JP2006058906A - Cleaning device for glass substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cleaning device for a glass substrate, wherein a tape-like cleaning material can correctly be fed with simple constitution and a detergent can surely be applied to necessary segments. <P>SOLUTION: The cleaning device for the glass substrate for removing the surface deposits at the edges of the glass substrate by a wiper tape 10 performs cleaning by drawing out the wiper tape 10 from a feed reel 11A by a tape feed mechanism 12A having a rotationally driven feed roller 15 and a driven roller 16, moving around pressers 8A and 8B of a wedge shape and pressing the wiper tape 10 to the edges of the glass substrate. The pressers 8A and 8B are driven by a chuck mechanism to be opened and closed and the chuck mechanism is elastically supported at a prescribed height position by a chuck supporting means made of a leaf spring. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a glass substrate cleaning apparatus for cleaning an edge of a glass substrate such as a display panel.

  In the manufacturing process of a glass substrate such as a display panel, the sub-substrate is connected to a terminal formed on the edge of the glass substrate. As a method for this connection, a method of bonding a sub-substrate to a glass substrate with an anisotropic conductive material is used. Prior to this bonding, the purpose is to remove foreign substances adhering to the surface of the edge of the glass substrate and to improve the sticking property of the anisotropic conductive material attached to mount electronic components on the glass substrate surface. Cleaning is performed.

  This cleaning is performed by sliding the glass substrate relative to the presser while wiping the wiper tape against the edge with the presser and wiping off the adhering matter adhering to the glass plate with the wiper tape. The wiper tape to be used is supplied while being wound around the supply reel, and is wound around the take-up reel, collected around the presser.

  However, in the conventional glass substrate cleaning device, the tape feeding drive is caused by the configuration of the tape feeding mechanism that pulls and feeds the wiper tape from the supply reel and the cleaning agent coating mechanism that applies the cleaning detergent to the wiper tape. The system is complicated, and there is a problem that the cleaning agent cannot be stably applied to the necessary part.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a glass substrate cleaning apparatus that can correctly feed a tape-shaped cleaning material with a simple configuration and can reliably apply a cleaning agent to a necessary portion.

  The glass substrate cleaning device according to claim 1 is a glass substrate cleaning device that removes surface deposits on the edge of the glass substrate with a tape-shaped cleaning material, and supplies the tape-shaped cleaning material in a wound state. A supply reel; a tape feeding means for pulling out and feeding the tape-shaped cleaning material from the supply reel; a feed amount detecting means for detecting a tape feed amount by the tape feeding means; and a tape-shaped cleaning drawn from the supply reel. A tension applying means for applying a tension in a direction opposite to the feeding direction to the material, a tension defining means for defining an upper limit value of the tension, a presser for pressing the drawn tape-shaped cleaning material against the edge, and after use A take-up reel for taking up the tape-shaped cleaning material, take-up drive means for rotating the take-up reel, and tape-like cleaning by the take-up reel. A winding force defining means for defining an upper limit value of the winding force of the material, a holding means for holding the glass substrate, a moving means for moving the holding means relative to the presser, and the presser A chuck mechanism for opening and closing the pair of pressing elements and a chuck support means for elastically supporting the chuck mechanism at a predetermined height position are provided. The chuck mechanism is vertically moved by a guide rail and a slider. It is held movably in the direction.

  The glass substrate cleaning device according to claim 2 is the glass substrate cleaning device according to claim 1, wherein the chuck support means is a plate spring member whose one end is cantilever fixed to a fixed block, and the plate spring. It consists of a pair of upper and lower rollers that clamp the free end of the member from above and below without restricting the relative displacement in the horizontal direction.

  ADVANTAGE OF THE INVENTION According to this invention, the surface deposit | attachment of the edge part of a glass substrate can be cleanly removed with a tape-shaped cleaning material.

  Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a side view of a glass substrate cleaning apparatus according to an embodiment of the present invention, FIG. 2 is a side view of a chuck mechanism of the glass substrate cleaning apparatus according to an embodiment of the present invention, and FIG. FIG. 4 is a partial sectional view of a tape feed driving system of a glass substrate cleaning apparatus according to an embodiment of the present invention, and FIG. FIG. 6 is an explanatory view of the pressing member of the glass substrate cleaning device of one embodiment, and FIG. 6 is a process explanatory view of the glass substrate cleaning method of one embodiment of the present invention.

  First, the configuration of the glass substrate cleaning apparatus will be described with reference to FIG. In FIG. 1, a positioning unit 2 and a terminal cleaning unit 3 are disposed on a base 1. The positioning unit 2 is configured by mounting a substrate holding unit 5 on a moving table 4. The substrate holding unit 5 sucks and holds the display panel 6 that is a glass substrate. That is, the substrate holding part 5 is a holding means for holding the glass substrate.

  The moving table 4 can move linearly in three directions of X, Y, and Z and rotate in the θ direction around the Z axis. The moving table 4 holds the display panel 6 on the substrate holding unit 5. 4, the edge 6 a of the display panel 6 is positioned with respect to the terminal cleaning unit 3 which is a cleaning means described below, and the display panel 6 is moved relative to the terminal cleaning unit 3 in the cleaning operation. Let Therefore, the moving table 4 is a moving means for moving the substrate holding unit 5 relative to the terminal cleaning unit 3.

  The terminal cleaning unit 3 includes a pair of pressing elements 8A and 8B. The pressing elements 8 </ b> A and 8 </ b> B press the wiper tape 10, which is a tape-like cleaning material, against the upper and lower surfaces of the edge 6 a of the display panel 6. The wiper tape 10 is supplied to the supply reels 11A and 11B in a wound state, is pulled out from the supply reels 11A and 11B by the tape feeding mechanisms 12A and 12B (tape feeding means), and is fed to the pressing surfaces of the pressing elements 8A and 8B. Led.

  Then, the wiper tape 10 is pressed against the edge 6a of the display panel 6 by driving the chuck mechanism 9 that opens and closes the pressing elements 8A and 8B. In this state, the display panel 6 held by the substrate holder 5 is moved in the X direction. The surface deposits on the edge 6a are removed by horizontally moving the edge 6a. Thus, the connection terminals formed on the edge 6a of the display panel 6 are cleaned.

  In cleaning, the wiper tape 10 is fed at a predetermined pitch, and the used wiper tape 10 is guided to the take-up reels 14A and 14B via the guide rollers 29A and 29B, and is sequentially taken up and collected. As will be described later, the chuck mechanism 9 is elastically supported by a plate spring member 13 and can absorb the positional deviation in the height direction between the chuck mechanism 9 and the display panel 6.

Next, the chuck mechanism 9 that opens and closes the pressing elements 8A and 8B will be described with reference to FIG. In FIG. 2, a slider 22 is fitted to a guide rail 21 arranged in a direction perpendicular to the base plate 7 so as to be movable up and down, and a moving plate 20 is fixed to the slider 22. Accordingly, the movable plate 20 is held so as to be movable in the vertical direction with respect to the base plate 7, and the chuck mechanism 9 provided on the movable plate 20 is movable up and down with respect to the base plate 7.

  The configuration of the chuck mechanism 9 will be described. A pair of pressing elements 8A and 8B provided protruding from the left end of the moving plate 20 are held by arms 23A and 23B, respectively, and the end of one arm 23B is coupled to a rod 26a of the cylinder 26. Yes. When the rod 26a protrudes and retracts, the presser 8B moves up and down via the arm 23B.

