CN103831705B - By the grinding device and method that grind the peripheral part of the workpiece such as belt grinding glass plate - Google Patents

By the grinding device and method that grind the peripheral part of the workpiece such as belt grinding glass plate Download PDF

Info

Publication number
CN103831705B
CN103831705B CN201310245364.1A CN201310245364A CN103831705B CN 103831705 B CN103831705 B CN 103831705B CN 201310245364 A CN201310245364 A CN 201310245364A CN 103831705 B CN103831705 B CN 103831705B
Authority
CN
China
Prior art keywords
grinding
workpiece
ground
axis
tape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201310245364.1A
Other languages
Chinese (zh)
Other versions
CN103831705A (en
Inventor
宍户光伸
山口直宏
佐藤觉
山崎亨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Micro Coating Co Ltd
Original Assignee
Nihon Micro Coating Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Micro Coating Co Ltd filed Critical Nihon Micro Coating Co Ltd
Publication of CN103831705A publication Critical patent/CN103831705A/en
Application granted granted Critical
Publication of CN103831705B publication Critical patent/CN103831705B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/002—Machines or devices using grinding or polishing belts; Accessories therefor for grinding edges or bevels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/16—Machines or devices using grinding or polishing belts; Accessories therefor for grinding other surfaces of particular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/18—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/18—Accessories
    • B24B21/22—Accessories for producing a reciprocation of the grinding belt normal to its direction of movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

The present invention provides a kind of peripheral part to workpiece such as glass plates and is accurately proceed the grinding device of grinding, grinding method.Grinding device includes：1st grind section is ground part to the straight line of the peripheral part of workpiece and is ground, and with the 1st horizontal grinding axis；With the 2nd grind section, part is ground to the non-rectilinear of the peripheral part of workpiece and is ground, and with horizontal 2nd grinding axis, the 1st, the 2nd grind section respectively includes：Work cell for keeping workpiece；With the grinding tape cell at least part surface opposite with work cell and for configuring lapping tape across grinding axis, the surface of the lapping tape configured marks off each abradant surface, straight line is ground part and abradant surface and is contiguously relatively moved on grinding axis, non-rectilinear is ground part and abradant surface and is contiguously relatively moved on grinding axis, is thus ground.

