JP5285783B2 - Wiping cleaning device and wiping cleaning method - Google Patents

Abstract

The disclosed wiping device comprises a first pressing head; a second pressing head which is disposed so as to be capable of vertical movement at a position adjacent to a first pressing head on the downstream side thereof in the direction in which a display panel is transported, and which presses a long sheet against the panel by moving downward; and a sheet-reversing means for reversing the long sheet so that the surface that is pressed against the terminal portion of the panel by the first pressing head is the reverse surface from the surface that is pressed against the terminal portion of the panel by the second pressing head. In the process of transporting the display panel in the transportation direction, the long sheet is made to slide across the terminal portion of the panel with a prescribed pressing force while in a dry state, before the cleaning liquid is supplied thereto via the cleaning liquid feeding nozzle, in order to wipe moisture from the terminal portion of the panel.

Description

  The present invention relates to a wiping cleaning device and a wiping cleaning method.

  Conventionally, in the manufacture of liquid crystal display devices, etc., in order to improve the quality and yield in the mounting process of mounting IC (Integrated Circuit) chips, wiring boards, etc. on the terminal part formed on the edge of the glass substrate Prior to the mounting process, a cleaning process for removing foreign substances adhering to the terminal forming surface of the glass substrate is employed.

  As a cleaning device used in such a cleaning process, a device for wiping and cleaning using a tape-like long sheet is known. For example, Patent Document 1 discloses that a cleaning liquid is supplied to both surfaces of a flat plate while a flat plate that is an object to be processed is advanced, and the flat plate is sandwiched from the front and back sides via a pair of press rollers. While pressing the scouring tape (long sheet), the scouring tape is run in the direction opposite to the forward direction of the flat plate, and the scouring tape pressed against one side of this flat plate is further reciprocated in the horizontal direction to A cleaning device that cleans both sides simultaneously is disclosed. And according to this, it describes that both surfaces of a flat plate can be highly flat and cleaned in a short time.

JP 2001-62696 A

  However, since the cleaning apparatus as described above wipes and cleans using a cleaning liquid, the cleaned substrate surface becomes wet, and there is a possibility that floating foreign substances may reattach during transfer to the next process such as a mounting process. When foreign matter reattaches to the terminal formation surface of the substrate, a connection failure occurs between the IC chip or wiring substrate mounted on the terminal formation surface and the terminal on the substrate, and the manufacturing yield decreases. .

  Therefore, in order to prevent reattachment of foreign matter to the substrate surface, it is conceivable to wipe off the moisture on the substrate surface after wiping and cleaning using a cleaning solution. If a moisture wiping sheet is added to the cleaning device separately from the sheet, these two sheets are required, which increases the running cost.

  This invention is made | formed in view of such a point, The place made into the objective is to prevent the reattachment of the foreign material to a to-be-processed object at low cost.

  In order to achieve the above-described object, the present invention provides a processing object after wiping off foreign matter with the long sheet in a dry state after wiping off foreign matter adhering to the processing target with a long sheet impregnated with a cleaning liquid. The moisture is wiped off.

  Specifically, the present invention includes a conveying unit that conveys the object to be processed along the conveying path to the cleaning work position, and a sheet feeding unit that is provided above the side of the conveying path and feeds a tape-like long sheet. A first unit that is disposed close to the feeding unit and above the conveyance path of the cleaning work position so as to be vertically movable, and presses the long sheet fed from the sheet feeding unit against the object to be processed on the conveying unit by moving downward. A pressing head and cleaning liquid supply means for supplying the long sheet with a cleaning liquid in the vicinity of the first pressing head, and moving the processing object in the transport direction and the first pressing head of the processing object. In the process of performing at least one of the movements in the counter-conveying direction, the long sheet impregnated with the cleaning liquid is slid against the object to be processed with a predetermined pressing force, thereby removing the foreign matter adhering to the object to be processed. Wipe off The cleaning device is intended, in which took following solutions.

  That is, according to the first aspect of the present invention, the second pressing unit is arranged in parallel with the first pressing head on the downstream side in the transport direction of the object to be processed, and presses the long sheet against the object to be processed by moving downward. The long sheet so that the pressing surface of the pressing sheet, the pressing surface of the long pressing sheet to the object to be processed by the first pressing head, and the pressing surface of the second pressing head to the object to be processed are opposite to each other. A sheet reversing means for reversing the process, and in the process of performing at least one of the movement of the object to be processed in the transport direction and the movement of the second pressing head in the counter-conveyance direction of the object to be processed The long sheet in a dry state before the cleaning liquid is supplied by the supply means or the long sheet in a state where the cleaning liquid impregnated through the first pressing head is dried is slid on the object to be processed with a predetermined pressing force. By, characterized in that it is configured to wipe moisture 該被 processed.

  According to a second invention, in the first invention, the long sheet is composed of cloths having different surface roughnesses on one surface and the other surface, and the long sheet surface having the smaller surface roughness It is characterized by wiping off foreign matter adhering to the object to be treated and wiping the moisture of the object to be treated by the long sheet surface having the larger surface roughness.

  According to a third invention, in the first or second invention, the long sheet is wound around the first pressing head and the second pressing head so as to be fed from the upper part of the head through the head tip part and the lower part of the head in order. The sheet reversing means is provided with a first reversing guide roller provided on the rear side of the first pressing head and a second reversing guide roller provided on the rear side of the second pressing head. A reversing guide roller and a second reversing guide roller are arranged in a letter C shape with a gap extending toward the conveying means, and the first pressing head is driven by the first reversing guide roller and the second reversing guide roller. And the second pressing head is configured such that the long sheet is reversed and passed from one to the other.

  In a fourth aspect based on any one of the first to third aspects, the sheet feeding means, the first pressing head, the cleaning liquid supplying means, the second pressing head, and the sheet reversing means are arranged at the cleaning work position. It is provided also under the said conveyance means so that it may become symmetrical with respect to the to-be-processed object on the said conveyance means in.

  Further, the present invention is also directed to a wiping cleaning method for wiping off foreign matters adhering to the object to be processed.

  That is, according to a fifth aspect of the present invention, in the wiping cleaning method, the tape-like long sheet fed from the sheet feeding unit is sequentially passed over the second pressing head and the first pressing head, and the first pressing head is The long sheet is passed over and the long sheet is impregnated and supplied with a cleaning liquid, and the long sheet impregnated with the cleaning liquid is pressed against the target object by the first pressing head and slid. The foreign matter adhering to the substrate is wiped off, and the long sheet in a dry state before the cleaning liquid is supplied is pressed against the target object after the foreign matter has been wiped by the second pressing head and slid. It is characterized by wiping off moisture.

