1271261 九、發明說明： _ 【發明所屬之技術領域】 ' 本發明係《金屬（鋼鐵、非鐵金幻或非金屬（喊、玻璃、娜) 等之研磨加工（abrasive finishing)者。 【先前技術】 採用介經使游離研磨粒分散的研磨劑而使被加工對象與研光具（丨叩） 相互摩擦並被稱作研光（lapping)或較金屬柔軟的拋光具（p〇lisher)之 ^ 玉具而研磨的拋光（pQlishing)等的研磨加工係機械加卫之最後修整步驟 用的加工法，隨着近年機器之高品質化而重要性日益增加的加工法。 研磨加工雖係對單面、二面、曲面等多種表面進行的加工作業，但基 本上如第10圖所示，_磨工作台（surface plate) 1〇上（抛光時，經 予貼合於工作台上的拋光具U上），以壓力p擠壓經予收容予以載具料 予以支持並以η速度旋_支架14 _被加工對象3，於研紅作台上 鲁 （拋光時，係拋光具U上）’滴下含有游離研磨粒12的研磨液15，同時以 N速度旋轉研紅作台1G，藉由該旋轉及被加工縣3之旋轉間的相對運 動’以游離研磨粒12去除被加工對象3之表面，使表面成高度平滑的加工 法。至於拋光具，大多採用非織物或麂皮型（suede_type)塑膠。現況上 騎磨加卫之最高研磨速度乃被視為約2m/s程度。 - 【發明内容】 發明欲解决 、然而’於採用旋轉型研紅作台之研磨加卫方面，通常成爲所謂的批 次加工方式’被加工縣之裝卸須暫時停止研紅作台後始•行，而使 5 1271261 對象所而的裝卸時間增長。另外，為進行被加工對象之兩面研磨加 連續的送人裝置且自動的對被加工對象進㈣磨加工之系統 賴的課題1胁大規模纽麟况時，提高研磨之加工效率即成亟待 加工:者’二旋轉型研紅作台上加工，研磨工作台之直徑至少需為被 、、寸象之2彳"以上，對較大的被加工對象即需要較大的研磨工作台、即 #成為需要供研磨裝置而用的大設置面積。再者製作以旋轉轴為橫齡向， 疋轉面為垂直方向的旋轉型二面研磨工作台時，原理上欲支持被加工對 象係車又困難的’故較難實現，欲充分利用裝置周圍的空間係較困難的。由 此事欲開發出可容鍵構以較緊密且可連續的將被加謂象送人裝置之自 動研磨加1系統’亦可裝置關的空間之新概念的研磨加工法正被強 烈的期盼著。 藝 本發明係提供以採用現在的旋轉型研磨工作台之旋轉型研磨加工法上 、貫見而可4建構以較緊密且可連續的將被加工對象送人裝置之自動 研磨加工系統’亦可有效的使職置厢的空間之新概純研磨加工法及 其加工裝置。 亦即，本發明係藉由擠麵加工對象至平行相鄰且相互進行相反方向 的直線運動之-組的平行直線紅作台之二者，對被加工對象施加供旋轉 運動而用馳合力（CQUple Qf fQrce)，藉由其旋轉與進行直線運動的該 組工作台間之相對運動，以研磨粒研磨被加工對象之直線前進型研磨方 1271261 • /。於此方法，使—組的平行平面1作台與另外-組的平行平面工作台對 . 向，於其間挾持被加工對象並可研磨單面或二面。 又，本發明騎直線運動方向使進行直線運_單_平i作台的表 面之摩擦係數於垂直方向上不同，藉由擠壓被加工對象至該平面工作台 上’對被加讀象施加供旋轉運動而用_合力，藉由其旋轉與進行直線 運動的该早-的平面工作台間之蝴運動，以研練研磨被加卫對象之直 • _研磨方法。於此方法，使另外的平紅作台與平面工作台對向，於其 間挾持被加工對象並可研磨單面或二面。 於上述的各種方法，以財圓板狀孔穴之長尺度板狀載具支持以圓板 狀的次載具經予固定的被加頌象，隨著_之進行將載具朝單方向徐緩 的拉出，同時可連續的進行研磨加工。 又於上賴各種方法’可_通職加頌象之支持台上的皮帶型抛 光具以取代平面工作台。 .又，本發明係以由呈平行相鄰的_組平面工作台、使該工作台於相互 相反方向上進行紐運動之設備、擠驗加工對象至紅作台上的設備而 成者為特徵之直騎進型研磨裝置。於此裝置，—組平行平面玉作台與另 組平仃平面工作台對向且可予配置於其間至可挾持被加工對象。 方、上述ai在研磨中可提供連續的供給、排出被力口工對象至研磨裝 置之長尺度的滅載具。又，於紐載具内，於平行平面玉作台之相鄰中 心線上或於離開相鄰中心線上的位置上可提供具有旋轉中心之圓形被加工 對象支持用次載具孔穴。再者於板狀載具内，可提供具有圓形、正方形、 1271261 長方形、多邊料的被加工縣支持孔穴，其旋射心位於平行平面工 台之相鄰中心線上的圓板狀次載具孔穴。 工作 再者，本發明係以對直線運動方向使表面之摩擦係數於直線運動方向 上不同而進仃直線運動之單—的平面謂台，擠壓被加工對象至該平面^ 作口上的設備而成者為特徵之直線前進型研磨裝置。於此裝置，平面工作 口與另-平面卫作台對向且可予配置於其間至可挾持被加工對象。 又，於上述裝置，可組合通過被加工對象支持台及其上的_組皮帶型 抛光具以取代平面工作台。 若依本發明之方法時，輯雜勒之平面卫作台所施加的 轉合力邊使被加工對級轉邊予研磨，故可得未_單方向的研磨條痕之 該種無方向性的粗糙度約Unm以下（数個原子間隔以下）之良好的加工 面。若被加頌象不旋轉時，則超過於平紅作台之運動方向的方向性之 1〇咖以上的粗糙度之條痕可予形成。由而，若依本發明之方法時，則可得 不刻劃研磨條痕的超級平滑面。 發明之功效 本發明之直線前進型研磨加工方法，係具有了述功效。 1) 可製造出較旋轉型研磨加工方法省空間的研磨裝置。 2) 在已使用習用的旋轉型研磨工作台之研磨法較難實現而可連續的將被加 工對象送入裝置的自動研磨加工系統之建構係可能的。 3) 可製作出$疋轉面係垂直方向之直立型的二面自動研磨系統，可有效的利 用裝置周圍之空間。 1271261 . 最佳形熊 ' 以第1騎示的説拋光的情形之例子鱗，說明本發明之直線前進型 研磨加工方法的原理。由本發明而得的拋光方法’係採用已平行相鄰的— 、跳光，、11作為平行平面卫作台A、B。—組拋光具11係挾持相鄰中心線 、相互相反方向上以v之速度進行直線運動。謂力？擠1野收容於對 旋轉幾乎不受限制的支架14内之被加工對象，至使接觸至一組抛光具u _之—者由而’對被加工對象3施加供旋轉運動而用的耗合力。對拋光具 11上供給含游離研磨粒之哺液。因此，藉由被加工對象3之旋轉與直線 運動的抛光具η之相對運動，以游離研磨粒去除被加工對象3之表面，使 表面成高度平滑。本發.方法雖絲本上·玉作台或研磨具之運動方 °或表面構leit肛作台之旋轉的方法，但是藉由來自電動機等的動力使 破加工對象旋轉’調整與工作台或研磨具間的相對運動，亦可進行研磨。 於_此方法之研賴置，已增加—組拋光具丨丨之錢幅喊度若成為較 破加工對象3之直徑稍大時，靡可鋪^磨加玉，故空間較旋轉型工作 台小即可完成。 方、此方法對被加對象之—面進行拋光力口王時，如第2圖所示，挾 持於相互以V速度於相反方向上進行直線運動之二組平行平面拋光具u並 放置被加工對象3。因此介經已以金屬或陶莞等製作的被加工對象支持台 (未予圖示），藉由以壓力p由垂直（上下）方向擠壓使被加工對象3之表 面接觸拋光具11之表面，對被加工對象3施加供旋轉運而用的耗合力，對 抛光具11上供給含游離研磨粒的研磨液。由而，以游離研磨粒去除被加工 1271261 對象3之上:表面’使表面呈現高度平滑。拋光具u係藉由採用皮帶型抛 光具，可連續的供給研磨具至研磨位置上。 :第2圖所7^的方法，如第3 ®所示般，於具有以圓板狀孔穴 ^被加工對象之長尺度的板狀载具13上支持被加工對象3，若能作成移動 載具至使隨著研磨之進行徐緩的朝任一方向拉出時，則對被加工對象之 -面研磨加工的輸統„為村_。加±，柯容易的使請 所4旋轉面為水平方向之橫置型的二面研磨加^法成騎轉面為垂直 方向之直立型—面研磨加工方法’亦可有效的利用裝置周圍的㈣之二面 研磨加工系統。 於第1圖至第3圖所示的研磨方法，載具13之被加工對象支持孔穴於 —組平行平㈣⑽目朴•時，如繩板㈣心糊被加 工對象雖無問題’但如㈣圓般在無中心孔穴之被加工對象，財心部並 未與拋光具接觸，故中心部未能研磨。因此，如第4圖所示般，㈣—电 的^平^作台A、B之婦中心線上離開驗置上，藉由將具有旋轉中 心的圓形孔穴之次載具13Α放入板狀的載具13内，可使被 面進行研磨。 