JP2002043879A5 - - Google Patents
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- JP2002043879A5 JP2002043879A5 JP2001145259A JP2001145259A JP2002043879A5 JP 2002043879 A5 JP2002043879 A5 JP 2002043879A5 JP 2001145259 A JP2001145259 A JP 2001145259A JP 2001145259 A JP2001145259 A JP 2001145259A JP 2002043879 A5 JP2002043879 A5 JP 2002043879A5
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- Japan
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/571,919 US6420202B1 (en) | 2000-05-16 | 2000-05-16 | Method for shaping thin film resonators to shape acoustic modes therein |
US09/571919 | 2000-05-16 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002043879A JP2002043879A (ja) | 2002-02-08 |
JP2002043879A5 true JP2002043879A5 (ja) | 2008-11-13 |
JP5142001B2 JP5142001B2 (ja) | 2013-02-13 |
Family
ID=24285591
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001145259A Expired - Fee Related JP5142001B2 (ja) | 2000-05-16 | 2001-05-15 | 薄膜音響共振子の形成方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US6420202B1 (ja) |
EP (1) | EP1156584B1 (ja) |
JP (1) | JP5142001B2 (ja) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1399269B1 (en) * | 2001-06-01 | 2010-11-03 | Ulvac, Inc. | Waveform generator for microdeposition control system |
DE10135872A1 (de) * | 2001-07-24 | 2003-02-27 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung einer Linse |
US20030048041A1 (en) * | 2001-09-07 | 2003-03-13 | Hiroyuki Kita | Piezoelectric thin-film element and a manufacturing method thereof |
JP3969224B2 (ja) * | 2002-01-08 | 2007-09-05 | 株式会社村田製作所 | 圧電共振子及びそれを用いた圧電フィルタ・デュプレクサ・通信装置 |
DE10200741A1 (de) * | 2002-01-11 | 2003-07-24 | Infineon Technologies Ag | Verfahren zur Herstellung einer topologieoptimierten Elektrode für einen Resonator in Dünnfilmtechnologie |
US20100107389A1 (en) * | 2002-01-11 | 2010-05-06 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Method of fabricating an electrode for a bulk acoustic resonator |
US20040173144A1 (en) * | 2002-05-31 | 2004-09-09 | Edwards Charles O. | Formation of printed circuit board structures using piezo microdeposition |
CN100535595C (zh) * | 2002-08-07 | 2009-09-02 | 松下电器产业株式会社 | 角速度传感器 |
JP4541147B2 (ja) | 2002-09-12 | 2010-09-08 | エヌエックスピー ビー ヴィ | バルク弾性波フィルタにおける通過帯域リップルを抑制する手段を有するバルク弾性波共振器 |
JP2004304704A (ja) * | 2003-04-01 | 2004-10-28 | Matsushita Electric Ind Co Ltd | 薄膜音響共振子、及び、薄膜音響共振子回路 |
JP4133580B2 (ja) * | 2003-05-21 | 2008-08-13 | 独立行政法人科学技術振興機構 | 圧電材料の加工方法 |
JP4012156B2 (ja) * | 2004-02-02 | 2007-11-21 | 独立行政法人科学技術振興機構 | 圧電素子の製造方法 |
JP4149416B2 (ja) * | 2004-05-31 | 2008-09-10 | 富士通メディアデバイス株式会社 | 圧電薄膜共振子およびフィルタならびにそれらの製造方法 |
JP2006140370A (ja) * | 2004-11-15 | 2006-06-01 | Oki Electric Ind Co Ltd | マイクロレンズの製造方法 |
US7541893B2 (en) * | 2005-05-23 | 2009-06-02 | Cts Corporation | Ceramic RF filter and duplexer having improved third harmonic response |
WO2006129532A1 (ja) | 2005-06-02 | 2006-12-07 | Murata Manufacturing Co., Ltd. | 圧電共振子及び圧電薄膜フィルタ |
US7889027B2 (en) * | 2005-09-09 | 2011-02-15 | Sony Corporation | Film bulk acoustic resonator shaped as an ellipse with a part cut off |
US7544612B1 (en) | 2006-01-20 | 2009-06-09 | Skyworks Solutions, Inc. | Method and structure for reducing the effect of vertical steps in patterned layers in semiconductor structures |
US7598827B2 (en) * | 2006-06-19 | 2009-10-06 | Maxim Integrated Products | Harmonic termination of power amplifiers using BAW filter output matching circuits |
US7586389B2 (en) * | 2006-06-19 | 2009-09-08 | Maxim Integrated Products, Inc. | Impedance transformation and filter using bulk acoustic wave technology |
JP2008078717A (ja) * | 2006-09-19 | 2008-04-03 | Nec Tokin Corp | ノイズフィルタおよびスイッチング電源 |
US7385334B1 (en) | 2006-11-20 | 2008-06-10 | Sandia Corporation | Contour mode resonators with acoustic reflectors |
WO2009023098A2 (en) * | 2007-08-14 | 2009-02-19 | Skyworks Solutions, Inc. | Bulk acoustic wave structure with aluminum copper nitride piezoelectric layer and related method |
US8035277B2 (en) * | 2007-08-14 | 2011-10-11 | Avago Technologies Wireless Ip (Singapore) Pte.Ltd. | Method for forming a multi-layer electrode underlying a piezoelectric layer and related structure |