  In a sixth aspect based on the fifth aspect, when the long sheet that has passed through the second pressing head is passed over the first pressing head, the long sheet is transferred to the object to be processed by the first pressing head. The long sheet is inverted so that the pressing surface of the second pressing head and the pressing surface of the second pressing head against the object to be processed are opposite to each other.

  According to a seventh aspect of the present invention, in the wiping cleaning method, the tape-like long sheet fed from the sheet feeding means is sequentially passed over the first pressing head and the second pressing head, and the first pressing head is The long sheet is passed over and the long sheet is impregnated and supplied with a cleaning liquid, and the long sheet impregnated with the cleaning liquid is pressed against the target object by the first pressing head and slid. The long sheet having passed through the first pressing head is reversed and dried, and the inverted long sheet is wiped by the second pressing head onto the object to be treated. It is characterized in that the moisture of the object to be treated is wiped off by pressing and sliding.

-Action-
Next, the operation of the present invention will be described.

  According to the first to seventh inventions, the long sheet impregnated with the cleaning liquid is pressed against the object to be processed by the first pressing head and slid to clean the foreign matter adhering to the object to be processed. The next step after this cleaning step is to wipe the moisture of the object to be processed by sliding the long sheet in the dry state against the object to be processed in the wet state after wiping off the foreign matter by the second pressing head. Thus, floating foreign matters are prevented from re-adhering to the object to be processed while the object is being conveyed. Furthermore, the foreign object wiping sheet and the moisture wiping sheet are separated from each other in order to continuously wipe off the foreign substance using the cleaning liquid and the wiping of moisture with a single long sheet. The running cost is reduced as compared with the case where preparation is performed. Therefore, it is possible to prevent the reattachment of foreign matter to the object to be processed at low cost.

  In addition, according to the first invention, the pressing surface of the long sheet to the object to be processed by the first pressing head and the pressing surface to the object to be processed by the second pressing head are opposite surfaces by the sheet reversing means. As a result, the one side and the other side of the long sheet can be used separately for wiping off foreign matter using a cleaning liquid and wiping off moisture, so wiping off the foreign matter using a cleaning liquid with one long sheet. And the wiping of moisture can be satisfactorily performed on the workpiece.

  That is, when the long sheet in a dry state before the cleaning liquid is supplied is pressed against the object to be processed by the second pressing head, the long sheet passes through the second pressing head and then passes through the first pressing head. Will be sent. In this case, even if the foreign material that could not be wiped off with the long sheet by the first pressing head was wiped off with the long sheet by the second pressing head together with moisture, the long sheet was later sent to the first pressing head and the foreign object. When the surface of the long sheet is wiped off, the foreign matter wiping surface of the long sheet is the unused surface after reversal, so that the foreign matter previously wiped off the long sheet by the second pressing head is transferred to the object to be reattached. There is no. On the other hand, when a long sheet in which the cleaning liquid impregnated through the first pressing head is dried is pressed against the object to be processed by the second pressing head and then slid, the long sheet passes through the first pressing head. It will be sent to the second pressing head. In this case, when wiping moisture with the long sheet by the second pressing head, the moisture wiping surface of the long sheet is an unused surface after reversal. Therefore, the first pressing head first precedes the long sheet with the long sheet. The wiped foreign matter is not transferred and reattached to the object. Therefore, in any case, the object to be processed can be wiped off with a single long sheet using the cleaning liquid and the moisture can be wiped off satisfactorily.

  According to the second aspect of the invention, since the foreign matter adhering to the object to be processed is wiped off by the long sheet surface having the smaller surface roughness, the cleaning liquid penetrates even a fine step such as a terminal pattern, and the object to be processed is made high. It becomes possible to wipe and clean to a high quality. Furthermore, if the surface roughness of the long sheet surface that wipes off foreign matter is small, the frictional resistance between the long sheet surface and the surface of the object to be processed becomes relatively high, but the long sheet is impregnated with the cleaning liquid. It is reduced by doing. Therefore, by wiping off the foreign matter adhering to the object to be processed with a long sheet, the object to be processed is prevented from being displaced from a predetermined position and the surface of the object to be processed is not damaged, and the generation of static electricity due to the friction is prevented. Reduced. In addition, since the moisture of the object to be processed is wiped off by the long sheet surface having the larger surface roughness, the frictional resistance between the long sheet surface and the object surface is relatively low even in the dry state. The body is prevented from shifting from a predetermined position and the surface of the object to be processed is prevented from being damaged, and generation of static electricity due to the friction is reduced.

  According to the third aspect, since the sheet reversing means is realized by a simple configuration using a pair of guide rollers, the configuration of the wiping cleaning device can be simplified.

  By the way, the foreign matter adhering to the back surface of the object to be processed does not directly relate to the connection when the mounting component is mounted on the surface of the object to be processed, but the mounting of the mounting component on the surface of the object to be processed supports the back surface. For this reason, there is a possibility that an error occurs in the parallelism between the object to be processed and the mounted component, and the mounted component may be poorly connected to the object to be processed.

  On the other hand, according to the fourth aspect of the present invention, it is possible to continuously perform the wiping of foreign matters and the wiping of moisture using the cleaning liquid in parallel on both the front and back surfaces of the object to be processed. The both surfaces of the object to be processed can be efficiently wiped and cleaned. As a result, foreign matters are adhered to the back surface of the object to be processed, so that it is possible to prevent a bad influence on the connection of the mounting component when mounting the mounting part performed by supporting the back surface of the object to be processed. It becomes possible to more securely connect the mounting component to the surface. Furthermore, since it has the same structure which becomes symmetrical by the upper direction and the downward direction with respect to the to-be-processed object on the conveyance means in a cleaning operation position, a wiping cleaning apparatus is realizable with a simple structure.

  According to the sixth invention, the first pressing head causes the first pressing head to slide the surface opposite to the pressing surface of the long sheet to the processing target by the second pressing head onto the processing target. Even if the foreign matter that could not be wiped off with the long sheet was wiped off with moisture by the second pressing head with the long sheet, when the long sheet was later sent to the first pressing head and wiped off the foreign matter on one side, The foreign matter wiping surface is an unused surface after reversal. For this reason, the foreign matter wiped off the other side of the long sheet is not transferred to the object to be reattached, and the single long sheet wipes off the foreign matter using the cleaning liquid and wipes off the moisture. Can be satisfactorily performed on the workpiece.

