JP2002131407A5 - - Google Patents
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- Publication number
- JP2002131407A5 JP2002131407A5 JP2000367822A JP2000367822A JP2002131407A5 JP 2002131407 A5 JP2002131407 A5 JP 2002131407A5 JP 2000367822 A JP2000367822 A JP 2000367822A JP 2000367822 A JP2000367822 A JP 2000367822A JP 2002131407 A5 JP2002131407 A5 JP 2002131407A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic field
- air gap
- soft magnetic
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 description 219
- 239000010409 thin film Substances 0.000 description 195
- 239000010408 film Substances 0.000 description 63
- 239000004020 conductor Substances 0.000 description 28
- 239000000463 material Substances 0.000 description 25
- 230000005415 magnetization Effects 0.000 description 16
- 230000035945 sensitivity Effects 0.000 description 14
- 230000004907 flux Effects 0.000 description 11
- 238000001514 detection method Methods 0.000 description 8
- 239000011800 void material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- YLZOPXRUQYQQID-UHFFFAOYSA-N 3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]propan-1-one Chemical compound N1N=NC=2CN(CCC=21)CCC(=O)N1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F YLZOPXRUQYQQID-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005292 diamagnetic effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000367822A JP4023997B2 (ja) | 2000-10-26 | 2000-10-26 | 薄膜磁界センサ |
| KR1020027008326A KR100687513B1 (ko) | 2000-10-26 | 2001-10-25 | 박막자계센서 |
| TW090126413A TW550394B (en) | 2000-10-26 | 2001-10-25 | Thin-film magnetic field sensor |
| PCT/JP2001/009385 WO2002037131A1 (fr) | 2000-10-26 | 2001-10-25 | Capteur de champ magnetique a couche mince |
| DE60139017T DE60139017D1 (de) | 2000-10-26 | 2001-10-25 | Dünnfilm-magnetfeldsensor |
| EP01978911A EP1329735B1 (en) | 2000-10-26 | 2001-10-25 | Thin-film magnetic field sensor |
| CNB018032648A CN100403048C (zh) | 2000-10-26 | 2001-10-25 | 薄膜磁传感器 |
| AT01978911T ATE434192T1 (de) | 2000-10-26 | 2001-10-25 | Dünnfilm-magnetfeldsensor |
| US10/225,794 US6642714B2 (en) | 2000-10-26 | 2002-08-22 | Thin-film magnetic field sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000367822A JP4023997B2 (ja) | 2000-10-26 | 2000-10-26 | 薄膜磁界センサ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002131407A JP2002131407A (ja) | 2002-05-09 |
| JP2002131407A5 true JP2002131407A5 (enrdf_load_stackoverflow) | 2005-03-17 |
| JP4023997B2 JP4023997B2 (ja) | 2007-12-19 |
Family
ID=18838177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000367822A Expired - Fee Related JP4023997B2 (ja) | 2000-10-26 | 2000-10-26 | 薄膜磁界センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4023997B2 (enrdf_load_stackoverflow) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4334914B2 (ja) * | 2003-05-28 | 2009-09-30 | 財団法人電気磁気材料研究所 | 薄膜磁気センサ |
| JP4323220B2 (ja) * | 2003-05-28 | 2009-09-02 | 財団法人電気磁気材料研究所 | 薄膜磁気センサ及びその製造方法 |
| JP2008209224A (ja) * | 2007-02-26 | 2008-09-11 | Daido Steel Co Ltd | 磁気センサ |
| JP6083690B2 (ja) | 2012-05-11 | 2017-02-22 | 公立大学法人大阪市立大学 | 力率計測装置 |
| CN103558467B (zh) * | 2013-10-29 | 2015-08-26 | 中国南方电网有限责任公司超高压输电公司 | 一种容性设备参数的计算方法 |
| CN104808158A (zh) * | 2015-05-07 | 2015-07-29 | 李川 | 一种飞磁探测器 |
| CN107037381A (zh) * | 2015-12-29 | 2017-08-11 | 爱盛科技股份有限公司 | 磁场感测装置及其感测方法 |
| JP2018151332A (ja) * | 2017-03-14 | 2018-09-27 | 大同特殊鋼株式会社 | 薄膜磁気センサ |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3466470B2 (ja) * | 1998-03-18 | 2003-11-10 | 財団法人電気磁気材料研究所 | 薄膜磁気抵抗素子 |
| JP2000180207A (ja) * | 1998-12-16 | 2000-06-30 | Yazaki Corp | 磁気センサ |
-
2000
- 2000-10-26 JP JP2000367822A patent/JP4023997B2/ja not_active Expired - Fee Related
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