Description

By the grinding device and method that grind the peripheral part of the workpiece such as belt grinding glass plate
Technical field
The present invention relates to in mobile phone display window, liquid crystal display panel, organic EL panel, plasma panel, solar-electricity The workpiece such as the glass plate used in the cloche of the flat-panel screens such as pond plate and electronic component-use, optical light filter etc. are ground The device and grinding method of mill.More particularly to grinding is accurately proceed to the peripheral part of the workpiece such as glass plate using lapping tape Grinding device and grinding method.
Background technology
In recent years, the market continuous enlargement of smart mobile phone, panel type terminal etc..These electronic equipments are mostly that display is exposed Equipment, scar is be easy to cause when falling or colliding.About the size of display, for example, smart mobile phone is 5 inch, Panel type terminal is 6 inches~10 inch, and functional mobile phone is that (transverse and longitudinal size ratio is usually 4: 3 transverse and longitudinal ratio to 3 inch Rate is 16 in the case of widescreen: 9).The demand of the cover member of display for protecting such electronic equipment persistently increases Add.
The material of cover member as the display display etc. of slave display, camera (basic display unit), substitution are previous On single side (or two-sided) apply cured film scratch resistance acrylic resin or makrolon, the use of cloche in recent years Increase, so that the intensity of the cloche is improved becomes technical task.
Glass is high-strength material (1000~2000kg/mm in theory2), but the relatively low (3~20kg/ of actual strength mm2).Its reason is that surface of glass etc. is upper in the presence of fine scar, crackle, the breach that can not visually observe more (chipping) etc. (latent wound), generates stress concentration, to as damaged reason when effect has tensile stress on glass.
In order to improve the intensity of glass, various physical methods (surface chilling method etc.) and chemical method (chemistry erosion are devised Quarter processing, ion-exchange etc.), using these intensifying methods, it is important that eliminate the glass as Breakage Reasons The fine scar of glass.
About cloche, usually predetermined size will be cut into as the glass plate of material, and implements various add to it Work and manufacture.On the end face as section of glass plate, it is formed with fine scar or crackle etc..It is such in order to eliminate It is formed in the fine scar of end face, carries out the chamfering (light chamfering) for eliminating rib portion and corner.
In chamfering, it is ground edge (end face and upper surface or the lower surface of the glass plate of regulation shape (rectangle etc.) Boundary portion) so-called C chamferings, alternatively, being ground the so-called R chamferings in corner (boundary portion of an end face and adjacent face) Deng.
In the past, to C chamferings and R chamferings using grinding-materials such as grinding wheels, especially in R chamferings, according to R shapes (for example, R1, R10 etc.) and need the corresponding grinding-material of shape, it is difficult to accurately form the shape of grinding-material.In addition, it is difficult into Row grinding programs and is difficult to maintain, improve the quality of the surface to be polished formed by grinding.
In the past, it was carried out by making the disc face of substantially discoid abrasive grinding wheel tilt and being pressed against to the rib portion of glass plate Only remove the C chamfer machinings (patent document 1 in rib portion：Japanese Unexamined Patent Publication 2000-233351 bulletins).In addition, at the end of abrasive grinding wheel Inclined surface is set on face, and the C chamfer machinings for only remove rib portion by the way that rib portion of the inclination towards glass plate to be pressed against are (specially Sharp document 2：Japanese Unexamined Patent Publication 2003-231046 bulletins, patent document 3：Japanese Unexamined Patent Publication 2011-51068 bulletins).
In addition, the recess portion of arc-shaped or the recess portion of desired shape are formed on the end face of abrasive grinding wheel, into enforcement glass The end surface shape of the end face profile copy grinding grinding wheel of glass plate and remove, R chamfer machinings or forming (patent document 4：It is Japanese special Open 2002-59346 bulletins, patent document 5：Japanese Unexamined Patent Publication 2001-85710 bulletins).
In previous chamfer machining as described above, as abrasive grinding wheel, using by metal powder aggregation sintering and admittedly Surely skive etc. that have diamond abrasive grain, that metal bonds, is carried out primary using the different grinding wheel of grit size (wheel) Processing and secondary operation.In time processing, using use sieve pore (mesh) size be #325~#600 diamond particles Grinding wheel, the average surface roughness Ra of the glass plate end edge portion after processing is generally in the range of 0.5 μm~1.0 μm.In order to Reduce the surface roughness, in secondary operation, shaped using the grinding wheel same cross-sectional shape with time processing, use Screen size is the finishing grinding wheel of the diamond particles of #1000~#2000.
In addition, replacing the skive that metal as described above bonds, proposition has is filled with resin between the fibers The chamfering abrasive wheel of fiber construct, or configured with grinding abrasive grains such as silicon carbide, the aluminium oxide that screen size is #500~#2000 Resin structure chamfering abrasive wheel (patent document 6：Japanese Unexamined Patent Publication 2002-160147 bulletins).While making the chamfering abrasive wheel (wheel) it rotates, is pressed against to the end face of glass for liquid crystal display plate etc. while section is made to be formed as concave grinding wheel peripheral part, by This is processed.In order not to generate processing unevenly uniformly ground, chamfering abrasive wheel with rotary shaft relative to glass plate The vertical vertical line in surface tilt the mode of predetermined angular and use.
Existing technical literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2000-233351 bulletins
Patent document 2：Japanese Unexamined Patent Publication 2003-231046 bulletins
Patent document 3：Japanese Unexamined Patent Publication 2011-51068 bulletins
Patent document 4：Japanese Unexamined Patent Publication 2002-59346 bulletins
Patent document 5：Japanese Unexamined Patent Publication 2001-85710 bulletins
Patent document 6：Japanese Unexamined Patent Publication 2002-160147 bulletins
Invention content
When grinding wheel as described above (wheel) to be pressed against to the end edge portion of glass plate simultaneously chamfering is carried out when making it rotate When, there are problems that the air-hole blockage of grinding wheel and grinding wheel are gradually worn out.If leading to grinding wheel due to air-hole blockage and abrasion The deteriorations such as the shape of processing department, then generate grinding scar in the peripheral part of glass plate, and due to the periphery of grinding wheel and glass plate The part in portion does not contact and generates undressed portion (processing is uneven), and burning is generated additionally, there are the unevenness due to tonnage The situation of wound etc..
In the case of the deteriorations such as the shape of the processing department of grinding wheel, although (dressing) and refine can be modified (truing), but for skive, high forming accuracy is essential, since the position of finishing etc. and grinding wheel adjusts The time is needed, therefore operating efficiency is low.In addition, due to need in the state that also remaining has a large amount of unused areas to grinding wheel into Finishing of row processing department etc. or the replacement that grinding wheel is carried out according to service life, accordingly, there exist costs to increase this problem.
In addition, when carrying out the chamfering of peripheral part of glass plate using grinding wheel, exist when abutting grinding wheel with machining object Mechanical collision can be applied, due to the collision breakage occurs for glass plate, and machining yield is caused to deteriorate this problem.
In the chamfering abrasive wheel (patent document of lower resin structure of rigidity etc. compared with the skive that metal bonds 6) in, the collision of the end edge portion of glass plate is reduced, the generation of notch and scar is reduced.But the abrasion of grinding wheel aggravates, to The change in shape of processing department is accelerated, and air-hole blockage is also resulted in, and accordingly, there exist high these of the finishing of grinding wheel (or refine) frequency to ask Topic.Additionally, there are following problems：The abrasive dust of grinding wheel is attached on the workpiece such as glass plate, needs decontaminating apparatus and clean process, Or device itself is dirty, therefore device is safeguarded and expends the time.
Moreover, in recent years, the thickness of the display cloche (glass plate) of demand continuous enlargement it is thinning (for example, 1mm with Under), it is desirable that chamfer machining more precisely is carried out to peripheral part (rib portion and corner).Use abrasive grinding wheel to glass in previous In the case that the peripheral part of plate carries out chamfering, the precision of obtained machined surface is inadequate, and fine scar is remained in peripheral part Or breach, to which the intensity of glass plate can not be improved by grinding.
In view of the above problems, the purpose of the present invention is to provide a kind of grinding devices, using lapping tape to works such as glass plates The peripheral part (edge, corner etc.) of part is ground, and can be accurately proceed processing.Additionally, it is provided a kind of grinding device, energy Enough the peripheral part with variously-shaped workpiece is ground using grinding device and lapping tape.
In addition, the purpose of the present invention is to provide it is a kind of in order to improve the intensity of glass plate and to the peripheral part of glass plate height The grinding method being ground to precision.And provide the glass plate that intensity improves by this method is ground.
The grinding device for solving the one embodiment of the present invention of the above subject, for the peripheral part using lapping tape to workpiece It is ground, which is characterized in that including：1st grind section is ground part to the straight line of the peripheral part of workpiece and is ground, And with the 1st horizontal grinding axis；With the 2nd grind section, part is ground to the non-rectilinear of the peripheral part of workpiece and is ground Mill, and axis is ground with the horizontal the 2nd, the 1st grind section includes：The 1st work cell for keeping workpiece；With across the 1st Grinding axis is opposite with the 1st work cell and is used to configure the 1st of at least part surface of the 1st lapping tape the grinding tape cell, 2nd grind section includes：The 2nd work cell for keeping workpiece；With across the 2nd grinding axis and the 2nd work cell it is opposite simultaneously The 2nd grinding tape cell at least part surface for configuring the 2nd lapping tape, in the 1st grind section, what is configured the 1st grinds The surface of grinding belt marks off the 1st abradant surface, and it is contiguously opposite on the 1st grinding axis that straight line is ground part and the 1st abradant surface It is mobile, it is thus ground, in the 2nd grind section, the surface of the 2nd lapping tape configured marks off the 2nd abradant surface, non-rectilinear It is ground part and the 2nd abradant surface contiguously to relatively move on the 2nd grinding axis, thus be ground.
By constituting in the above described manner, the straight line of the peripheral part of workpiece can be ground using lapping tape by grinding device Mill part, such as rectangle glass plate edge (rib portion) and workpiece peripheral part non-rectilinear be ground part, such as rectangle The corner of glass plate be ground.In addition, by constituting in the above described manner, for example, can be by by the 1st lapping tape and the 2nd Lapping tape (can be identical) configure on grinding device, to it is variously-shaped (for example, rectilinear form and with regulation curvature shape Shape) be ground part be ground.The grinding device of the present invention can be the peripheral part of 1mm sheet workpieces below to thickness It is accurately proceed grinding.Workpiece can be glass plate, can also be the plate that the crystalline materials such as silicon are constituted.The present invention especially for The aspect for improving the intensity for the plate being made of the crystalline material to enbrittle and being ground to peripheral part is effective.Workpiece can be with It is the plate by being constituted without brittle crystalline material, can also be the plate being made of metal materials such as stainless steel or aluminium.
The grinding device of the present invention is preferably, in order to be connected automatically in the range of from the 1st grind section to 2 grind section Continuous grinding, can include workpiece supply unit.Workpiece supply unit is preferably to have and carried out for adsorbing the upper surface of workpiece The arm mechanism of conveying.The arm mechanism of workpiece supply unit also rotates in work cell and configures workpiece.For example, such as Figure 15 institutes Show, about the workpiece W of rectangle, with cornerwise intersection point, that is, center C1 of workpiece or pair of the square of the short side comprising workpiece Centered on the intersection point of linea angulata, that is, center C2, workpiece is made to rotate (90 degree or each 180 degree every time).It is single by being conveyed with workpiece Member, for example, can exist to four end faces (or eight sides of upper surface, lower surface) of the workpiece including rectangle and four corners The peripheral part of interior workpiece is integrally continuously and automatically ground.