  According to the seventh aspect of the invention, the long sheet in a state where it is reversed after passing through the first pressing head and the cleaning liquid is dried is slid on the object to be processed by the second pressing head. When wiping moisture, the moisture wiping surface is an unused surface after inversion. For this reason, the foreign matter wiped on the other surface of the long sheet is not transferred to the object to be reattached, and the single long sheet wipes off the foreign matter using the cleaning liquid and the moisture. It can be performed well on the workpiece.

  According to the present invention, after wiping off the foreign matter adhering to the object to be processed by the long sheet impregnated with the cleaning liquid, the moisture of the object to be processed after wiping off the foreign object is wiped off by the long sheet in the dry state. It is possible to prevent reattachment of foreign matters to the object to be processed at a cost. Thereby, for example, when wiping and cleaning the terminal part of the display panel, it is possible to realize a good connection between the mounting part such as an IC chip and a wiring board mounted on the display panel and the panel terminal part, and as a result, display The manufacturing yield of the apparatus can be improved.

FIG. 1 is a perspective view schematically showing the wiping and cleaning device of the first embodiment. FIG. 2 is an enlarged perspective view illustrating a wiping cleaning operation in the wiping cleaning device of the first embodiment. FIG. 3 is a perspective view schematically showing a liquid crystal display panel cleaned using a wiping cleaning device. FIG. 4 is a perspective view schematically showing a liquid crystal display device manufactured using a wiping cleaning device. FIG. 5 is a perspective view schematically showing the wiping cleaning device of the second embodiment.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the following embodiments.

Embodiment 1 of the Invention
The wiping and cleaning apparatus of the present embodiment includes, for example, particles attached to terminal portions of a plate-shaped object such as a liquid crystal display panel, an organic EL (ElectroLuminescence) display panel, a plasma display panel, or a display panel, or a wiring board. It is a device that wipes and cleans foreign matter with a sheet. In this embodiment, a liquid crystal display panel in which a terminal portion is formed on one side of an edge portion will be described as an example of the object to be processed.

<Configuration of LCD panel>
An overall perspective view of the liquid crystal display panel P is shown in FIG.

  The liquid crystal display panel P includes a TFT substrate 1 provided with TFTs (Thin Film Transistors) and the like, and a color filter substrate 2 provided with color filters and the like through a frame-shaped sealing material 4 enclosing the liquid crystal layer 3. And have a laminated structure. One side of the edge of the TFT substrate 1 protrudes from the color filter substrate 2, and the protruding portion constitutes a terminal portion (hereinafter also referred to as a panel terminal portion) 1t. The panel terminal portion 1t has a terminal-forming surface on the surface of the color filter substrate 2, and although not shown, a plurality of terminals for connecting to the IC chip and the wiring substrate are externally provided on the terminal-forming surface. It is exposed and formed.

<Schematic configuration of wiping and cleaning device>
An overall perspective view of the wiping and cleaning apparatus S according to this embodiment is shown in FIG.

  The wiping / cleaning device S is a wiping / cleaning unit 15 for wiping and cleaning a conveying means for conveying a liquid crystal display panel (hereinafter simply referred to as a display panel) P and a terminal portion 1t of the display panel P on the conveying means. And.

<Configuration of the transport means>
The transport means includes a transport stage 10 on which the display panel P is placed with the terminal forming surface facing upward so that the terminal portion 1t projects to the wiping cleaning unit 15 side, and a transport path (hereinafter, stage transport). A horizontal movement mechanism (not shown) that horizontally moves along a path), and an elevation movement mechanism (not shown) that moves the conveyance stage 10 up and down.

  The transport stage 10 has a plurality of suction ports (not shown) connected to vacuum suction means such as a vacuum pump formed on the upper surface, and sucks and holds the mounted display panel P by driving the vacuum suction means. It is configured as follows. The transfer stage 10 can be attached to and detached from the horizontal movement mechanism and the up-and-down movement mechanism, and the transfer stage 10 having an appropriate size can be adopted according to the size of the display panel P.

  The horizontal movement mechanism is such that the terminal portion 1t that projects the display panel P placed on the upper surface to the outside of the transfer stage 10 is a cleaning work position by the wiping cleaning unit 15 (a position where it overlaps a first pressing head or a second pressing head described later). ) Through the conveying direction perpendicular to the protruding direction of the terminal portion 1t (hereinafter referred to as the terminal portion protruding direction). 1 indicates the moving direction of the transfer stage 10, that is, the transfer direction of the display panel P (hereinafter referred to as the panel transfer direction). On the other hand, the elevation moving mechanism adjusts its height position to a predetermined position with respect to the wiping cleaning unit 15 according to the thickness of the terminal portion 1t (TFT substrate 1) of the display panel P held on the transport stage 10. Is configured to do.

<Schematic configuration of the wiping cleaning unit 15>
The wiping and cleaning unit 15 is provided close to the side of the stage conveyance path at the cleaning work position, and wipes and cleans the surface of the terminal part 1t of the display panel P and the terminal part 1t of the display panel P. The rear surface cleaning mechanism 20B wipes and cleans the rear surface.

<Configuration of surface cleaning mechanism 20A>
The surface cleaning mechanism 20A as a whole is provided above the side of the stage conveyance path, and includes a first pressing head 23 and a second pressing head 25 that are disposed close to the stage conveyance path at the cleaning work position, and a second pressing head 25. Provided between the feeding reel 21 provided above the rear side of the pressing head 25, the take-up reel 22 provided above the rear side of the first pressing head 23, and the first pressing head 23 and the take-up reel 22. The first reverse guide roller 26a, the second reverse guide roller 26b provided below the supply reel 21 on the rear side of the second pressing head 25, and provided between the supply reel 21 and the second reverse guide roller 26b. A plurality of first guide rollers 27 and a second guide roller 28 provided below the take-up reel 22 on the rear side of the first pressing head 23. There.

  The feeding reel 21 and the take-up reel 22 constitute sheet feeding means for feeding the tape-like long sheet 6. The feeding reel 21 is held so that the rotating shaft is in a direction parallel to the panel conveying direction in a state where the unused long sheet 6 is wound, and the long sheet 6 is fed out. The take-up reel 22 is arranged so that the rotation axis of the take-up reel 21 is parallel to the take-up reel 21 so that the used long sheet 6 passed through the first pressing head 23 and the second pressing head 25 can be taken up after being fed from the supply reel 21. Is held in.

