JP2000138422A - Wiring board and its manufacture - Google Patents

Wiring board and its manufacture

Info

Publication number
JP2000138422A
JP2000138422A JP30904798A JP30904798A JP2000138422A JP 2000138422 A JP2000138422 A JP 2000138422A JP 30904798 A JP30904798 A JP 30904798A JP 30904798 A JP30904798 A JP 30904798A JP 2000138422 A JP2000138422 A JP 2000138422A
Authority
JP
Japan
Prior art keywords
wiring board
liquid crystal
crystal polymer
wiring
wiring pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30904798A
Other languages
Japanese (ja)
Other versions
JP3490309B2 (en
Inventor
Shoichi Yamada
昭一 山田
Hiroshi Ohira
洋 大平
Akira Yonezawa
章 米沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaichi Electronics Co Ltd
Original Assignee
Yamaichi Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaichi Electronics Co Ltd filed Critical Yamaichi Electronics Co Ltd
Priority to JP30904798A priority Critical patent/JP3490309B2/en
Publication of JP2000138422A publication Critical patent/JP2000138422A/en
Application granted granted Critical
Publication of JP3490309B2 publication Critical patent/JP3490309B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Printed Wiring (AREA)
  • Laminated Bodies (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve the practicability of a wiring board by omitting a bonded integral configuration by means of an adhesive, to reduce environmental issues, and to transmit high-speed signals without further degrading electric characteristics, particularly, the signals. SOLUTION: A wiring board is provided with a core wiring board 9 carrying wiring patterns 7a and 7b formed on at least one main surface of an insulating layer 6 made of a liquid crystal polymer. The wiring board is also provided with insulating coating layers 8a and 8b which are integrated with the surfaces of the wiring board 9 on which the wiring pattern 7a and 7b are formed, have bored holes for exposing required portions 10a and 10b of the pattern 7a and 7b, and are made of the liquid crystal polymer.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は配線パターン面を絶
縁被覆した構成の配線基板、およびその配線基板の製造
方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wiring board having a wiring pattern surface insulated and covered, and a method of manufacturing the wiring board.

【0002】[0002]

【従来の技術】電子機器類の小型化などに伴って、回路
を形成する配線基板においてもコンパクト化、もしくは
高密度配線などが要求されている。このような要求に対
応して、図4に要部構成を拡大し断面的に示すような配
線基板が開発されている。図4において、1は厚さ25μ
m 程度の接着剤付きポリイミド樹脂フィルム(絶縁支持
体)、2は前記ポリイミド樹脂フィルム1主面に形成さ
れた配線パターン、3は前記配線パターン2の所要領域
2aを露出させて、配線パターン2形成面を被覆する厚さ
25μm 程度の接着剤付きポリイミド樹脂フィルム(カバ
ーフィルム)、4はスルホール接続部である。なお、5
a,5bはいずれも接着剤層であり、また、配線パターン
2の露出領域2aは、電子部品もしくは他の回路配線との
電気的な接続部である。
2. Description of the Related Art Along with the miniaturization of electronic devices and the like, a wiring board for forming a circuit is required to be compact or have high-density wiring. In response to such a demand, a wiring board has been developed as shown in FIG. In FIG. 4, 1 is 25 μ in thickness
m is a polyimide resin film with an adhesive (insulating support), 2 is a wiring pattern formed on the main surface of the polyimide resin film 1, and 3 is a required area of the wiring pattern 2.
Thickness that exposes 2a and covers wiring pattern 2 formation surface
A polyimide resin film (cover film) with an adhesive of about 25 μm has a through-hole connection portion. Note that 5
Each of a and 5b is an adhesive layer, and the exposed region 2a of the wiring pattern 2 is an electrical connection portion with an electronic component or another circuit wiring.

【0003】そして、上記図4に示した構成の配線基板
は、次のようにして製造されている。すなわち、厚さ25
μm 程度のポリイミド樹脂フィルム1の主面に、接着剤
層5aを介して厚さ12〜18μm 程度の銅箔を貼り合わせた
銅箔貼りシートを用意する。次いで、この銅箔貼りシー
トの所定領域に穿孔加工を施し、層間接続用の貫通孔を
設けた後、銅箔について穿孔内壁面に導電体層を形成刷
る。その後、フォトエッチング処理を施して、配線パタ
ーン2を形成し、前記両面の配線パターン2間が接続さ
れた配線パターニング2付きポリイミド樹脂フィルム1
とする。
The wiring board having the structure shown in FIG. 4 is manufactured as follows. That is, thickness 25
A copper foil-bonded sheet is prepared by bonding a copper foil having a thickness of about 12 to 18 μm to the main surface of a polyimide resin film 1 of about μm via an adhesive layer 5a. Next, a predetermined area of the copper foil-bonded sheet is perforated to provide a through-hole for interlayer connection, and then a conductive layer is formed and printed on the inner wall surface of the perforated copper foil. Thereafter, the wiring pattern 2 is formed by performing a photo-etching process, and the polyimide resin film 1 having the wiring pattern 2 is connected between the wiring patterns 2 on both surfaces.
And

