JP2000517072A - 測定システムを備えた光学スコープ - Google Patents
測定システムを備えた光学スコープInfo
- Publication number
- JP2000517072A JP2000517072A JP11505366A JP50536699A JP2000517072A JP 2000517072 A JP2000517072 A JP 2000517072A JP 11505366 A JP11505366 A JP 11505366A JP 50536699 A JP50536699 A JP 50536699A JP 2000517072 A JP2000517072 A JP 2000517072A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- scope
- reference point
- laser beam
- optical scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
- G02B23/2407—Optical details
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/00163—Optical arrangements
- A61B1/00174—Optical arrangements characterised by the viewing angles
- A61B1/00183—Optical arrangements characterised by the viewing angles for variable viewing angles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/04—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances
- A61B1/05—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances characterised by the image sensor, e.g. camera, being in the distal end portion
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/103—Detecting, measuring or recording devices for testing the shape, pattern, colour, size or movement of the body or parts thereof, for diagnostic purposes
- A61B5/107—Measuring physical dimensions, e.g. size of the entire body or parts thereof
- A61B5/1076—Measuring physical dimensions, e.g. size of the entire body or parts thereof for measuring dimensions inside body cavities, e.g. using catheters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
- A61B18/18—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves
- A61B18/20—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves using laser
- A61B18/22—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by applying electromagnetic radiation, e.g. microwaves using laser the beam being directed along or through a flexible conduit, e.g. an optical fibre; Couplings or hand-pieces therefor
- A61B2018/2255—Optical elements at the distal end of probe tips
- A61B2018/2272—Optical elements at the distal end of probe tips with reflective or refractive surfaces for deflecting the beam
- A61B2018/2283—Optical elements at the distal end of probe tips with reflective or refractive surfaces for deflecting the beam with pivotable mirrors
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Surgery (AREA)
- Medical Informatics (AREA)
- Animal Behavior & Ethology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Optics & Photonics (AREA)
- Molecular Biology (AREA)
- Veterinary Medicine (AREA)
- Biophysics (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Dentistry (AREA)
- Astronomy & Astrophysics (AREA)
