JP2001058874A - Ceramics substrate and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve splittability of a substrate by forming cleavage grooves and hollows on respective surfaces of front-back both sides different from each other, setting the point angle of each cleavage groove to be not larger than a specific value and forming the hollows on the underside between cleavage grooves. SOLUTION: A point angle is set to be <=20 deg.. A greensheet 1 is formed by a doctor blade process from a slurry obtained by mixing raw material powder where Al2O3 powder, MgO powder, CaCO3 powder and SiO2 powder are mixed with a butyral resin, a plasticizer and a solvent, and dispersing them. Cleavage grooves 2 are formed on the greensheet 1 by a metallic mold where blades having an edge angle of 30-45 deg. are built in e.g. at an interval of 360 μm. The hollows 3 having e.g. a width of 240 μm and a depth of 10-40 μm are formed by a metallic mold on the underside between cleavage grooves 2 of the greensheet 1 and are baked at 1,600 deg.C. Splittability does not depend on the composition of a ceramics substrate but is influenced by the form of cleavage grooves. Deeper the depth of the hollows 3, the smaller the edge angle of the cleavage grooves, which 1eads to improvement in a cleavage yield.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic substrate used for various electronic parts typified by square chip resistors and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, a ceramic substrate having a dividing groove is manufactured as follows.

First, a green sheet 4 is formed from a slurry obtained by mixing and dispersing a ceramic powder as a raw material together with an organic binder by a doctor blade method or the like as shown in FIG. Next, using a mold incorporating a blade having a predetermined edge angle, the green sheet 4
The division groove 5 is formed. The dividing groove 5 has a V-shape with the tip angle of the blade edge angle. The compact obtained in this way is fired at a temperature at which sintering proceeds sufficiently.

[0004] Here, the sharper the leading edge of the dividing groove 5 formed in the green sheet 4 is, the more the dividing property is improved. However, considering the durability of the blade, if the blade edge angle of the blade is smaller than 30 °, mass production is difficult. Not suitable for Therefore, when the forming conditions are determined and the dividing groove is formed using a blade having a blade edge angle of 30 ° or more, a microcrack 6 of several tens of microns is formed from the tip of the dividing groove 5 to improve the dividing property.

[0005]

However, in such a conventional technique, the micro crack 6 may not be formed vertically from the tip of the dividing groove 5, and at this time, the micro crack 6 is obliquely formed along the micro crack 6 in the dividing groove. However, there is a problem of deterioration in the dividing property that the image is divided into pieces.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a ceramic substrate in which the dividing property is improved by sharpening the tip angle of the dividing groove, and a method of manufacturing the same.

[0007]

SUMMARY OF THE INVENTION In order to solve this problem, the present invention is directed to a ceramic substrate having a dividing groove having a tip angle of 20 ° or less and having a recess formed between the dividing grooves. And a method of manufacturing a ceramic substrate in which a recess is formed between the divided grooves of the green sheet so that the tip angle of the divided grooves is set to 20 ° or less, and the resultant is fired.

According to the present invention, it is possible to obtain a ceramic substrate having a dividing groove having a small tip angle of the dividing groove.

[0009]

The invention according to claim 1 of the present invention is characterized in that the substrate has a dividing groove and a dent on different sides of the substrate, and the tip angle of the dividing groove is 20 ° or less. This is a ceramic substrate having a depression formed on the back surface between the division grooves, and has an effect of improving the division performance by forming a depression in the substrate to reduce the tip angle of the division groove.

According to a second aspect of the present invention, there is provided a semiconductor device having a dividing groove and a recess on the same surface of a substrate, wherein a tip angle of the dividing groove is 20 ° or less, and the recess is formed between the dividing grooves. This has the effect of improving the dividability by forming a relatively shallow depression in the substrate to reduce the tip angle of the dividing groove.

According to a third aspect of the present invention, there is provided a semiconductor device, comprising: a dividing groove formed on both sides of a substrate; and a dent formed on one side, wherein the tip angle of the dividing groove is 20 ° or less, Is a ceramic substrate formed between the above-mentioned dividing grooves, and has a function of further improving the dividing property by forming a depression on one surface of the substrate to reduce the tip angle of the dividing groove on both surfaces of the substrate.