  The long sheet 6 is a woven fabric having a liquid impregnation property woven by a technique such as so-called twill weaving or twill weaving, and the roughness of the weave is different on one side and the other side. As a result, the long sheet 6 has a surface roughness on one side with fine texture (the white surface in FIG. 1) smaller than the surface roughness on the other side with rough texture (the hatched surface in FIG. 1). . Although the long sheet 6 is a woven fabric, it may be a knitted fabric or a nonwoven fabric woven with synthetic fibers, and may be a sheet having liquid impregnation properties.

  The first pressing head 23 and the second pressing head 25 are juxtaposed in the panel transport direction so that the front ends thereof are directed to the stage transport path side, and the first pressing head 23 is upstream of the panel transport direction, and the second pressing head 25. Are provided on the downstream side in the panel conveying direction. Further, the first pressing head 23 and the second pressing head 25 are configured to be able to move up and down independently, and before the panel terminal portion 1t is cleaned, the display panel P on the transport stage 10 at the cleaning position is cleaned. It is arranged at an initial position spaced upward from the same height position as the surface of the terminal portion 1t. And the 1st pressing head 23 and the 2nd pressing head 25 press the elongate sheet 6 by predetermined | prescribed pressing force to the panel terminal part 1t by a downward movement.

  A pair of guide pieces (shown in FIG. 2) 23g and 25g are provided on the upper portions of the first pressing head 23 and the second pressing head 25 so that both side surfaces protrude upward and restrict the displacement of the long sheet 6 in the sheet width direction. Is configured. Further, a cleaning liquid supply nozzle 24 which is a cleaning liquid supply means for supplying the long sheet 6 with the cleaning liquid is connected to a side portion of the first pressing head 23.

  The cleaning liquid supply nozzle 24 supplies an organic solvent or ozone liquid to the first pressing head 23 as the cleaning liquid. On the upper surface 23s of the first pressing head 23, there is formed a discharge port 23h for discharging the cleaning liquid supplied from the cleaning liquid supply nozzle 24 toward the long sheet 6 through a flow path formed inside the head. . Then, the long sheet 6 passing through the upper surface 23s of the first pressing head 23 is supplied by impregnating the organic solvent from the opposite surface side to the contact surface side with the panel terminal portion 1t by the cleaning liquid supply nozzle 24. It has become. Here, when an organic solvent such as ethanol or IPA (Isopropyl Alcohol) is used as the cleaning liquid, it can be effectively removed not only when dust and glass fragments on the panel terminal 1t but also when oil is attached. Is possible.

  The first reversing guide roller 26a and the second reversing guide roller 26b are configured such that the surface opposite to the pressing surface of the long sheet 6 to the panel terminal portion 1t by the second pressing head 25 is the panel terminal portion by the first pressing head 23. The sheet reversing means 26 for reversing the long sheet 6 is configured so as to be a pressing surface against 1t. The first reversing guide roller 26a and the second reversing guide roller 26b are arranged in a letter C shape in which the distance between them increases toward the stage conveyance path side.

  Then, the long sheet 6 fed out from the feeding reel 21 is wound around each second guide head 27 so as to be wound around the second pressing head 25 while maintaining a predetermined tension. In the second pressing head 25, the long sheet 6 is fed from the upper part of the head through the head tip part and the lower part of the head in order, and the long sheet surface with the smaller surface roughness is the outer surface, that is, the panel terminal part. It is wound in parallel to the protruding direction of the terminal portion so as to be a pressing surface to 1t. The long sheet 6 that is wound around the second pressing head 25 and folded back to the head is placed on the first reverse guide roller 26a with the pressing surface of the second pressing head 23 against the panel terminal portion 1t facing upward. It is hung around the second reversing guide roller 26b so as to be hung. The long sheet 6 hung from the second reversing guide roller 26 b to the first reversing guide roller 26 a is hung so that the upper side surface and the lower side surface are reversed and hung on the first pressing head 23. The first pressing head 23 is such that the long sheet 6 is fed from the upper part of the head through the head tip part and the lower part of the head in order, and the long sheet surface having the larger surface roughness reversed by the sheet reversing means 26. Is wound in parallel with the protruding direction of the terminal portion so as to be the outer surface (the pressing surface to the panel terminal portion 1t). The long sheet 6 wound around the first pressing head 23 and folded back to the back of the head is wound so as to be wound around the take-up reel 22 while maintaining a predetermined tension via the second guide roller 28. Turned.

<Operation of surface cleaning mechanism 20A>
In the surface cleaning mechanism 20A having the above-described configuration, by driving the feeding reel 21 and the take-up reel 22, the long sheet 6 is sequentially fed through the first guide rollers 27 and the second pressing head 25, and then, The one surface and the other surface are reversed in the course of being sent to the second reversing guide roller 26b and the first reversing guide roller 26a in order, and then fed sequentially through the first pressing head 23 and the second guide roller 28. Then, it travels so as to be taken up by the take-up reel 22. In FIG. 1, arrows on the side of the supply reel 21, the take-up reel 22, and the guide rollers 26a, 26b, 27, and 28 indicate the respective rotation directions. Then, in the process in which the display panel P on the transport stage 10 passes the cleaning work position by transport, the first pressing head 23 is moved downward with the long sheet 6 running as described above, and the cleaning liquid is impregnated. The one surface (surface with the smaller surface roughness) of the long sheet 6 is pressed against the panel terminal portion 1t and slid to wipe off foreign matter on the surface of the panel terminal portion 1t. Further, the second pressing head 25 is moved downward, and the other surface (the surface with the larger surface roughness) of the long sheet 6 in the dry state on the upstream side in the sheet running direction before supplying the cleaning liquid is wiped with foreign matter. By pressing and sliding on the surface of the terminal portion 1t, moisture on the surface of the panel terminal portion 1t is wiped off.

