JP2002071989A - 光導波路デバイスの製造方法および光導波路デバイス - Google Patents

光導波路デバイスの製造方法および光導波路デバイス

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Publication number
JP2002071989A
JP2002071989A JP2000253249A JP2000253249A JP2002071989A JP 2002071989 A JP2002071989 A JP 2002071989A JP 2000253249 A JP2000253249 A JP 2000253249A JP 2000253249 A JP2000253249 A JP 2000253249A JP 2002071989 A JP2002071989 A JP 2002071989A
Authority
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Japan
Prior art keywords
optical waveguide
waveguide device
thickness
layer
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000253249A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002071989A5 (enExample
Inventor
Madoka Kondo
円華 近藤
Yasuhiro Kuwana
保宏 桑名
Toru Takahashi
亨 高橋
Masatoshi Yamaguchi
正利 山口
Toshihiro Kuroda
敏裕 黒田
Hiroshi Masuda
宏 増田
Nobuo Miyadera
信生 宮寺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP2000253249A priority Critical patent/JP2002071989A/ja
Publication of JP2002071989A publication Critical patent/JP2002071989A/ja
Publication of JP2002071989A5 publication Critical patent/JP2002071989A5/ja
Pending legal-status Critical Current

Links

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  • Optical Integrated Circuits (AREA)
JP2000253249A 2000-08-24 2000-08-24 光導波路デバイスの製造方法および光導波路デバイス Pending JP2002071989A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000253249A JP2002071989A (ja) 2000-08-24 2000-08-24 光導波路デバイスの製造方法および光導波路デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000253249A JP2002071989A (ja) 2000-08-24 2000-08-24 光導波路デバイスの製造方法および光導波路デバイス

Publications (2)

Publication Number Publication Date
JP2002071989A true JP2002071989A (ja) 2002-03-12
JP2002071989A5 JP2002071989A5 (enExample) 2007-10-11

Family

ID=18742369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000253249A Pending JP2002071989A (ja) 2000-08-24 2000-08-24 光導波路デバイスの製造方法および光導波路デバイス

Country Status (1)

Country Link
JP (1) JP2002071989A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003056371A1 (fr) * 2001-12-26 2003-07-10 Hitachi Chemical Co.,Ltd. Procede de fabrication de dispositif a guide d'onde et dispositif a guide d'ondes
WO2003058306A1 (fr) * 2001-12-28 2003-07-17 Hitachi Chemical Co.,Ltd. Film a guide d'ondes optique polymere

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003056371A1 (fr) * 2001-12-26 2003-07-10 Hitachi Chemical Co.,Ltd. Procede de fabrication de dispositif a guide d'onde et dispositif a guide d'ondes
US7200313B2 (en) 2001-12-26 2007-04-03 Hitachi Chemical Co., Ltd. Method for the preparation of optical waveguide devices and optical waveguide devices
WO2003058306A1 (fr) * 2001-12-28 2003-07-17 Hitachi Chemical Co.,Ltd. Film a guide d'ondes optique polymere
US7162134B2 (en) 2001-12-28 2007-01-09 Hitachi Chemical Co., Ltd. Polymeric optical waveguide film
US7373064B2 (en) 2001-12-28 2008-05-13 Hitachi Chemical Co., Ltd. Polymeric optical waveguide film

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