【0004】一方、所要の領域に打ち抜きプレス加工を
施した厚さ15μm 程度の接着剤層付きの厚さ12μm 程度
のポリイミド樹脂フィルム(カバーフィルム)3を用意
する。その後、前記ポリイミド樹脂フィルム1の配線パ
ターニング2面に、このポリイミド樹脂フィルム(カバ
ーフィルム)3を位置合わせ・積層・配置して、配線パ
ターニング2面に圧着・一体化させることにより製造さ
れている。
On the other hand, a polyimide resin film (cover film) 3 having a thickness of about 12 .mu.m with an adhesive layer having a thickness of about 15 .mu.m is prepared by stamping and pressing a required area. Thereafter, the polyimide resin film (cover film) 3 is aligned, laminated, and arranged on the wiring patterning 2 surface of the polyimide resin film 1, and is crimped and integrated with the wiring patterning 2 surface.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記配
線基板の場合は、コンパクト化できること、あるいはフ
レキシブル的であることなどの利点を有するが、一方で
は、次のような不都合がある。すなわち、(a) ポリイミ
ド樹脂フィルム(絶縁性支持体)1と配線パターン2
(銅箔など)とを接合・一体化するため、また、(b) 配
線パターン2の形成面にカバーフィルム3を接合・一体
化するために、それぞれ接着剤層5a,5bを介挿してい
る。ところで、前記接着剤層5a,5bは、一般的に、難燃
性化が要求されており、この要求に対応して、たとえば
ハロゲン化合物、燐化合物などの難燃化剤が添加・配合
されている。
However, the above-mentioned wiring board has advantages such as being compact and flexible, but has the following disadvantages. That is, (a) a polyimide resin film (insulating support) 1 and a wiring pattern 2
(Copper foil, etc.), and (b) an adhesive layer 5a, 5b, respectively, for joining and integrating the cover film 3 to the surface on which the wiring pattern 2 is formed. . Incidentally, the adhesive layers 5a and 5b are generally required to be flame-retardant, and in response to this requirement, a flame retardant such as a halogen compound or a phosphorus compound is added or blended. I have.

【0006】ここで、難燃化剤を含有する接着剤層5a,
5bの介挿・存在は、構成された配線基板自体の電気的な
特性に悪影響を及ぼすばかりでなく、配線基板の製造工
程上、または配線基板の破棄処分などにおいて、その難
燃化剤が環境問題を提起する恐れもある。
[0006] Here, the adhesive layers 5a, 5a,
The insertion and presence of 5b not only adversely affects the electrical characteristics of the configured wiring board itself, but also causes the flame retardant to be used in the manufacturing process of the wiring board or in the disposal of the wiring board. It can raise issues.

【0007】本発明は、上記事情に対処してなされたも
ので、接着剤による接合一体化の構成を省略した実用性
が高く、また、環境問題を軽減し、かつ従来の基板より
も電気特性、特に高速信号を劣化させることなく伝送で
きる配線基板、およびその製造方法の提供を目的とす
る。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has high practicability in which the structure of joining and integrating with an adhesive is omitted, reduces environmental problems, and has better electrical characteristics than conventional substrates. In particular, it is an object of the present invention to provide a wiring board capable of transmitting a high-speed signal without deteriorating it, and a method of manufacturing the same.

【0008】[0008]

【課題を解決するための手段】請求項1の発明は、液晶
ポリマーから成る絶縁体層の少なくとも一主面に配線パ
ターンが形成されたコア配線板と、前記コア配線板の配
線パターン形成面に一体化され、かつ配線パターンの所
要箇所を露出するための穿孔を有する液晶ポリマーから
成る絶縁被覆層とを備えていることを特徴とする配線基
板である。
According to a first aspect of the present invention, there is provided a core wiring board having a wiring pattern formed on at least one main surface of an insulating layer made of a liquid crystal polymer, and a wiring pattern forming surface of the core wiring board. An insulating coating layer made of a liquid crystal polymer that is integrated and has a hole for exposing a required portion of the wiring pattern.