- Oral & Maxillofacial Surgery (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1. アクセス不可能な位置にある特徴を見る光学スコープにして、 使用時にはアクセス不可能な位置に挿入できる遠位端及びハウジングに接続さ れた近位端を有する管と、 特徴の像を収集して像を観察手段に中継する光学システムと、 レーザ・ビームを管の遠位端にある第1基準点に向ける手段と、 第1基準点回りに回転可であり、ビームをスコープから出して標的特徴へと向 けるようレーザ・ビームの方向を変化させるため操作できる、管の遠位端に装着 された第1反射鏡と、 第2基準点回りに回転可であり、標的特徴で軸がレーザ・ビームと交差するよ う第2基準点と交差する基準軸の方向を変化させるため操作できる、管の遠位端 に装着された第2反射鏡と、 スコープの近位端で起動し、第1及び第2基準点を中心に第1及び第2反射鏡 を回転させることができる制御手段と、 第1及び第2反射鏡の動作を検出する位置感知手段と、 制御手段に付随するバックラッシ防止手段とを備える光学スコープ。 2. 各反射鏡の制御手段が、反射鏡と、ハウジングに装着された回転式制御 カラーとの間に延在する機械的リンク装置を備える請求項1に記載の光学スコー プ。 3. 機械的リンク装置が引張りワイヤを備える請求項2に記載の光学スコー プ。 4. バックラッシ防止手段が、各反射鏡を制御手段と反対に偏倚するばね手 段を備える請求項1から3のいずれか1項に記載の光学スコープ。 5. バックラッシ防止手段がさらに、引張りワイヤの近位端を固定する摩擦 制動ホイールを備える請求項4に記載の光学スコープ。 6. バックラッシ防止手段がさらに、引張りワイヤの近位端を固定する再循 環ボールねじ装置を備える請求項4に記載の光学スコープ。 7. バックラッシ防止手段がさらに、 ハウジング内に配置されて軸方向に動くよう制限され、引張りワイヤの近位端 を固定する第1シリンダと、 第1シリンダの近位側に配置され、同様に軸方向に動くよう制限された第2シ リンダと、 第1及び第2シリンダを互いに向かって押しつけるばね手段と、 第1及び第2シリンダと連結されて、回転するとシリンダを軸方向に動かす回 転式起動カラーと、 カラーをハウジングの固定部品に軸方向に押しつけるばね手段とを備える請求 項4に記載の光学スコープ。 8. 引張りワイヤが軸がばねによって近位方向に偏倚されたホイールの回り に巻かれて2つの引張りワイヤ腕を設け、第1腕は旋回点の一方側で反射鏡に取 り付けられ、第2腕は旋回点の他方側で反射鏡に取り付けられ、第1及び第2位 置感知手段がそれぞれ第1及び第2腕を伴う請求項3に記載の光学スコープ。 9. 第2レーザ・ビームを第2基準点に向け、それによって基準軸が第2レ ーザ・ビームで規定される手段をさらに有する請求項1から8のいずれか1項に 記載の光学スコープ。 10. スコープが第2基準点と交差する視軸を有し、それによって基準軸が 視軸で規定される請求項1から9のいずれか1項に記載の光学スコープ。 11. 計数線が画像転送システムに装着され、これによって特徴の像が計数 線の中心と整列すると、視軸が特徴と交差するよう配置される請求項10に記載 の光学スコープ。 12. 第1レーザ・ビームを第1基準点に向ける手段が、少なくとも1本の 光ファイバを備える請求項1から11のいずれか1項に記載の光学スコープ。 13. 第1レーザ・ビームを第1基準点に向ける手段がさらに、ビームの進 路に装着された少なくとも1つの反射鏡を備える請求項12に記載の光学スコー プ。 14. 第2レーザ・ビームを第2基準点に向ける手段が、少なくとも1本の 光ファイバを備える請求項1から9のいずれか1項に記載の光学スコープ。 15. 第2レーザ・ビームを第2基準点に向ける手段がさらに、ビームの進 路に装着された少なくとも1つの反射鏡を備える請求項14に記載の光学スコー プ。 16. 位置感知手段がハウジング内に配置される請求項1から15のいずれ か1項に記載の光学スコープ。 17. 位置感知手段が線形電圧変位変換器を備える請求項1から16のいず れか1項に記載の光学スコープ。 18. 位置感知手段が干渉縞装置を備える請求項1から16のいずれか1項 に記載の光学スコープ。 19. 位置感知手段が可変抵抗器電位計を備える請求項1から16のいずれ か1項に記載の光学スコープ。 20. 位置感知手段が可変磁気抵抗型変換器を備える請求項1から16のい ずれか1項に記載の光学スコープ。 21. 位置感知手段がインダクトシンを備える請求項1から16のいずれか 1項に記載の光学スコープ。 22. アクセス不可能な位置にある特徴の寸法を判定する装置で、請求項1 から21のいずれか1項の光学スコープと、光学スコープの光学システムによっ て中継された像を受信する観察手段と、位置感知手段からデータを受信してデー タから特徴の寸法を計算する処理手段とを備える装置。 23. 観察手段が、カメラと、カメラが受信した像を表示するモニタとを備 える請求項22に記載の装置。 24. 添付図面に関連してほぼ上述したような光学スコープ。 25. 添付図面に関連してほぼ上述したような装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9713680.8 | 1997-06-27 | ||
GBGB9713680.8A GB9713680D0 (en) | 1997-06-27 | 1997-06-27 | Improvements in or relating to optical scopes with measuring systems |
PCT/GB1998/001831 WO1999000642A1 (en) | 1997-06-27 | 1998-06-23 | Optical scope with measuring system |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2000517072A true JP2000517072A (ja) | 2000-12-19 |
JP3946267B2 JP3946267B2 (ja) | 2007-07-18 |
Family
ID=10815084
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50536699A Expired - Fee Related JP3946267B2 (ja) | 1997-06-27 | 1998-06-23 | 測定システムを備えた光学スコープ |
Country Status (6)
Country | Link |
---|---|
US (1) | US6482148B1 (ja) |
EP (1) | EP0922199B1 (ja) |
JP (1) | JP3946267B2 (ja) |
DE (1) | DE69822763T2 (ja) |
GB (2) | GB9713680D0 (ja) |
WO (1) | WO1999000642A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010243197A (ja) * | 2009-04-01 | 2010-10-28 | Toshiba Corp | 流体速度計測システム |
JP2015009799A (ja) * | 2013-07-02 | 2015-01-19 | トヨタ自動車株式会社 | 車両構造 |
