JP2002110321A5 - - Google Patents

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Publication number
JP2002110321A5
JP2002110321A5 JP2000301418A JP2000301418A JP2002110321A5 JP 2002110321 A5 JP2002110321 A5 JP 2002110321A5 JP 2000301418 A JP2000301418 A JP 2000301418A JP 2000301418 A JP2000301418 A JP 2000301418A JP 2002110321 A5 JP2002110321 A5 JP 2002110321A5
Authority
JP
Japan
Prior art keywords
ceramic heater
heater according
coating layer
glass
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000301418A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002110321A (ja
JP4596622B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000301418A priority Critical patent/JP4596622B2/ja
Priority claimed from JP2000301418A external-priority patent/JP4596622B2/ja
Publication of JP2002110321A publication Critical patent/JP2002110321A/ja
Publication of JP2002110321A5 publication Critical patent/JP2002110321A5/ja
Application granted granted Critical
Publication of JP4596622B2 publication Critical patent/JP4596622B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000301418A 2000-09-29 2000-09-29 セラミックヒーターとこれを用いたウエハ加熱装置 Expired - Fee Related JP4596622B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000301418A JP4596622B2 (ja) 2000-09-29 2000-09-29 セラミックヒーターとこれを用いたウエハ加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000301418A JP4596622B2 (ja) 2000-09-29 2000-09-29 セラミックヒーターとこれを用いたウエハ加熱装置

Publications (3)

Publication Number Publication Date
JP2002110321A JP2002110321A (ja) 2002-04-12
JP2002110321A5 true JP2002110321A5 (enrdf_load_stackoverflow) 2005-06-09
JP4596622B2 JP4596622B2 (ja) 2010-12-08

Family

ID=18782955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000301418A Expired - Fee Related JP4596622B2 (ja) 2000-09-29 2000-09-29 セラミックヒーターとこれを用いたウエハ加熱装置

Country Status (1)

Country Link
JP (1) JP4596622B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006013262A (ja) * 2004-06-28 2006-01-12 Kyocera Corp ヒーターとその製造方法ならびにそれを用いたウェハ加熱装置
TW200633947A (en) * 2005-02-16 2006-10-01 Ngk Insulators Ltd Joined body and manufacturing method for the same
CN116081953B (zh) * 2023-01-03 2024-06-04 武汉理工大学 一种锌硼二元超低温烧结微晶玻璃及其制备方法和应用

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543751A (en) * 1978-09-21 1980-03-27 Tokyo Shibaura Electric Co Plane heating element
JPH0611547B2 (ja) * 1986-09-19 1994-02-16 株式会社日立製作所 厚膜型感熱記録ヘツド
JPH0433390A (ja) * 1990-05-30 1992-02-04 Taiyo Yuden Co Ltd 電子回路基板の実装方法
JPH0959785A (ja) * 1995-08-22 1997-03-04 Mitsubishi Materials Corp ホーロー基板の製造方法
JPH09190873A (ja) * 1996-01-05 1997-07-22 Matsushita Electric Ind Co Ltd 面状発熱体の製造法
JPH09269687A (ja) * 1996-03-29 1997-10-14 Toshiba Lighting & Technol Corp 定着ヒータ，定着装置および画像形成装置
JPH11322361A (ja) * 1998-05-08 1999-11-24 Asahi Glass Co Ltd 導電性ペースト及び導電体付ガラス板
JP2000231980A (ja) * 1999-02-10 2000-08-22 Ibiden Co Ltd ホットプレート用窒化アルミニウム基材

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