US7777596B2 (en) * | 2007-12-18 | 2010-08-17 | Robert Bosch Gmbh | MEMS resonator structure and method |
US7795781B2 (en) * | 2008-04-24 | 2010-09-14 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonator with reduced energy loss |
US7602102B1 (en) | 2008-04-24 | 2009-10-13 | Skyworks Solutions, Inc. | Bulk acoustic wave resonator with controlled thickness region having controlled electromechanical coupling |
US7889025B1 (en) * | 2008-06-10 | 2011-02-15 | The United States Of America As Represented By The Secretary Of The Army | Anti-reflective acoustic diffuser for SAW and BAW devices |
JP5288920B2 (ja) * | 2008-07-16 | 2013-09-11 | 日本電波工業株式会社 | 水晶振動用素子の製造方法 |
CN101477194B (zh) * | 2009-02-17 | 2011-07-06 | 东南大学 | 一种转子碰摩声发射源定位方法 |
US9608589B2 (en) | 2010-10-26 | 2017-03-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Method of forming acoustic resonator using intervening seed layer |
WO2017116739A1 (en) | 2015-12-30 | 2017-07-06 | 3M Innovative Properties Company | Elliptically-shaped resonator markers with enhanced frequency stability and gain |
WO2020082245A1 (zh) * | 2018-10-23 | 2020-04-30 | 华为技术有限公司 | 单片集成baw谐振器制作方法 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52658B2 (ja) * | 1971-12-30 | 1977-01-10 | ||
JPS58137317A (ja) * | 1982-02-09 | 1983-08-15 | Nec Corp | 圧電薄膜複合振動子 |
US4556812A (en) * | 1983-10-13 | 1985-12-03 | The United States Of America As Represented By The United States Department Of Energy | Acoustic resonator with Al electrodes on an AlN layer and using a GaAs substrate |
US4719383A (en) * | 1985-05-20 | 1988-01-12 | The United States Of America As Represented By The United States Department Of Energy | Piezoelectric shear wave resonator and method of making same |
JP2644855B2 (ja) * | 1988-10-24 | 1997-08-25 | 株式会社日立製作所 | 弾性波フィルタ、及びそれを用いたアンテナ分波器 |
US5074646A (en) | 1989-04-28 | 1991-12-24 | At&T Bell Laboratories | Planar reflective optical devices |
US4966447A (en) | 1989-04-28 | 1990-10-30 | At&T Bell Laboratories | Integration of free-space planar optical components |
US4966446A (en) | 1989-04-28 | 1990-10-30 | At&T Bell Laboratories | Mask controlled coupling of inter-substrate optical components |
US5011254A (en) | 1989-11-30 | 1991-04-30 | At&T Bell Laboratories | Coupling of optical devices to optical fibers by means of microlenses |
US5079130A (en) | 1990-05-25 | 1992-01-07 | At&T Bell Laboratories | Partially or fully recessed microlens fabrication |
US5075641A (en) * | 1990-12-04 | 1991-12-24 | Iowa State University Research Foundation, Inc. | High frequency oscillator comprising cointegrated thin film resonator and active device |
JP3362860B2 (ja) * | 1991-01-09 | 2003-01-07 | 大日本印刷株式会社 | 表面弾性波素子の製造方法 |
JPH04322508A (ja) * | 1991-04-22 | 1992-11-12 | Matsushita Electric Ind Co Ltd | 水晶振動子の製造方法 |
US5348617A (en) * | 1991-12-23 | 1994-09-20 | Iowa State University Research Foundation, Inc. | Selective etching process |
US5412506A (en) * | 1992-03-09 | 1995-05-02 | At&T Corp. | Free-space optical interconnection arrangement |
US5286338A (en) | 1993-03-01 | 1994-02-15 | At&T Bell Laboratories | Methods for making microlens arrays |
US5650075A (en) * | 1995-05-30 | 1997-07-22 | Motorola, Inc. | Method for etching photolithographically produced quartz crystal blanks for singulation |
US5696423A (en) * | 1995-06-29 | 1997-12-09 | Motorola, Inc. | Temperature compenated resonator and method |
US5918354A (en) * | 1996-04-02 | 1999-07-06 | Seiko Epson Corporation | Method of making a piezoelectric element |
JPH10107573A (ja) * | 1996-09-30 | 1998-04-24 | Kyocera Corp | 弾性表面波装置 |
JP2000040931A (ja) * | 1998-07-23 | 2000-02-08 | Matsushita Electric Ind Co Ltd | 圧電共振子、圧電共振子の製造方法および圧電共振子の周波数調整方法 |
JP4036544B2 (ja) * | 1998-09-22 | 2008-01-23 | Tdk株式会社 | 電圧制御発振器 |
-
2000
- 2000-05-16 US US09/571,919 patent/US6420202B1/en not_active Expired - Lifetime
-
2001
- 2001-05-08 EP EP01304145A patent/EP1156584B1/en not_active Expired - Lifetime
- 2001-05-15 JP JP2001145259A patent/JP5142001B2/ja not_active Expired - Fee Related