The grinding device of the present invention is preferably that the peripheral part of the workpiece to being made of glass plate is ground.When to by glass When the peripheral part for the workpiece that glass plate is constituted is ground, in the 1st grind section of grinding device, straight line is ground part and the 1st Abradant surface relatively moves, and is formed as so that the straight line of the peripheral part of glass plate is ground part, average surface roughness Ra is 20nm or less and maximum valley depth Rv are 200nm hereinafter, in the 2nd grind section of grinding device, and non-rectilinear is ground part and the 2 abradant surfaces relatively move, and are formed as so that the non-rectilinear of the peripheral part of glass plate is ground part, average surface roughness Ra It is 200nm or less for 20nm or less and maximum valley depth Rv.
The grinding device of the present invention is configured to, and is ground to the peripheral part of glass plate strong to improve the machinery of glass plate Degree.As shown in figure 16, the peripheral part (rib as the glass plate W of grinding charge in main surface (upper surface, lower surface) and end face Portion, corner) there is (A) recess portion formed when cutting blanket and protrusion and (B) crackle etc..It is formed in the sharp protrusion in rib portion As the starting point of breach, crackle becomes the starting point of the destruction of glass plate.The present invention grinding device to peripheral part accurately into Row is ground so that manufacturing the crackle etc. generated when glass plate will not extend and be eliminated, to improve the intensity of glass plate. In order to form the high-precision surface characteristic for the intensity that can improve glass plate, abradant surface is made to be made of lapping tape, with will not be Being ground the mode of part formation scar or breach makes abradant surface and grinding unit point relative movement.
Specifically, the 1st work cell includes：The 1st workpiece holding station for keeping workpiece；With for making the 1st workpiece Swing mechanism of the holding station along above-mentioned 1st grinding axis oscillating.
The present invention grinding device in, by make straight line grinding unit split-phase for static abradant surface flatly, with Predetermined stroke moves back and forth (swing) and is ground.By making work cell miniaturization, lighting, and configure balancer etc., Vibration when swing can be reduced.It, being capable of high-precision thereby, it is possible to reduce the generation of the scar of the surface to be polished caused by vibrating Ground is finished in smooth surface to be polished.Can be that the position of abradant surface is static, the lapping tape for forming abradant surface moves It is dynamic.
In the grinding device of the present invention, pass through grinding for glass plate that workholding units are kept and grinding tape cell The range (stroke) that flour milling (relatively) is swung is preferably the range in positive and negative 1~200mm.Thus, it is difficult to generate amount of grinding Deviation (turned-down edge).
In addition, the 2nd work cell includes on horizontal pedestal：X-direction movable stage, with can be in the horizontal direction And mobile mode is arranged along the direction (X-direction) vertical with the 2nd grinding axis；Y-direction movable stage, for being capable of edge The Y-direction movable stage that the mobile mode in the direction (Y-direction) parallel with the 2nd grinding axis is arranged, and be provided integrally with along X The groove portion of direction elongation；With the 2nd workpiece holding station, pass through the 1st vertical axis being provided integrally on X-direction movable stage And can horizontal supporting, the 2nd workpiece holding station be rotatably to be protected from the 2nd workpiece with the 2nd vertical axis, the 2nd vertical axis The 2nd vertical axis that the surface of platform vertically extends is held, and the above-mentioned groove portion of above-mentioned Y-direction movable stage can be slidably disposed in Interior, workpiece is maintained in above-mentioned 2nd workpiece holding station, and non-rectilinear grinding unit passes through the 1st vertical axis and above-mentioned 2nd vertical axis Mobile, side carries out the above-mentioned 2nd grinding axis oscillating of yaw moving edges.
In the 2nd grind section, also by make non-rectilinear grinding unit split-phase for static abradant surface side in the horizontal plane Yaw action side is carried out to be ground with predetermined stroke reciprocating movement.At this point, yaw movement can be according to being ground part Curvature etc. (or wish formed curvature) determines that the track of horizontal reciprocating motion is consistent with axis is ground, therefore, it is possible to make Non-rectilinear is ground part and is ground when being abutted successively with flat abradant surface.
It is preferred that the position of two vertical axis is in synchronized control by servomotor etc..By synchronously controlling the 1st lead The position y of the position x of the X-direction of vertical axis and the position x ' of the X-direction of the 2nd vertical axis, Y-direction, can make the angle of glass plate The non-rectilinears such as portion are ground part and are formed as desired R shapes (for example, R1, R10 etc.).
It is preferred that even a kind of lapping tape, can also be ground the part that is ground with various curvature.It does not need Grinding-material (grinding wheel etc.) is made according to R shapes, high-precision essence can be formed in the corner of workpiece while cutting down cost Machined surface.
In addition, the 1st grinding tape cell has for making the 1st abradant surface in the horizontal direction and along vertical with the 1st grinding axis Direction movement the 1st lapping tape mobile mechanism, as a result, straight line be ground part and the 1st abradant surface can it is above-mentioned 1st grinding It is abutted on axis, the 2nd grinding tape cell has for making the 2nd abradant surface in the horizontal direction and along vertical with the 2nd grinding axis 2nd lapping tape mobile mechanism of direction movement, non-rectilinear is ground at least part of part as a result, and the 2nd abradant surface can It is abutted on the 2nd grinding axis.
By with detent mechanism as described above, for example, can make the edge of the workpiece of rectangle whole in grinding axis It is upper to be abutted with flat abradant surface, can take place without only end thereof contacts, uniformly grind.In addition, due to that can inhibit To the mechanical collision of any of workpiece, so can also inhibit the extension of the generation of breach and the crackle being present on workpiece, from And it can carry out improving the high-precision grinding of the breakdown strength of workpiece.In addition, the intensity of each workpiece does not have deviation, Neng Gouwen Determine quality.
Moreover, the grinding device of the present invention is characterized in that, the 1st grinding tape cell includes the length for making the 1st abradant surface Axis is spent relative to the 1st grinding inclined 1st leaning device of axis, and the 2nd grinding tape cell includes the length for making the 2nd abradant surface Axis is spent relative to the 2nd grinding inclined 2nd leaning device of axis.
The grinding tape cell of the present invention preferably has grinding relatively configured with work cell, parallel with grinding axis Liner, the surface for the lapping tape that (can be movably) be configured on the polishing pad is marked off for being ground part to workpiece The abradant surface being ground.The lapping tape being configured on polishing pad has Rack and length, and has length direction Axis (length axes).The length axes are identical as moving direction when lapping tape is moved.The length axes can be with grinding shaft Line is consistent, can also be tilted relative to grinding axis.
The length axes of abradant surface can be made to tilt such as θ degree.In the case where abradant surface is vertical guide, θ degree is opposite In the angle of inclination of horizontal plane.
The lapping tape for marking off abradant surface has Rack.The case where additionally, there are with fixing speed continuous moving.When When making the length axes level of lapping tape, for example, the abradant surface (lapping tape) abutted with the linear edge of horizontal workpiece It is smaller, it is not ground and is just increased using the amount for the lapping tape for terminating and being charged for.The present invention grinding device have make grinding The inclined mechanism of length axes in face, thus it is advantageous in terms of cost.That is, by making the length axes of abradant surface (when mobile For moving direction) it is tilted relative to grinding axis, the wide range (preferably whole surface) of lapping tape, energy can be efficiently used Enough reduce operating cost (cost of lapping tape).According to the length of the edge of the workpiece such as glass plate, can such as 0 degree of ＜ θ≤ 90 degree of range determines inclined angle, θ.The workpiece such as the different glass plate of size can be coped with the lapping tape of fixed width, from And the construction of grinding tape cell can be simplified.When using multiple grinding tape cells, uniform specification can reduce grinding tape cell Manufacturing cost.In addition, due to can be coped in various workpieces (glass plate etc.) with a kind of lapping tape, so without to each work Part replaces lapping tape, can reduce duty cycle.Since the type of lapping tape can be reduced, so being easy to carry out stock control (reduction of bad inventory concentrates and buys band of the same race and bring volume discount etc.).Using narrow lapping tape, lapping tape can be made The exchanging operation of lighting, band becomes easy.In addition, the multiple glass plates of lapping tape simultaneous grinding of fixed width can be used, So as to seek being further reduced for duty cycle.
Moreover, the 1st grinding tape cell includes the 1st rotation for making the 1st abradant surface be rotated centered on the 1st grinding axis Mechanism, the 2nd grinding tape cell include the 2nd rotating mechanism for making the 2nd abradant surface be rotated centered on the 2nd grinding axis.
The present invention grinding device abradant surface vertical can be configured, in addition, abradant surface can be made with grind axis (or With the parallel pivot center of grinding axis) centered on rotate and tilted relative to vertical guide.Thereby, it is possible to the straight lines to workpiece Portion carries out C face grindings.Due to lapping tape unit rotational, so can be to being flatly fixed on the upper table of the workpiece in work cell The edge of face and lower surface carries out the desired faces C grinding.Work cell need not make workpiece inclination etc., can simplify structure. The angle [alpha] that the abradant surface of grinding tape cell is rotated centered on grinding axis ranges preferably from, when with parallel with vertical guide When abradant surface is 0 degree, it is up in the up-down direction 90 degree (at this point, abradant surface is horizontal).
Alternatively, grinding tape cell can not have rotating mechanism.In this case, in order to the glass plate etc. flatly placed The edge (rib portion) of the upper surface (or lower surface) of workpiece carries out C face grindings, can by the abradant surface for grinding tape cell with It tilts such as 45 degree of state relative to vertical guide (or horizontal plane) to fix, to constitute grinding tape cell.
Moreover, the grinding device of the present invention is characterized in that, the 1st work cell include for making workpiece in the horizontal direction and The workpiece mobile mechanism moved along the direction vertical with the 1st grinding axis.Straight line is ground part as a result, and abradant surface can be It is reliably abutted on grinding axis.
Moreover, the present invention grinding device be characterized in that, the 1st work cell include for push and fix workpiece, And/or adsorb and fix the 1st workpiece fixed mechanism of workpiece, the 2nd work cell include for push and fix workpiece and/ Or adsorb and fix the 2nd workpiece fixed mechanism of workpiece.
The workpiece such as the glass plate being placed in work cell (the 1st, the 2nd) are fixed on work cell before actual milled processed Workpiece holding station on.As fixed mechanism, it is preferable to use attraction and pushing force.The workpiece such as glass plate can pass through fixed plate It fixes, can also be fixed in holding station by vacuum suction method etc. Deng being pushed from top.On the surface of holding station and admittedly The elastic pieces such as dry goods or rubber are pasted at the back side of fixed board, so that the upper surface and the lower surface in workpiece such as glass plates not will produce Scar.
Upper surface is pushed, while adsorbing lower surface, is held a workpiece in workpiece holding station with high retentivity as a result,. In milled processed, glass plate can be made movably will not expeditiously to be ground when the abradant surface for being ground tape cell pushes Mill.
In addition, the grinding device of the present invention is characterized in that, the 1st grinding tape cell includes for making the 1st lapping tape move The 1st lapping tape mobile mechanism, the 2nd grinding tape cell include for make the 2nd lapping tape move the 2nd lapping tape mobile mechanism.
The grinding device of the other modes of the present invention is for being ground to the straight line of the peripheral part of workpiece using lapping tape Grinding device that part is ground, with horizontal grinding axis, which is characterized in that including：Work for keeping workpiece Part unit；With the lapping tape list at least part surface opposite with work cell and for configuring lapping tape across grinding axis Member, the surface of the lapping tape configured mark off abradant surface, and straight line is ground part and abradant surface contiguously on grinding axis Relative movement, is thus ground.
In addition, which is characterized in that workpiece is made of glass plate, and work cell includes：For keeping the workpiece of workpiece to keep Platform；With for making workpiece holding station along the swing mechanism of grinding axis oscillating, straight line is ground part and abradant surface relative movement, Be formed as so that the straight line of the peripheral part of glass plate is ground part, average surface roughness Ra is 20nm or less and maximum Paddy depth Rv is 200nm or less.