』又王 _具m内的孔穴之形狀係除園形以外，亦以正方形長方形多 持可俩磨。又於無孔穴的圓形被加工對象時，在不用次載呈似 T次載具㈣的被加工對象之孔穴中心設成由相鄰⑽上離開的 立置上，亦可使被加工對象3之全面進行研磨。 又於次載具13A之旋轉中心的周圍上，如第5圖所示般，於由次載具 !271261 13A之旋轉中心離開的位置上，若採用具有二個以上的被加工對象支持孔穴 載/、13A時，縱使有無被加工對象孔穴，亦可使被加工對象3之寺面 進行王面研磨。此方法係適於研磨大量的被加工對象。 第6圖、第7圖絲示本發明之研磨方法及裝置的其他實施形態之概 念圖。藉由使進行直線運動的直線前進型工作台之表面的摩擦力對直線運 動方向不同於垂直方向’於該直線前進型卫作台上擠壓被加謂象，可施 加供旋轉運動而用的耦合力至被加工對象上。 由此方法而得的拋光加玉，係、如第7 _示般，作為上下—組的平面 工作台，挾持於相互以V速度於相對方向上進行直線運動之皮帶型抛光具 11 11間，並置放在已支持於載具13上的被加頌象3，以壓力p由上下 擠壓抛光具n、U，使被加頌象3之表面接觸至抛光具丨卜Η之表面並 進行單面或二面研磨的方法。 使拋光具之表面狀態於拋光具之長度方向中心線的左右作成不同，使 摩擦力成為不同，如，藉由於單側的拋光具表面上對長度方向中心線刻 劃圓形狀孔穴或鱗狀的賴’使該單側之被加工縣與㈣具間的接觸 面積減少，可由另—側減少摩擦力。又，即使於拋光具之長度方向中心線 的左右藉由改變拋光具表面之硬度_機械特性，因可使在左右㈣加工 對象與拋光關之躺狀驗變，㈣左右的縣力、施純合力成 為可能。 藉由如此實施，可對被加工對象Ί 豕加供碇轉運動而用的耦合力。對 抛光具11上供給含游離研磨粒的研磨 „ 履。因此，藉由被加工對象3之旋轉 1271261 - 與進彳了直線運動的拋光具n之姆物，⑽騎練絲被加工對象3 之上下表面’使呈現南度平滑。此方法如第7圖所示般，即使採用以v速 • 度於相同方向上進行直線運動的皮帶魏光具u、u，亦可同樣的進行研 磨。 第6圖、第7 ®雖絲示著使直線運動型平面工作台對向，於其間挟 持被加工對象並進行單面或三面研磨的·，但藉由對以v速度進行直線 φ 運動的单一抛光具擠壓被加工對象，亦可對被加工對象施加供旋轉運動而 用的搞口力’藉由其旋轉與抛光具之直線運動間的相對運動亦可進行研磨。 實施例1 以下苓考第8圖並表示本發明方法之實施例。 如第8圖所示，藉由對通過被加工對象支持台上之—組相鄰的皮帶型 拋光具各自利用電動機M1及M2使於相互成相反方向上以直線運動循環著 。於挾持-組拋光具之相鄰中心線的二側表面上，擠壓被加工對象之圓板 • &磁碟基板並進行抛光。均勻的供給研磨粒之氧化銘研磨粒至抛光具上。 私S：[力係3. 7kPa ’拋光具之移動速度係i. 5m/s，拋光具係應皮型。磁碟 基板係銘型’研磨時間係5min。結果，磁碟基板係藉由耗合力以至少〇·心/s 以上的速度_，藉由進行絲運_拋光具a、b間之㈣勒，以研磨 • 粒研磨基板，使基板呈現平滑化。 - 帛9圖係表示利用光干擾式高精確度表面測定器（WYKO)測定由拋光 而得的磁碟紐之表面的平滑度而得之三維粗糙度測定絲。磁碟基板表 面係利用拋光可予非常清淨_磨，可達以此值計約13nm之超級平滑1271261 IX. Description of the invention: _ [Technical field to which the invention belongs] 'The present invention is a method of "abrasive finishing" of metal (steel, non-ferrous gold or non-metal (shout, glass, na). 】 By using an abrasive that disperses the free abrasive particles to rub the object to be rubbed with the polishing tool, it is called a lapping or a metal-soft polishing tool. Grinding processing such as jade polishing and polishing (pQlishing) is a processing method for the final finishing step of mechanical reinforcement, and the processing method is becoming more and more important with the high quality of the machine in recent years. , two sides, curved surfaces and other surface processing operations, but basically as shown in Figure 10, _ grinding table (surface plate) 1 ( (polishing, pasted on the workbench polishing tool U Above), pressurizing with pressure p to receive the carrier material to support and rotate at η speed _ bracket 14 _ to be processed object 3, in the research red table on the Lu (when polishing, polishing equipment U) 'drop Grinding with free abrasive particles 12 The grinding liquid 15 is simultaneously rotated at the N speed to grind the red table 1G, and the surface of the object 3 is removed by the free abrasive grains 12 by the relative motion between the rotation and the rotation of the processed county 3, so that the surface is highly smooth. Processing method. As for the polishing tools, most of them use non-woven or suede type plastics. The highest grinding speed of riding and grinding is considered to be about 2m/s. 