  The arms 23A and 23B are coupled to rack gears 24A and 24B, respectively, and the rack gears 24A and 24B mesh with one pinion gear 25. Accordingly, in conjunction with the vertical movement of the pressing element 8B by the cylinder 26, the pressing element 8A also performs the vertical movement. That is, the pair of pressing elements 8A and 8B are opened and closed in synchronization by the cylinder 26 which is a single driving means. The opening / closing operation of the pressing elements 8A and 8B at this time is an operation that is vertically symmetric with respect to the center line CL that coincides with the height position of the pinion gear 25. Therefore, during the closing operation of the pressing elements 8A and 8B by the chuck mechanism 9, the closing operation is always performed around a certain height position (center line CL). A chuck mechanism using a belt or a cam may be used as a mechanism for always closing the pressing elements 8A and 8B around a fixed height position using a single driving means.

  A pair of upper and lower rotatable rollers 27 are disposed at the right end of the moving plate 20. The roller 27 holds the free end of the leaf spring member 13 whose one end is cantilevered and fixed to the base plate 7 by the fixing block 13a from above and below without restricting relative displacement in the horizontal direction. Therefore, the chuck mechanism 9 held so as to be movable up and down with respect to the base plate 7 is elastically held in the vertical direction by the leaf spring member 13.

  At this time, the height position of the center line CL of the chuck mechanism 9 coincides with a predetermined height position (height original position) determined in relation to the positioning unit 2, that is, the plate due to the own weight of the chuck mechanism 9. The position of the fixed block 13a is set by correcting the deflection of the spring member 13 in advance.

  By adopting such a holding method, when an external force in the vertical direction is applied to the chuck mechanism 9, the chuck mechanism 9 is displaced in the external force acting direction by the bending allowance of the leaf spring member 13 corresponding to the external force. Is removed, the chuck mechanism 9 returns to the original height position by the elastic force of the leaf spring member 13. That is, the leaf spring member 13 elastically supports the chuck mechanism 9 at a predetermined height position, and restores the displacement to the chuck mechanism 9 when the chuck mechanism 9 is displaced vertically from the predetermined height position. It becomes the 1st support means (chuck support means) which gives the restoring force which performs. In the first support means, the restoring force is generated by the leaf spring member 13, but an elastic member such as a coil spring may be used in addition to the leaf spring.

  A pair of clamp members 28 are arranged on the right side of the chuck mechanism 9 at positions where the plate spring member 13 is sandwiched from above and below. The clamp member 28 is opened and closed by a driving means (not shown), and the leaf spring member 13 is clamped and fixed in the vertical direction in the closed state. The fixing position at this time is set so that the center line CL of the chuck mechanism 9 coincides with the above-described original height position.

  That is, by closing the clamp member 28, the chuck mechanism 9 is fixedly supported at the original height position, and the chuck mechanism 9 is prevented from being displaced in the vertical direction when unnecessary. Therefore, the clamp member 28 serves as a second support unit that fixedly supports the chuck mechanism 9 at a predetermined height position. Note that the fixing position by the clamp member 28 may be slightly deviated from the original height position.

Next, the tape feeding mechanism of the wiper tape 10 will be described with reference to FIGS. In FIG. 3, only the upper side of the two sets of tape feeding mechanisms arranged vertically symmetrically is shown, but the lower tape feeding mechanism has the same configuration. In FIG. 3, a supply reel 11 </ b> A and a take-up reel 14 </ b> A are disposed close to the side surface of the base plate 7, and are respectively fixed to the base plate 7.

  As shown in FIG. 4A, pulleys 34 and 35 are coupled to the rotation shafts 30 and 31 of the supply reel 11A and the take-up reel 14A via torque limiters 32 and 33, respectively. An output shaft of a motor 37 is coupled to the pulley 35 on one side, and a belt 36 is tuned between the pulley 34 and the pulley 35. Therefore, by driving the motor 37, the pulleys 34 and 35 rotate together.

  This rotation is transmitted to the supply reel 11A and the take-up reel 14A via the rotary shafts 30 and 31. At this time, the rotation is transmitted through the torque limiters 32 and 33, and the rotational force exceeding the specified torque is not transmitted. It is performed in a form corresponding to the restraint state of 14A.