【0009】請求項2の発明は、請求項1記載の配線基
板において、コア配線板は、多層配線パターン型である
ことを特徴とする。
According to a second aspect of the present invention, in the wiring board according to the first aspect, the core wiring board is of a multilayer wiring pattern type.

【0010】請求項3の発明は、請求項1もしくは請求
項2記載の配線基板において、コア配線板の配線パター
ン層間は絶縁体層を貫挿した導電性バンプで接合されて
いることを特徴とする。
According to a third aspect of the present invention, in the wiring board according to the first or second aspect, the wiring pattern layers of the core wiring board are joined by conductive bumps penetrating an insulator layer. I do.

【0011】請求項4の発明は、請求項1ないし請求項
3いずれか一記載の配線基板において、コア配線板の配
線パターン形成面に一体化された絶縁被覆層の融点が、
コア配線板の絶縁体層を成す液晶ポリマーの融点よりも
低いことを特徴とする。
According to a fourth aspect of the present invention, in the wiring board according to any one of the first to third aspects, the melting point of the insulating coating layer integrated with the wiring pattern forming surface of the core wiring board is:
It is characterized by being lower than the melting point of the liquid crystal polymer forming the insulator layer of the core wiring board.

【0012】請求項5の発明は、請求項1ないし請求項
4いずれか一記載の配線基板において、コア配線板の配
線パターンは銅箔製であることを特徴とする。
According to a fifth aspect of the present invention, in the wiring board according to any one of the first to fourth aspects, the wiring pattern of the core wiring board is made of copper foil.

【0013】請求項6の発明は、請求項1ないし請求項
5いずれか一記載の配線基板において、絶縁被覆層に接
するコア配線板の配線パターンは、コア配線板面と平坦
面を成していることを特徴とする。
According to a sixth aspect of the present invention, in the wiring board according to any one of the first to fifth aspects, the wiring pattern of the core wiring board in contact with the insulating coating layer forms a flat surface with the surface of the core wiring board. It is characterized by being.

【0014】請求項7の発明は、液晶ポリマーから成る
絶縁体層の少なくとも一主面に導電性金属箔を載置し、
加圧・加熱一体化する工程と、前記加圧一体化した導電
性金属箔を配線パターニングしてコア配線板化する工程
と、前記コア配線板の配線パターン形成面に液晶ポリマ
ーから成る絶縁シートを位置決め配置して加圧・加熱一
体化する工程と、前記配線パターン形成面の絶縁シート
の所定領域を穿孔加工し、配線パターンの所要箇所を露
出させる工程とを有することを特徴とする配線基板の製
造方法である。
According to a seventh aspect of the present invention, a conductive metal foil is placed on at least one main surface of an insulator layer made of a liquid crystal polymer,
A step of pressurizing and heating and integrating, a step of wiring-patterning the pressure-integrated conductive metal foil to form a core wiring board, and an insulating sheet made of a liquid crystal polymer on a wiring pattern forming surface of the core wiring board. A step of positioning and arranging to integrate under pressure and heat, and a step of perforating a predetermined region of the insulating sheet on the wiring pattern forming surface to expose a required portion of the wiring pattern. It is a manufacturing method.

【0015】請求項8の発明は、請求項7記載の配線基
板の製造方法において、導電性金属箔は、銅箔であるこ
とを特徴とする。
According to an eighth aspect of the present invention, in the method for manufacturing a wiring board according to the seventh aspect, the conductive metal foil is a copper foil.

【0016】上記各発明において、コア配線板の絶縁体
層(絶縁性支持体)、および配線パターン形成面を被覆
する絶縁被覆層(カバーフィルムないしカバーシート)
を形成する液晶ポリマーは、たとえばキシダール(商品
名.Dartco社製)、ベクトラ(商品名.Clanese 社製)
で代表される多軸配向の熱可塑性ポリマーである。ここ
で、液晶ポリマーは、その分子構造によって、その融点
なども異なっており、同一の分子構造でも、結晶構造や
添加物によって融点が変動する。たとえばベクトランA
タイプ(融点, 285℃)、ベクトランCタイプ(融点,
325℃)、BIACフィルム(融点, 335℃)などが例
示される。
In each of the above inventions, the insulator layer (insulating support) of the core wiring board and the insulating coating layer (cover film or cover sheet) covering the surface on which the wiring pattern is formed
The liquid crystal polymer which forms is, for example, Xidal (trade name, manufactured by Dartco), Vectra (trade name, manufactured by Clanese)
Is a multiaxially oriented thermoplastic polymer. Here, the melting point of the liquid crystal polymer differs depending on the molecular structure, and the melting point varies depending on the crystal structure and the additive even with the same molecular structure. For example, Vectran A
Type (melting point, 285 ° C), Vectran C type (melting point,
325 ° C.), BIAC film (melting point, 335 ° C.) and the like.

