JP2001249625A5 - - Google Patents
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- Publication number
- JP2001249625A5 JP2001249625A5 JP2000271562A JP2000271562A JP2001249625A5 JP 2001249625 A5 JP2001249625 A5 JP 2001249625A5 JP 2000271562 A JP2000271562 A JP 2000271562A JP 2000271562 A JP2000271562 A JP 2000271562A JP 2001249625 A5 JP2001249625 A5 JP 2001249625A5
- Authority
- JP
- Japan
- Prior art keywords
- light shielding
- conductive layer
- electro
- optical device
- shielding film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims description 71
- 239000004065 semiconductor Substances 0.000 claims description 27
- 239000010409 thin film Substances 0.000 claims description 23
- 239000003990 capacitor Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 9
- 239000010410 layer Substances 0.000 description 83
- 239000011229 interlayer Substances 0.000 description 31
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000009413 insulation Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000271562A JP3991567B2 (ja) | 1998-12-28 | 2000-09-07 | 電気光学装置及び電子機器 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP37358898 | 1998-12-28 | ||
| JP10-373588 | 1998-12-28 | ||
| JP2000271562A JP3991567B2 (ja) | 1998-12-28 | 2000-09-07 | 電気光学装置及び電子機器 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000591472A Division JP3381718B2 (ja) | 1998-12-28 | 1999-12-27 | 電気光学装置及びその製造方法並びに電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001249625A JP2001249625A (ja) | 2001-09-14 |
| JP2001249625A5 true JP2001249625A5 (enExample) | 2004-09-24 |
| JP3991567B2 JP3991567B2 (ja) | 2007-10-17 |
Family
ID=26582509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000271562A Expired - Lifetime JP3991567B2 (ja) | 1998-12-28 | 2000-09-07 | 電気光学装置及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3991567B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3608614B2 (ja) * | 2001-03-28 | 2005-01-12 | 株式会社日立製作所 | 表示装置 |
| JP3870941B2 (ja) | 2002-10-31 | 2007-01-24 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
| JP3772888B2 (ja) | 2003-05-02 | 2006-05-10 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
| JP2005084104A (ja) * | 2003-09-04 | 2005-03-31 | Seiko Epson Corp | 半導体装置及び電気光学装置 |
| JP7476695B2 (ja) * | 2020-07-08 | 2024-05-01 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
-
2000
- 2000-09-07 JP JP2000271562A patent/JP3991567B2/ja not_active Expired - Lifetime
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