JP2001509640A5 - - Google Patents

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Publication number
JP2001509640A5
JP2001509640A5 JP2000502240A JP2000502240A JP2001509640A5 JP 2001509640 A5 JP2001509640 A5 JP 2001509640A5 JP 2000502240 A JP2000502240 A JP 2000502240A JP 2000502240 A JP2000502240 A JP 2000502240A JP 2001509640 A5 JP2001509640 A5 JP 2001509640A5
Authority
JP
Japan
Prior art keywords
door
processing chamber
support
panel
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000502240A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001509640A (ja
JP4508412B2 (ja
Filing date
Publication date
Priority claimed from US08/891,550 external-priority patent/US5837059A/en
Application filed filed Critical
Publication of JP2001509640A publication Critical patent/JP2001509640A/ja
Publication of JP2001509640A5 publication Critical patent/JP2001509640A5/ja
Application granted granted Critical
Publication of JP4508412B2 publication Critical patent/JP4508412B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2000502240A 1997-07-11 1998-05-28 処理チャンバ Expired - Lifetime JP4508412B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/891,550 1997-07-11
US08/891,550 US5837059A (en) 1997-07-11 1997-07-11 Automatic positive pressure seal access door
PCT/US1998/010879 WO1999002751A1 (en) 1997-07-11 1998-05-28 Automatic positive pressure seal access door

Publications (3)

Publication Number Publication Date
JP2001509640A JP2001509640A (ja) 2001-07-24
JP2001509640A5 true JP2001509640A5 (enExample) 2009-08-06
JP4508412B2 JP4508412B2 (ja) 2010-07-21

Family

ID=25398394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000502240A Expired - Lifetime JP4508412B2 (ja) 1997-07-11 1998-05-28 処理チャンバ

Country Status (7)

Country Link
US (1) US5837059A (enExample)
EP (1) EP1021587A1 (enExample)
JP (1) JP4508412B2 (enExample)
KR (1) KR100626275B1 (enExample)
AU (1) AU7700898A (enExample)
TW (1) TW371673B (enExample)
WO (1) WO1999002751A1 (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0870850B1 (de) * 1997-04-11 2002-09-18 Leybold Systems GmbH Verfahren und Vorrichtung zum Be- und Entladen einer evakuierbaren Behandlungskammer
US20020051699A1 (en) * 1997-05-05 2002-05-02 Gordon Nelson Door system for a process chamber
EP2099061A3 (en) 1997-11-28 2013-06-12 Mattson Technology, Inc. Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing
US6106213A (en) * 1998-02-27 2000-08-22 Pri Automation, Inc. Automated door assembly for use in semiconductor wafer manufacturing
US6322312B1 (en) 1999-03-18 2001-11-27 Applied Materials, Inc. Mechanical gripper for wafer handling robots
JP2001118904A (ja) * 1999-10-19 2001-04-27 Canon Inc ロードロック室を備えた基板処理装置および被処理基板の搬送方法
US6582175B2 (en) 2000-04-14 2003-06-24 Applied Materials, Inc. Robot for handling semiconductor wafers
US6379095B1 (en) * 2000-04-14 2002-04-30 Applied Materials, Inc. Robot for handling semiconductor wafers
US6698439B2 (en) * 2000-07-03 2004-03-02 Tokyo Electron Limited Processing apparatus with sealing mechanism
CN1276465C (zh) * 2001-05-18 2006-09-20 兰姆研究有限公司 降低制造过程中表面张力的衬底制备设备
JP2003031639A (ja) * 2001-07-17 2003-01-31 Canon Inc 基板処理装置、基板の搬送方法及び露光装置
JP2003045947A (ja) * 2001-07-27 2003-02-14 Canon Inc 基板処理装置及び露光装置
US6776848B2 (en) 2002-01-17 2004-08-17 Applied Materials, Inc. Motorized chamber lid
US7196507B2 (en) * 2003-08-28 2007-03-27 Suss Microtec Testsystems (Gmbh) Apparatus for testing substrates
US7632078B2 (en) * 2003-10-30 2009-12-15 Deka Products Limited Partnership Pump cassette bank
WO2006029025A2 (en) * 2004-09-04 2006-03-16 Applied Materials, Inc. Substrate carrier having reduced height
WO2007061604A2 (en) * 2005-11-21 2007-05-31 Applied Materials, Inc. Apparatus and methods for a substrate carrier having an inflatable seal
US20070141280A1 (en) * 2005-12-16 2007-06-21 Applied Materials, Inc. Substrate carrier having an interior lining
KR100841942B1 (ko) * 2007-06-05 2008-06-27 주식회사 케이피씨 기판 처리장치의 슬라이딩 도어
ES2752207T3 (es) * 2015-08-07 2020-04-03 Indag Pouch Partners Gmbh Máquina para el llenado aséptico de líquidos, procedimiento para abrir y procedimiento para cerrar una ventana de apertura en una máquina para el llenado aséptico de líquidos
CN107345293B (zh) * 2016-05-06 2019-07-05 北京北方华创微电子装备有限公司 反应腔室及半导体加工设备
CN106555158B (zh) * 2016-11-15 2018-11-13 浦江和平真空镀膜有限公司 一种真空镀膜箱设备
DE102019134546B4 (de) * 2019-12-16 2025-03-27 VON ARDENNE Asset GmbH & Co. KG Verfahren, Steuervorrichtung und Vakuumanordnung
JP6952920B1 (ja) * 2021-04-20 2021-10-27 株式会社ブイテックス デュアルゲートバルブ
US11933416B2 (en) * 2021-07-16 2024-03-19 Changxin Memory Technologies, Inc. Gate valve device, cleaning method and mechanical apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546132A (en) * 1977-06-17 1979-01-18 Mitsubishi Heavy Ind Ltd Gate valve
JPS55139562A (en) * 1979-04-14 1980-10-31 Hitachi Ltd Valve device
US5013385A (en) * 1986-04-18 1991-05-07 General Signal Corporation Quad processor
JPS6323331A (ja) * 1986-10-21 1988-01-30 Tokyo Ohka Kogyo Co Ltd 蓋体の開閉機構
US5186594A (en) * 1990-04-19 1993-02-16 Applied Materials, Inc. Dual cassette load lock
ES2090893T3 (es) * 1993-01-28 1996-10-16 Applied Materials Inc Aparato de tratamiento en vacio que tiene una capacidad de produccion mejorada.
JP2761438B2 (ja) * 1993-04-16 1998-06-04 ブルックス オートメーション インコーポレイテッド 搬送装置
US5607276A (en) * 1995-07-06 1997-03-04 Brooks Automation, Inc. Batchloader for substrate carrier on load lock

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