And, which is characterized in that lapping tape unit includes：Lapping tape mobile mechanism, for for making abradant surface along horizontal Direction and the lapping tape mobile mechanism moved along the direction vertical with grinding axis, straight line, which is ground, as a result, partly grinds with above-mentioned Flour milling can abut on grinding axis；Leaning device is used to make the length axes of abradant surface to be tilted relative to grinding axis； And rotating mechanism, it is used to that abradant surface to be made to rotate centered on grinding axis.
Moreover, work cell includes the work for making workpiece to horizontal direction and being moved to the direction vertical with grinding axis Part mobile mechanism.
By constituting in the above described manner, can become using lapping tape to edge of the glass plate of rectangle etc., workpiece it is straight Line is ground the grinding device that part carries out the desired faces C grinding.In addition, can become high to the edge of glass plate or end face Precision it is ground the grinding device of the intensity to improve glass plate.
The grinding device of another other modes of the present invention is for using non-rectilinear of the lapping tape to the peripheral part of workpiece It is ground grinding device that part is ground, with horizontal grinding axis, which is characterized in that including：For keeping work The work cell of part；It is ground with opposite with work cell across axis is ground and at least part surface that is being used to configure lapping tape The surface of grinding belt unit, the lapping tape configured marks off abradant surface, and non-rectilinear is ground part and abradant surface is contiguously being ground It relatively moves on mill axis, is thus ground.
In addition, which is characterized in that workpiece is made of glass plate, and work cell has on horizontal pedestal：X-direction is movable Workbench, that can be arranged in the horizontal direction and in a manner of mobile with the vertical direction (X-direction) of grinding axis；Y-direction Movable stage, for that can be started building by the Y-direction that can be arranged in a manner of mobile along the direction (Y-direction) parallel with grinding axis Make platform, and is provided integrally with the groove portion extended in X direction；With workpiece holding station, can be started building by being provided integrally at X-direction Make the 1st vertical axis on platform and can horizontal supporting, workpiece holding station are with the 2nd vertical axis, the 2nd vertical axis rotatably The 2nd vertical axis vertically extended from the surface of the workpiece holding station, and the slot of Y-direction movable stage can be slidably disposed in In portion, workpiece is maintained in workpiece holding station, and non-rectilinear grinding unit passes through the movement of the 1st vertical axis and the 2nd vertical axis, Bian Jin The above-mentioned grinding axis oscillating of row yaw moving edges, non-rectilinear is ground part and abradant surface relative movement, so that glass plate Peripheral part non-rectilinear be ground part be formed as, average surface roughness Ra is 20nm or less and maximum valley depth Rv is 200nm or less.
By constituting in the above described manner, it can become and part is ground to the non-rectilinear of the workpiece such as glass plate using lapping tape It is ground the grinding device of (for example, the faces the R grinding in corner).When to the different R shapes of curvature be ground part into Row grinding when (for example, R1, R10 etc.), work cell according to the shape while carry out yaw move while grinding axis on swing, because This, need not change grinding-material (grinding wheel etc.) according to R shapes, can carry out high-precision grinding.
Lapping tape is formed as described below used in the grinding device of aforementioned present invention：In the table of plastic base material film Face coating makes abrasive grain be scattered in solution obtained from resinoid bond, and the sheet material after drying, solidification is cut into necessary width, and It is wound up on reel.
As base material film, the plastic plastic foil with flexibility is used.Specifically, as base material film, make With by polyethylene terephthalate, polybutylene terephthalate (PBT), polyethylene naphthalate, poly- naphthalenedicarboxylic acid fourth The polyolefin resins such as the polyester resins such as diol ester, polyethylene, polypropylene, using polyvinyl alcohol or methylallyl alcohol as principal component The compositions such as acrylic resin film.
As abrasive grain (abrasive grains), aluminium oxide (Al can be used2O3), cerium oxide (CeO2), silica (SiO2), gold Hard rock, silicon carbide (SiC), chromium oxide (Cr2O3), zirconium oxide (ZrO2), cubic boron nitride (cBN) etc. and its mixture.
The average grain diameter of abrasive grain is preferably in the range of 0.2 μm or more (#20000), 3 μm or less (#4000).If average grain Diameter is more than 3 μm, although can then remove the bigger scar and notch of the end face before grinding, can newly be produced on polished surface Raw fine scar and notch can not assign glass plate sufficient intensity, therefore not preferably.If average grain diameter less than 0.2 μm, Then grinding efficiency is extreme low and productivity deteriorates, therefore, industrial impracticable.
Moreover, the present invention provides a kind of grinding method, using above-mentioned grinding device, in order to improve the work being made of glass plate The intensity of part is ground the peripheral part of the workpiece.This method includes following process：Using lapping tape to the peripheral part of workpiece Straight line be ground part be ground or to the non-rectilinear of workpiece be ground part be ground so that being ground part Be formed as, average surface roughness Ra is 20nm or less and maximum valley depth Rv is 200nm grinding process below, and lapping tape is It is constituted by fixing the abrasive grain with specified particle size by resinoid bond on base material film.
In order to assign sufficient mechanical strength to glass plate effectively above-mentioned surface is formed in the peripheral part of glass plate The polished surface of roughness Ra and maximum valley depth Rv.Glass plate made of being ground in such a way that peripheral part has above-mentioned surface characteristic The fine scar and notch using peripheral part can be prevented as the generation of the crackle of starting point, and can be prevented by mechanical stress or heat It is damaged caused by impact.In addition, the machining yield of subsequent handling can be improved, the reliable of the product for being assembled with glass plate is improved Property.
Invention effect
By implementing the grinding device or grinding method of the present invention, the face of smart mobile phone or panel type terminal can be removed The cloche of the flat-panel screens such as plate, liquid crystal display panel, organic EL panel, plasma panel, solar battery panel, other electricity The latent wound of the edge of glass plate and/or corner used in the manufacture of the cloche of subassembly etc. and form high-precision surface Characteristic, so as to assign high mechanical properties to glass plate.Cloche is manufactured using the glass plate of the present invention, and in mobile terminal It is used in, thereby, it is possible to improve the fabrication yield in the manufacturing process of various products, group can be improved and enter to have the glass plate Product quality.
In addition, grinding device according to the present invention, grinding method, it can be to the edge of the workpiece such as glass plate, end face, angle Portion, corner rib portion etc. be ground, need not according to grinding charge shape make grinding-material.In addition, due to can be efficient Lapping tape is used to rate, so cost can be reduced and improve quality.
Description of the drawings
Fig. 1 is the figure for the workpiece for showing schematically a mode.
(A) of Fig. 2 is the partial sectional view of workpiece, and (B) of Fig. 2 is the vertical view of workpiece.
Fig. 3 is the front view of the omission for the grinding device 1 for showing schematically one embodiment of the present invention.
Fig. 4 A are the vertical views for the grind section for showing schematically one embodiment of the present invention.
Fig. 4 B are the vertical views of the detent mechanism for the grinding tape cell for showing schematically one embodiment of the present invention.
Fig. 5 is X-X ' that show schematically the rotating mechanism for grinding tape cell of one embodiment of the present invention, along Fig. 4 A Omit side view in the part of line.
Fig. 6 is that main view is omitted in the part of the leaning device for the grinding tape cell for showing schematically one embodiment of the present invention Figure.
Fig. 7 is the vertical view of the swing mechanism for the work cell for showing schematically one embodiment of the present invention.
Fig. 8 is the vertical view of the workpiece mobile mechanism for the work cell for showing schematically one embodiment of the present invention.
Fig. 9 is the vertical view for the grind section for showing schematically the other modes of the present invention.
Figure 10 A are the vertical views for the work cell for showing schematically the other modes of the present invention.
Figure 10 B are the side views for the work cell for showing schematically the other modes of the present invention.
Figure 11 is the figure for the grinding method for showing schematically the workpiece edge (rib portion) for having used grinding wheel.
Figure 12 is the enlarged photograph of the surface to be polished of Examples and Comparative Examples.
Figure 13 is the enlarged photograph of the surface to be polished of other comparative examples.
Figure 14 is the figure for the method for showing schematically edge strength experiment.
Figure 15 is the figure of center C1, C2 for indicating the workpiece such as rectangular glass plate.
Figure 16 is the side (A) observation picture and the upper surface (B) observation picture of the glass plate as workpiece.
Reference sign
W parts
T lapping tapes
A grinds axis
1 grinding device
2 pedestals
10 workpiece mounting tables 1
20 supply units
30 the 1st grind sections
40 the 2nd grind sections
50 workpiece mounting tables 2
300 grinding tape cells 1
300 ' grinding tape cells 2
350 units 1
400 work cells 2
Specific implementation mode
Hereinafter, being described with reference to the various features of the present invention and not constituting the preferred embodiment limited to the present invention.For Convenient for explanation, simplifies attached drawing and size also may not be consistent.
Fig. 1 schematically illustrates the workpiece W as grinding charge.Workpiece W can be glass plate, stainless steel plate, aluminium sheet, work The silicon plate etc. used for solar cell substrate.Workpiece can be rectangle, can also be other shapes.Workpiece W is in upper surface Or lower surface (main surface) and the boundary portion of end face have edge (rib portion), in addition, the boundary an end face and adjacent face Portion has corner (corner part).End face and corner can be to maintain state (the as slice being cut into from blanket：Cut state), Rough lapping can be implemented.
(A) of Fig. 2 shows that at least two edge have carried out the partial cross section of the workpiece W1 of so-called C chamferings, Fig. 2's (B) show that four corners have carried out the workpiece W2 of so-called R chamferings.By being ground to edge or corner, can obtain Workpiece W1, W2 of ' or S2, S2 ', S2 ", S2 ' with polished surface S1, S1 ".
Workpiece W can be made of glass plate.In order to improve the intensity of glass plate, it is important that be ground to come to peripheral part Scar or breach are removed, and reduces polished surface S1 etc. or the surface roughness and maximum valley depth of S2 etc..In order to be assigned to glass plate W High mechanical properties are given, preferably polished surface S1 etc. or S2 etc. is formed as, and average surface roughness Ra is 20nm or less, coarse writes music The maximum valley depth Rv of line is 200nm or less.
Fig. 3 schematically illustrates the grinding device 1 of one embodiment of the present invention.Grinding device 1 consists of the following parts：Match Set on the base 2, the mounting table 10 of workpiece W；According to the workpiece supply unit 20 of the moving direction Wf conveying workpieces W of workpiece W； 1st grind section 30；2nd grind section 40；And for placing milled processed after workpiece W12 mounting table 50.1st grinding Portion 30, which is configured to be ground part to straight line, to be ground, and the 2nd grind section 40, which is configured to be ground part to non-rectilinear, grinds Mill.The quantity of these grind sections and combination can be not limited to this.
Fig. 4 A schematically illustrate the 1st grind section 30.1st grind section 30 on horizontal pedestal 2 across horizontal by grinding Grind axis A and relatively configured grinding tape cell 300 and the composition of work cell 350.
It includes lapping tape cell operation platform 301 to grind tape cell 300, and the lapping tape cell operation platform 301 is with can be along water It is arranged on the base 2 square to and along the mode that is moved with the vertical direction, that is, directions A1 grinding axis A.Workbench 301 can By motor 302 being arranged between workbench 301 and pedestal 2, for releasing control, LM guide portions 303,304 along A1 Direction moves back and forth.On workbench 301, pillar 305,306,307 is extended along vertical direction.Connecting block 311 can by with The LM guide portions 309 and single-shaft mechanical arm (robot) 310 that pillar 305 is set in parallel are moved up along pillar 305 in vertical direction It is dynamic.It is preferred that two axis 312,312 ' (Fig. 5) can slidably run through connecting block 311 in the horizontal direction.Before axis 312,312 ' End is equipped with connecting member 313.Connecting member 313 is rotatably attached at and 314 one of cursor by being pivotally supported pin 316 Extension arm 314 ' on.Cursor 314 (and extension arm 314 ') and cursor 315 have substantially symmetrical shape, via Fastening means 330,331, plate 317 and hang plate 318 keep grinding for storing, configuring the babinet of lapping tape T from left and right Bistrique 319.Cursor 314 (314 '), 315 are mounted in the way of it can be rotated centered on axis A2 on pillar 306,307.Axis A2 is parallel with grinding axis A.