  That is, by driving the motor 37, torques in the directions of arrows a and b are transmitted to the supply reel 11A and the take-up reel 14A, respectively, as shown in FIG. As a result, a tension in the direction opposite to the feed-out direction (arrow d direction) is applied to the wiper tape 10 pulled out from the supply reel 11A in the arrow c direction. At this time, since the upper limit value of the torque transmitted to the supply reel 11A by the torque limiter 32 is defined, the upper limit value of the tension applied to the wiper tape 10 is defined by this torque.

  Further, a tension in the direction of winding the wiper tape 10 (direction of arrow e), that is, a winding force acts on the winding reel 14A. At this time, since the upper limit value of the torque transmitted to the supply reel 12A by the torque limiter 33 is defined, the upper limit value of the winding force applied to the wiper tape 10 is defined by this torque.

  In the above configuration, the motor 37, the pulleys 34 and 35, the belt 36, the torque limiter 32, and the rotary shaft 30 are tensions that apply a tension in a direction opposite to the feeding direction to the wiper tape 10 drawn by applying torque to the supply reel 11A. The torque limiter 32 is a tension defining means for defining an upper limit value of the tension.

  Similarly, the motor 37, the pulley 35, the torque limiter 33, and the rotating shaft 31 serve as winding drive means for rotationally driving the winding reel 14A, and the torque limiter 33 winds the wiper tape 10 by the winding reel 14A. It is a winding force defining means for defining an upper limit value of the taking force. The tension applying means and the winding drive means are driven by a motor 37 as the same drive source.

  A tape feed mechanism 12A is disposed below the supply reel 11A. The tape feeding mechanism 12 </ b> A includes a feed roller 15 that is rotationally driven and a driven roller 16. The driven roller 16 is pivotally supported by a holding member 17, and the holding member 17 is urged by a spring 18 in a direction in which the driven roller 16 is pressed against the feed roller 15.

  As shown in FIG. 4B, the pulley 41 coupled to the rotation shaft 40 of the feed roller 15 is rotationally driven by a motor 42 as a feed drive source via a belt 44 and a pulley 43, and the motor 42 is driven. The rotation is transmitted to the feed roller 15 by driving. The wiper tape 10 is fed by frictional force when the feed roller 15 rotates in a state where the wiper tape 10 that has circulated in contact with the feed roller 15 is pressed against the feed roller 15 by the driven roller 16.

  As shown in FIG. 4B, the driven roller 16 is provided with a rotating dog 16a that rotates integrally. The rotating dog 16a is provided with slits at a constant pitch on the outer peripheral portion of the disk member, and a photosensor 19 having the slit as a detection position is disposed on the outer peripheral portion. The amount of rotation of the driven roller 16 can be detected by detecting the number of times the photosensor 19 is turned on and off by the rotation of the slit by the control unit 16b.

  When the wiper tape 10 is fed, the driven roller 16 rotates together with the tape feed. Therefore, by detecting the rotation amount of the driven roller 16, the feed amount of the wiper tape 10 can be detected. The controller 16b determines the amount of feed of the wiper tape 10 from the detected amount of rotation of the driven roller 16, and controls the drive of the motor 42 based on this. Therefore, the rotation dog 16a, the photo sensor 19 and the control unit 16b serve as a feed amount detecting means for detecting the tape feed amount by detecting the rotation amount of the driven roller 16. Thus, by detecting the tape feed amount from the rotation amount of the driven roller 16, the tape feed amount is obtained regardless of the slip that occurs between the feed roller 15 and the wiper tape 10 due to the reverse tension applied to the wiper tape 10. Can be detected correctly.

  In the present embodiment, the position of the tape feeding mechanism 12A on the feeding path of the wiper tape 10 is set on the upstream side of the pressing element 8A, but the tape feeding mechanism is arranged on the downstream side of the pressing element 8A. It may be. However, in this case, since the wiper tape 10 after use is sandwiched between the feed roller and the driven roller, the tape feed mechanism is contaminated by contaminants adhering to the wiper tape 10 or cleaning agent applied at the cleaning position. There is a risk of being. For this reason, it is desirable to arrange the tape feeding mechanism on the upstream side of the pressing element 8A.

