JP2000266679A5 - - Google Patents

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Publication number
JP2000266679A5
JP2000266679A5 JP1999073576A JP7357699A JP2000266679A5 JP 2000266679 A5 JP2000266679 A5 JP 2000266679A5 JP 1999073576 A JP1999073576 A JP 1999073576A JP 7357699 A JP7357699 A JP 7357699A JP 2000266679 A5 JP2000266679 A5 JP 2000266679A5
Authority
JP
Japan
Prior art keywords
substrate
inspection
uninspected
inspected
holding portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999073576A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000266679A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP11073576A priority Critical patent/JP2000266679A/ja
Priority claimed from JP11073576A external-priority patent/JP2000266679A/ja
Publication of JP2000266679A publication Critical patent/JP2000266679A/ja
Publication of JP2000266679A5 publication Critical patent/JP2000266679A5/ja
Pending legal-status Critical Current

Links

JP11073576A 1999-03-18 1999-03-18 基板検査装置 Pending JP2000266679A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11073576A JP2000266679A (ja) 1999-03-18 1999-03-18 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11073576A JP2000266679A (ja) 1999-03-18 1999-03-18 基板検査装置

Publications (2)

Publication Number Publication Date
JP2000266679A JP2000266679A (ja) 2000-09-29
JP2000266679A5 true JP2000266679A5 (cs) 2006-05-25

Family

ID=13522266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11073576A Pending JP2000266679A (ja) 1999-03-18 1999-03-18 基板検査装置

Country Status (1)

Country Link
JP (1) JP2000266679A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103996632B (zh) * 2013-02-20 2016-12-28 无锡奥特维科技股份有限公司 一种双位切换的光伏晶硅电池片机器视觉定位及质检平台
JP2019045330A (ja) * 2017-09-04 2019-03-22 日本電産コパル株式会社 外観検査装置及び製品製造システム

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