【0017】また、コア配線板の配線パターン層間を絶
縁離隔する絶縁体層の厚さは、一般的に、25〜 100μm
程度であり、一方、カバーフィルムないしカバーシート
の厚さは、一般的に、10〜50μm 程度である。ここで、
絶縁体層を複数層の積層で構成する場合、同種の絶縁体
シートや液晶ポリマーの組み合わせでも、あるいは異種
の絶縁体シートや液晶ポリマー組み合わせでもよい。特
に、加熱工程などを要する場合は、比較的融点の高い絶
縁体シートや液晶ポリマーに対し、比較的融点の低い絶
縁体シートや液晶ポリマーを組み合わせることが好まし
い。
The thickness of the insulator layer that insulates and separates the wiring pattern layers of the core wiring board is generally 25 to 100 μm.
On the other hand, the thickness of the cover film or cover sheet is generally about 10 to 50 μm. here,
When the insulator layer is formed by laminating a plurality of layers, a combination of the same kind of insulator sheet and liquid crystal polymer or a combination of different kinds of insulator sheets and liquid crystal polymer may be used. In particular, when a heating step or the like is required, it is preferable to combine an insulator sheet or a liquid crystal polymer having a relatively low melting point with an insulator sheet or a liquid crystal polymer having a relatively high melting point.

【0018】なお、一般的に、液晶ポリマーは吸湿性が
ほとんどなく、誘電率が約 3.0(1MHz)程度であり、広い
周波数領域で安定しているだけでなく、たとえば熱プレ
スによって熱変形し、かつ対向する配線パターン面や液
晶ポリマー層(絶縁支持体)面に対して容易に接合・一
体化する。この場合、配線パターン面、液晶ポリマー面
の粗化された面での場合、固着・一体化がより強固にな
る。
In general, a liquid crystal polymer has almost no hygroscopicity and a dielectric constant of about 3.0 (1 MHz), and is stable not only in a wide frequency range but also thermally deformed by, for example, a hot press. In addition, it can be easily joined and integrated with the opposing wiring pattern surface or liquid crystal polymer layer (insulating support) surface. In this case, in the case of the roughened surface of the wiring pattern surface and the liquid crystal polymer surface, the fixation / integration becomes stronger.

【0019】また、上記各発明において、コア配線板
は、フレキシブル性の要求に対応すると片面パターン型
もしくは両面パターン型が望ましいが、配線回路の高機
能性などの要求に対しては多層配線型が望まれる。そし
て、配線パターン層間の電気的な接続を要する構成の場
合は、配線パターン面の所定位置に配置した導電性バン
プ先端部の絶縁体層貫挿により、絶縁離隔された他の配
線パターン面に対接させる構造を採ると、製造工程を簡
略化できるし、さらに、微細で信頼性の高い配線パター
ン層間の接続が得られる。
In each of the above-mentioned inventions, the core wiring board is preferably a single-sided pattern type or a double-sided pattern type in order to meet the requirement for flexibility. desired. In the case of a configuration that requires electrical connection between the wiring pattern layers, the insulating bump is inserted through the insulator layer at the end of the conductive bump disposed at a predetermined position on the wiring pattern surface, so that the insulating bumps are separated from other wiring pattern surfaces that are insulated and separated. When the contact structure is adopted, the manufacturing process can be simplified, and furthermore, fine and highly reliable connection between wiring pattern layers can be obtained.