<Configuration and operation of back surface cleaning mechanism 20B>
The back surface cleaning mechanism 20B as a whole is provided below the side of the stage conveyance path, and is similar to the front surface cleaning mechanism 20A, such as a feeding reel 21, a take-up reel 22, a first pressing head 23, a cleaning liquid supply nozzle 24, and a second. A pressing head 25, a sheet reversing means 26 (first reversing guide roller 26a and second reversing guide roller 26b), a first guide roller 27 and a second guide roller 28 are provided, and these are displayed on the conveying stage 10 at the cleaning work position. The upper and lower sides of the panel P are provided so as to be symmetrical with the surface cleaning mechanism 20A. Here, elements common to the front surface cleaning mechanism 20A in the rear surface cleaning mechanism 20B are denoted by the same reference numerals in FIG. 1 and description thereof is omitted.

  In the back surface cleaning mechanism 20B having such a configuration, in a process in which the display panel P on the transport stage 10 passes through the cleaning work position by transport, the long sheet 6 is caused to travel in synchronization with the front surface cleaning mechanism 20A. The first pressing head 23 is moved upward, and the one side (the surface with the smaller surface roughness) of the long sheet 6 impregnated with the cleaning liquid is pressed against the panel terminal 1t and slid, thereby the panel terminal portion. Wipe off foreign matter on the back of the 1t. Further, the second pressing head 25 is moved upward, and the other surface (the surface having the larger surface roughness) of the long sheet 6 in the dry state on the upstream side in the sheet running direction before supplying the cleaning liquid is wiped with foreign matter. By pressing and sliding on the surface of the terminal portion 1t, moisture on the back surface of the panel terminal portion 1t is wiped off.

-Cleaning method-
Next, a method of wiping and cleaning the terminal portion 1t of the display panel P using the wiping and cleaning device S will be described with reference to FIGS. FIG. 2 is a perspective view showing the wiping / cleaning operation of the wiping / cleaning apparatus S. FIG. In FIG. 2, the configuration of the back surface cleaning mechanism 20B is omitted. Further, the arrow on the long sheet 6 in FIG. 2 indicates the sheet traveling direction.

  First, as shown in FIG. 1, the display panel P, which is the object to be processed, is wiped to the cleaning unit 15 side by the transfer robot or the like on the transfer stage 10 in the initial position on the upper side in the panel transfer direction. The terminal portion 1t is placed so as to protrude, and then the vacuum suction means connected to the transfer stage 10 is driven to discharge air between the transfer stage 10 and the display panel P from each suction port. Then, the display panel P is sucked and held on the surface of the transfer stage 10. At this stage, the supply reel 21 and the take-up reel 22 are not driven, and the long sheet 6 is not in a traveling state.

  Next, by driving the lifting / lowering mechanism, the height position of the display panel P on the transport stage 10 is adjusted to a predetermined position according to the thickness of the panel terminal portion 1t. At the same time, by driving the horizontal movement mechanism, the display panel P held on the transport stage 10 is transported to a cleaning work position where the terminal portion 1 t overlaps each first pressing head 23.

  When the first pressing heads 23 are positioned above and below the upstream end of the panel terminal portion 1t that projects to the outside of the transport stage 10, the both reels 21 and take-up reels are used in the cleaning mechanisms 20A and 20B. By driving 22, the long sheet 6 is caused to travel over the second pressing head 25 and the first pressing head 23 in order. By this sheet running operation, the long sheet 6 fed from the feeding reel 21 is passed over the second pressing head 25 in a dry state before the cleaning liquid is supplied, and after passing through the second pressing head 25, the first pressing is performed. At that time, one side and the other side of the sheet are reversed by the sheet reversing means 26, and the first pressing head 23 is stretched and impregnated with the cleaning liquid on the head upper surface 23s or the head lower surface. After passing through the first pressing head 23, it is taken up on the take-up reel 22.

  At this time, the first pressing head 23 of the front surface cleaning mechanism 20A is moved downward, and the first pressing head 23 of the back surface cleaning mechanism 20B is moved upward in synchronization therewith. As a result, the first pressing head 23 sandwiches the panel terminal portion 1t and presses the long sheet 6 impregnated with the cleaning liquid on the front and back surfaces thereof. With the long sheet 6 in the running state pressed against both sides of the panel terminal portion 1t in this way, the display panel P on the transport stage 10 is further transported along the transport path by continuously driving the horizontal movement mechanism. Then, the first pressing head 23 is placed along the panel terminal portion 1t. In that process, the one side (surface with the smaller surface roughness) of the long sheet 6 impregnated with the cleaning liquid is slid on both sides of the panel terminal portion 1t to wipe off foreign matter on both sides of the panel terminal portion 1t.

  Furthermore, when each 2nd pressing head 25 is located above and below the panel terminal part 1t part after foreign substance wiping, as shown in FIG. 2, the 2nd pressing head 25 of the surface cleaning mechanism 20A is moved downward, and it synchronizes with it. Then, the second pressing head 25 of the back surface cleaning mechanism 20B is moved upward. As a result, the panel terminal portion 1t is sandwiched between the second pressing heads 25, and the long sheet 6 in a dry state before supplying the cleaning liquid is pressed against the front and back surfaces thereof. Then, in a state where the long sheet 6 in the running state is pressed against both surfaces of the panel terminal portion 1t, each second pressing head 25 is also along the panel terminal portion 1t on the downstream side in the panel conveying direction together with each first pressing head 23. . In that process, the other side (the surface with the larger surface roughness) of the long sheet 6 in the dry state before supplying the cleaning liquid is slid on both sides of the panel terminal portion 1t in the wet state after wiping off foreign matter. To wipe the moisture on both sides of the panel terminal portion 1t.

  In this way, when the panel terminal portion 1t passes through the cleaning work position, the foreign matter and the moisture are wiped sequentially in sequence on the front and back surfaces of the panel terminal portion 1t. When the panel terminal portion 1t passes the cleaning work position, the driving of the feeding reel 21 and the take-up reel 22 is stopped in both the cleaning mechanisms 20A and 20B, the sheet running operation is stopped, and the first pressing head 23 is stopped. When the panel terminal portion 1t passes through the second pressing head 25, the second pressing head 25 is moved upward or downward to the initial position.

  Thereafter, the display panel P on the transport stage 10 is transported to a panel separation position (position indicated by a two-dot chain line in FIG. 1) by driving the horizontal movement mechanism, and the display panel P by each suction port of the transport stage 10 is transported. The display panel P is separated from the surface of the transfer stage 10 by releasing the suction.

  As described above, the terminal portion 1t of the display panel P can be wiped and cleaned. Then, the display panel P wiped and cleaned in this manner is transferred to the mounting process, and mounting components such as the IC chip 51 and the wiring board 52 are mounted on the panel terminal portion 1t, whereby the liquid crystal display shown in FIG. The device 50 can be manufactured.