CN107544135A (zh) * | 2016-06-29 | 2018-01-05 | 医电鼎众股份有限公司 | 具有测距功能的内视镜及测距方法 |
JP2018538107A (ja) * | 2015-09-23 | 2018-12-27 | イースト カロライナ ユニバーシティ | 発光体を使用して物体距離及びターゲット寸法を測定する方法、システム、及びコンピュータプログラム製品 |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2354836B (en) | 1999-09-28 | 2003-06-04 | Keymed | Improvements relating to borescopes and endoscopes with variable direction of view |
US6610007B2 (en) | 2000-04-03 | 2003-08-26 | Neoguide Systems, Inc. | Steerable segmented endoscope and method of insertion |
US6837846B2 (en) * | 2000-04-03 | 2005-01-04 | Neo Guide Systems, Inc. | Endoscope having a guide tube |
US6468203B2 (en) | 2000-04-03 | 2002-10-22 | Neoguide Systems, Inc. | Steerable endoscope and improved method of insertion |
US8888688B2 (en) | 2000-04-03 | 2014-11-18 | Intuitive Surgical Operations, Inc. | Connector device for a controllable instrument |
US8517923B2 (en) | 2000-04-03 | 2013-08-27 | Intuitive Surgical Operations, Inc. | Apparatus and methods for facilitating treatment of tissue via improved delivery of energy based and non-energy based modalities |
GB2385735B (en) * | 2002-02-21 | 2003-12-31 | Keymed | Image capture and display system |
DE202004012992U1 (de) * | 2004-08-19 | 2005-12-29 | Storz Endoskop Produktions Gmbh | Endoskopisches Video-Meßsystem |
US7428048B1 (en) * | 2004-12-30 | 2008-09-23 | Spectral Molecular Imaging Inc. | Imaging elastic scattering spectroscopy |
US7632012B2 (en) * | 2005-09-01 | 2009-12-15 | Siemens Energy, Inc. | Method of measuring in situ differential emissivity and temperature |
US20090156958A1 (en) * | 2007-12-12 | 2009-06-18 | Mehta Bankim H | Devices and methods for percutaneous energy delivery |
US9986896B2 (en) * | 2008-03-05 | 2018-06-05 | The Board Of Regents Of The University Of Texas System | Disposable sheath designs for the stimulating endoscope and needle endoscopes having distal electrodes for nerve block under direct vision and methods for making and using same |
US20090240106A1 (en) * | 2008-03-05 | 2009-09-24 | Board Of Regents, The University Of Texas System | Endoscope With a Stimulating Electrode For Peripheral Nerve Blocks Under Direct Vision |
PL2489979T3 (pl) * | 2011-02-19 | 2013-09-30 | Refractory Intellectual Property Gmbh & Co Kg | Sposób rozpoznawania i pomiaru cylindrycznych powierzchni na ogniotrwałych ceramicznych częściach konstrukcyjnych w zastosowaniach metalurgicznych |
US8780362B2 (en) * | 2011-05-19 | 2014-07-15 | Covidien Lp | Methods utilizing triangulation in metrology systems for in-situ surgical applications |
US9113822B2 (en) | 2011-10-27 | 2015-08-25 | Covidien Lp | Collimated beam metrology systems for in-situ surgical applications |
US9561022B2 (en) | 2012-02-27 | 2017-02-07 | Covidien Lp | Device and method for optical image correction in metrology systems |
GB201216703D0 (en) | 2012-09-19 | 2012-10-31 | Rolls Royce Plc | A boroscope and a method of laser processing a component within an assembled apparatus using a boroscope |
