JP2002134585A5 - - Google Patents
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- Publication number
- JP2002134585A5 JP2002134585A5 JP2000324128A JP2000324128A JP2002134585A5 JP 2002134585 A5 JP2002134585 A5 JP 2002134585A5 JP 2000324128 A JP2000324128 A JP 2000324128A JP 2000324128 A JP2000324128 A JP 2000324128A JP 2002134585 A5 JP2002134585 A5 JP 2002134585A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000324128A JP2002134585A (ja) | 2000-10-24 | 2000-10-24 | ワーク搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000324128A JP2002134585A (ja) | 2000-10-24 | 2000-10-24 | ワーク搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002134585A JP2002134585A (ja) | 2002-05-10 |
| JP2002134585A5 true JP2002134585A5 (enExample) | 2007-11-22 |
Family
ID=18801706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000324128A Pending JP2002134585A (ja) | 2000-10-24 | 2000-10-24 | ワーク搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002134585A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6852644B2 (en) * | 2002-11-25 | 2005-02-08 | The Boc Group, Inc. | Atmospheric robot handling equipment |
| KR100914738B1 (ko) * | 2007-08-03 | 2009-08-31 | 세메스 주식회사 | 웨이퍼 이송 로봇을 구비하는 반도체 제조 설비 및 그의웨이퍼 이송 방법 |
| JP7078479B2 (ja) | 2018-07-13 | 2022-05-31 | 株式会社安川電機 | 搬送ロボットおよびロボットシステム |
| CN115126841B (zh) * | 2022-07-22 | 2023-03-24 | 沈阳新松机器人自动化股份有限公司 | 一种应用于真空机械手立柱的升降轴装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10100083A (ja) * | 1996-09-27 | 1998-04-21 | Tokico Ltd | 工業用ロボット |
| JP3726978B2 (ja) * | 1996-10-28 | 2005-12-14 | 株式会社安川電機 | 多関節ロボット |
| JPH11198070A (ja) * | 1998-01-12 | 1999-07-27 | Shin Meiwa Ind Co Ltd | 搬送装置 |
| JPH11216691A (ja) * | 1998-02-03 | 1999-08-10 | Hitachi Ltd | フロッグレッグ形ロボット並びに処理装置および処理方法 |
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2000
- 2000-10-24 JP JP2000324128A patent/JP2002134585A/ja active Pending