 및 그의웨이퍼 이송 방법
JP2020011303A (ja) * 2018-07-13 2020-01-23 株式会社安川電機 搬送ロボットおよびロボットシステム
JP7078479B2 (ja) 2018-07-13 2022-05-31 株式会社安川電機 搬送ロボットおよびロボットシステム
US12090670B2 (en) 2018-07-13 2024-09-17 Kabushiki Kaisha Yaskawa Denki Transfer robot and robot system
CN115126841A (zh) * 2022-07-22 2022-09-30 沈阳新松机器人自动化股份有限公司 一种应用于真空机械手立柱的升降轴装置

Similar Documents

Publication Publication Date Title
US12263587B2 (en) Dual arm robot
US6737826B2 (en) Substrate transport apparatus with multiple independent end effectors
US7578649B2 (en) Dual arm substrate transport apparatus
JP4227298B2 (ja) 搬送用ロボット
JP2011199121A (ja) 搬送装置
CN102085658A (zh) 水平多关节机械手以及具备该机械手的输送装置
JP2008135630A (ja) 基板搬送装置
KR20010050352A (ko) 수평다관절형 산업용 로봇
WO2008002454A2 (en) Robot with belt-drive system
JP2010527149A (ja) 機械的スイッチ機構を利用する複数の可動アームを有する基板搬送装置
JP2001112223A (ja) 真空モータ及び搬送装置
JP2000069741A (ja) 真空用アクチュエータ
JP2002134585A (ja) ワーク搬送装置
US9452527B2 (en) Robot having high stiffness coupling
JP3488393B2 (ja) 多関節ロボット装置
JP2002273681A (ja) 産業用ロボット
JPH11307609A (ja) 搬送用アームロボットのアーム駆動装置
JP2010527148A (ja) 基板搬送装置
KR100674331B1 (ko) 이송용 로봇
JP2000317867A (ja) 回転駆動装置
JPH04264749A (ja) ウエハ移送ロボット
JP2025054059A (ja) 搬送装置
JP2019090538A (ja) 同軸状２軸の減速機構
JPH10291176A (ja) ワーク搬送ロボット

Legal Events

Date Code Title Description
A521 Written amendment

Effective date: 20071005

Free format text: JAPANESE INTERMEDIATE CODE: A523

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20071005

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20071005

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20091029

A131 Notification of reasons for refusal

Effective date: 20091127

Free format text: JAPANESE INTERMEDIATE CODE: A131

A02 Decision of refusal

Effective date: 20100319

Free format text: JAPANESE INTERMEDIATE CODE: A02