JP2000502509A5 - - Google Patents

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Publication number
JP2000502509A5
JP2000502509A5 JP1997523888A JP52388897A JP2000502509A5 JP 2000502509 A5 JP2000502509 A5 JP 2000502509A5 JP 1997523888 A JP1997523888 A JP 1997523888A JP 52388897 A JP52388897 A JP 52388897A JP 2000502509 A5 JP2000502509 A5 JP 2000502509A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997523888A
Other languages
English (en)
Japanese (ja)
Other versions
JP3941966B2 (ja
JP2000502509A (ja
Filing date
Publication date
Priority claimed from US08/577,382 external-priority patent/US5838529A/en
Application filed filed Critical
Publication of JP2000502509A publication Critical patent/JP2000502509A/ja
Publication of JP2000502509A5 publication Critical patent/JP2000502509A5/ja
Application granted granted Critical
Publication of JP3941966B2 publication Critical patent/JP3941966B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP52388897A 1995-12-22 1996-12-20 絶縁性基板のような基板用の低電圧静電クランプ Expired - Lifetime JP3941966B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/577,382 1995-12-22
US08/577,382 US5838529A (en) 1995-12-22 1995-12-22 Low voltage electrostatic clamp for substrates such as dielectric substrates
PCT/US1996/020883 WO1997023945A1 (en) 1995-12-22 1996-12-20 Low voltage electrostatic clamp for substrates such as dielectric substrates

Publications (3)

Publication Number Publication Date
JP2000502509A JP2000502509A (ja) 2000-02-29
JP2000502509A5 true JP2000502509A5 (enExample) 2004-11-11
JP3941966B2 JP3941966B2 (ja) 2007-07-11

Family

ID=24308464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52388897A Expired - Lifetime JP3941966B2 (ja) 1995-12-22 1996-12-20 絶縁性基板のような基板用の低電圧静電クランプ

Country Status (4)

Country Link
US (1) US5838529A (enExample)
EP (1) EP0880818B1 (enExample)
JP (1) JP3941966B2 (enExample)
WO (1) WO1997023945A1 (enExample)

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