JP2002094064A - 薄膜トランジスタ、薄膜トランジスタの製造方法、液晶表示装置およびエレクトロルミネッセンス表示装置 - Google Patents

薄膜トランジスタ、薄膜トランジスタの製造方法、液晶表示装置およびエレクトロルミネッセンス表示装置

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Publication number
JP2002094064A
JP2002094064A JP2000274620A JP2000274620A JP2002094064A JP 2002094064 A JP2002094064 A JP 2002094064A JP 2000274620 A JP2000274620 A JP 2000274620A JP 2000274620 A JP2000274620 A JP 2000274620A JP 2002094064 A JP2002094064 A JP 2002094064A
Authority
JP
Japan
Prior art keywords
film
thin film
film transistor
electrode
display device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000274620A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002094064A5 (enExample
Inventor
Shinji Goto
真志 後藤
Mutsumi Yamamoto
睦 山本
Mikihiko Nishitani
幹彦 西谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2000274620A priority Critical patent/JP2002094064A/ja
Publication of JP2002094064A publication Critical patent/JP2002094064A/ja
Publication of JP2002094064A5 publication Critical patent/JP2002094064A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment
    • H10D86/021—Manufacture or treatment of multiple TFTs
    • H10D86/0231—Manufacture or treatment of multiple TFTs using masks, e.g. half-tone masks

Landscapes

  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Thin Film Transistor (AREA)
JP2000274620A 2000-09-11 2000-09-11 薄膜トランジスタ、薄膜トランジスタの製造方法、液晶表示装置およびエレクトロルミネッセンス表示装置 Pending JP2002094064A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000274620A JP2002094064A (ja) 2000-09-11 2000-09-11 薄膜トランジスタ、薄膜トランジスタの製造方法、液晶表示装置およびエレクトロルミネッセンス表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000274620A JP2002094064A (ja) 2000-09-11 2000-09-11 薄膜トランジスタ、薄膜トランジスタの製造方法、液晶表示装置およびエレクトロルミネッセンス表示装置

Publications (2)

Publication Number Publication Date
JP2002094064A true JP2002094064A (ja) 2002-03-29
JP2002094064A5 JP2002094064A5 (enExample) 2005-09-08

Family

ID=18760353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000274620A Pending JP2002094064A (ja) 2000-09-11 2000-09-11 薄膜トランジスタ、薄膜トランジスタの製造方法、液晶表示装置およびエレクトロルミネッセンス表示装置

Country Status (1)

Country Link
JP (1) JP2002094064A (enExample)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100412121B1 (ko) * 2001-03-31 2003-12-31 비오이 하이디스 테크놀로지 주식회사 박막 트랜지스터의 제조방법
JP2007199708A (ja) * 2005-12-28 2007-08-09 Semiconductor Energy Lab Co Ltd 表示装置及びその作製方法
JP2008009372A (ja) * 2006-06-29 2008-01-17 Lg Philips Lcd Co Ltd 液晶表示装置及びその製造方法
JP2008015460A (ja) * 2006-06-30 2008-01-24 Lg Philips Lcd Co Ltd 液晶表示装置の製造方法及び液晶表示装置
JP2008015455A (ja) * 2006-06-30 2008-01-24 Lg Phillips Lcd Co Ltd 液晶表示装置及びその製造方法
JP2009054836A (ja) * 2007-08-28 2009-03-12 Mitsubishi Electric Corp Ｔｆｔ基板及びその製造方法
JP2009271527A (ja) * 2008-05-06 2009-11-19 Samsung Mobile Display Co Ltd 平板表示装置用の薄膜トランジスタアレイ基板、それを備える有機発光表示装置、及びそれらの製造方法
JP2010098280A (ja) * 2008-02-22 2010-04-30 Toppan Printing Co Ltd 透明薄膜トランジスタ及び画像表示装置
KR101338106B1 (ko) * 2006-06-30 2013-12-06 엘지디스플레이 주식회사 액정표시장치 및 그 제조방법
KR101338108B1 (ko) * 2006-12-14 2013-12-06 엘지디스플레이 주식회사 액정표시장치의 제조방법
US8634044B2 (en) 2005-12-28 2014-01-21 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method thereof

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01255830A (ja) * 1988-04-05 1989-10-12 Nec Corp 液晶表示装置の配線の製造方法と液晶表示装置の配線
JPH0234970A (ja) * 1988-07-25 1990-02-05 Sony Corp 電界効果型薄膜トランジスタ
JPH02245739A (ja) * 1989-03-20 1990-10-01 Hitachi Ltd 液晶表示装置
JPH03129326A (ja) * 1989-10-13 1991-06-03 Hitachi Ltd 表示装置
JPH03216996A (ja) * 1990-01-19 1991-09-24 Matsushita Electron Corp 画像表示装置
JPH04278928A (ja) * 1991-03-07 1992-10-05 Sharp Corp アクティブマトリクス基板
JPH053318A (ja) * 1991-06-26 1993-01-08 Stanley Electric Co Ltd 薄膜トランジスタと薄膜トランジスタの製造方法
JPH06169086A (ja) * 1992-11-30 1994-06-14 Sanyo Electric Co Ltd 多結晶シリコン薄膜トランジスタ
JPH0778992A (ja) * 1993-09-07 1995-03-20 Fujitsu Ltd 薄膜トランジスタ及びその製造方法
JPH07142735A (ja) * 1993-11-12 1995-06-02 Sanyo Electric Co Ltd 薄膜トランジスタの製造方法及び薄膜トランジスタ
JPH11281992A (ja) * 1998-03-31 1999-10-15 Sharp Corp 液晶表示装置及びその製造方法

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01255830A (ja) * 1988-04-05 1989-10-12 Nec Corp 液晶表示装置の配線の製造方法と液晶表示装置の配線
JPH0234970A (ja) * 1988-07-25 1990-02-05 Sony Corp 電界効果型薄膜トランジスタ
JPH02245739A (ja) * 1989-03-20 1990-10-01 Hitachi Ltd 液晶表示装置
JPH03129326A (ja) * 1989-10-13 1991-06-03 Hitachi Ltd 表示装置
JPH03216996A (ja) * 1990-01-19 1991-09-24 Matsushita Electron Corp 画像表示装置
JPH04278928A (ja) * 1991-03-07 1992-10-05 Sharp Corp アクティブマトリクス基板
JPH053318A (ja) * 1991-06-26 1993-01-08 Stanley Electric Co Ltd 薄膜トランジスタと薄膜トランジスタの製造方法
JPH06169086A (ja) * 1992-11-30 1994-06-14 Sanyo Electric Co Ltd 多結晶シリコン薄膜トランジスタ
JPH0778992A (ja) * 1993-09-07 1995-03-20 Fujitsu Ltd 薄膜トランジスタ及びその製造方法
JPH07142735A (ja) * 1993-11-12 1995-06-02 Sanyo Electric Co Ltd 薄膜トランジスタの製造方法及び薄膜トランジスタ
JPH11281992A (ja) * 1998-03-31 1999-10-15 Sharp Corp 液晶表示装置及びその製造方法

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100412121B1 (ko) * 2001-03-31 2003-12-31 비오이 하이디스 테크놀로지 주식회사 박막 트랜지스터의 제조방법
US8634044B2 (en) 2005-12-28 2014-01-21 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method thereof
JP2007199708A (ja) * 2005-12-28 2007-08-09 Semiconductor Energy Lab Co Ltd 表示装置及びその作製方法
US12189232B2 (en) 2005-12-28 2025-01-07 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method thereof
US11269214B2 (en) 2005-12-28 2022-03-08 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method thereof
US10739637B2 (en) 2005-12-28 2020-08-11 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method thereof
US10444564B1 (en) 2005-12-28 2019-10-15 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method thereof
US9703140B2 (en) 2005-12-28 2017-07-11 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method thereof
JP2014115677A (ja) * 2005-12-28 2014-06-26 Semiconductor Energy Lab Co Ltd 表示装置
JP2008009372A (ja) * 2006-06-29 2008-01-17 Lg Philips Lcd Co Ltd 液晶表示装置及びその製造方法
JP2008015455A (ja) * 2006-06-30 2008-01-24 Lg Phillips Lcd Co Ltd 液晶表示装置及びその製造方法
KR101338106B1 (ko) * 2006-06-30 2013-12-06 엘지디스플레이 주식회사 액정표시장치 및 그 제조방법
KR101236726B1 (ko) 2006-06-30 2013-02-25 엘지디스플레이 주식회사 액정표시장치의 제조방법
JP2008015460A (ja) * 2006-06-30 2008-01-24 Lg Philips Lcd Co Ltd 液晶表示装置の製造方法及び液晶表示装置
KR101338108B1 (ko) * 2006-12-14 2013-12-06 엘지디스플레이 주식회사 액정표시장치의 제조방법
JP2009054836A (ja) * 2007-08-28 2009-03-12 Mitsubishi Electric Corp Ｔｆｔ基板及びその製造方法
JP2010098280A (ja) * 2008-02-22 2010-04-30 Toppan Printing Co Ltd 透明薄膜トランジスタ及び画像表示装置
JP2009271527A (ja) * 2008-05-06 2009-11-19 Samsung Mobile Display Co Ltd 平板表示装置用の薄膜トランジスタアレイ基板、それを備える有機発光表示装置、及びそれらの製造方法

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