JP2000237699A - Cleaning apparatus of glass substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cleaning apparatus of glass substrate capable of ensuring cleaning quality. SOLUTION: The cleaning apparatus of glass substrates is adapted in order to remove adherend to the surface of the edge portion of a glass substrate 1 by a wiper tape 4. In this case, a guide 13 for guiding the wiper tape 4 to position the same on the pressing surfaces 12a of pressing members 12 is provided between the pressing members 12 for pressing the wiper taper 4 to both surfaces of a glass plate 1A to be moved between two upper and lower pressing members 12. By this constitution, even when the shapes of the pressing members 12 are formed into edge shapes provided with projected parts 12b corresponding to the stepped part of the glass substrate 1, the wiper tape 4 is not hooked with the projected parts 12b at a time of the feeding of the wiper tape 4 and the wiper tape 4 can be sent stably.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate cleaning apparatus for cleaning an edge of a glass substrate such as a liquid crystal panel.

[0002]

2. Description of the Related Art In a process of manufacturing a glass substrate such as a liquid crystal panel, a sub-substrate is connected to an electrode portion formed at an edge of the glass substrate. As a method of this connection, a method of joining a sub-substrate to an electrode portion of a glass substrate using an anisotropic conductive material is used. Prior to this bonding, cleaning is performed to remove foreign substances adhering to the surface of the edge of the glass substrate. This cleaning is performed for the purpose of improving the adhesiveness of the adhesive and preventing erroneous recognition of the recognition mark provided on the electrode portion due to foreign matter.

Hereinafter, a conventional glass substrate cleaning apparatus will be described with reference to the drawings. FIG. 5 is a partial sectional view of a conventional glass substrate cleaning apparatus. In FIG. 5, a glass substrate 1 includes upper and lower glass plates 1A and 1B.
The edge of the glass plate 1A protrudes from the outer edge of the glass plate 1B, and an electrode for connection with the sub-substrate is formed on the surface of the edge. Prior to joining the sub-substrate to this electrode portion with an anisotropic conductive material, the edge portion is cleaned. In this cleaning, the cleaning rollers 2A and 2B and the guide roller 3 are caused to rotate the wiper tape 4 for cleaning.
A, 2B with the edge positioned between
A and 2B are pressed against both the front and back surfaces of the edge, which is the site to be cleaned.

[0004]

The cleaning of the front surface is performed by wiping off the deposits on the front and back surfaces of the glass plate 1A with the wiper tape 4 by sliding the edges relatively to the cleaning rollers 2A and 2B. is there. However, in the conventional method using a cleaning roller, the wiper tape 4 cannot be pressed near the step near the end face of the glass plate 1B because the outer periphery of the cleaning roller is R-shaped. There is a problem that the cleaning is not sufficiently performed, and the required cleaning quality cannot be ensured.

Accordingly, an object of the present invention is to provide a glass substrate cleaning apparatus capable of ensuring cleaning quality.

[0006]

A glass substrate cleaning apparatus according to the present invention is a glass substrate cleaning apparatus for removing adhering substances on the edge of a glass substrate with a wiper tape. A tape pressing means for pressing the wiper tape by a pressing member; a positioning means for moving and positioning the tape pressing means relative to the glass substrate; and a tape feeder for feeding the wiper tape to the tape pressing means. Feeding means, a guide member disposed between the pressing members and guiding a wiper tape fed to the pressing member to position the pressing member on a pressing surface of the pressing member against the glass substrate; and Moving means for moving between the pressing members.

According to the present invention, by providing a moving means for moving a guide member disposed between pressing members for pressing the wiper tape against the edge of the glass substrate,
Even when the shape of the pressing member is an edge shape corresponding to the step portion, the wiper tape does not catch on the edge when the wiper tape is fed.

[0008]

Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a side view of a glass substrate cleaning apparatus according to an embodiment of the present invention, FIG. 2 is a partial plan view of the glass substrate cleaning apparatus, and FIGS.
4 (b), (c) and FIGS. 4 (a), (b), (c) are process explanatory views of the glass substrate cleaning method.

First, a glass substrate cleaning apparatus will be described with reference to FIGS. In FIG. 1, a glass substrate 1 composed of two upper and lower glass plates 1A and 1B is placed on a holding unit 6. A protective film 5 is formed on the surfaces of the glass plates 1A and 1B. The edge of the glass plate 1A protrudes from the edge of the glass plate 1B, and an electrode for connection to the sub-substrate is formed on the surface of the edge of the glass plate 1A. Prior to connection with the sub-substrate, the edge on which the electrode is formed is subjected to cleaning for removing surface deposits. The holding unit 6 for holding the glass substrate 1 includes a driving unit 7
, The glass substrate 1 is positioned.

A cleaning unit 10 is provided on the side of the glass substrate 1. Cleaning unit 10
Has a chuck mechanism 11 having two chuck claws 11a for performing a chucking operation, and a pressing member 12 is mounted on the chuck claws 11a. Chuck claw 11a
Are mounted so as to face the flat portion 12a provided at the front end portion, and the front end of the flat portion 12a is an edge-shaped projection 12b. The wiper tape 4 is fed to the pressing member 12 via guide rollers 14 and 15 from a feed reel 16A of the wiper tape, which is a tape feeding means disposed above.

The wiper tape 4 is fed along the outer periphery of the upper pressing member 12 and circulates around a guide 13 disposed between the pressing members 12 to rotate around the lower pressing member 12.
Is derived along the outer circumference of. After this, wiper tape 4
Is collected on the collection reel 16B via the guide rollers 14 and 15. A cleaning agent ejection head 19 is disposed above the pressing member 12, and a cleaning liquid such as ethanol is dropped onto the wiper tape 4 from a nozzle 20 of the ejection head 19.

By driving the driving unit 7, the glass substrate 1 moves horizontally and the edge of the glass plate 1 A, which is the cleaning target, can be positioned between the pressing members 12. By driving the chuck mechanism 11 in this state, the pressing member 12 is closed, and the wiper tape 4 is pressed against the front and back surfaces of the edge of the glass plate 1A by the flat portion 12a. That is, the chuck mechanism 11 and the pressing member 12 are tape pressing means. The drive section 7 is a positioning means for positioning the tape pressing means relative to the glass substrate 1.

The guide 13 disposed between the pressing members 12 is provided with a rod 17a of a cylinder 17 as shown in FIG.
Is mounted on a block 18 fixed to the block 18. By moving the rod 17a of the cylinder 17 up and down, the guide 1
3 moves horizontally between the upper and lower pressing members 12.
In a state where the rod 17a is immersed, the guide 13 guides the wiper tape 4 and pushes the pressing member 1 as shown in FIG.
The second flat portion 12a, that is, the pressing portion against the glass plate 1A. With the rod 17a protruding, the guide 13 is located outside the distal end of the pressing member 12. Therefore, the cylinder 17 is a moving means for moving the guide 13.

This glass substrate cleaning apparatus is configured as described above. The operation of the apparatus will be described below with reference to FIGS. First, in FIG. 3A, the glass substrate 1 is placed on the holding unit 6. At this time, the wiper tape 4 is fed along the pressing member 12 of the cleaning unit 10, and the wiper tape 4 is guided by the guide 13 and is located along the flat portion 12 a of the pressing member 12.

Next, a driving unit (not shown) is driven to hold the holding unit 6.
The upper glass substrate 1 is moved, and the edge of the glass plate 1A, which is the cleaning target site, is positioned between the pressing members 12. By driving the chuck mechanism 11, the pressing member 12 presses the wiper tape 4 on both the front and back surfaces of the edge of the glass plate 1 </ b> A. By horizontally moving the glass substrate 1 in this state, the glass plate 1A
Is removed by the wiper tape 4 and cleaning is performed. At this time, since the front end of the flat portion 12a, which is the pressing surface of the pressing member 12, is an edge-shaped projection 12b, the wiper tape 4 is pressed to the step between the glass plate 1A and the glass plate 1B. As compared with the conventional method of pressing the wiper tape using a roller, good cleaning can be performed without generating an uncleaned portion.

Thereafter, when the cleaning of the portion is completed, the pressing member 12 is opened as shown in FIG. 4A, and the pressed state of the wiper tape 4 is released. Next, as shown in FIG. 4B, the glass substrate 1 is moved to position the glass substrate 1A outside the pressing member 12, and the rod 17a (FIG. 2) of the cylinder 17 is made to protrude. As a result, as shown in FIG.
Are located outside the pressing member 12. Then, in this state, the recovery reel 16B is driven to wind up the wiper tape 4 at a predetermined pitch. Thus, the wiper tape 4 contaminated by the above-described cleaning operation is collected, and a new unused wiper tape 4 is fed.

In the feeding operation of the wiper tape 4, the wiper tape 4 is merely fed along the outside of the pressing member 12, and the wiper tape 4 does not need to go around the tip of the pressing member 12. Therefore, the wiper tape 4 can always be fed stably without causing damage to the wiper tape 4 that occurs when the tip 12b orbits the projecting portion 12b at an acute angle.

[0018]

According to the present invention, since the moving means for moving the guide member disposed between the pressing members for pressing the wiper tape against the edge of the glass substrate is provided, the shape of the pressing member can be reduced. Even in the case of an edge shape corresponding to the stepped portion, the wiper tape does not catch on the edge when the wiper tape is fed. Therefore,
Good cleaning with few uncleaned portions can be performed while always feeding the wiper tape stably.

[Brief description of the drawings]

FIG. 1 is a side view of a glass substrate cleaning apparatus according to an embodiment of the present invention.

FIG. 2 is a partial plan view of the glass substrate cleaning apparatus according to one embodiment of the present invention.

FIG. 3A is a diagram illustrating a process of a method for cleaning a glass substrate according to an embodiment of the present invention. FIG. 3B is a diagram illustrating a process of a method for cleaning a glass substrate according to an embodiment of the present invention. Process explanatory diagram of the glass substrate cleaning method of one embodiment

FIG. 4A is a diagram illustrating a process of a method for cleaning a glass substrate according to an embodiment of the present invention. FIG. 4B is a diagram illustrating a process of a method for cleaning a glass substrate according to an embodiment of the present invention. Process explanatory diagram of the glass substrate cleaning method of one embodiment

FIG. 5 is a partial cross-sectional view of a conventional glass substrate cleaning device.

[Explanation of symbols]

 Reference Signs List 1 glass substrate 4 wiper tape 7 drive unit 10 cleaning unit 11 chuck mechanism 12 pressing member 13 guide 16A supply reel 17 cylinder

Claims (1)

[Claims] 1. An apparatus for cleaning a glass substrate, which removes surface deposits on an edge of the glass substrate with a wiper tape, and a tape pressing means for pressing the wiper tape on both front and back surfaces of the edge by a pressing member;
Positioning means for moving and positioning the tape pressing means relative to the glass substrate, tape feeding means for feeding a wiper tape to the tape pressing means, and the pressing member are provided. A guide member that guides the wiper tape fed to the pressing member and is positioned on a pressing surface of the pressing member against the glass substrate; and a moving unit that moves the guide member between the pressing members. An apparatus for cleaning a glass substrate.