-Effect of Embodiment 1-
According to the first embodiment, the long sheet 6 impregnated with the cleaning liquid is pressed against the panel terminal portion 1t by the first pressing head 23 and slid to wipe off the foreign matter adhering to both surfaces of the panel terminal portion 1t. Subsequently, the long sheet 6 in a dry state before the supply of the cleaning liquid is pressed against the panel terminal portion 1t in a wet state after wiping off foreign matter by the second pressing head 25, and is slid to slide the long sheet 6 of the panel terminal portion 1t. Moisture on both sides is wiped off, and in parallel with the front and back surfaces of the panel terminal portion 1t, the foreign matter using the cleaning liquid and the moisture are wiped off continuously, so that both sides of the panel terminal portion 1t can be wiped and cleaned efficiently. . And it can suppress that a floating foreign material adheres again to both surfaces of the panel terminal part 1t in the middle of conveying the display panel P to the next process after a cleaning process.

  Moreover, the sheet reversing means 26 makes the opposite surface of the pressing surface of the long sheet 6 to the panel terminal portion 1t by the first pressing head 23 and the pressing surface to the panel terminal portion 1t by the second pressing head 25, One side and the other side of the long sheet 6 are selectively used for wiping off foreign matters using a cleaning liquid and wiping off moisture. As a result, even if the foreign material that could not be wiped off with the long sheet 6 by the first pressing head 23 was wiped off with moisture by the long sheet 6 by the second pressing head 25, the long sheet 6 would later become the first pressing head. 23, when the foreign matter is wiped off, the foreign matter wiping surface of the long sheet 6 is an unused surface after reversal. Therefore, the foreign matter previously wiped off the long sheet 6 by the second pressing head 25 is removed. It is not transferred and reattached to the panel terminal portion 1t. Therefore, each one long sheet 6 can satisfactorily wipe the foreign matter and the moisture using the cleaning liquid on the front surface and the back surface of the panel terminal portion 1t.

  Furthermore, when wiping and cleaning the panel terminal portion 1t, the cleaning liquid penetrates even the fine steps of the terminal pattern in order to wipe off foreign matter adhering to the panel terminal portion 1t by the long sheet surface having the smaller surface roughness. The terminal forming surface (terminal portion 1t surface) can be wiped and cleaned with high quality. Further, since the surface roughness of the long sheet surface for wiping off foreign matters is small, the frictional resistance between the long sheet surface and the panel terminal portion 1t becomes relatively high. Reduced by impregnation. Therefore, by wiping off the foreign matter adhering to the panel terminal portion 1t with the long sheet 6, the display panel P can be prevented from being displaced from a predetermined position and the terminal forming surface can be damaged, and the generation of static electricity due to the friction can be prevented. Can be reduced. Further, since the moisture of the panel terminal portion 1t is wiped off by the long sheet surface having the larger surface roughness, the friction resistance between the long sheet surface and the panel terminal portion 1t is relatively low even in the dry state. The panel P can be prevented from being displaced from a predetermined position and the terminal forming surface can be prevented from being damaged, and the generation of static electricity due to the friction can be reduced.

  In the wiping and cleaning apparatus S according to the first embodiment, since the sheet reversing unit 26 is realized by a simple configuration using a pair of guide rollers 26a and 26b, the configuration of the wiping and cleaning apparatus S can be simplified. Furthermore, since it has the same structure which becomes symmetrical by upper and lower with respect to the display panel P on the conveyance stage 10 in a cleaning operation position, the wiping cleaning device S can be realized with a simple structure.

  As described above, both surfaces of the terminal portion 1t of the display panel P can be wiped and cleaned satisfactorily with a simple configuration, and reattachment of foreign matter to the panel terminal portion 1t after the wiping and cleaning can be suppressed. For this reason, foreign matter exists between the mounting components such as the IC chip 51 and the wiring board 52 mounted on the display panel P and the panel terminal portion 1t, and foreign matter is attached to the back surface of the panel terminal portion 1t. Thus, it is possible to suppress the adverse effect on the connection of the mounting components 51, 52 when mounting the mounting components 51, 52 performed while supporting the back surface of the display panel P, and the mounting components 51, 52 to the panel terminal portion 1t are excellent. Connection can be realized. As a result, the manufacturing yield of the liquid crystal display device 50 can be improved.

<< Embodiment 2 of the Invention >>
FIG. 5 is an overall perspective view of the wiping cleaning device S according to the present embodiment. In the following, the same parts as those in FIGS. 1 to 4 are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the first embodiment, the long sheet 6 is wound around so as to be sent from the second pressing head 25 to the first pressing head 23, and the long sheet 6 in a dry state before the supply of the cleaning liquid is moved to the second pressing head 25. In the present embodiment, the long sheet 6 is moved from the first pressing head 23 to the second pressing head by sliding the panel terminal portion 1t after wiping off the foreign matter to wipe the moisture of the panel terminal portion 1t. By sliding the long sheet 6 that has been passed around the first pressing head 23 and dried after being passed through the first pressing head 23 to the panel terminal portion 1t after the foreign matter has been wiped off by the second pressing head 25. The panel terminal portion 1t is configured to wipe off moisture.

  The wiping and cleaning apparatus S includes air blow nozzles 40 on the rear side of the first pressing head 23 and the second pressing head 25, respectively. The air blow nozzle 40 has a front outlet at the surface of the long sheet 6 in the course of the travel path between the first pressing head 23 and the second pressing head 25, for example, to the panel terminal portion 1 t by the first pressing head 23. When the long sheet 6 is sent from the first pressing head 23 to the second pressing head 25, compressed air is blown onto the long sheet 6 so that the pressing surface faces the portion facing upward. The cleaning liquid is configured to be dried.

-Cleaning method-
Next, a method for wiping and cleaning the terminal portion 1t of the display panel P using the wiping and cleaning device S will be described.

  First, as in the first embodiment, the display panel P is sucked and held on the surface of the transport stage 10 in the initial position on the upper side in the panel transport direction, and then the lifting and lowering movement mechanism and the horizontal movement mechanism are driven. Thus, the height position of the display panel P on the transfer stage 10 is adjusted to a predetermined position in accordance with the thickness of the panel terminal portion 1t, and the display panel P held on the transfer stage 10 is adjusted by the terminal portion 1t. Transport to pass the cleaning work position.