US9351643B2 (en) | 2013-03-12 | 2016-05-31 | Covidien Lp | Systems and methods for optical measurement for in-situ surgical applications |
EP2778601A1 (en) * | 2013-03-15 | 2014-09-17 | Siemens Healthcare Diagnostics Inc. | Optical metrology by light beam analysis |
US9545220B2 (en) * | 2014-03-02 | 2017-01-17 | V.T.M (Virtual Tape Measure) Technologies Ltd. | Endoscopic measurement system and method |
US10729315B2 (en) * | 2016-01-29 | 2020-08-04 | Boston Scientific Scimed, Inc. | Medical retrieval devices and related methods of use |
US10222201B2 (en) * | 2016-07-14 | 2019-03-05 | United Technologies Corporation | Visual depth measurement gage |
US11202014B2 (en) | 2018-07-06 | 2021-12-14 | Medos International Sari | Camera scope electronic variable angle of view |
US11032481B2 (en) | 2018-07-06 | 2021-06-08 | Medos International Sarl | Camera scope electronic variable prism |
EP4015986A1 (en) * | 2020-12-18 | 2022-06-22 | TESA Sàrl | Contactless sensor unit for a coordinate measuring machine |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4824287U (ja) * | 1971-07-29 | 1973-03-20 | ||
JPS5145911B1 (ja) * | 1967-08-08 | 1976-12-06 | ||
JPH01145514A (ja) * | 1987-12-02 | 1989-06-07 | Kobe Steel Ltd | 炉内観察測距装置 |
JPH03231622A (ja) * | 1990-02-06 | 1991-10-15 | Olympus Optical Co Ltd | 内視鏡装置 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3819267A (en) | 1967-08-08 | 1974-06-25 | Olympus Co Ltd | Device for measuring dimensions from the forward end portion of an endoscope |
US3817619A (en) | 1967-08-08 | 1974-06-18 | Olympus Optical Co | Device for measuring distance of an object from the forward end portion of an endoscope |
US3817631A (en) | 1967-08-08 | 1974-06-18 | Olympus Optical Co | Device for measuring distance of objects from the forward end portion of an endoscope |
US3817635A (en) * | 1967-08-08 | 1974-06-18 | Olumpus Co Ltd | Device for measuring the actual dimension of an object at the forward end portion of an endoscope |
US3595220A (en) | 1967-08-08 | 1971-07-27 | Olympus Optical Co | Device for measuring the distance of an object from the forward end portion of an endoscope |
US3804081A (en) * | 1971-07-29 | 1974-04-16 | Olympus Optical Co | Endoscope |
DE2818760C2 (de) | 1978-04-28 | 1984-01-12 | Richard Wolf Gmbh, 7134 Knittlingen | Endoskop mit Einrichtung zum Messen des Objektabstandes vom Objekt |
DE2903529A1 (de) | 1979-01-31 | 1980-08-07 | Schlatter Ag | Verfahren zum messen von entfernungen und vorrichtung zur durchfuehrung des verfahrens |
US4226536A (en) | 1979-02-23 | 1980-10-07 | Dreyfus Marc G | Electro-optical contour measuring system |
EP0060629B1 (en) | 1981-03-05 | 1988-01-13 | Imperial Chemical Industries Plc | Monitoring gaseous pollutants by laser scan |
GB8508915D0 (en) * | 1985-04-04 | 1985-05-09 | Tunnel Investigations Ltd | Survey apparatus |
US4688555A (en) * | 1986-04-25 | 1987-08-25 | Circon Corporation | Endoscope with cable compensating mechanism |
US4896343A (en) | 1988-05-02 | 1990-01-23 | Saunders Allan M | Radiation apparatus with distance mapper for dose control |