According to a fourth aspect of the present invention, the substrate has a dividing groove and a depression on both sides, and the tip angle of the dividing groove is 20.
° or less, a ceramic substrate in which the depression is formed between the division grooves, and the dividability is further improved by forming depressions on both surfaces of the substrate to reduce the tip angles of the division grooves on both surfaces of the substrate. It has the action of:

According to a fifth aspect of the present invention, there is provided a first step of forming a green sheet, a second step of forming a dividing groove in the green sheet obtained in the first step, and a second step of forming a green sheet. A third step of forming a depression between the divided grooves of the obtained green sheet, and a fourth step of firing the green sheet obtained in the third step, wherein the third step is formed in the second step. This is a method of manufacturing a ceramic substrate in which the tip angle of a dividing groove is reduced, and when a depression is formed between the dividing grooves, the green sheet flows locally toward the dividing groove to reduce the tip angle, thereby improving the dividing property. It has the effect of improving.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1) First embodiment of the present invention
The ceramic substrate in the state is made of Al as shown in FIG. _Two
O_Three: MgO: CaCO_Three: SiO_Two96: 1.
Raw material powder and spots mixed in a weight ratio of 0: 0.5: 2.5
A mixture obtained by mixing and dispersing Lal resin, plasticizer and solvent
Green sheet 1 from rally by doctor blade method
A first step of forming a green sheet; and a green chip obtained in the first step.
Blades with blade angles of 30 ° to 45 ° for each
Formed the dividing groove 2 with a mold assembled at 360 μm intervals
The second step to be formed and the green sheet obtained in the second step
A recess having a width of 240 μm and a depth of 40 μm between one dividing groove 2.
3 in a mold, and the mold obtained in the third step.
A fourth step of firing the lean sheet 1 at 1600 ° C.
(Samples 1 and 2).

Further, Al ₂ O ₃ : MnO ₂ : TiO ₂ : Si
A ceramic substrate (samples 3 and 4) was obtained by firing at 1200 ° C. in the same manner from a raw material powder obtained by mixing O ₂ powder at a weight ratio of 94: 2.0: 2.0: 2.0.

For comparison, in the second step described above, 3
Using a blade of 0 to 45 °, a ceramic substrate was prepared under the same conditions except that no depression was formed (Comparative Product 1,
2). The results are shown in comparison with (Table 1).

[0018]

[Table 1]

According to Table 1, according to the present invention, the comparative products 1,
It can be seen that the yield of division is improved as in Samples 1, 2, 3, and 4 as compared with Sample No. 2. In addition, from the comparison between Samples 1 and 2 and Samples 3 and 4, it was found that the dividing property did not depend on the composition of the ceramic substrate, and that the shape of the dividing groove was greatly affected.

(Embodiment 2) A second embodiment of the present invention
The ceramic substrate in the state is, as shown in FIG. _Two
O_Three: MnO_Two: TiO_Two: SiO_TwoPowder 94: 2.0:
Starting from raw material powder mixed at a weight ratio of 2.0: 2.0
Green sheet 1 was obtained in the same manner as in the first embodiment. this
Green sheet 1 with 30 ° blade edge angle
A dividing groove 2 and a depression 3 are formed on one side, and the depth of the depression 3 is set to 10
The ceramic substrate was obtained by changing the distance between
Fees 5, 6, 7, 8). Compare the results to the above (Table 1)
Shown.

It can be seen that as the depth of the dent 3 increases, the tip angle of the division groove 2 decreases, and the division yield improves. In addition, by forming the division groove 2 and the depression 3 on the same surface of the substrate, the tip angle of the division groove 2 similar to that of the sample 3 can be achieved with the depth of the depression 3 of 20 μm as in the case of the sample 6, and is relatively shallow. It can be seen that the dents 3 improve the dividing property.

(Embodiment 3) A third embodiment of the present invention
In the state, the ceramic substrate is made of Al as shown in FIG. _Two
O_Three: MnO_Two: TiO_Two: SiO_TwoPowder 94: 2.0:
Starting from raw material powder mixed at a weight ratio of 2.0: 2.0
Green sheet 1 was obtained in the same manner as in the first embodiment. this
Green sheet 1 with 30 ° blade edge angle
A dividing groove 2 is formed on one side, and 20 μm is formed between the dividing grooves 2 on both sides.
To form a recess 3 having a depth of 3 mm and firing to obtain a ceramic substrate.
(Sample 9). The results are shown in comparison with the above (Table 1).