'In the aspect of grinding and cultivating with the rotary type red-working table, it is usually the so-called batch processing method. The loading and unloading of the processed county must temporarily stop the research and start of the red-making platform, and the loading and unloading of the object of 5 1271261 In addition, in order to perform the two-side grinding of the object to be processed and the continuous feeding device, and the system for automatically processing the object to be processed is subjected to the problem of large-scale processing, the processing efficiency of the polishing is improved. Chengyu to be processed: the 'two-rotating research red table processing, the diameter of the grinding table must be at least 2, 寸", above, for larger objects, that requires a larger grinder The table is the large installation area that needs to be used for the polishing device. In addition, when the rotary type two-side grinding table with the rotating axis as the horizontal direction and the vertical surface is the vertical direction, the principle is to support the processing. It is difficult to realize the object car, so it is difficult to make full use of the space around the device. Therefore, it is difficult to develop a permitting structure that can be added to the device in a tighter and continuous manner. The grinding method of the new concept of automatic grinding plus 1 system 'can also be used to close the space is being strongly expected. The invention provides a rotary grinding method using the current rotary grinding table. However, it is possible to construct a new automatic grinding processing method for a space in which the object to be processed is delivered to the device in a relatively compact and continuous manner, and to effectively make the space of the living room and the processing device thereof. That is, the present invention applies a kinematic force to the object to be processed by applying a kinematic force to the object to be processed by pressing the object to the parallel straight red table which is parallel and adjacent to each other in a linear motion in the opposite direction. CQUple Qf fQrce), by the relative movement between the group and the table in which the linear motion is performed, the linear advance type grinding surface of the object to be processed is 1271261 • /. In this method, the parallel plane 1 of the group is set as a table with the parallel plane table of the other group, and the object to be processed is held therebetween and can be polished on one or both sides. Moreover, the direction of the linear motion of the present invention causes the friction coefficient of the surface of the straight-line operation to be different in the vertical direction, by pressing the object to be processed onto the plane table to 'apply to the image to be read. For the rotary motion, the _ resultant force, by its rotation and the butterfly movement between the early-plane workbench for linear motion, is used to practice the grinding method of the reinforced object. In this method, the other flat red table is opposed to the flat table, and the object to be processed is held between them and can be polished on one or both sides. In the above various methods, the long-sized plate-shaped carrier of the circular-plate-shaped hole supports the twisted image which is fixed by the circular-shaped sub-carrier, and the carrier is slowed in one direction as the _ proceeds Pull out while continuously grinding. In addition to the various methods, the belt-type polishing device on the support table can be used instead of the flat table. Moreover, the present invention is characterized by a device which is arranged in parallel adjacent groups of planes, a device for moving the table in opposite