【0020】なお、上記配線パターン層間の接続に推奨
した導電性バンプは、導電性ペーストの印刷などで配置
・形成できる。ここで、導電性ペーストは、たとえば
銀,金,銅,半田粉などの導電性粉末、これらの合金粉
末もしくは複合(混合)金属粉末と、樹脂バインダー成
分とを混合して調製されたペースト類が挙げられる。前
記樹脂バインダー成分としては、たとえばポリカーボネ
ート樹脂、ポリスルホン樹脂、ポリエステル樹脂、フェ
ノキシ樹脂などの熱可塑性樹脂、フェノール樹脂、ポリ
イミド樹脂、メラミン樹脂、エポキシ樹脂などの熱硬化
性樹脂などが一般的に挙げられる。
The conductive bumps recommended for connection between the wiring pattern layers can be arranged and formed by printing a conductive paste or the like. Here, examples of the conductive paste include pastes prepared by mixing a conductive powder such as silver, gold, copper, and solder powder, or an alloy powder or a composite (mixed) metal powder thereof with a resin binder component. No. Examples of the resin binder component include thermoplastic resins such as polycarbonate resin, polysulfone resin, polyester resin, and phenoxy resin, and thermosetting resins such as phenol resin, polyimide resin, melamine resin, and epoxy resin.

【0021】上記各発明において、コア配線板の配線パ
ターンは、一般的に、厚さ 5〜35μm 程度のたとえば
銅、アルミニウムなどの導電性金属箔のフォトエッチン
グで形成される。つまり、液晶ポリマーフィルム面に貼
着された導電性金属箔の選択的なエッチングで配線パタ
ーンが形成される。したがって、一般的に、配線パター
ンは、その厚さ分だけ、液晶ポリマーフィルム面から突
出しているが、これを液晶ポリマーフィルム面に圧入し
て、液晶ポリマーフィルム面と平坦な面とすれば、カバ
ーフィルムの配置・被覆が容易になるだけでなく、凹凸
のないパターンなどの緻密な被覆層を形成するので、ボ
イドの巻き込みを低減できカバーコートの信頼性が向上
すること、また、配線パターンの基板に対する密着強度
が向上する。 請求項1の発明では、配線パターンを支
持する絶縁体層、および前記配線パターン形成面を被覆
する絶縁被覆層がともに液晶ポリマーで形成され、かつ
接着剤層の介挿も不要となるので、接着剤層が含む難燃
化剤に起因する環境問題など大幅に軽減する。つまり、
液晶ポリマーが有する本来の特長である耐湿性、高い電
気絶縁性と高速信号伝送安定性を有する信頼性の高い配
線回路を提供できる。
In each of the above inventions, the wiring pattern of the core wiring board is generally formed by photo-etching a conductive metal foil of, for example, copper or aluminum having a thickness of about 5 to 35 μm. That is, a wiring pattern is formed by selective etching of the conductive metal foil adhered to the liquid crystal polymer film surface. Therefore, in general, the wiring pattern protrudes from the liquid crystal polymer film by the thickness thereof, but if this is pressed into the liquid crystal polymer film surface to make the liquid crystal polymer film flat with the flat surface, Not only is it easy to arrange and cover the film, but also because it forms a dense coating layer such as a pattern with no irregularities, it reduces the entrapment of voids and improves the reliability of the cover coat. The adhesion strength with respect to is improved. According to the first aspect of the present invention, the insulating layer for supporting the wiring pattern and the insulating coating layer for covering the wiring pattern forming surface are both formed of a liquid crystal polymer, and it is not necessary to insert an adhesive layer. It greatly reduces environmental problems caused by the flame retardant contained in the agent layer. That is,
It is possible to provide a highly reliable wiring circuit having moisture resistance, high electrical insulation, and high-speed signal transmission stability, which are the essential features of the liquid crystal polymer.

【0022】請求項2の発明では、コア配線板の多層配
線パターン型により、液晶ポリマーが有する本来の特長
である耐湿性、高い電気絶縁性と高速信号伝送安定性な
どが生かされながら、高機能化された配線回路を提供で
きる。
According to the second aspect of the present invention, the multi-layer wiring pattern type of the core wiring board makes use of the inherent characteristics of the liquid crystal polymer, such as moisture resistance, high electrical insulation and high-speed signal transmission stability, while providing high performance. It is possible to provide a simplified wiring circuit.

【0023】請求項3の発明では、コア配線板の配線パ
ターン層間の接続が、絶縁体層を貫挿した導電性バンプ
で成されているため、微細で、かつ信頼性の高い接続を
備えた配線回路を提供できる。
According to the third aspect of the present invention, since the connection between the wiring pattern layers of the core wiring board is made of conductive bumps penetrating the insulator layer, a fine and highly reliable connection is provided. A wiring circuit can be provided.

