JP2000241128A - 面間隔測定方法および装置 - Google Patents
面間隔測定方法および装置Info
- Publication number
- JP2000241128A JP2000241128A JP11154540A JP15454099A JP2000241128A JP 2000241128 A JP2000241128 A JP 2000241128A JP 11154540 A JP11154540 A JP 11154540A JP 15454099 A JP15454099 A JP 15454099A JP 2000241128 A JP2000241128 A JP 2000241128A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light beam
- optical
- optical path
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- 238000000034 method Methods 0.000 claims abstract description 92
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- 230000010287 polarization Effects 0.000 claims description 64
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- 230000008859 change Effects 0.000 claims description 9
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- 239000004065 semiconductor Substances 0.000 claims description 4
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- 238000000691 measurement method Methods 0.000 claims 2
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 abstract 3
- 238000005498 polishing Methods 0.000 description 9
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- 239000011521 glass Substances 0.000 description 2
- 238000012800 visualization Methods 0.000 description 2
- 101100366710 Arabidopsis thaliana SSL12 gene Proteins 0.000 description 1
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- 101100366563 Panax ginseng SS13 gene Proteins 0.000 description 1
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- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
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- 230000035945 sensitivity Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11154540A JP2000241128A (ja) | 1998-12-25 | 1999-06-02 | 面間隔測定方法および装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP37108998 | 1998-12-25 | ||
| JP10-371089 | 1998-12-25 | ||
| JP11154540A JP2000241128A (ja) | 1998-12-25 | 1999-06-02 | 面間隔測定方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000241128A true JP2000241128A (ja) | 2000-09-08 |
| JP2000241128A5 JP2000241128A5 (enExample) | 2006-07-27 |
Family
ID=26482798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11154540A Pending JP2000241128A (ja) | 1998-12-25 | 1999-06-02 | 面間隔測定方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000241128A (enExample) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002310620A (ja) * | 2001-04-19 | 2002-10-23 | Olympus Optical Co Ltd | レンズ中肉厚測定装置及びレンズ中肉厚測定方法 |
| JP2003098034A (ja) * | 2001-09-26 | 2003-04-03 | Olympus Optical Co Ltd | レンズ面間隔測定装置および測定方法 |
| JP2006517028A (ja) * | 2003-01-16 | 2006-07-13 | メディツィニシェス ラザーツェントラム リューベック ゲゼルシャフト ミット ベシュレンクテル ハフツング | 無接触温度モニタ及び制御方法及び装置 |
| WO2006088186A1 (ja) * | 2005-02-21 | 2006-08-24 | National University Corporation Nagoya University | 二物体間の隙間測定装置、隙間測定方法、及び隙間測定装置の較正方法 |
| JP2008224568A (ja) * | 2007-03-15 | 2008-09-25 | Fujitsu Ltd | 表面形状計測装置及び表面形状計測方法 |
| JP2008292296A (ja) * | 2007-05-24 | 2008-12-04 | Toray Eng Co Ltd | 透明膜の膜厚測定方法およびその装置 |
| JP2012232383A (ja) * | 2011-05-02 | 2012-11-29 | Olympus Corp | 光学素子製造装置及び光学素子製造方法 |
| JP2013076733A (ja) * | 2011-09-29 | 2013-04-25 | Kyocera Crystal Device Corp | ウエハの接合装置 |
| KR101457303B1 (ko) * | 2013-10-07 | 2014-11-04 | 조선대학교산학협력단 | 근적외선을 이용한 웨이퍼 형상, 두께, 굴절률 3d 측정 장치 및 방법 |
| CN105674902A (zh) * | 2016-01-08 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | 光学镜组镜面间隙测量装置和测量方法 |
| CN105674903A (zh) * | 2016-01-08 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | 透镜组镜面间距的测量装置和测量方法 |
| CN112362311A (zh) * | 2020-12-07 | 2021-02-12 | 中测光科(福建)技术有限公司 | 一种双光路镜头间距测量系统及其工作方法 |
| WO2025203289A1 (ja) * | 2024-03-27 | 2025-10-02 | 株式会社ニコン | 干渉計測装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06109582A (ja) * | 1992-09-25 | 1994-04-19 | Olympus Optical Co Ltd | レンズ総合検査機 |
| JPH102855A (ja) * | 1996-06-17 | 1998-01-06 | Rikagaku Kenkyusho | 積層構造体の層厚および屈折率の測定方法およびその測定装置 |
-
1999
- 1999-06-02 JP JP11154540A patent/JP2000241128A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06109582A (ja) * | 1992-09-25 | 1994-04-19 | Olympus Optical Co Ltd | レンズ総合検査機 |
| JPH102855A (ja) * | 1996-06-17 | 1998-01-06 | Rikagaku Kenkyusho | 積層構造体の層厚および屈折率の測定方法およびその測定装置 |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002310620A (ja) * | 2001-04-19 | 2002-10-23 | Olympus Optical Co Ltd | レンズ中肉厚測定装置及びレンズ中肉厚測定方法 |
| JP2003098034A (ja) * | 2001-09-26 | 2003-04-03 | Olympus Optical Co Ltd | レンズ面間隔測定装置および測定方法 |
| JP2006517028A (ja) * | 2003-01-16 | 2006-07-13 | メディツィニシェス ラザーツェントラム リューベック ゲゼルシャフト ミット ベシュレンクテル ハフツング | 無接触温度モニタ及び制御方法及び装置 |
| WO2006088186A1 (ja) * | 2005-02-21 | 2006-08-24 | National University Corporation Nagoya University | 二物体間の隙間測定装置、隙間測定方法、及び隙間測定装置の較正方法 |
| JP2008224568A (ja) * | 2007-03-15 | 2008-09-25 | Fujitsu Ltd | 表面形状計測装置及び表面形状計測方法 |
| JP2008292296A (ja) * | 2007-05-24 | 2008-12-04 | Toray Eng Co Ltd | 透明膜の膜厚測定方法およびその装置 |
| JP2012232383A (ja) * | 2011-05-02 | 2012-11-29 | Olympus Corp | 光学素子製造装置及び光学素子製造方法 |
| JP2013076733A (ja) * | 2011-09-29 | 2013-04-25 | Kyocera Crystal Device Corp | ウエハの接合装置 |
| KR101457303B1 (ko) * | 2013-10-07 | 2014-11-04 | 조선대학교산학협력단 | 근적외선을 이용한 웨이퍼 형상, 두께, 굴절률 3d 측정 장치 및 방법 |
| CN105674902A (zh) * | 2016-01-08 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | 光学镜组镜面间隙测量装置和测量方法 |
| CN105674903A (zh) * | 2016-01-08 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | 透镜组镜面间距的测量装置和测量方法 |
| CN112362311A (zh) * | 2020-12-07 | 2021-02-12 | 中测光科(福建)技术有限公司 | 一种双光路镜头间距测量系统及其工作方法 |
| WO2025203289A1 (ja) * | 2024-03-27 | 2025-10-02 | 株式会社ニコン | 干渉計測装置 |
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