JP2001249458A5 - - Google Patents
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- Publication number
- JP2001249458A5 JP2001249458A5 JP1999372757A JP37275799A JP2001249458A5 JP 2001249458 A5 JP2001249458 A5 JP 2001249458A5 JP 1999372757 A JP1999372757 A JP 1999372757A JP 37275799 A JP37275799 A JP 37275799A JP 2001249458 A5 JP2001249458 A5 JP 2001249458A5
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- JP
- Japan
- Prior art keywords
- group
- general formula
- acid
- branched
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 125000003545 alkoxy group Chemical group 0.000 claims 9
- 125000000217 alkyl group Chemical group 0.000 claims 9
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 9
- 229920002120 photoresistant polymer Polymers 0.000 claims 8
- 125000001424 substituent group Chemical group 0.000 claims 8
- 239000002253 acid Substances 0.000 claims 7
- 125000003118 aryl group Chemical group 0.000 claims 7
- 125000004432 carbon atom Chemical group C* 0.000 claims 6
- 125000005843 halogen group Chemical group 0.000 claims 6
- 150000001875 compounds Chemical class 0.000 claims 5
- 125000006165 cyclic alkyl group Chemical group 0.000 claims 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 5
- 125000000753 cycloalkyl group Chemical group 0.000 claims 4
- 230000005855 radiation Effects 0.000 claims 4
- 125000003710 aryl alkyl group Chemical group 0.000 claims 3
- 125000005842 heteroatom Chemical group 0.000 claims 3
- 125000002252 acyl group Chemical group 0.000 claims 2
- 125000004423 acyloxy group Chemical group 0.000 claims 2
- 239000003513 alkali Substances 0.000 claims 2
- 125000004450 alkenylene group Chemical group 0.000 claims 2
- 125000002947 alkylene group Chemical group 0.000 claims 2
- 125000002837 carbocyclic group Chemical group 0.000 claims 2
- 125000000623 heterocyclic group Chemical group 0.000 claims 2
- -1 imide sulfonate compound Chemical class 0.000 claims 2
- 125000002950 monocyclic group Chemical group 0.000 claims 2
- 125000003367 polycyclic group Chemical group 0.000 claims 2
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- 239000004094 surface-active agent Substances 0.000 claims 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 claims 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 125000004442 acylamino group Chemical group 0.000 claims 1
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims 1
- 150000001450 anions Chemical class 0.000 claims 1
- ILFFFKFZHRGICY-UHFFFAOYSA-N anthracene-1-sulfonic acid Chemical compound C1=CC=C2C=C3C(S(=O)(=O)O)=CC=CC3=CC2=C1 ILFFFKFZHRGICY-UHFFFAOYSA-N 0.000 claims 1
- 125000000732 arylene group Chemical group 0.000 claims 1
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 claims 1
- 229940092714 benzenesulfonic acid Drugs 0.000 claims 1
- 229910052801 chlorine Inorganic materials 0.000 claims 1
- 125000001309 chloro group Chemical group Cl* 0.000 claims 1
- 125000004093 cyano group Chemical group *C#N 0.000 claims 1
- 125000004185 ester group Chemical group 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 125000002485 formyl group Chemical group [H]C(*)=O 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 229910052740 iodine Inorganic materials 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- PSZYNBSKGUBXEH-UHFFFAOYSA-N naphthalene-1-sulfonic acid Chemical compound C1=CC=C2C(S(=O)(=O)O)=CC=CC2=C1 PSZYNBSKGUBXEH-UHFFFAOYSA-N 0.000 claims 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 125000006296 sulfonyl amino group Chemical group [H]N(*)S(*)(=O)=O 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP37275799A JP3963625B2 (ja) | 1999-02-24 | 1999-12-28 | ポジ型フォトレジスト組成物 |
| US09/512,664 US6630280B1 (en) | 1999-02-24 | 2000-02-24 | Positive photoresist composition |
| KR1020000009219A KR100621456B1 (ko) | 1999-02-24 | 2000-02-24 | 포지티브 포토레지스트 조성물 |
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4652499 | 1999-02-24 | ||
| JP10548599 | 1999-04-13 | ||
| JP11-46524 | 1999-10-20 | ||
| JP11-105485 | 1999-10-20 | ||
| JP11-298608 | 1999-10-20 | ||
| JP29860899 | 1999-10-20 | ||
| JP37275799A JP3963625B2 (ja) | 1999-02-24 | 1999-12-28 | ポジ型フォトレジスト組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001249458A JP2001249458A (ja) | 2001-09-14 |
| JP2001249458A5 true JP2001249458A5 (enExample) | 2005-07-07 |
| JP3963625B2 JP3963625B2 (ja) | 2007-08-22 |
Family
ID=27461890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP37275799A Expired - Lifetime JP3963625B2 (ja) | 1999-02-24 | 1999-12-28 | ポジ型フォトレジスト組成物 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6630280B1 (enExample) |
| JP (1) | JP3963625B2 (enExample) |
| KR (1) | KR100621456B1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4177966B2 (ja) * | 2001-01-25 | 2008-11-05 | 富士フイルム株式会社 | ポジ型フォトレジスト組成物 |
| JP2002229210A (ja) * | 2001-02-06 | 2002-08-14 | Fuji Photo Film Co Ltd | ポジ型レジスト組成物 |
| KR100795109B1 (ko) * | 2001-02-23 | 2008-01-17 | 후지필름 가부시키가이샤 | 포지티브 감광성 조성물 |
| TW562999B (en) * | 2001-05-09 | 2003-11-21 | Fuji Photo Film Co Ltd | Positive resist composition for electronic or X-rays |
| JP4137408B2 (ja) * | 2001-05-31 | 2008-08-20 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
| US6949329B2 (en) * | 2001-06-22 | 2005-09-27 | Matsushita Electric Industrial Co., Ltd. | Pattern formation method |
| JP3890365B2 (ja) * | 2001-11-01 | 2007-03-07 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
| JP4414721B2 (ja) * | 2002-11-22 | 2010-02-10 | 富士フイルム株式会社 | ポジ型レジスト組成物及びそれを用いたパターン形成方法 |
| JP4115322B2 (ja) * | 2003-03-31 | 2008-07-09 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
| JP5054041B2 (ja) * | 2008-02-08 | 2012-10-24 | 信越化学工業株式会社 | ポジ型レジスト材料並びにこれを用いたパターン形成方法 |
| JP5054042B2 (ja) * | 2008-02-08 | 2012-10-24 | 信越化学工業株式会社 | ポジ型レジスト材料並びにこれを用いたパターン形成方法 |
| JP5237173B2 (ja) | 2008-06-03 | 2013-07-17 | 信越化学工業株式会社 | 重合性化合物、高分子化合物及びポジ型レジスト材料並びにこれを用いたパターン形成方法 |
| JP5423367B2 (ja) * | 2009-01-23 | 2014-02-19 | Ｊｓｒ株式会社 | 酸転写用組成物、酸転写用膜及びパターン形成方法 |
| JP2024024708A (ja) | 2022-08-10 | 2024-02-26 | 信越化学工業株式会社 | 化学増幅ポジ型レジスト組成物及びレジストパターン形成方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2777441B2 (ja) * | 1989-12-21 | 1998-07-16 | 東洋合成工業株式会社 | 感放射線樹脂組成物及び該感放射線樹脂組成物を用いたパターン形成方法 |
| US5072137A (en) | 1990-08-17 | 1991-12-10 | Sgs-Thomson Microelectronics, Inc. | Semiconductor memory with a clocked access code for test mode entry |
| US5558971A (en) * | 1994-09-02 | 1996-09-24 | Wako Pure Chemical Industries, Ltd. | Resist material |
| JP3322493B2 (ja) * | 1994-12-09 | 2002-09-09 | 富士写真フイルム株式会社 | 湿し水不要感光性平版印刷版 |
| US5843624A (en) * | 1996-03-08 | 1998-12-01 | Lucent Technologies Inc. | Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material |
| US6165678A (en) * | 1997-09-12 | 2000-12-26 | International Business Machines Corporation | Lithographic photoresist composition and process for its use in the manufacture of integrated circuits |
| JP4007570B2 (ja) * | 1998-10-16 | 2007-11-14 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
-
1999
- 1999-12-28 JP JP37275799A patent/JP3963625B2/ja not_active Expired - Lifetime
-
2000
- 2000-02-24 KR KR1020000009219A patent/KR100621456B1/ko not_active Expired - Lifetime
- 2000-02-24 US US09/512,664 patent/US6630280B1/en not_active Expired - Lifetime