WO1989011630A1 (en) | 1988-05-26 | 1989-11-30 | Wild Leitz Ag | Process and device for measuring surfaces |
US4941454A (en) * | 1989-10-05 | 1990-07-17 | Welch Allyn, Inc. | Servo actuated steering mechanism for borescope or endoscope |
JPH03106412U (ja) | 1990-02-13 | 1991-11-01 | ||
JP2510786B2 (ja) | 1990-04-14 | 1996-06-26 | 松下電工株式会社 | 物体の形状検出方法及びその装置 |
US5431645A (en) * | 1990-05-10 | 1995-07-11 | Symbiosis Corporation | Remotely activated endoscopic tools such as endoscopic biopsy forceps |
US5057681A (en) | 1990-07-27 | 1991-10-15 | Range Vision Inc. | Long range triangulating coordinate finder |
US5268687A (en) * | 1990-07-30 | 1993-12-07 | Spectrum Sciences B.V. | Laser scanning apparatus |
DE4201280C1 (ja) * | 1992-01-18 | 1992-12-10 | Richard Wolf Gmbh, 7134 Knittlingen, De | |
DE4241767C1 (de) * | 1992-12-11 | 1993-12-09 | Wolf Gmbh Richard | Instrument zum Bearbeiten der Oberfläche von Teilen in technischen Hohlräumen |
GB9408533D0 (en) | 1994-04-29 | 1994-06-22 | Univ Essex | Assessment of distance |
DE4439227C1 (de) * | 1994-11-03 | 1996-01-11 | Wolf Gmbh Richard | Endoskop und Verfahren zur Ermittlung von Objektabständen |
-
1997
- 1997-06-27 GB GBGB9713680.8A patent/GB9713680D0/en not_active Ceased
-
1998
- 1998-06-23 JP JP50536699A patent/JP3946267B2/ja not_active Expired - Fee Related
- 1998-06-23 EP EP98930925A patent/EP0922199B1/en not_active Expired - Lifetime
- 1998-06-23 WO PCT/GB1998/001831 patent/WO1999000642A1/en active IP Right Grant
- 1998-06-23 DE DE69822763T patent/DE69822763T2/de not_active Expired - Lifetime
- 1998-06-23 GB GB9813524A patent/GB2327547B/en not_active Expired - Lifetime
- 1998-06-23 US US09/242,931 patent/US6482148B1/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5145911B1 (ja) * | 1967-08-08 | 1976-12-06 | ||
JPS4824287U (ja) * | 1971-07-29 | 1973-03-20 | ||
JPH01145514A (ja) * | 1987-12-02 | 1989-06-07 | Kobe Steel Ltd | 炉内観察測距装置 |
JPH03231622A (ja) * | 1990-02-06 | 1991-10-15 | Olympus Optical Co Ltd | 内視鏡装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010243197A (ja) * | 2009-04-01 | 2010-10-28 | Toshiba Corp | 流体速度計測システム |
JP2015009799A (ja) * | 2013-07-02 | 2015-01-19 | トヨタ自動車株式会社 | 車両構造 |
JP2018538107A (ja) * | 2015-09-23 | 2018-12-27 | イースト カロライナ ユニバーシティ | 発光体を使用して物体距離及びターゲット寸法を測定する方法、システム、及びコンピュータプログラム製品 |
CN107544135A (zh) * | 2016-06-29 | 2018-01-05 | 医电鼎众股份有限公司 | 具有测距功能的内视镜及测距方法 |
CN107544135B (zh) * | 2016-06-29 | 2020-04-17 | 医电鼎众股份有限公司 | 具有测距功能的内视镜及测距方法 |
Also Published As
Publication number | Publication date |
---|---|
GB2327547B (en) | 1999-08-11 |
DE69822763T2 (de) | 2005-04-21 |
JP3946267B2 (ja) | 2007-07-18 |
WO1999000642A1 (en) | 1999-01-07 |
GB9713680D0 (en) | 1997-09-03 |
EP0922199B1 (en) | 2004-03-31 |
DE69822763D1 (de) | 2004-05-06 |
GB9813524D0 (en) | 1998-08-19 |
GB2327547A (en) | 1999-01-27 |
US6482148B1 (en) | 2002-11-19 |
EP0922199A1 (en) | 1999-06-16 |
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