JP2001351870A5 - - Google Patents

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Publication number
JP2001351870A5
JP2001351870A5 JP2000174330A JP2000174330A JP2001351870A5 JP 2001351870 A5 JP2001351870 A5 JP 2001351870A5 JP 2000174330 A JP2000174330 A JP 2000174330A JP 2000174330 A JP2000174330 A JP 2000174330A JP 2001351870 A5 JP2001351870 A5 JP 2001351870A5
Authority
JP
Japan
Prior art keywords
substrate
processing apparatus
valve
substrate processing
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000174330A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001351870A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000174330A priority Critical patent/JP2001351870A/ja
Priority claimed from JP2000174330A external-priority patent/JP2001351870A/ja
Publication of JP2001351870A publication Critical patent/JP2001351870A/ja
Publication of JP2001351870A5 publication Critical patent/JP2001351870A5/ja
Pending legal-status Critical Current

Links

JP2000174330A 2000-06-09 2000-06-09 基板処理装置 Pending JP2001351870A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000174330A JP2001351870A (ja) 2000-06-09 2000-06-09 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000174330A JP2001351870A (ja) 2000-06-09 2000-06-09 基板処理装置

Publications (2)

Publication Number Publication Date
JP2001351870A JP2001351870A (ja) 2001-12-21
JP2001351870A5 true JP2001351870A5 (https=) 2004-11-04

Family

ID=18676394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000174330A Pending JP2001351870A (ja) 2000-06-09 2000-06-09 基板処理装置

Country Status (1)

Country Link
JP (1) JP2001351870A (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5241052B2 (ja) * 2001-09-03 2013-07-17 ラム リサーチ コーポレーション プラズマ処理装置
JP2004063925A (ja) * 2002-07-31 2004-02-26 Mitsubishi Heavy Ind Ltd プラズマ処理装置及びプラズマ処理方法
JP2012104488A (ja) * 2011-12-08 2012-05-31 Lam Research Corporation プラズマ処理装置
GB2575451B (en) * 2018-07-09 2021-01-27 Edwards Ltd Vacuum pump with through channel and vacuum chamber
TWI901580B (zh) * 2019-03-15 2025-10-21 美商蘭姆研究公司 用於蝕刻反應器的渦輪分子泵及陰極組件
GB2584160A (en) * 2019-05-24 2020-11-25 Edwards Ltd Vacuum assembly and vacuum pump with an axial through passage
WO2021181498A1 (ja) * 2020-03-10 2021-09-16 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、排気流量制御装置及び半導体装置の製造方法

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