  When the first pressing heads 23 are positioned above and below the upstream end in the transport direction of the panel terminal portion 1t protruding outside the transport stage 10 in the process in which the panel terminal portion 1t passes through the cleaning work position, In the cleaning mechanisms 10 </ b> A and 20 </ b> B, the long reel 6 is caused to run over the first pressing head 25 and the second pressing head 23 in order by driving the feeding reel 21 and the take-up reel 22. By this sheet running operation, the long sheet 6 fed from the feeding reel 21 is passed over the first pressing head 23 and supplied with the cleaning liquid impregnated on the head upper surface 23 s or the head lower surface, and passes through the first pressing head 23. When the sheet is turned over to the second pressing head 25 later, one side and the other side of the sheet are reversed by the sheet reversing means 26, and the cleaning liquid is dried by blowing the compressed air by the air blow nozzle 40. After that, it is taken up on the take-up reel 22. At this time, each first pressing head 23 is driven (moved downward or moved downward) so that the panel terminal portion 1t is sandwiched between the first pressing heads 23 and the long sheet 6 is pressed against the front and back surfaces thereof.

  Further, when the second pressing heads 25 are positioned above and below the end of the panel terminal portion 1t on the upstream side in the transport direction, the second pressing heads 25 are driven (moved downward or moved upward) to drive both the second pressing heads 25. The panel sheet 1t is sandwiched between the two pressing heads 25 and the long sheet 6 after the cleaning liquid is dried is pressed against the front and back surfaces.

  In this manner, in the process of transporting the display panel P, the one side of the long sheet 6 impregnated with the cleaning liquid (the surface with the smaller surface roughness) is slid on both sides of the panel terminal portion 1t to thereby obtain the panel terminal portion. Wipe off the foreign matter on both sides of 1t, and then slide the other side (the surface with the larger surface roughness) of the long sheet 6 in the dry state on both sides of the panel terminal portion 1t in the wet state after wiping off the foreign matter. To wipe the moisture on both sides of the panel terminal portion 1t.

  Thereafter, similarly to the first embodiment, in both the cleaning mechanisms 20A and 20B, the driving of the feeding reel 21 and the take-up reel 22 is stopped to stop the sheet traveling operation, and the first pressing head 23 and the second pressing head 25 are stopped. Are moved to their initial positions. Then, the display panel P on the transport stage 10 is transported to a panel separation position (a position indicated by a two-dot chain line in FIG. 5) by driving the horizontal movement mechanism, and the display panel P is sucked by each suction port of the transport stage 10. By canceling, the display panel P is separated from the surface of the transfer stage 10.

  As described above, the terminal portion 1t of the display panel P can be wiped and cleaned, and thereafter, the display panel P is transported to the mounting process, and the IC chip 51, the wiring board 52, etc. with respect to the panel terminal portion 1t. The liquid crystal display device 50 shown in FIG. 4 can be manufactured by mounting the mounting parts.

-Effect of Embodiment 2-
According to the second embodiment, the long sheet 6 is sent to the second pressing head 25 after passing through the first pressing head 23, but it is long when the long sheet 6 is passed from the first pressing head 23 to the second pressing head 25. Since the cleaning liquid for the length sheet 6 is dried, the dried long sheet 6 can be slid on the panel terminal portion 1t after the foreign matter has been wiped off by the second pressing head 25, and the moisture on the panel terminal portion 1t is wiped off. be able to.

  Then, the sheet reversing means 26 selectively uses one side and the other side of the long sheet 6 to wipe off the foreign matter using the cleaning liquid and wipe the moisture, so that the second pressing head 25 removes moisture from the long sheet 6. When wiping, the moisture wiping surface of the long sheet 6 is an unused surface after reversal, and the foreign matter wiped first with the long sheet 6 by the first pressing head 23 is transferred to the panel terminal portion 1t and reattached. There is nothing to do. Therefore, the front and back surfaces of the panel terminal portion 1t can be efficiently wiped and cleaned by each one long sheet 6 and floated on the panel terminal portion 1t in the middle of transporting the display panel P to the next process after the cleaning process. Foreign matter can be prevented from reattaching. For this reason, the same effects as those of the first embodiment can be obtained, and the manufacturing yield of the liquid crystal display device 50 can be improved.

<< Other Embodiments >>
In the first embodiment, the sheet reversing unit 26 is provided, and the long sheet 6 is configured to be reversed when it is passed from the second pressing head 25 to the first pressing head 23. However, the sheet reversing means 26 is not provided, and the pressing surface of the long sheet 6 to the panel terminal portion 1t by the first pressing head 23 and the pressing surface to the panel terminal portion 1t by the second pressing head 25 are the same surface. It may be. Even in such a configuration, the long sheet 6 impregnated with the cleaning liquid wipes and cleans foreign matter adhering to the panel terminal portion 1t, and then the panel after the foreign matter is wiped by the dry long sheet 6 Since the moisture of the terminal portion 1t is wiped off, it is possible to prevent the floating foreign matter from reattaching to the panel terminal portion 1t during the transport of the display panel P to the next process after the cleaning process.

  In each of the above-described embodiments, in the process of transporting the display panel P on the transport stage 10, the foreign matter adhered to the panel terminal portion 1t is wiped off and the moisture in the panel terminal portion 1t after the foreign matter wipe is wiped off. However, the present invention is not limited to this. For example, the wiping / cleaning unit 15 is configured to be able to move the first pressing head 23 and the second pressing head 25 integrally in the anti-panel conveyance direction, and the first pressing head 23 and the second pressing head 25 can be moved. In the process of moving, the panel terminal portion 1t may be wiped off foreign matter and moisture. Furthermore, in the process of performing both the movement of the display panel P in the conveyance direction and the movement of the first pressing head 23 and the second pressing head 25 in the non-panel conveyance direction, the foreign substance is wiped off from the panel terminal portion 1t. In addition, the moisture may be wiped off.

  In each of the above-described embodiments, the sheet reversing unit 26 includes the first reversing guide roller 26a and the second reversing guide roller 26b. However, the present invention is not limited to this, and the sheet reversing unit 26 is a long sheet. The long sheet 6 is reversed so that the pressing surface of the sheet 6 to the panel terminal portion 1t by the first pressing head 23 and the pressing surface to the panel terminal portion 1t by the second pressing head 25 are opposite to each other. It only has to be done. For example, the sheet reversing unit 26 includes one reversing guide roller provided on the rear side of the first pressing head 23 or the second pressing head 25, and the first pressing head 23 or the second pressing head 25 and the reversing guide roller. The long sheet 6 may be twisted and reversed along the sheet travel path between the two. If comprised in this way, since the sheet | seat inversion means 26 can be comprised with one guide roller, the structure of the wiping cleaning apparatus S can further be simplified and compactized.

