JP2001521187A5 - - Google Patents

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Publication number
JP2001521187A5
JP2001521187A5 JP2000517316A JP2000517316A JP2001521187A5 JP 2001521187 A5 JP2001521187 A5 JP 2001521187A5 JP 2000517316 A JP2000517316 A JP 2000517316A JP 2000517316 A JP2000517316 A JP 2000517316A JP 2001521187 A5 JP2001521187 A5 JP 2001521187A5
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JP
Japan
Prior art keywords
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independently
composition
embedded image
embedded
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2000517316A
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English (en)
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JP4374483B2 (ja
JP2001521187A (ja
Filing date
Publication date
Priority claimed from US08/954,425 external-priority patent/US5935760A/en
Application filed filed Critical
Publication of JP2001521187A publication Critical patent/JP2001521187A/ja
Publication of JP2001521187A5 publication Critical patent/JP2001521187A5/ja
Application granted granted Critical
Publication of JP4374483B2 publication Critical patent/JP4374483B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【請求項７】
Ｒ3が：
【化５】
Figure 2001521187
からなる群から選択され、そしてＲ7およびＲ8が独立して−Ｈ、−ＯＨ、−ＯＣＨ3、−
ＮＯ2、−Ｃｌ、−Ｆ、−Ｂｒ、−Ｎ（ＣＨ3）2、または−Ｎ（ＣＨ2ＣＨ3）2を表し；Ｒ9が−Ｈ、−ＣＯ−ＯＲ10、−ＣＯ−Ｎ（Ｒ10）2、−ＣＯ−Ｒ10、−ＣＮを表し；そしてＲ10が−Ｈ、−ＣＨ3、または−ＣＨ 2ＣＨ3を表す請求項６の組成物。
JP2000517316A 1997-10-20 1998-10-20 多層ホトレジストプロセスのための熱硬化性ポリエステル抗反射コーティング Expired - Lifetime JP4374483B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/954,425 US5935760A (en) 1997-10-20 1997-10-20 Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
US08/954,425 1997-10-20
PCT/US1998/022143 WO1999021058A1 (en) 1997-10-20 1998-10-20 Thermosetting polyester anti-reflective coatings for multilayer photoresist processes

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008293674A Division JP4374502B2 (ja) 1997-10-20 2008-11-17 多層ホトレジストプロセスのための熱硬化性ポリエステル抗反射コーティング

Publications (3)

Publication Number Publication Date
JP2001521187A JP2001521187A (ja) 2001-11-06
JP2001521187A5 true JP2001521187A5 (ja) 2006-01-05
JP4374483B2 JP4374483B2 (ja) 2009-12-02

Family

ID=25495407

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2000517316A Expired - Lifetime JP4374483B2 (ja) 1997-10-20 1998-10-20 多層ホトレジストプロセスのための熱硬化性ポリエステル抗反射コーティング
JP2008293674A Expired - Lifetime JP4374502B2 (ja) 1997-10-20 2008-11-17 多層ホトレジストプロセスのための熱硬化性ポリエステル抗反射コーティング

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2008293674A Expired - Lifetime JP4374502B2 (ja) 1997-10-20 2008-11-17 多層ホトレジストプロセスのための熱硬化性ポリエステル抗反射コーティング

Country Status (9)

Country Link
US (3) US5935760A (ja)
EP (1) EP1025462B1 (ja)
JP (2) JP4374483B2 (ja)
KR (1) KR20010031185A (ja)
CN (1) CN1276883A (ja)
CA (1) CA2305461A1 (ja)
DE (1) DE69807913T2 (ja)
TW (1) TW446738B (ja)
WO (1) WO1999021058A1 (ja)

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CN102405248B (zh) * 2009-04-23 2013-07-31 花王株式会社 电子照相用色调剂
US20100316949A1 (en) * 2009-06-10 2010-12-16 Rahman M Dalil Spin On Organic Antireflective Coating Composition Comprising Polymer with Fused Aromatic Rings
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