directions, and a device for pressing the object to the red table. Straight ride into the grinding device. In this device, the set of parallel plane jade tables is opposed to the other flat plane table and can be disposed therebetween to hold the object to be processed. The above-mentioned ai can provide a continuous supply and discharge of the long-range destroyer of the object to be polished to the grinding apparatus during the grinding. Further, in the new carrier, a circular object-supported sub-carrier hole having a center of rotation can be provided on the adjacent center line of the parallel plane jade table or at a position away from the adjacent center line. Furthermore, in the plate-shaped carrier, a processed plate support hole having a circular, square, 1271261 rectangular shape and a polygonal material can be provided, and the disk-shaped sub-carrier with the spinning center located on the adjacent center line of the parallel plane table can be provided. hole. Further, in the present invention, the present invention is a device for squeezing a workpiece to a flat surface by squeezing a single plane in which the friction coefficient of the surface is different in a linear motion direction in a linear motion direction. A straight forward type grinding device characterized by a person. In this device, the planar working port is opposed to the other-planar table and can be disposed therebetween to hold the object to be processed. Further, in the above apparatus, the workpiece support table and the _ group belt type polishing tool thereon can be combined to replace the plane table. According to the method of the present invention, the turning force applied by the flat-laid table of the singularity causes the processed edge to be ground, so that the non-directional coarseness of the non-unidirectional grinding streak can be obtained. A good working surface with a degree of less than about Unm (several atomic intervals). If the twisted image does not rotate, a streak of roughness equal to or greater than the directionality of the motion direction of the flat red table can be formed. Thus, according to the method of the present invention, a super smooth surface which does not scratch the scratches can be obtained. EFFECTS OF THE INVENTION The linear advance type grinding processing method of the present invention has the effects described. 1) It is possible to manufacture a grinding device that is space-saving compared to the rotary grinding method. 2) It is possible to construct a self-grinding system that can continuously feed the object to be processed into the device, which is difficult to implement using a conventional rotary type polishing table. 3) It is possible to produce an upright type two-sided automatic grinding system in which the 疋 turn surface is vertical, which can effectively utilize the space around the device. 1271261. The best shape bear The principle of the straight forward type grinding processing method of the present invention will be described with reference to the scale of the case of polishing in the first riding. The polishing method by the present invention employs parallel adjacent, jump, and 11 as parallel plane stages A, B. - The group of polishing tools 11 is configured to hold adjacent center lines and move linearly at a speed of v in opposite directions. What is the force? The squeezed field is accommodated