Grinding head 319 is the roller that can be rotated that configuration lapping tape T is configured in the babinet with bottom surface and side And constitute.It is preferred that the top surface of grinding head 319 is made of the lid that can be opened and closed.Grinding head 319 has liner component (grinding lining Pad) 324, it is configured on liner component 324 by the lapping tape that roller supplies.Lapping tape T is supplied and is wound from supply roller 321 Roller 322 is wound.In order to assign moderate tension to lapping tape T, supply roller 321 is connect with torque motor (not shown).Take-up roll 322 connect with stepping motor (not shown), wind the lapping tape T supplied from supply roller 321.It can also be configured to grinding The stopping roller (stopper roller) of moderate tension is assigned with T, for lapping tape T to be properly configured at liner component 324 On help roll etc..According to the surface shape (for example, flat rectangle) of polishing pad 324, configure on polishing pad 324 Lapping tape T mark off the abradant surface 320 with specific length and width.
In order to form high-precision surface characteristic in being ground on part for workpiece W, preferably liner component 324 is fitted Work as selection.If elastic excessive (for example, Xiao A hardness is less than 20) of liner component 324, workpiece W be ground part (such as Edge) polished surface turned-down edge, be easy lose edge part linearity.In addition, the abrasive grain on the surface for being contained in lapping tape T Average grain diameter be 1 μm or less (#8000) in the case of, the liner components such as big foamed resin plate of elasticity can make grinding rate urgency Drastic change is slow and impracticable.In the case where elasticity is small (for example, Xiao A hardness is more than 90), the straight line of the edge part of polished surface Property is abundant, but is not easy fully to remove the scar and notch generated on workpiece by mechanical collision.
For example, as liner component 324, in order to mitigate mechanical collision, it can use Xiao A hardness in 20 to 50 ranges Foamed resin plate.Via flexible liner component 324, the abradant surface 320 formed by lapping tape T is abutted with workpiece, Thereby, it is possible to mitigate mechanical collision, it is ground and is also easy in the case where the shape of grinding unit changes servo-actuated.
Alternatively, as liner component 324, can also use foamed resin plate as described above and Xiao A hardness 80 The material that rubber slab in 90 ranges is composed.Even if as a result, using the average grain diameter of abrasive grain it is extremely fine (for example, 1 μm or less) lapping tape, grinding rate will not be made excessively slow, can be formed it is with high-precision surface characteristic (Ra, Rv), The excellent polished surface of the linearity of edge part.
Liner component 324 can also be that MC nylon etc. does not have the material of elasticity.Do not have elasticity in liner component 324 In the case of, in order not to generate mechanical collision, preferably carry out pushing control.
The surface of liner component 324 can be the curved surface of uneven convex.The reason is that grinding unit can be limited Point end (for example, both ends etc. of edge) and the contact of lapping tape T (abradant surface), so as to when protecting lapping tape T into Row grinding.
It is ground using the faces C of the peripheral part of lapping tape and flexible liner component progress workpiece W with flexibility, As a result, on polished surface (S1, Fig. 2), edge part (boundary portion of upper surface or lower surface and machined surface S1) is generally formed as The curved surface of section circular shape will not form new scar and notch in new edge part.
In milled processed, lapping tape T can be stationary state, can also continuously or intermittently move.In the short time In the case that interior grinding just terminates, lapping tape T can not be made mobile and used with stationary state, after grinding in order to which next time grinds And the surface of new lapping tape T is supplied as abradant surface to liner component.Thereby, it is possible to reduce cost.It is expended in grinding In the case of prolonged, in order to supply the surface of continual and steady abradant surface, the i.e. lapping tape comprising abrasive grain, preferably make lapping tape Continuously or intermittently move.Thereby, it is possible to improve grinding efficiency.
About for will be from the abradant surface 320 that the lapping tape T configured on liner component 324 is marked off to works such as glass plates The pushing force that the edge of part W or end face push, can be smaller in grinding initial stage according to the state of workpiece W, with the progress of grinding And gradually increase.For example, in the case of glass plate, there are acute angle portions on the corner and end face of cutting state, if from grinding Initial stage just applies strong pushing force, then exists due to acute angle portion and cause scar, lapping tape T broken the lapping tape T of abradant surface 320 The case where damage.By adjust pushing force, can side protection lapping tape Surface Edge be ground.
Work cell 350 has the horizontal workpiece holding station 351 for flatly keeping workpiece W.Before milled processed, Workpiece W preferably (passing through workpiece supply unit 20) is configured across grinding axis A in workpiece holding station 351.
Fig. 4 B illustrate the detent mechanism in the 1st grind section of the grinding device of the present invention.Lapping tape cell operation platform 301 It is moved along the directions A1 by motor 302 (Fig. 4 A) and LM guide portions 303,304 (Fig. 4 A), is placed on workpiece holding station 351 On at least part of an end face (or edge) of workpiece W abutted with abradant surface 320.By further to abradant surface 320 It pushes, an end face (edge) is whole to be abutted on grinding axis A with abradant surface 320.At this point, grinding axis A can be with rotation Axis A2 is consistent.
The workpiece W positioned in this way is fixed in workpiece holding station 351 and is ground, therefore, it is possible to carry out pair One end face (edge) of the workpiece of rectangle takes place without only end thereof contacts, uniform grinding.
Fig. 5 shows X-X ' the line side views after omitting a part of Fig. 4 A.To put it more simply, integrally illustrating rotation Arm 314 and extension arm 314 ', and grinding head 319 is illustrated with dotted line.Via fastening means 330, plate 317, hang plate 318 and protect The cursor 314 (314 ') of grinding head 319 is held can be rotated centered on pivot center A2 (being preferably placed on abradant surface 320) Mode be mounted on pillar 306 on.In the opposite side across grinding head 319, arm 315 is mounted on pillar 307 (Fig. 4 A).Rotation The shape of arm and fastening means is not particularly limited, can carry out suitably select with keep grinding head 319 and with grinding head 319 1 The component (plate, motor etc.) of body.
As described above, cursor 314 (314 ') is articulated in by being pivotally supported pin 316 on connecting member 313, in linking part The rear end of part 313 is fixed with 311 perforative axis 312,312 ' of connecting block, and connecting block 311 passes through LM guide portions 309 and uniaxial machine Tool hand 310 and can be moved in vertical direction along pillar 305.
As connecting block 311 is moved upward along pillar 305, with the axis 312,312 ' of the one of connecting member 313 to attached drawing Right direction draw, cursor 314 (314 ') around pivot center A2 rotate, be maintained at the grinding head 319 on cursor around rotation Axis A2 rotations, abradant surface 320 being capable of tilt alpha degree relative to vertical guide.The range of angle [alpha] is not limited to example illustrated, energy Enough arbitrarily determined according to the displacement distance of the vertical direction of connecting block 311 and the length of axis 312,312 ' etc..Preferred angle alpha Ranging from, relative to the vertical guide for including pivot center A2, -90 degree≤α≤90 degree.
Like this, the abradant surface 320 of grinding head 319 is relative to vertical guide inclination angle alpha, and thereby, it is possible to flatly protecting The edge (rib portion) for being held in the upper surface of the workpiece W (not shown) in work cell carries out the desired faces C grinding.
Similarly, by making connecting block 311 be moved downwards along pillar 305, abradant surface 320 can be flatly held in The edge (rib portion) of the lower surface of workpiece W (not shown) in work cell abuts and carries out the desired faces C grinding.
Fig. 6 shows the leaning device of the grinding tape cell 300 of the present invention.As described above, with the (figure of cursor 314,314 ' 4A, Fig. 5) one integrally holding plate 317 of fastening means 330,331.Hang plate 318 can be around by being pivotally supported pin 325 325 perforative axis A7 (Fig. 5) of pin will be pivotally supported to be rotatably mounted on plate 317.The lower surface of grinding head 319 and hang plate 318 flat upper end (Fig. 4 A) integrally links.Centered on being equipped with formation to be pivotally supported pin 325 (axis A7) on plate 317 Circle circular arc guiding groove 326a, 326b, 326c, 326d.Be provided integrally at setting tool 327a on hang plate 318, 327b, 327c, 327d are slided in guiding groove 326a, 326b, 326c, 326d respectively with the rotation of hang plate 318, can Hang plate 318 is fixed at an arbitrary position relative to plate 317.
When hang plate does not rotate, by the length axes A3 and grinding axis of the abradant surface 320 that the surface of lapping tape T is formed A (part that is ground of workpiece is contacted with abradant surface and to be ground the track relatively moved) is consistent.When hang plate 318 When rotation, the length axes A3 of abradant surface 320 is for example to length axes A3 ' cant angle thetas.Angle, θ ranges preferably from, and 0 degree of ＜ θ≤ 90 degree.
Fig. 7 illustrates the swing mechanism of workpiece holding station 351 in the work cell 350 of the present invention, keeping workpiece W.
There is workholding units 350 fixed plate 359, the fixed plate 359 to be flatly placed in the upper edge vertical in pedestal 2 The top of the pillar (not shown) of direction elongation, and there is LM guide rail 360a, the 360b parallel with grinding axis A in upper surface. In the lower section of fixed plate 359, equipped with the timing belt wheel 354a linkedly driven by motor 352 and timing belt 355, 354b, 354c and 353a, 353b, 353c, 353d.It, and can on LM guide rails 360a, 360b in the top of fixed plate 359 LM guide blocks 361a, 361b, 361c, 361d of swing are integrally flatly placed with workpiece holding station 351.Similarly, in fixation The top of plate 359 is integrally placed with balancer with LM guide blocks 362a, the 362b that can be swung on LM guide rails 360a, 360b (counterweight) 358b is integrally placed with balancer (counterweight) 358c with LM guide blocks 363a, 363b.
In the slot 357a for being set to the lower surface of workpiece holding station 351, inserted with from the upper surface of timing belt wheel 354a The bar 356a extended to vertical.In addition, in the slot 357b for being set to the lower surface of balancer 358b, inserted with from timing belt wheel The bar 356b extended to the upper surface vertical of 354b, in the slot 357c for being set to the lower surface of balancer 358c, inserted with from The bar 356c extended to the upper surface vertical of timing belt wheel 354c.
By the driving of motor 352, timing belt wheel 354a, 354b, 354c rotation, bar 356a, 356b, 356c are synchronously Rotation, workpiece holding station 351, balancer 358b, 358c are swung along grinding axis A respectively as a result,.
Here, workpiece holding station 351 is configured to fully inhibit flatly to keep by fixed mechanism (not shown) Workpiece W vibration.When workpiece holding station 351 is moved to the left direction of attached drawing, balancer 358b, 358c distinguish right direction It is mobile.When workpiece holding station 351 is moved to the right direction of attached drawing, balancer 358b, 358c difference left direction movement.By This, can eliminate vibration when workpiece holding station 351 is swung, thus allow for high-precision grinding.
In order to inhibit to vibrate, swing mechanism is configured to, and is disposed adjacently more (such as two) workpiece holding station 351, and it is made synchronously to be swung round about along grinding axis A.In this case, can be eliminated by more workpiece holding station Vibration, therefore do not need balancer.
According to power, the intensity of the flexibility of liner component, elasticity and glass plate for pushing abradant surface (lapping tape T), i.e., Make to be ground body (glass plate) relative to abrasive body (abradant surface) movement to be ground, being ground body will not grind Occur in mill damaged.Relative movement of the part with abradant surface (surface of lapping tape) is ground to inhibit to vibrate when due to grinding And carried out along the mode of grinding axis, so it is special to assign high-precision surface to surface to be polished (polished surface S1 etc., Fig. 2) Property is to improve the intensity of glass plate.
Fig. 8 illustrates the detent mechanism of the other modes of the grinding device of the present invention.The workpiece holding station of work cell 350 351 ' have slot 334 in upper surface, and the bar 333 that can be moved along the directions drive shaft A1 ' of motor 332 is located in the slot.
As shown in (A) of Fig. 8, in the case where workpiece W is placed not across grinding axis A, driven by motor 332 Dynamic bar 333 releases workpiece W along the directions A1 towards grinding axis A.The quilt of the abradant surface and workpiece W of grinding tape cell as a result, Means of abrasion can reliably abut on grinding axis A.
Fig. 9 illustrates the 2nd grind section 40 of the grinding device 1 (Fig. 3) of the present invention.2nd grind section 40 includes lapping tape list Member 300 ' and work cell 400 and constitutes, wherein the work cell 400 across grinding axis A with grinding tape cell 300 ' relatively Ground configures, and with the workpiece holding station 401 for configuring workpiece W.Grinding tape cell 300 ' preferably has and grinding tape cell 300 identical structures.Grinding axis A can be consistent with the 1st grind section.Differ with the 1st grinding axis A alternatively, it is also possible to have The horizontal grinding axis A ' of cause.
