JP2001009713A5 - - Google Patents

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Publication number
JP2001009713A5
JP2001009713A5 JP1999185357A JP18535799A JP2001009713A5 JP 2001009713 A5 JP2001009713 A5 JP 2001009713A5 JP 1999185357 A JP1999185357 A JP 1999185357A JP 18535799 A JP18535799 A JP 18535799A JP 2001009713 A5 JP2001009713 A5 JP 2001009713A5
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JP
Japan
Prior art keywords
polishing
top ring
polished
ring
rings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999185357A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001009713A (ja
JP3797822B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP18535799A priority Critical patent/JP3797822B2/ja
Priority claimed from JP18535799A external-priority patent/JP3797822B2/ja
Priority to US09/605,989 priority patent/US6447385B1/en
Publication of JP2001009713A publication Critical patent/JP2001009713A/ja
Publication of JP2001009713A5 publication Critical patent/JP2001009713A5/ja
Application granted granted Critical
Publication of JP3797822B2 publication Critical patent/JP3797822B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP18535799A 1999-06-30 1999-06-30 ポリッシング装置 Expired - Fee Related JP3797822B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP18535799A JP3797822B2 (ja) 1999-06-30 1999-06-30 ポリッシング装置
US09/605,989 US6447385B1 (en) 1999-06-30 2000-06-29 Polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18535799A JP3797822B2 (ja) 1999-06-30 1999-06-30 ポリッシング装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006076902A Division JP4413882B2 (ja) 2006-03-20 2006-03-20 ポリッシング装置

Publications (3)

Publication Number Publication Date
JP2001009713A JP2001009713A (ja) 2001-01-16
JP2001009713A5 true JP2001009713A5 (enExample) 2004-12-24
JP3797822B2 JP3797822B2 (ja) 2006-07-19

Family

ID=16169384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18535799A Expired - Fee Related JP3797822B2 (ja) 1999-06-30 1999-06-30 ポリッシング装置

Country Status (2)

Country Link
US (1) US6447385B1 (enExample)
JP (1) JP3797822B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6780083B2 (en) * 2002-04-19 2004-08-24 Peter Wolters Cmp-Systeme Gmbh & Co. Kg Apparatus and method for the chemical mechanical polishing of the surface of circular flat workpieces, in particular semi-conductor wafers
US20100041316A1 (en) * 2008-08-14 2010-02-18 Yulin Wang Method for an improved chemical mechanical polishing system
JP5941763B2 (ja) * 2012-06-15 2016-06-29 株式会社荏原製作所 研磨方法
JP6370084B2 (ja) * 2014-04-10 2018-08-08 株式会社荏原製作所 基板処理装置
JP6971676B2 (ja) * 2016-08-29 2021-11-24 株式会社荏原製作所 基板処理装置および基板処理方法
CN107799436B (zh) * 2016-08-29 2023-07-07 株式会社荏原制作所 基板处理装置及基板处理方法
EP3616237A4 (en) * 2017-04-26 2020-12-16 Axus Technology, LLC MECHANO-CHEMICAL POLISHING MACHINE WITH IMPROVED EFFICIENCY AND IMPROVED PROCESSING FLEXIBILITY
US20210323117A1 (en) * 2020-04-16 2021-10-21 Applied Materials, Inc. High throughput polishing modules and modular polishing systems
US11705354B2 (en) 2020-07-10 2023-07-18 Applied Materials, Inc. Substrate handling systems
CN114203574A (zh) * 2020-09-17 2022-03-18 长鑫存储技术有限公司 清洗机台以及清洗方法
US12198944B2 (en) 2020-11-11 2025-01-14 Applied Materials, Inc. Substrate handling in a modular polishing system with single substrate cleaning chambers
US12224186B2 (en) 2023-04-03 2025-02-11 Applied Materials, Inc. Apparatus and method of brush cleaning using periodic chemical treatments

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5649854A (en) 1994-05-04 1997-07-22 Gill, Jr.; Gerald L. Polishing apparatus with indexing wafer processing stations
US5562524A (en) 1994-05-04 1996-10-08 Gill, Jr.; Gerald L. Polishing apparatus
US5738574A (en) 1995-10-27 1998-04-14 Applied Materials, Inc. Continuous processing system for chemical mechanical polishing
US5951373A (en) * 1995-10-27 1999-09-14 Applied Materials, Inc. Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning
EP1281476A3 (en) * 1996-05-16 2003-08-13 Ebara Corporation Method for polishing workpieces and apparatus therefor
JP3679871B2 (ja) * 1996-09-04 2005-08-03 株式会社荏原製作所 ポリッシング装置及び搬送ロボット
US6241585B1 (en) * 1999-06-25 2001-06-05 Applied Materials, Inc. Apparatus and method for chemical mechanical polishing

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