  Next, with reference to FIG. 5, the presser 8 </ b> A (8 </ b> B) that presses the wiper tape 10 against the cleaning portion at the edge of the substrate will be described. FIG.5 (b) has shown the AA cross section of Fig.5 (a). As shown in FIGS. 5A and 5B, the pressing element 8A has a wedge shape having an acute edge portion 52 around which the wiper tape 10 fed from the tape feeding mechanism circulates. The wiper tape 10 that has been fed is guided to the guide portions 50 provided on both sides and fed along the wedge surface 51.

  On the wedge surface 51 on the upstream side in the tape feeding direction of the edge portion 52, a discharge hole 53 for discharging a cleaning detergent is opened. The discharge hole 53 communicates with the cleaning agent injection hole 55 through the inner hole 54, and the cleaning agent injection hole 55 is connected to the cleaning agent discharge unit 56 through a pipe line. The cleaning agent discharge unit 56 discharges the cleaning agent with a predetermined pressure and a predetermined discharge pattern.

  In a state where the wiper tape 10 is mounted around the presser 8A, the cleaning agent is discharged from the discharge hole 53 of the wedge surface 51 and is in contact with the wedge surface 51 by driving the cleaning agent discharge unit 56. A cleaning agent is applied to 10. In this state, the tape is fed by the tape feeding mechanism 12A, so that the wiper tape 10 in which the cleaning agent is reliably applied is positioned on the outer periphery of the edge portion 52. As a result, the wiper tape 10 sufficiently coated with the cleaning agent can be pressed against the stepped portion (see FIG. 6) of the double-layered substrate that is most difficult to clean in the cleaning of the display panel 6 to perform good cleaning. it can.

This glass substrate cleaning apparatus is configured as described above, and the cleaning operation will be described below with reference to the drawings. First, in FIG. 1, the display panel 6 is placed on the substrate holding unit 5, and then the moving table 4 is driven to align the edge 6 a of the display panel 6 with the end cleaning unit 3. That is, as shown in FIG. 6 (a), the clamp member 28 is closed and the height position of the chuck mechanism 9 is fixed at the original height position, and the rod 26a of the cylinder 26 is protruded to push the pusher. With the 8A and 8B opened, the display panel 6 is moved in the Y direction, and the end 6a is advanced to the cleaning position between the pressers 8A and 8B.

  At this time, the cleaning agent is applied to the wiper tape 10 in a state of being fed to the pressing elements 8A and 8B. That is, the cleaning agent is discharged from the discharge hole 53 to the wiper tape 10 in a range in contact with the wedge surface 51 on the upstream side of the edge portion 52 (see FIG. 5). Further, by feeding the wiper tape 10 further, the wiper tape 10 to which the cleaning agent has been applied circulates around the outer periphery of the edge portion 52.

  Thereafter, as shown in FIG. 6B, the clamp of the leaf spring member 13 by the clamp member 28 is released. As a result, the chuck mechanism 9 is in a floating state in which it is elastically supported by the leaf spring member 13. Next, the rod 26a of the cylinder 26 is immersed and the pressers 8A and 8B are closed. As a result, the wiper tape 10 is pressed against the upper and lower surfaces of the edge portion 6a of the display panel 6 so that cleaning is possible.

  Next, the moving table 4 is driven to move the display panel 6 horizontally relative to the wiper tape 10 in the X direction. As a result, the surface deposit on the edge 6a of the display panel 6 is removed by the wiper tape 10, and the terminals formed on the edge are cleaned. At this time, the edge portion 52 of the pressing element 8A can sufficiently perform cleaning up to the vicinity of the stepped portion.

  In this cleaning operation, there may be a displacement in the height direction at the cleaning site where the pressing elements 8A and 8B press the edge 6a due to deformation of the edge 6a. Even in such a case, since the chuck mechanism 9 is elastically supported by the leaf spring member 13, as shown in FIG. 6C, the chuck mechanism 9 is displaced in the vertical direction following the displacement. Is allowed to do.