Figure 10 A, Figure 10 B illustrate work cell 400.In Figure 10 A, workpiece W and workpiece holding station is represented by dashed line 401。
Work cell 400 has：Fixed plate 403 is flatly positioned in elongation above from horizontal pedestal 2 to vertical On pillar 402, pillar 402 '；With fixed plate 405, flatly it is positioned in from the upper table of fixed plate 403 above towards vertical On the pillar 404 of elongation.
X-direction movable stage 413 is installed on fixed plate 405, servomotor 414 and single shaft can be passed through Mobile unit 408 moves back and forth in X direction.Integrally installed with X-direction movable plate on X-direction movable stage 413 406.The axis A4 being made of shaft member is extended from the upper surface vertical of X-direction movable plate 406, enables workpiece holding station 401 Rotatably flatly support the workpiece holding station 401.
In addition, the Y-direction movable stage 407 with hole 429 is installed on fixed plate 405, it can be by straight Line guide portion 409 is moved back and forth along Y-direction.In the Y direction on movable stage 407 integrally provided with Y-direction movable plate 410, In the Y direction integrally installed with the guide member 411 with guiding groove 412 on movable plate 410.By from workpiece holding station 401 Lower surface vertical the axis A5 that constitutes of the bar (or pin) that extends can be slidably disposed in the guiding groove 412 formed in X direction.
Between plate 403 and plate 405, equipped with the timing belt wheel linkedly driven by motor 420 and timing belt 423 422,424, between timing belt wheel 422 and Y-direction movable stage 407, equipped with can synchronously be rotated with timing belt wheel 422 Rotary part 425.From the upper table of rotary part 425 movable stage in the Y direction is inserted into towards the bar 427 extended above vertical In 407 hole 429.
By the driving of motor 420, when timing belt wheel 422 is rotated via timing belt 423, rotary part 425 with Belt wheel 422 synchronously rotates.When rotary part 425 rotates, the rotation of integrated bar 427 can start building being set to Y-direction on one side Make to move in the hole 429 on platform 407, movable stage 407 is made to be moved back and forth with fixed journey system along Y-direction on one side.With Y-direction The reciprocating movement of movable stage 407, integrated plate 410 and guide member 411 are moved back and forth along Y-direction, in guiding groove 412 Vertical axis A 5 is moved to Y-direction.With movement from vertical axis A 5 to Y-direction accordingly, the position y of the Y-direction of vertical axis A 5 via Sequence controller is transferred to servomotor 414, and by servomotor 414, vertical axis A 4 is synchronously to the non-rectilinear of workpiece W It is ground part (corner with regulation curvature) and is located on grinding axis A, the X-direction of vertical axis A 4 position x movements.It is logical The movement to X-direction of vertical axis A 4 is crossed, rotatably level can be maintained at the workpiece holding station 401 in the vertical axis A 4 to X Direction is moved, and is slided in slot 412 with the vertical axis A 5 of 401 one of workpiece holding station and is moved to X-direction.The fortune of vertical axis A 5 Dynamic is the movement combination of X-direction and Y-direction, becomes the movement rotated around vertical axis A 4.For example, it may be vertical axis A 5 with It is moved centered on the center C of oscillating stroke, on the elliptical circumference that major diameter is 2d.
Like this, vertical axis A 4 is moved to X-direction, and vertical axis A 5 is moved to x-direction and y-direction, as a result, workpiece holding station 401 side yaw moving edges grinding axis A are swung, and the non-rectilinears such as the corner of the workpiece of rectangle can be made to be ground part side and grind Flour milling abuts side and is ground successively.
Position control is carried out by using servomotor, the non-rectilinear that can easily control on grinding axis A is ground The yaw of part, the stroke of swing are ground, the faces the R grinding of desired curvature is thus allowed for.Due to can be according to workpiece Being ground the shape of part makes workpiece swing and be ground, so need not be made according to the shape for being ground part of workpiece Abrasive material (grinding wheel etc.).
Replace above structure, X-axis can also be carried out by servomotor and 2 axis of Y-axis control.Alternatively, can also take Control of the generation based on servomotor, the position of two above-mentioned vertical axis is controlled by cam control.In this case, can Replace servomotor, using for making vertical axis A 4 be moved to X-direction timing belt wheel and with the Y-direction of vertical axis A 5 Mobile synchronous cam carrys out constituent apparatus.
The abradant surface 320 ' of tape cell 300 ' is ground relative to vertical guide tilt alpha degree, can also carry out workpiece W's as a result, The grinding in the rib portion of the upper surface (or lower surface) in corner.
The grinding device of the present invention is preferably included for the control device (not shown) of control each unit.
The grinding device of the present invention can carry out dry grinding and wet lapping.In order to carry out wet lapping, preferably have For supplying water or the water feeder of the aqueous solution added with surfactant and water pipe (not shown).By to abradant surface or work Part supplies water etc., grinding efficiency can be improved, in addition, lapping rejects can be rinsed.Grinding device can also have for spraying sky The air nozzle of gas.This is because water or lapping rejects can be prevented to be attached in work cell etc..In addition, in order to prevent by metal The burn for the workpiece that material is constituted preferably has the feeder and oil filling pipe (not shown) of supply processing oil.
The grinding device of the present invention can include to be ground the 1st grinding that part is ground to the straight line of above-mentioned workpiece Portion and the 2nd grind section that is ground of part is ground to the non-rectilinear of workpiece and is constituted.Thereby, it is possible to be filled by a grinding It sets and the peripheral part of glass plate is integrally ground.In addition, being ground due to the use of lapping tape, so can be in polished surface It is upper to form high-precision surface characteristic, so as to improve the quality of grinding charge.Since grinding belt grinding can be used various The workpiece of shape, so cost can be reduced, the lapping rejects that when grinding generates is few, is also easy to carry out the maintenance of device.
In addition, the grinding device of the present invention can be made of either one of above-mentioned the 1st grind section and the 2nd grind section.
Embodiment 1
The edge (rib portion) of workpiece is ground using the grinding device of the present invention.As workpiece, length is used The rectangular soda-lime glass of 70mm, width 40mm, thickness 0.8mm.It is ground on 8 sides of the upper surface and the lower surface of the glass plate It grinds and is formed as polished surface (S1 etc., Fig. 2).In grinding, the length axes of the abradant surface of tape cell are ground relative to grinding Axis tilts 10 degree (θ=10 °).In addition, abradant surface tilts 45 degree (α=45 °) relative to vertical guide.Like this, glass plate One edge and abradant surface abut, and axis oscillating is ground on work cell edge and glass plate and abradant surface relatively move, and is thus carried out Grinding.The amount of grinding of the faces C grinding is 50 μm, and in order to realize fixed amount of grinding, the abrasive grain according to the surface for being contained in lapping tape is straight Diameter adjusts the reciprocal time (1 reciprocal=1 passage) of glass plate.Abradant surface is parallel with grinding axis, and lapping tape does not move.In addition, It is ground while supplying a small amount of waterside to abradant surface.
Other grinding conditions of embodiment 1 are as follows.
Grinding condition (1 side)
The stroke length (L) of the reciprocating motion of glass plate：150mm
The width of lapping tape：30mm
The pushing force (thrust) of lapping tape：15N
As lapping tape, GC (green silicon carbide) #4000 (SiC are used：3 μm of average grain diameter), as liner component, make It is padded with the Foamex of Xiao A hardness 30.The reciprocal time of glass plate is 21 passages.
Embodiment 2
In the manufacturing method of embodiment 2, as lapping tape, use GC#6000 (2 μm of average grain diameter).Glass plate Reciprocal time be 24 passages.Other conditions are same as Example 1.
Embodiment 3
In the manufacturing method of embodiment 3, as lapping tape, use GC#10000 (0.5 μm of average grain diameter).As Liner component uses the rubber slab of Xiao A hardness 80 and the foamed resin plate of Xiao A hardness 30.The reciprocal time of glass plate is 31 passages.Other conditions are same as Example 1.
Comparative example 1
In the manufacturing method of comparative example 1, as lapping tape, use GC#1000 (16 μm of average grain diameter).Glass plate Reciprocal time be 7 passages.Other conditions are same as Example 1.
Comparative example 2
In the manufacturing method of comparative example 2, as lapping tape, use GC#2000 (9 μm of average grain diameter).Glass plate Reciprocal time be 11 passages.Other conditions are same as Example 1.
Comparative example 3
In the manufacturing method of comparative example 3, as lapping tape, use GC#3000 (5 μm of average grain diameter).Glass plate Reciprocal time be 17 passages.Other conditions are same as Example 1.
Comparative example 4
In the manufacturing method of comparative example 4, using by diamond abrasive grain (14~22 μ of average grain diameter of screen size #1000 M) grinding wheel 500 made of metal bonds.As shown in figure 11, the main surface (the upper surface and the lower surface) of grinding wheel and glass plate is configured Rib portion carries out the chamfer grinding in rib portion by making grinding wheel rotation.
The average surface roughness of the embodiment, comparative example that carry out smooth grinding as described above is shown in the following table 1 The maximum valley depth Rv of Ra and roughness curve.Pass through surface roughness meter (name of product NewView5000：Zygo corporations) it surveys Allocate equal surface roughness Ra and maximum valley depth Rv.
Table 1
According to the manufacturing method of embodiment 1 to 3, capable of obtaining grinding unit point, to be formed as high-precision polished surface (flat Equal surface roughness Ra：1.7nm~11.5nm, maximum valley depth Rv：32nm~162nm) glass plate.Reciprocal passage number is 20 It is secondary to 30 times or so, grinding rate is also abundant.The maximum of the polished surface of the glass plate obtained by comparing the manufacturing method of example Gu Shen is mostly more than 1000nm.
Figure 12 show embodiment, comparative example polished surface enlarged photograph.Left side is based on digital microscope (product Title VHX500：KEYENCE corporations) optical photograph, right side be based on surface roughness meter (name of product NewView5000：Zygo corporations) optical photograph.(A) it is the polished surface of comparative example 1, (B) is the finishing of comparative example 2 Face, (C) are the polished surface of embodiment 1, and (D) is the polished surface of embodiment 3.
(A), the concave-convex surface of (B) of comparative example are more, and the surface characteristic as polished surface is insufficient.Embodiment (C), (D) becomes the high-precision polished surface without concave-convex and scar, and the linearity of edge part is also excellent.Due to the use of grinding Band, so polished surface has curved surface.
Figure 13 is the enlarged photograph of the polished surface of the glass plate obtained by comparing the manufacturing method of example 4.Have on surface There is grinding marks (grinding wheel trace), observes more scar.Due to being ground by grinding wheel, so polished surface will not be formed For curved surface.
The edge strength (MPa) of each glass plate of embodiment, comparative example is determined.Edge strength refers to glass The intensity of end edge portion.Based on room temperature bending strength test method (JISR1601), marketed 4 Apparatus for Bending at low-temp pair are used Edge strength is determined.The method that Figure 14 schematically illustrates edge strength experiment (4 points of bendings).At load tool interval 30mm is divided between 10mm, support tool, load rate is tested under conditions of being 5mm/min.
Edge strength obtained from testing each 10 pieces of glass plates of embodiment, comparative example has been recorded in table 1 Average value.Grinding device through the invention grinds end edge portion about using in lapping tape of the surface comprising fine abrasive grain And the glass plate of polished surface is formed, the average surface roughness Ra and maximum valley depth Rv of machined surface can be greatly reduced Value, as a result, compared with the previous processing carried out by grinding wheel, edge strength improves 3 times or more.Like this, due to The edge strength of the glass plate of the present invention significantly improves, so in the manufacturing process using the product of the glass plate, Neng Goufang Only there is a situation where glass plates, and breakage is generated due to mechanical stress or thermal shock.In addition, glass plate is after being assembled into product It is difficult to breakage, the reliability of product can be improved.
Embodiment 4
The corner of glass plate is ground using the grinding device of the present invention.The glass plate using first passing through grinding wheel in advance And the glass plate of R shape processings (rough lapping) as defined in implementing.Use lapping tape same as Example 1.Pressure is 1N, past Again number is 5 passages.
Embodiment 5
The corner of no (cutting state) glass plate for implementing rough lapping is ground.About lapping tape, with D#600 After (30 μm) implement R shape processings (rough lapping), lapping tape same as Example 1 is used.
In embodiment 4,5, high-precision polished surface (average surface roughness Ra can be also obtained：About 1.5nm~ 12nm, maximum valley depth Rv：About 30nm~165nm).
For those skilled in the art, various repair can be carried out in the case where not departing from the thought and mode of the present invention Just.Therefore, unquestionably, mode of the invention is only to illustrate, and is not delimit the scope of the invention.