in the object to be processed in the holder 14 which is almost unrestricted in rotation, so as to contact the set of polishing tools u _ and the 'competing force for applying the rotary motion to the workpiece 3 . A feeding liquid containing free abrasive grains is supplied to the polishing tool 11. Therefore, the surface of the object 3 to be processed is removed by the free abrasive grains by the relative movement of the rotation of the object 3 and the polishing tool η of the linear motion, so that the surface is highly smooth. The method of the present invention is a method in which the movement of the jade table or the movement of the abrasive device or the surface of the abrasive device is rotated, but the object to be processed is rotated by the power from the motor or the like. The relative motion between the abrasive tools can also be ground. In this method, the research has been increased, and the amount of money for the group polishing has become slightly larger than the diameter of the broken object 3, and the space can be compared with the rotary table. Small to complete. Fang, this method performs the polishing force on the surface of the object to be added, as shown in Fig. 2, holds two sets of parallel plane polishing tools u which are linearly moved in the opposite direction at V speed and is placed and processed. Object 3. Therefore, the surface of the object to be processed 3 is brought into contact with the surface of the polishing tool 11 by being pressed by the vertical (upper and lower) direction by the pressure p by a workpiece support table (not shown) which has been produced by metal or ceramics or the like. The workpiece 3 is subjected to a frictional force for rotation, and a polishing liquid containing free abrasive grains is supplied to the polishing tool 11. Thus, the removal of the free abrasive particles is processed 1271261 above the object 3: the surface 'has a highly smooth surface. The polishing tool u can continuously supply the abrasive tool to the grinding position by using a belt type polishing tool. The method of Fig. 2 is to support the object to be processed 3 on the long-sized plate-shaped carrier 13 having a circular-shaped hole to be processed, as shown in the third embodiment. When the material is pulled out in any direction as the grinding progresses, the surface of the object to be processed is _ _ _ _ _ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ The horizontally-oriented two-side grinding method of the transverse direction is a vertical type of vertical-surface grinding processing method, and the two-side grinding processing system around the device can also be effectively utilized. In Figures 1 to 3 In the polishing method shown in the figure, the object to be processed of the carrier 13 supports the hole in the group-parallel flat (four) (10). When the rope plate (four) is processed, the object is not problematic, but as in the case of the (four) circle, there is no central hole. The object to be processed, the Ministry of Finance has not been in contact with the polishing tool, so the center has not been able to grind. Therefore, as shown in Figure 4, (4) - the ^ ^ ^ ^ ^ ^ ^ ^ Upper, by placing the secondary carrier 13 of the circular hole having the center of rotation into the plate-shaped carrier 13, The surface of the quilt is polished. The shape of the hole in the _ _ _ m is in addition to the shape of the circle, but also in the shape of a square rectangle, which can be worn by two squares. The center of the hole of the object to be processed like the T-th power carrier (4) is set to stand on the adjacent (10), and the workpiece 3 can be completely polished. Further, around the center of rotation of the sub-carrier 13A As shown in Fig. 5, when there are two or more objects to be processed to support the hole load/13A at the position away from the center of rotation of the sub-carrier !271261 13A, even if there is a hole to be processed, The temple surface of the object to be processed 3 may be subjected to royal polishing. This method is suitable for polishing a large number of objects to be processed. Fig. 6 and Fig. 7 are conceptual diagrams showing other embodiments of the polishing method and apparatus of the present invention. By applying the frictional force of the surface of the linear advancing worktable that performs the linear motion to the direction of the linear motion different from the vertical direction, the extrusion is applied to the linear advancement type table, and can be applied for the rotary motion. Coupling force to On the object to be processed, the polishing jade obtained by the method is a belt-type polishing machine which is a flat table of the upper and lower groups as shown in the seventh embodiment, and is held in a linear motion in the opposite direction at a V speed. 11 11 , juxtaposed on the twisted image 3 already supported on the carrier 13 , pressing the polishing tools n and U up and down with a pressure p, so that the surface of the twisted image 3 is in contact with the polishing tool The surface is subjected to one-side or two-side grinding. The surface state of the polishing tool is made different from the left and right of the center line of the length direction of the polishing tool, so that the frictional force is different, for example, by the length of the surface of the polishing tool on one side The direction center line is scribed with a circular hole or a scaly shape to reduce the contact area between the unilaterally processed county and the (four) member, and the friction can be reduced by the other side. Moreover, even in the longitudinal direction center line of the polishing tool By changing the hardness of the surface of the polishing tool _ mechanical characteristics, it is possible to make the left and right (four) processing objects and the polishing of the lying side to change, and (4) the county force and the combination of pure force are possible. By doing so, the coupling force for the twisting motion can be added to the object to be processed. The polishing tool 11 is supplied with a polishing slurry containing free abrasive grains. Therefore, by the rotation of the object 3 to be rotated 1271261 - the workpiece of the polishing tool n that has been linearly moved, (10) the horse is processed by the object 3 The upper and lower surfaces 'smooth to the south. This method is the same as shown in Fig. 7. Even if the belts Wei, u, u, which are linearly moved in the same direction with v-speed, can be polished in the same way. Fig. 6 and Fig. 7 show the single-side polishing of the linear motion plane at the v-speed by holding the object to be processed and aligning it with one-sided or three-sided grinding. The object to be processed by