According to Table 1, according to the present invention, by forming the dividing groove 2 on one side and the depression 3 on both sides, the tip angle of the dividing groove 2 is reduced, and the dividing yield is further improved.

(Embodiment 4) A fourth embodiment of the present invention.
The ceramic substrate in the state is, as shown in FIG. _Two
O_Three: MnO_Two: TiO_Two: SiO_TwoPowder 94: 2.0:
Starting from raw material powder mixed at a weight ratio of 2.0: 2.0
Green sheet 1 was obtained in the same manner as in the first embodiment. this
30 ° angle of blade edge on both sides of green sheet 1
To form a dividing groove 2, and further, between the dividing grooves 2 on both surfaces, 1
A recess 3 having a depth of 0 μm is formed and fired to form a ceramic substrate.
Was obtained (Sample 10). Compare the results to the above (Table 1)
Shown.

According to Table 1, according to the present invention, the depth of the shallower recess 3 of 10 μm is formed by forming the recess 3 on both sides of the substrate in synergy with the effect of forming the dividing grooves 2 on both sides. It can be seen that the tip angle of the dividing groove 2 becomes smaller, and the dividing yield is further improved.

In this case, 100 samples were used, and the division failure was a diagonal division, and a specimen deviated by 8 ° or more from the vertical direction of the substrate surface was determined to be defective.

[0027]

As described above, according to the present invention, the first step of forming the green sheet is a ceramic substrate in which the tip angle of the dividing groove is not more than 20 ° and the hollow is formed between the dividing grooves. A second step of forming a dividing groove in the green sheet obtained in the first step, a third step of forming a depression between the dividing grooves of the green sheet obtained in the second step, and a third step. A method of manufacturing a ceramic substrate, comprising at least a fourth step of firing the obtained green sheet, and reducing a tip angle of the divided groove formed in the second step in the third step;
By forming the depression in the third step, the tip angle of the division groove formed in the second step is reduced, so that a ceramic substrate having excellent division characteristics can be obtained.

[Brief description of the drawings]

FIG. 1 is a sectional view of a ceramic substrate according to a first embodiment of the present invention;

FIG. 2 is a sectional view of a ceramic substrate according to a second embodiment of the present invention;

FIG. 3 is a sectional view of a ceramic substrate according to a third embodiment of the present invention;

FIG. 4 is a sectional view of a ceramic substrate according to a fourth embodiment of the present invention;

FIG. 5 is a cross-sectional view of a conventional divided grooved ceramic substrate.

[Explanation of symbols]

 1 Green sheet 2 Dividing groove 3 Depression

Continuation of the front page (72) Inventor Koji Shimoyama 1006 Kazuma Kadoma, Kadoma-shi, Osaka Matsushita Electric Industrial Co., Ltd. F-term (reference) 4G030 AA07 AA08 AA16 AA25 AA36 AA37 BA01

Claims (5)

[Claims] 1. A ceramic substrate having a dividing groove and a dent on different sides of a substrate, wherein a tip angle of the dividing groove is 20 ° or less, and wherein the dent is formed on a back surface between the dividing grooves. . 2. A substrate having a dividing groove and a depression on the same surface of a substrate,
A ceramic substrate, wherein a tip angle of the division groove is equal to or less than 20 ° and the depression is formed between the division grooves. 3. A ceramic having a dividing groove formed on both sides of a substrate and a dent formed on one side, wherein a tip angle of the dividing groove is 20 ° or less, and wherein the dent is formed between the dividing grooves. substrate. 4. A ceramic substrate having a dividing groove and a dent on both sides of a substrate, wherein a tip angle of the dividing groove is 20 ° or less, and wherein the dent is formed between the dividing grooves. 5. A first step of forming a green sheet,
A second step of forming a dividing groove in the green sheet obtained in the first step, a third step of forming a depression between the dividing grooves of the molded body obtained in the second step, and a third step At least a fourth step of firing the molded body, and the third step
A method of manufacturing a ceramic substrate, wherein the tip angle of a dividing groove formed in a process is reduced.