Claims (18)

1. a kind of grinding device, for being ground to the peripheral part of workpiece using lapping tape, which is characterized in that including：
1st grind section is ground part to the straight line of the peripheral part of the workpiece and is ground, and ground with the horizontal the 1st Grind axis；With
2nd grind section is ground part to the non-rectilinear of the peripheral part of the workpiece and is ground, and has the horizontal the 2nd Axis is ground,
1st grind section includes：The 1st work cell for keeping the workpiece, the 1st work cell includes for keeping 1st workpiece holding station of the workpiece and for make the 1st workpiece holding station along it is described 1st grinding axis oscillating swing Mechanism；It is opposite with the 1st work cell and at least one for configuring the 1st lapping tape with axis is ground across the described 1st Divide the 1st grinding tape cell on surface,
2nd grind section includes：The 2nd work cell for keeping the workpiece；Axis and institute are ground with across the described 2nd The 2nd grinding tape cell at least part surface for stating the 2nd work cell relatively and for configuring the 2nd lapping tape,
In the 1st grind section, the surface of the 1st lapping tape of the configuration marks off the 1st abradant surface, and the straight line is ground Part and the 1st abradant surface contiguously relatively move on the 1st grinding axis, are thus ground,
In the 2nd grind section, the surface of the 2nd lapping tape of the configuration marks off the 2nd abradant surface, and the non-rectilinear is ground Mill part and the 2nd abradant surface contiguously relatively move on the 2nd grinding axis, are thus ground.
2. grinding device as described in claim 1, which is characterized in that
The workpiece is made of glass plate,
In the 1st grind section, the straight line is ground part and the 1st abradant surface relative movement, so that the glass The straight line of the peripheral part of glass plate is ground part and is formed as, and average surface roughness Ra is 200nm or less and maximum valley depth Rv is 20nm hereinafter,
In the 2nd grind section, the non-rectilinear is ground part and the 2nd abradant surface relative movement, so that described The non-rectilinear of the peripheral part of glass plate is ground part and is formed as, and average surface roughness Ra is 20nm or less and maximum valley depth Rv is 200nm or less.
3. grinding device as claimed in claim 1 or 2, which is characterized in that
2nd work cell has on horizontal pedestal：
X-direction movable stage, with can in the horizontal direction and along with the vertical direction, that is, X-direction of the 2nd grinding axis Mobile mode is arranged；
Y-direction movable stage, for by can be in a manner of moved with the parallel direction, that is, Y-direction of the 2nd grinding axis The Y-direction movable stage of setting, and it is provided integrally with the groove portion extended in X direction；With
2nd workpiece holding station, by can by the 1st vertical axis being provided integrally on the X-direction movable stage Rotatably horizontal supporting,
The 2nd workpiece holding station have the 2nd vertical axis, the 2nd vertical axis be from the surface of the 2nd workpiece holding station vertically 2nd vertical axis of elongation, and can be slidably disposed in the groove portion of the Y-direction movable stage,
The workpiece is maintained in the 2nd workpiece holding station,
The non-rectilinear grinding unit is by the movement of the 1st vertical axis and the 2nd vertical axis, when carrying out yaw movement Along the 2nd grinding axis oscillating.
4. grinding device as claimed in claim 1 or 2, which is characterized in that
The 1st grinding tape cell has for making the 1st abradant surface hang down in the horizontal direction and along with the 1st grinding axis 1st lapping tape mobile mechanism of straight direction movement, as a result, the straight line be ground part and the 1st abradant surface can be It is abutted on the 1st grinding axis,
The 2nd grinding tape cell has for making the 2nd abradant surface hang down in the horizontal direction and along with the 2nd grinding axis 2nd lapping tape mobile mechanism of straight direction movement, as a result, the non-rectilinear be ground at least part and described the of part 2 abradant surfaces can abut on the 2nd grinding axis.
5. grinding device as claimed in claim 1 or 2, which is characterized in that
The 1st grinding tape cell includes for making the length axes of the 1st abradant surface incline relative to the 1st grinding axis The 1st oblique leaning device,
The 2nd grinding tape cell includes for making the length axes of the 2nd abradant surface incline relative to the 2nd grinding axis The 2nd oblique leaning device.
6. grinding device as claimed in claim 1 or 2, which is characterized in that
It is described 1st grinding tape cell include for make the 1st abradant surface by it is described 1st grinding axis centered on rotate the 1st Rotating mechanism,
It is described 2nd grinding tape cell include for make the 2nd abradant surface by it is described 2nd grinding axis centered on rotate the 2nd Rotating mechanism.
7. grinding device as claimed in claim 1 or 2, which is characterized in that
1st work cell includes for making the workpiece in the horizontal direction and along the side vertical with the 1st grinding axis To mobile workpiece mobile mechanism.
8. grinding device as claimed in claim 1 or 2, which is characterized in that
1st work cell includes for pushing and fix the workpiece and/or adsorb and fix the 1st of the workpiece the Workpiece fixed mechanism,
2nd work cell includes for pushing and fix the workpiece and/or adsorb and fix the 2nd of the workpiece the Workpiece fixed mechanism.
9. grinding device as claimed in claim 1 or 2, which is characterized in that
The 1st grinding tape cell includes the 1st lapping tape mobile mechanism for making the 1st lapping tape movement,
The 2nd grinding tape cell includes the 2nd lapping tape mobile mechanism for making the 2nd lapping tape movement.
10. a kind of grinding device is ground for being ground part to the straight line of the peripheral part of workpiece using lapping tape, and has There is horizontal grinding axis, which is characterized in that including：
Work cell for keeping the workpiece, the work cell include workpiece holding station for keeping the workpiece and For making the workpiece holding station along the swing mechanism of the grinding axis oscillating；With
The grinding at least part surface opposite with the work cell and for configuring lapping tape across the grinding axis Tape cell,
The surface of the lapping tape of the configuration marks off abradant surface, and the straight line is ground part and the abradant surface contiguously exists It relatively moves on the grinding axis, is thus ground.
11. grinding device as claimed in claim 10, which is characterized in that
The workpiece is made of glass plate,
The straight line is ground part and abradant surface relative movement, so that the straight line of the peripheral part of the glass plate is ground Mill part is formed as, and average surface roughness Ra is 20nm or less and maximum valley depth Rv is 200nm or less.
12. the grinding device as described in claim 10 or 11, which is characterized in that
The grinding tape cell includes：
Lapping tape mobile mechanism, for for making the abradant surface in the horizontal direction and along the direction vertical with the grinding axis Mobile lapping tape mobile mechanism, the straight line is ground part as a result, and the abradant surface can be on the grinding axis It abuts；
Leaning device is used to make the length axes of the abradant surface to be tilted relative to the grinding axis；With
Rotating mechanism is used to make the abradant surface to be rotated centered on the grinding axis.
13. the grinding device as described in claim 10 or 11, which is characterized in that
The work cell includes for making the workpiece be moved in the horizontal direction and along the direction vertical with the grinding axis Workpiece mobile mechanism.
14. a kind of grinding device is ground for being ground part to the non-rectilinear of the peripheral part of workpiece using lapping tape, and With horizontal grinding axis, which is characterized in that including：
Work cell for keeping the workpiece；With
The grinding at least part surface opposite with the work cell and for configuring lapping tape across the grinding axis Tape cell,
The surface of the lapping tape of the configuration marks off abradant surface, and the non-rectilinear is ground part and the abradant surface contiguously It relatively moves on the grinding axis, is thus ground,
The work cell has on horizontal pedestal：
X-direction movable stage, that can move in the horizontal direction and along the direction, that is, X-direction vertical with the grinding axis Mode be arranged；
Y-direction movable stage, to be arranged in a manner of it can be moved along the direction, that is, Y-direction parallel with the grinding axis Y-direction movable stage, and be provided integrally with the groove portion extended in X direction；With
Workpiece holding station can be rotated by the 1st vertical axis being provided integrally on the X-direction movable stage Ground horizontal supporting,
The workpiece holding station has the 2nd vertical axis, and the 2nd vertical axis is vertically extended from the surface of the workpiece holding station 2nd vertical axis, and can be slidably disposed in the groove portion of the Y-direction movable stage,
The workpiece is maintained in the workpiece holding station,
The non-rectilinear grinding unit is by the movement of the 1st vertical axis and the 2nd vertical axis, when carrying out yaw movement Along the grinding axis oscillating.
15. grinding device as claimed in claim 14, which is characterized in that
The workpiece is made of glass plate,
The non-rectilinear is ground part and abradant surface relative movement, so that the non-rectilinear of the peripheral part of the glass plate It is ground part to be formed as, average surface roughness Ra is 20nm or less and maximum valley depth Rv is 200nm or less.
16. a kind of grinding method, using grinding device according to any one of claims 10, in order to improve the workpiece being made of glass plate Intensity and the peripheral part of the workpiece is ground,
The grinding method includes following grinding process：Part is ground to the straight line of the peripheral part of the workpiece using lapping tape It is ground, so that the part that is ground is formed as, average surface roughness Ra is 20nm or less and maximum valley depth Rv is 200nm hereinafter,
The lapping tape is being made up of resinoid bond fixed abrasive grain on base material film,
The grain size of the abrasive grain is in 0.2 μm or more, 3 μm of ranges below.
17. a kind of grinding method, using the grinding device described in claim 14, in order to improve the workpiece being made of glass plate Intensity and the peripheral part of the workpiece is ground,
The grinding method includes following grinding process：Using lapping tape to the non-rectilinear grinding unit of the peripheral part of the workpiece Divide and be ground, so that the part that is ground is formed as, average surface roughness Ra is 20nm or less and maximum valley depth Rv is 200nm hereinafter,
The lapping tape is made of base material and the abrasive grain fixed on the substrate by resinoid bond,
The grain size of the abrasive grain is in 0.2 μm or more, 3 μm of ranges below.
18. at least part of a kind of glass plate, peripheral part is ground by the grinding method of claim 16 or 17.
CN201310245364.1A 2012-11-27 2013-06-17 By the grinding device and method that grind the peripheral part of the workpiece such as belt grinding glass plate Active CN103831705B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012258219A JP6190108B2 (en) 2012-11-27 2012-11-27 Polishing apparatus and polishing method for polishing peripheral edge of workpiece such as plate glass with polishing tape
JP2012-258219 2012-11-27