  A restoring force that restores this displacement is applied to the chuck mechanism 9 that has been displaced in the vertical direction from the original height position, and the chuck mechanism 9 is relatively moved to a position where there is no positional deviation in the height direction of the edge 6a. Then, the chuck mechanism 9 returns to the original height position. Thus, in the cleaning operation, the chuck mechanism 9 is displaced in accordance with the position of the edge 6a in the height direction, and always holds the edge 6a at the position of the center line CL. Accordingly, the display panel 6 is not subjected to a bending load generated by pressing one of the pressing elements 8A and 8B with a larger pressing force. When the cleaning is completed, the chuck mechanism 9 is opened, the clamp member 28 is closed, and the chuck mechanism 9 is fixedly supported at a predetermined height position in a floating state.

  That is, by adopting the configuration shown in the present embodiment, even if the height of the edge 6a is partially different in the same display panel 6, the height difference is caused by the leaf spring member 13. Is absorbed, and the edge portion 6a can be cleaned in an always good state. Thereby, a bending load does not act on the display panel 6 in the cleaning operation, and the display panel 6 is not damaged by the excessive bending load and the display panel 6 is not displaced on the substrate holding portion 5. Therefore, it is possible to improve the product yield and prevent problems in the subsequent process due to the positional deviation.

  According to the present invention, the surface deposit on the edge of the glass substrate can be cleaned and removed with the tape-shaped cleaning material, which is useful as a cleaning device for a glass substrate such as a display panel.

The side view of the cleaning apparatus of the glass substrate of one embodiment of this invention The side view of the chuck | zipper mechanism of the cleaning apparatus of the glass substrate of one embodiment of this invention 1 is a layout diagram of a tape feed drive system of a glass substrate cleaning apparatus according to an embodiment of the present invention. The fragmentary sectional view of the tape feed drive system of the cleaning device of the glass substrate of one embodiment of the present invention Explanatory drawing of the presser of the cleaning apparatus of the glass substrate of one embodiment of this invention Process explanatory drawing of the cleaning method of the glass substrate of one embodiment of this invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 2 Positioning part 3 Terminal cleaning part 6 Display panel 8A, 8B Presser 9 Chuck mechanism 10 Wiper tape 11A, 11B Supply reel 12A, 12B Tape feed mechanism 14A, 14B Take-up reel 15 Feed roller 16 Drive roller

Claims (2)

  A glass substrate cleaning device that removes surface deposits on the edge of a glass substrate with a tape cleaning material, the supply reel supplying the tape cleaning material in a wound state, and the tape cleaning material supplying reel A tape feeding means for pulling out and feeding the tape, a feed amount detecting means for detecting the tape feeding amount by the tape feeding means, and applying a tension in a direction opposite to the feeding direction to the tape-shaped cleaning material drawn from the supply reel. A tension applying means, a tension defining means for defining an upper limit value of the tension, a pressing member that presses the drawn tape-shaped cleaning material against the edge, and a take-up reel that winds up the tape-shaped cleaning material after use. A take-up drive means for rotating the take-up reel, and a take-up force regulation for defining an upper limit value of the take-up force of the tape-like cleaning material by the take-up reel. Means, a holding means for holding the glass substrate, a moving means for moving the holding means relative to the pressing element, and a pair of the pressing elements, and the pair of pressing elements are driven to open and close. A chuck mechanism and a chuck support means that elastically supports the chuck mechanism at a predetermined height position, and the chuck mechanism is held by a guide rail and a slider so as to be movable in the vertical direction. Glass substrate cleaning device. The chuck support means comprises a leaf spring member having one end cantilevered to a fixed block, and a pair of upper and lower rollers for clamping the free end of the leaf spring member from above and below without restricting relative displacement in the horizontal direction. The glass substrate cleaning apparatus according to claim 1.

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