JP2002110525A5 - - Google Patents

Download PDF

Info

Publication number
JP2002110525A5
JP2002110525A5 JP2000302045A JP2000302045A JP2002110525A5 JP 2002110525 A5 JP2002110525 A5 JP 2002110525A5 JP 2000302045 A JP2000302045 A JP 2000302045A JP 2000302045 A JP2000302045 A JP 2000302045A JP 2002110525 A5 JP2002110525 A5 JP 2002110525A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000302045A
Other languages
Japanese (ja)
Other versions
JP2002110525A (ja
JP4566376B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000302045A priority Critical patent/JP4566376B2/ja
Priority claimed from JP2000302045A external-priority patent/JP4566376B2/ja
Publication of JP2002110525A publication Critical patent/JP2002110525A/ja
Publication of JP2002110525A5 publication Critical patent/JP2002110525A5/ja
Application granted granted Critical
Publication of JP4566376B2 publication Critical patent/JP4566376B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000302045A 2000-10-02 2000-10-02 半導体装置の製造方法 Expired - Fee Related JP4566376B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000302045A JP4566376B2 (ja) 2000-10-02 2000-10-02 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000302045A JP4566376B2 (ja) 2000-10-02 2000-10-02 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2002110525A JP2002110525A (ja) 2002-04-12
JP2002110525A5 true JP2002110525A5 (enrdf_load_stackoverflow) 2007-11-15
JP4566376B2 JP4566376B2 (ja) 2010-10-20

Family

ID=18783474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000302045A Expired - Fee Related JP4566376B2 (ja) 2000-10-02 2000-10-02 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP4566376B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004274028A (ja) * 2003-02-20 2004-09-30 Tokyo Ohka Kogyo Co Ltd 現像装置および現像方法
JP4985188B2 (ja) * 2007-07-30 2012-07-25 東京エレクトロン株式会社 現像方法、現像装置及び記憶媒体
KR101690402B1 (ko) 2010-01-22 2017-01-09 시바우라 메카트로닉스 가부시끼가이샤 기판 처리 장치 및 기판 처리 방법
JP6148210B2 (ja) * 2014-06-17 2017-06-14 東京エレクトロン株式会社 現像方法及びコンピュータ読み取り可能な記録媒体
JP6289318B2 (ja) * 2014-09-08 2018-03-07 東京エレクトロン株式会社 現像方法、現像装置及び記憶媒体
JP6798390B2 (ja) * 2017-03-30 2020-12-09 東京エレクトロン株式会社 現像方法、現像装置及び記憶媒体
JP7149170B2 (ja) * 2018-11-20 2022-10-06 ナガセケムテックス株式会社 流動性材料の塗布方法および塗布装置、ならびにノズルヘッド

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01281729A (ja) * 1988-05-09 1989-11-13 Fujitsu Ltd 現像・エッチング処理装置
JPH076944A (ja) * 1992-12-31 1995-01-10 Sigma Merutetsuku Kk 薬液処理方法および装置
JP3527426B2 (ja) * 1998-01-09 2004-05-17 東京エレクトロン株式会社 現像処理方法および現像処理装置
JPH11329960A (ja) * 1998-02-23 1999-11-30 Toshiba Corp 基板処理方法及び基板処理装置
JP3049039B1 (ja) * 1999-02-10 2000-06-05 九州日本電気株式会社 現像液供給装置

Similar Documents

Publication Publication Date Title
BE2015C062I2 (enrdf_load_stackoverflow)
BE2014C035I2 (enrdf_load_stackoverflow)
BE2013C060I2 (enrdf_load_stackoverflow)
BE2012C026I2 (enrdf_load_stackoverflow)
BE2010C019I2 (enrdf_load_stackoverflow)
BE2010C018I2 (enrdf_load_stackoverflow)
JP2003501800A5 (enrdf_load_stackoverflow)
JP2000238294A5 (enrdf_load_stackoverflow)
JP2001198217A5 (enrdf_load_stackoverflow)
JP2002181049A5 (enrdf_load_stackoverflow)
JP2001260669A5 (enrdf_load_stackoverflow)
CH694022C1 (enrdf_load_stackoverflow)
JP2002030532A5 (enrdf_load_stackoverflow)
JP2001296253A5 (enrdf_load_stackoverflow)
JP2003531681A5 (enrdf_load_stackoverflow)
JP2001216923A5 (enrdf_load_stackoverflow)
BR0112866A2 (enrdf_load_stackoverflow)
JP2002537915A5 (enrdf_load_stackoverflow)
BRPI0003419A (enrdf_load_stackoverflow)
BY5768C1 (enrdf_load_stackoverflow)
JP2001194839A5 (enrdf_load_stackoverflow)
JP2002003171A5 (enrdf_load_stackoverflow)
CN3138718S (enrdf_load_stackoverflow)
AU2000271150A8 (enrdf_load_stackoverflow)
CN3144671S (enrdf_load_stackoverflow)