JP2000307109A - 半導体装置及びその製造方法 - Google Patents

半導体装置及びその製造方法

Info

Publication number
JP2000307109A
JP2000307109A JP11114590A JP11459099A JP2000307109A JP 2000307109 A JP2000307109 A JP 2000307109A JP 11114590 A JP11114590 A JP 11114590A JP 11459099 A JP11459099 A JP 11459099A JP 2000307109 A JP2000307109 A JP 2000307109A
Authority
JP
Japan
Prior art keywords
insulating film
semiconductor
main surface
semiconductor substrate
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11114590A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000307109A5 (enrdf_load_stackoverflow
Inventor
Yoshito Nakazawa
芳人 中沢
Nobuo Machida
信夫 町田
Hideo Kanai
秀男 金井
Takamitsu Kanazawa
孝光 金澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Eastern Japan Semiconductor Inc
Original Assignee
Hitachi Ltd
Hitachi Tohbu Semiconductor Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Tohbu Semiconductor Ltd filed Critical Hitachi Ltd
Priority to JP11114590A priority Critical patent/JP2000307109A/ja
Publication of JP2000307109A publication Critical patent/JP2000307109A/ja
Publication of JP2000307109A5 publication Critical patent/JP2000307109A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/64Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66Vertical DMOS [VDMOS] FETs
    • H10D30/665Vertical DMOS [VDMOS] FETs having edge termination structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/101Integrated devices comprising main components and built-in components, e.g. IGBT having built-in freewheel diode
    • H10D84/141VDMOS having built-in components
    • H10D84/148VDMOS having built-in components the built-in components being breakdown diodes, e.g. Zener diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/106Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]  having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions

Landscapes

  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP11114590A 1999-04-22 1999-04-22 半導体装置及びその製造方法 Pending JP2000307109A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11114590A JP2000307109A (ja) 1999-04-22 1999-04-22 半導体装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11114590A JP2000307109A (ja) 1999-04-22 1999-04-22 半導体装置及びその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009021362A Division JP2009124169A (ja) 2009-02-02 2009-02-02 半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
JP2000307109A true JP2000307109A (ja) 2000-11-02
JP2000307109A5 JP2000307109A5 (enrdf_load_stackoverflow) 2005-09-02

Family

ID=14641677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11114590A Pending JP2000307109A (ja) 1999-04-22 1999-04-22 半導体装置及びその製造方法

Country Status (1)

Country Link
JP (1) JP2000307109A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008085188A (ja) * 2006-09-28 2008-04-10 Sanyo Electric Co Ltd 絶縁ゲート型半導体装置
US7834407B2 (en) 2005-05-20 2010-11-16 Renesas Electronics Corporation Semiconductor device

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7834407B2 (en) 2005-05-20 2010-11-16 Renesas Electronics Corporation Semiconductor device
US8232610B2 (en) 2005-05-20 2012-07-31 Renesas Electronics Corporation Semiconductor device and manufacturing method of the same
US8592920B2 (en) 2005-05-20 2013-11-26 Renesas Electronics Corporation Semiconductor device and manufacturing method of the same
US8604563B2 (en) 2005-05-20 2013-12-10 Renesas Electronics Corporation Semiconductor device and manufacturing method of the same
US9013006B2 (en) 2005-05-20 2015-04-21 Renesas Electronics Corporation Semiconductor device and manufacturing method of the same
US9245973B2 (en) 2005-05-20 2016-01-26 Renesas Electronics Corporation Semiconductor device and manufacturing method of the same
US9478530B2 (en) 2005-05-20 2016-10-25 Renesas Electronics Corporation Semiconductor device and manufacturing method of the same
US9837528B2 (en) 2005-05-20 2017-12-05 Renesas Electronics Corporation Semiconductor device and manufacturing method of the same
US10211332B2 (en) 2005-05-20 2019-02-19 Renesas Electronics Corporation Semiconductor device and manufacturing method of the same
US11107912B2 (en) 2005-05-20 2021-08-31 Renesas Electronics Corporation Trench gate semiconductor device with dummy gate electrode and manufacturing method of the same
JP2008085188A (ja) * 2006-09-28 2008-04-10 Sanyo Electric Co Ltd 絶縁ゲート型半導体装置

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