  In each of the above embodiments, the configuration including the transport stage 10 as a transport unit has been described as an example. However, the present invention is not limited to this, and the transport unit holds the display panel P by rotating it while holding it up and down. However, it may be constituted by a plurality of transport rollers that transport while well, and it is possible to employ known transport means such as a transport mechanism having an arm that transports while supporting the display panel P.

  In each said embodiment, although the wiping cleaning unit 15 was provided with the surface cleaning mechanism 20A and the back surface cleaning mechanism 20B, this invention is not restricted to this, Only one of the surface cleaning mechanism A and the back surface cleaning mechanism B is used. It may be configured. For example, the wiping / cleaning unit 15 may be configured by only the surface cleaning mechanism 20A and may be configured to wipe and clean only the surface of the panel terminal portion 1t. Moreover, after wiping and cleaning the surface of the panel terminal part 1t, the front surface and the back surface of the display panel P may be reversed, and then the back surface of the panel terminal part 1t may be wiped and cleaned.

  As described above, the present invention is useful for a wiping cleaning device and a wiping cleaning method, and in particular, a wiping cleaning device that is desired to suppress the reattachment of foreign matter to an object to be processed at low cost. And suitable for wiping and cleaning methods.

S Wiping and cleaning device P Liquid crystal display panel (object to be processed)
5 Conveyance direction of workpiece 6 Long sheet 10 Conveyance stage (conveyance means)
21 Feeding reel (sheet feeding means)
22 Take-up reel (sheet feeding means)
23 First pressing head 24 Cleaning liquid supply nozzle (cleaning liquid supply means)
25 Second pressing head 26 Sheet reversing means 26a First reversing guide roller 26b Second reversing guide roller

Claims (7)

Transport means for transporting the object to be processed along the transport path to the cleaning work position;
A sheet feeding means that is provided above the side of the conveying path and feeds a tape-like long sheet;
A first pressing head, which is disposed close to the cleaning work position above the conveyance path so as to be vertically movable, and presses the long sheet fed from the sheet feeding unit against the object to be processed on the conveying unit by moving downward;
Cleaning liquid supply means for supplying the long sheet with a cleaning liquid in the vicinity of the first pressing head;
In the process of performing at least one of the movement of the object to be processed in the transport direction and the movement of the first pressing head in the anti-conveyance direction of the object to be processed, the long sheet impregnated with the cleaning liquid is processed as the object to be processed. A wiping cleaning device that wipes off foreign matter adhering to the object by sliding the body with a predetermined pressing force,
A second pressing head that is arranged in parallel with the first pressing head on the downstream side in the conveyance direction of the object to be processed, and presses the long sheet against the object to be processed by moving downward;
A sheet for reversing the long sheet so that the pressing surface of the long sheet to the object to be processed by the first pressing head and the pressing surface to the object to be processed by the second pressing head are opposite surfaces. Reversing means,
In the process of performing at least one of the movement of the object to be processed in the transport direction and the movement of the second pressing head in the direction of non-conveyance of the object to be processed before the cleaning liquid is supplied by the cleaning liquid supply means By sliding the long sheet in a dry state or the long sheet in a state where the cleaning liquid impregnated through the first pressing head is dried to the object to be processed with a predetermined pressing force, A wiping cleaning device configured to wipe moisture away. In the wiping cleaning apparatus according to claim 1,
The long sheet is composed of cloths having different surface roughness on one side and the other side,
The long sheet surface with the smaller surface roughness wipes off the foreign matter adhering to the object to be processed, and the long sheet surface with the larger surface roughness wipes away the moisture of the object to be processed. Wiping cleaning device characterized by. In the wiping cleaning apparatus according to claim 1 or 2,
The long sheet is wound around the first pressing head and the second pressing head so as to be sent from the upper part of the head through the head tip and the lower part in order,
The sheet reversing means includes a first reversing guide roller provided on the rear side of the first pressing head and a second reversing guide roller provided on the rear side of the second pressing head, and the first reversing guide roller And a second reversing guide roller are arranged in a letter C shape in which the distance between the second reversing guide rollers increases toward the conveying means, and the first pressing head and the second reversing guide roller are arranged by the first reversing guide roller and the second reversing guide roller. A wiping and cleaning device, wherein the long sheet is reversed and passed from one side of the pressing head to the other. In the wiping cleaning apparatus of any one of Claim 1 to 3,
The sheet feeding means, the first pressing head, the cleaning liquid supply means, the second pressing head, and the sheet reversing means are symmetric with respect to the object to be processed on the conveying means at the cleaning work position. A wiping and cleaning device, which is also provided below. The tape-like long sheet fed from the sheet feeding means is sequentially passed over the second pressing head and the first pressing head, the long sheet is passed over the first pressing head, and the cleaning liquid is applied to the long sheet. Before the cleaning liquid is supplied by wiping off the foreign matter adhering to the object to be processed by sliding the long sheet impregnated with the cleaning liquid against the object to be processed by being pressed against the object to be processed by the first pressing head. A method of wiping and cleaning, wherein the dry sheet is pressed against the object to be processed after the foreign matter has been wiped off by the second pressing head and slid. In the wiping cleaning method of Claim 5,
When the long sheet having passed through the second pressing head is passed over the first pressing head, the pressing surface of the long sheet to the object to be processed by the first pressing head and the object to be processed by the second pressing head. A wiping and cleaning method, wherein the long sheet is inverted so that the pressing surface against the treatment body is opposite to the processing surface. The tape-like long sheet fed from the sheet feeding means is sequentially passed over the first pressing head and the second pressing head, the long sheet is passed over the first pressing head, and the cleaning liquid is applied to the long sheet. The long sheet impregnated with the cleaning liquid is pressed against the object to be processed by the first pressing head and slid to remove the foreign matter adhering to the object to be processed, and passes through the first pressing head. The long sheet is inverted and dried, and the dried dry long sheet is pressed against the object to be processed after the foreign object is wiped off by the second pressing head, and the moisture of the object to be processed is slid. Wiping cleaning method characterized by wiping off.

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