extrusion may also be applied to the object to be processed for the rotational movement of the workpiece. The relative movement between the rotation and the linear motion of the polishing tool may also be performed. Example 1 Figure 8 is a view showing an embodiment of the method of the present invention. As shown in Fig. 8, the pair of belt-shaped polishing tools adjacent to each other passing through the object to be processed are respectively opposed to each other by the motors M1 and M2. Transported in a straight line Cycling. On the two side surfaces of the adjacent center line of the holding-group polishing tool, the disk of the object to be processed is pressed and polished, and the polishing is performed to uniformly polish the abrasive grains. Private S: [force system 3. 7kPa 'The moving speed of the polishing tool is i. 5m / s, the polishing tool is leather type. The disk substrate type type 'grinding time is 5min. Results, the disk substrate system The substrate is smoothed by polishing the substrate by grinding and polishing the substrate at a speed of at least 〇·heart/s or more by the kinetic force _ 帛 图 图 。 。 。 。 。 。 。 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图It is a three-dimensional roughness measuring wire obtained by measuring the smoothness of the surface of the magnetic disk obtained by polishing using a high-precision surface measuring device (WYKO). The surface of the magnetic disk substrate can be very clean by polishing. , up to 13nm super smoothing with this value
1271261 面，顯示出本發明之直線前進型研磨裝置的有效性。 【圖式簡單説明】 第1圖係表示本發明之直線前進型研磨方法的原理之模式圖。 第2圖係表示本發明之直線前進型二面研磨方法的實施形態之模式圖。 第3圖絲示姻本發明之直線前進型二面研磨裝置的連續自動加工 法之模式圖。 第4圖係表示第3圖所示的連續自動加工法之修飾形態的模式圖。 第5圖係表示第3圖所示的連續自動加工法之其他修飾形態的模式圖。 第6圖係表林伽之直線前進t面研磨方法的其他實施形態之模 式圖。 、 .第7圖係'表示第6 _示的直線前進型二面研磨方法之修_態的模 式圖。 、 =圖係實&例已採用的直線前進型研磨裝置之側視圖。 第9圖係表_峨_恤面細（ 而得的磁碟基板之表面 疋由抛先 相。 奸π度一之三維粗糙度測定結果的圖面代用照 第10圖係表示習 圖〇 用之研磨加卫方法（拋光加X之例子) 的原理之模式 【主要元件符號說明】 3 被加工對象 10研磨工作台 13 1271261 11 拋光具 12 游離研磨粒 13載具 14支架 15研磨液The surface of 1271261 shows the effectiveness of the linear advancement type polishing apparatus of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the principle of the linear advance type polishing method of the present invention. Fig. 2 is a schematic view showing an embodiment of the linear advance type two-side polishing method of the present invention. Fig. 3 is a schematic view showing a continuous automatic machining method of the linear advance type two-side polishing apparatus of the present invention. Fig. 4 is a schematic view showing a modified form of the continuous automatic machining method shown in Fig. 3. Fig. 5 is a schematic view showing another modification of the continuous automatic machining method shown in Fig. 3. Fig. 6 is a schematic view showing another embodiment of the straight-line t-surface polishing method of the table. Fig. 7 is a pattern diagram showing the repair state of the linear advance type two-side polishing method shown in Fig. 6. , = Figure and a side view of a straight-line type grinding device that has been used. Figure 9 is a table _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The mode of the grinding and lifting method (example of polishing plus X) [Main component symbol description] 3 The object to be processed 10 The polishing table 13 1271261 11 The polishing tool 12 The free abrasive grain 13 The carrier 14 Bracket 15 The polishing liquid