JP2000503136A5 - - Google Patents
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- Publication number
- JP2000503136A5 JP2000503136A5 JP1997524976A JP52497697A JP2000503136A5 JP 2000503136 A5 JP2000503136 A5 JP 2000503136A5 JP 1997524976 A JP1997524976 A JP 1997524976A JP 52497697 A JP52497697 A JP 52497697A JP 2000503136 A5 JP2000503136 A5 JP 2000503136A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB9600469.2A GB9600469D0 (en) | 1996-01-10 | 1996-01-10 | Three dimensional etching process |
| GB9600469.2 | 1996-01-10 | ||
| PCT/GB1997/000043 WO1997025653A1 (en) | 1996-01-10 | 1997-01-09 | Three-dimensional etching process |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000503136A JP2000503136A (ja) | 2000-03-14 |
| JP2000503136A5 true JP2000503136A5 (enExample) | 2004-11-11 |
| JP3965213B2 JP3965213B2 (ja) | 2007-08-29 |
Family
ID=10786847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP52497697A Expired - Fee Related JP3965213B2 (ja) | 1996-01-10 | 1997-01-09 | 三次元エッチングプロセス |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US6682657B2 (enExample) |
| EP (1) | EP0873542B1 (enExample) |
| JP (1) | JP3965213B2 (enExample) |
| KR (1) | KR19990077120A (enExample) |
| CN (1) | CN1135438C (enExample) |
| AT (1) | ATE507496T1 (enExample) |
| AU (1) | AU1388497A (enExample) |
| CA (1) | CA2242634C (enExample) |
| DE (1) | DE69740180D1 (enExample) |
| GB (2) | GB9600469D0 (enExample) |
| PL (1) | PL194893B1 (enExample) |
| WO (1) | WO1997025653A1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19904307C2 (de) * | 1999-01-28 | 2001-09-20 | Bosch Gmbh Robert | Verfahren zur Herstellung von dreidimensionalen Strukturen mittels eines Ätzprozesses |
| DE10135872A1 (de) * | 2001-07-24 | 2003-02-27 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung einer Linse |
| JP4012156B2 (ja) * | 2004-02-02 | 2007-11-21 | 独立行政法人科学技術振興機構 | 圧電素子の製造方法 |
| TW200625699A (en) * | 2004-11-24 | 2006-07-16 | Sumitomo Chemical Co | Semiconductor substrate, method for manufacture thereof, and light emitting element |
| TWI415288B (zh) * | 2005-03-22 | 2013-11-11 | 住友化學股份有限公司 | 獨立基板、其製造方法，以及半導體發光元件 |
| JP2007019318A (ja) * | 2005-07-08 | 2007-01-25 | Sumitomo Chemical Co Ltd | 半導体発光素子、半導体発光素子用基板の製造方法及び半導体発光素子の製造方法 |
| US8691674B2 (en) * | 2005-09-29 | 2014-04-08 | Sumitomo Chemical Company, Limited | Method for producing group 3-5 nitride semiconductor and method for producing light-emitting device |
| KR100998017B1 (ko) * | 2009-02-23 | 2010-12-03 | 삼성엘이디 주식회사 | 발광소자 패키지용 렌즈 및 이를 구비하는 발광소자 패키지 |
| JP5650388B2 (ja) * | 2009-10-05 | 2015-01-07 | 三菱電機株式会社 | 有機ｅｌパネル、パネル接合型発光装置、有機ｅｌパネルの製造方法 |
| JP2019121750A (ja) * | 2018-01-11 | 2019-07-22 | 東京エレクトロン株式会社 | エッチング方法およびエッチング装置 |
| CN110824590A (zh) | 2019-11-25 | 2020-02-21 | 京东方科技集团股份有限公司 | 微透镜阵列的制备方法、显示装置的制备方法及显示装置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4357704A (en) * | 1980-09-15 | 1982-11-02 | Science Applications, Inc. | Disc or slab laser apparatus employing compound parabolic concentrator |
| US4514252A (en) | 1982-11-18 | 1985-04-30 | Hewlett-Packard Company | Technique of producing tapered features in integrated circuits |
| CA1237824A (en) * | 1984-04-17 | 1988-06-07 | Takashi Mimura | Resonant tunneling semiconductor device |
| JPS6144627A (ja) | 1984-08-09 | 1986-03-04 | Pioneer Electronic Corp | マイクロフレネルレンズの製造方法 |
| EP0199497B1 (en) * | 1985-04-10 | 1992-01-02 | Fujitsu Limited | Process for fabricating a self-aligned bipolar transistor |
| WO1987002179A1 (en) | 1985-09-27 | 1987-04-09 | Burroughs Corporation | Method of fabricating a tapered via hole in polyimide |
| FR2590409B1 (fr) * | 1985-11-15 | 1987-12-11 | Commissariat Energie Atomique | Procede de fabrication d'un transistor en couches minces a grille auto-alignee par rapport au drain et a la source de celui-ci et transistor obtenu par le procede |
| US4698128A (en) * | 1986-11-17 | 1987-10-06 | Motorola, Inc. | Sloped contact etch process |
| GB8715211D0 (en) | 1987-06-29 | 1987-08-05 | Secr Defence | Lensed photo detector |
| US5161059A (en) | 1987-09-21 | 1992-11-03 | Massachusetts Institute Of Technology | High-efficiency, multilevel, diffractive optical elements |
| US4902377A (en) * | 1989-05-23 | 1990-02-20 | Motorola, Inc. | Sloped contact etch process |
| US5227915A (en) | 1990-02-13 | 1993-07-13 | Holo-Or Ltd. | Diffractive optical element |
| US5073007A (en) | 1990-06-11 | 1991-12-17 | Holo-Or Ltd. | Diffractive optical element |
| US5316640A (en) * | 1991-06-19 | 1994-05-31 | Matsushita Electric Industrial Co., Ltd. | Fabricating method of micro lens |
| US5286338A (en) * | 1993-03-01 | 1994-02-15 | At&T Bell Laboratories | Methods for making microlens arrays |
| JP2795126B2 (ja) * | 1993-04-16 | 1998-09-10 | 株式会社デンソー | 曲面加工方法及びその装置 |
| US5853960A (en) * | 1998-03-18 | 1998-12-29 | Trw Inc. | Method for producing a micro optical semiconductor lens |
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1996
- 1996-01-10 GB GBGB9600469.2A patent/GB9600469D0/en active Pending
-
1997
- 1997-01-09 AU AU13884/97A patent/AU1388497A/en not_active Abandoned
- 1997-01-09 KR KR1019980705256A patent/KR19990077120A/ko active Granted
- 1997-01-09 CN CNB971927529A patent/CN1135438C/zh not_active Expired - Fee Related
- 1997-01-09 JP JP52497697A patent/JP3965213B2/ja not_active Expired - Fee Related
- 1997-01-09 CA CA002242634A patent/CA2242634C/en not_active Expired - Fee Related
- 1997-01-09 PL PL327667A patent/PL194893B1/pl not_active IP Right Cessation
- 1997-01-09 US US09/101,306 patent/US6682657B2/en not_active Expired - Fee Related
- 1997-01-09 DE DE69740180T patent/DE69740180D1/de not_active Expired - Lifetime
- 1997-01-09 EP EP97900295A patent/EP0873542B1/en not_active Expired - Lifetime
- 1997-01-09 AT AT97900295T patent/ATE507496T1/de not_active IP Right Cessation
- 1997-01-09 GB GB9813813A patent/GB2322833B/en not_active Expired - Fee Related
- 1997-01-09 WO PCT/GB1997/000043 patent/WO1997025653A1/en not_active Ceased