Publications (2)

Publication Number Publication Date
CN103831705A CN103831705A (en) 2014-06-04
CN103831705B true CN103831705B (en) 2018-07-17

Family

ID=50795768

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310245364.1A Active CN103831705B (en) 2012-11-27 2013-06-17 By the grinding device and method that grind the peripheral part of the workpiece such as belt grinding glass plate

Country Status (4)

Country Link
JP (1) JP6190108B2 (en)
KR (1) KR102059203B1 (en)
CN (1) CN103831705B (en)
TW (1) TWI603810B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106041685B (en) * 2016-05-13 2018-10-02 宁波方太厨具有限公司 One kind being sized fillet grinding device
KR102607582B1 (en) * 2016-08-30 2023-11-30 삼성디스플레이 주식회사 Cover window, display device including a cover window, and method of manufacturing a cover window
CN108857694A (en) * 2018-07-20 2018-11-23 皖西学院 A kind of photovoltaic panel grinding apparatus based on photovoltaic power generation apparatus manufacture
CN111745504B (en) * 2020-05-20 2022-06-21 深圳市裕展精密科技有限公司 Polishing mechanism, polishing device and polishing method
WO2022137894A1 (en) * 2020-12-22 2022-06-30 日本電気硝子株式会社 Plate glass processing device and plate glass manufacturing method
CN113001345B (en) * 2021-02-26 2022-05-06 浙江大学山东工业技术研究院 Panel processing is with automatic equipment of polishing
CN113319678B (en) * 2021-05-25 2023-05-23 江西华冠钢结构有限公司 Metal sheet cutting grinding device based on two-sided synchronous polishing
CN117862986B (en) * 2024-03-06 2024-05-10 长沙韶光芯材科技有限公司 Glass substrate grinding device and grinding method

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5199220A (en) * 1992-06-19 1993-04-06 Emerson Electric Co. Combination belt and disc sander
JPH1199458A (en) * 1997-09-29 1999-04-13 Sanshin:Kk Plate-like member corner edge chamfering device
JP3470057B2 (en) * 1999-02-10 2003-11-25 株式会社白井▲鉄▼工所 Plate glass polishing equipment
JP2001085710A (en) * 1999-09-17 2001-03-30 Kanegafuchi Chem Ind Co Ltd Thin-film solar battery module and manufacturing method thereof
JP2002059346A (en) * 2000-08-22 2002-02-26 Nippon Electric Glass Co Ltd Method and device for chamfering plate-like work
JP4588863B2 (en) * 2000-11-21 2010-12-01 旭硝子株式会社 Edge glass edge polishing method
JP2003231046A (en) * 2002-02-07 2003-08-19 Nec Kagoshima Ltd Method and device for polishing end surface of plasma display panel
TW529519U (en) * 2002-06-13 2003-04-21 Ruei-Sen Liau Apparatus for ascending and descending vertical shaft of multi-functional carpentry grinding machine
JP2004017226A (en) * 2002-06-18 2004-01-22 Dainippon Printing Co Ltd Polishing sheet
JP3727300B2 (en) * 2002-11-20 2005-12-14 カワサキプラントシステムズ株式会社 Chamfering device for plate material
JP4125148B2 (en) * 2003-02-03 2008-07-30 株式会社荏原製作所 Substrate processing equipment
JP2008264914A (en) * 2007-04-19 2008-11-06 Nihon Micro Coating Co Ltd Abrasive tape, polishing method using this abrasive tape, and polishing device
DE102007022581A1 (en) * 2007-05-11 2008-11-20 Heesemann, Jürgen, Dipl.-Ing. Abrasive aggregate as a tool for a processing device
KR101168712B1 (en) * 2009-02-13 2012-09-13 호야 가부시키가이샤 Substrate for mask blank use, mask blank, and photo mask
JP5372670B2 (en) * 2009-09-03 2013-12-18 川崎重工業株式会社 Method and apparatus for chamfering plate material
JP5286329B2 (en) * 2010-06-18 2013-09-11 株式会社サンシン Method and apparatus for chamfering silicon block or quadrangular columnar member
JP5886602B2 (en) * 2011-03-25 2016-03-16 株式会社荏原製作所 Polishing apparatus and polishing method
JP5874393B2 (en) * 2011-12-28 2016-03-02 日本電気硝子株式会社 Glass plate processing apparatus and processing method thereof

Also Published As

Publication number Publication date
JP6190108B2 (en) 2017-08-30
TW201420267A (en) 2014-06-01
TWI603810B (en) 2017-11-01
KR102059203B1 (en) 2019-12-24
CN103831705A (en) 2014-06-04
JP2014104526A (en) 2014-06-09
KR20140067886A (en) 2014-06-05

Similar Documents

Publication Publication Date Title
CN103831705B (en) By the grinding device and method that grind the peripheral part of the workpiece such as belt grinding glass plate
CN103084957B (en) Glass plate and manufacture method, the Ginding process of glass plate end edge portion and device
US8540551B2 (en) Glass edge finish system, belt assembly, and method for using same
TWI480127B (en) Glass substrate and its production method
JP4588863B2 (en) Edge glass edge polishing method
JP2014144525A (en) Polishing method
KR20110105322A (en) Complex processing device for chamfering of ingot block
JP2010076013A (en) Polishing method of rotary grindstone and polishing apparatus, grinding grindstone and grinding apparatus using the grindstone
CN110900312A (en) Precise brush grinding and polishing process
JP7128309B2 (en) Chamfered substrate manufacturing method and chamfering apparatus used therefor
JP6608604B2 (en) Chamfered substrate and method for manufacturing liquid crystal display device
KR101830617B1 (en) Substrate polishing apparatus and method of using the same
CN204868425U (en) Manufacturing installation of glass board
JP4746788B2 (en) Super-abrasive wheel for surface honing, dressing method thereof, and grinding apparatus using the wheel
JP2013035079A (en) Method for cylindrical grinding of four round corner faces of square pole-like ingot
JP2010250893A (en) Manufacturing method of magnetic disk glass substrate, and surface correction method of bonded abrasive tool
JP5690540B2 (en) Manufacturing method of glass substrate for information recording medium
JP6493740B2 (en) Polishing tool for loose abrasive machining, method for producing the same, and loose abrasive polishing apparatus
CN220902806U (en) Grinding and polishing quick up-down piece's planetary wheel structure
KR20010040249A (en) Polishing apparatus and method for producing semiconductors using the apparatus
CN210115769U (en) Chamfer grinding device
KR101540572B1 (en) Spindle unit apparatus including wheel for chuck grinding
JP2005125420A (en) Dressing method for grinding tool of continuous grinder
JP2009142908A (en) Glass ribbon grinding method
KR20000023288A (en) A polishing method of glass

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant