JP4023997B2 - 薄膜磁界センサ - Google Patents
薄膜磁界センサ Download PDFInfo
- Publication number
- JP4023997B2 JP4023997B2 JP2000367822A JP2000367822A JP4023997B2 JP 4023997 B2 JP4023997 B2 JP 4023997B2 JP 2000367822 A JP2000367822 A JP 2000367822A JP 2000367822 A JP2000367822 A JP 2000367822A JP 4023997 B2 JP4023997 B2 JP 4023997B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- gap
- terminal
- soft magnetic
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 221
- 239000010409 thin film Substances 0.000 title claims description 198
- 239000010408 film Substances 0.000 claims description 55
- 239000004020 conductor Substances 0.000 claims description 31
- 230000005415 magnetization Effects 0.000 claims description 16
- 239000000463 material Substances 0.000 description 25
- 230000035945 sensitivity Effects 0.000 description 14
- 230000004907 flux Effects 0.000 description 11
- 238000001514 detection method Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- YLZOPXRUQYQQID-UHFFFAOYSA-N 3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]propan-1-one Chemical compound N1N=NC=2CN(CCC=21)CCC(=O)N1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F YLZOPXRUQYQQID-UHFFFAOYSA-N 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Images
Landscapes
- Measuring Magnetic Variables (AREA)
- Magnetic Heads (AREA)
- Hall/Mr Elements (AREA)
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000367822A JP4023997B2 (ja) | 2000-10-26 | 2000-10-26 | 薄膜磁界センサ |
KR1020027008326A KR100687513B1 (ko) | 2000-10-26 | 2001-10-25 | 박막자계센서 |
TW090126413A TW550394B (en) | 2000-10-26 | 2001-10-25 | Thin-film magnetic field sensor |
PCT/JP2001/009385 WO2002037131A1 (fr) | 2000-10-26 | 2001-10-25 | Capteur de champ magnetique a couche mince |
DE60139017T DE60139017D1 (de) | 2000-10-26 | 2001-10-25 | Dünnfilm-magnetfeldsensor |
EP01978911A EP1329735B1 (en) | 2000-10-26 | 2001-10-25 | Thin-film magnetic field sensor |
CNB018032648A CN100403048C (zh) | 2000-10-26 | 2001-10-25 | 薄膜磁传感器 |
AT01978911T ATE434192T1 (de) | 2000-10-26 | 2001-10-25 | Dünnfilm-magnetfeldsensor |
US10/225,794 US6642714B2 (en) | 2000-10-26 | 2002-08-22 | Thin-film magnetic field sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000367822A JP4023997B2 (ja) | 2000-10-26 | 2000-10-26 | 薄膜磁界センサ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002131407A JP2002131407A (ja) | 2002-05-09 |
JP2002131407A5 JP2002131407A5 (enrdf_load_stackoverflow) | 2005-03-17 |
JP4023997B2 true JP4023997B2 (ja) | 2007-12-19 |
Family
ID=18838177
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000367822A Expired - Fee Related JP4023997B2 (ja) | 2000-10-26 | 2000-10-26 | 薄膜磁界センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4023997B2 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104508501A (zh) * | 2012-05-11 | 2015-04-08 | 公立大学法人大阪市立大学 | 功率因数计测装置 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4334914B2 (ja) * | 2003-05-28 | 2009-09-30 | 財団法人電気磁気材料研究所 | 薄膜磁気センサ |
JP4323220B2 (ja) * | 2003-05-28 | 2009-09-02 | 財団法人電気磁気材料研究所 | 薄膜磁気センサ及びその製造方法 |
JP2008209224A (ja) * | 2007-02-26 | 2008-09-11 | Daido Steel Co Ltd | 磁気センサ |
CN103558467B (zh) * | 2013-10-29 | 2015-08-26 | 中国南方电网有限责任公司超高压输电公司 | 一种容性设备参数的计算方法 |
CN104808158A (zh) * | 2015-05-07 | 2015-07-29 | 李川 | 一种飞磁探测器 |
CN107037381A (zh) * | 2015-12-29 | 2017-08-11 | 爱盛科技股份有限公司 | 磁场感测装置及其感测方法 |
JP2018151332A (ja) * | 2017-03-14 | 2018-09-27 | 大同特殊鋼株式会社 | 薄膜磁気センサ |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3466470B2 (ja) * | 1998-03-18 | 2003-11-10 | 財団法人電気磁気材料研究所 | 薄膜磁気抵抗素子 |
JP2000180207A (ja) * | 1998-12-16 | 2000-06-30 | Yazaki Corp | 磁気センサ |
-
2000
- 2000-10-26 JP JP2000367822A patent/JP4023997B2/ja not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104508501A (zh) * | 2012-05-11 | 2015-04-08 | 公立大学法人大阪市立大学 | 功率因数计测装置 |
US10120001B2 (en) | 2012-05-11 | 2018-11-06 | Osaka City University | Power factor measurement device |
Also Published As
Publication number | Publication date |
---|---|
JP2002131407A (ja) | 2002-05-09 |
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