【0024】請求項4の発明では、絶縁体層および絶縁
被覆層が、融点の異なる液晶ホリマーの選択により形成
したことに伴って、緻密な一体性が確保されるため、よ
り信頼性の高い配線回路を提供できる。
According to the fourth aspect of the invention, since the insulator layer and the insulating coating layer are formed by selecting a liquid crystal polymer having different melting points, dense integration is ensured, so that a more reliable wiring is provided. Circuit can be provided.

【0025】請求項5の発明では、コア配線板の配線パ
ターンが銅箔製であるため、設計仕様し易く、かつ回路
特性の良好な配線回路を提供できる。
According to the fifth aspect of the present invention, since the wiring pattern of the core wiring board is made of copper foil, it is possible to provide a wiring circuit having easy design specifications and good circuit characteristics.

【0026】請求項6の発明では、コア配線板の配線パ
ターンがコア配線板に圧入的に配置され、コア配線板面
に対して平坦面を成しているため、絶縁被覆層との良好
な密着性が図られ、信頼性の高い配線回路を提供でき
る。
According to the sixth aspect of the present invention, since the wiring pattern of the core wiring board is press-fitted into the core wiring board and forms a flat surface with respect to the core wiring board surface, the wiring pattern with the insulating coating layer is excellent. Adhesion is achieved, and a highly reliable wiring circuit can be provided.

【0027】請求項7の発明では、液晶ポリマー本来の
特長である耐湿性、高い電気絶縁性と高速信号伝送安定
性などが生かされ、高機能化された配線回路を歩留まり
よく提供できる。
According to the seventh aspect of the present invention, a high-performance wiring circuit can be provided with a high yield by utilizing the inherent characteristics of the liquid crystal polymer such as moisture resistance, high electrical insulation and high-speed signal transmission stability.

【0028】請求項8の発明では、配線パターの形成に
銅箔を使用することにより、より容易に、高機能化され
た配線回路を歩留まりよく提供できる。
According to the eighth aspect of the present invention, by using a copper foil for forming a wiring pattern, it is possible to more easily provide a highly functionalized wiring circuit with a high yield.

【0029】[0029]

【発明の実施の形態】図1,図2および図3を参照して
実施例を説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment will be described with reference to FIGS. 1, 2 and 3. FIG.

【0030】図1は、第1の実施例に係る配線基板の要
部構成を示す断面図である。図1において、6は融点 3
25℃程度、厚さ50μm 程度の液晶ポリマーフィルム(絶
縁体層ないし絶縁性支持体)、7a,7bは前記液晶ポリマ
ーフィルム6の両面に設けられた厚さ12μm 程度の電解
銅箔製の配線パターン、8a,8bは前記配線パターン7a,
7b形成面に一体化し、被覆する融点 285℃程度、厚さ30
μm 程度の液晶ポリマーフィルムである。
FIG. 1 is a cross-sectional view showing the structure of a main part of a wiring board according to the first embodiment. In FIG. 1, 6 is the melting point.
A liquid crystal polymer film (insulator layer or insulating support) having a thickness of about 25 ° C. and a thickness of about 50 μm, and 7a and 7b are wiring patterns made of electrolytic copper foil having a thickness of about 12 μm provided on both sides of the liquid crystal polymer film 6. , 8a, 8b are the wiring patterns 7a,
7b Integrates and coats on the forming surface Melting point 285 ° C, thickness 30
Liquid crystal polymer film of about μm.

【0031】ここで、液晶ポリマーフィルム6および配
線パターン7a,7bはコア配線板9を構成しており、ま
た、液晶ポリマーフィルム8a,8bは、所要箇所(もしく
は領域)を穿孔し、前記配線パターン7a,7bの被接続部
10a, 10bを露出させたカバーコートを形成している。
なお、11はコア配線板9の両面に形成されている配線パ
ターン7a,7b間を接続する層間接続部である。この穿孔
方法としては、エキシマ、 YAGあるいは半導体レーザー
光を照射し、選択した領域の液晶ポリマーを揮散させる
方法が適している。勿論、他の方法でもよく、たとえば
選択した領域に予めマスクを配置しておき、カバーフィ
ルムを貼り合わせた後に、前記マスクを除去する手段で
もよい。
Here, the liquid crystal polymer film 6 and the wiring patterns 7a and 7b constitute a core wiring board 9, and the liquid crystal polymer films 8a and 8b perforate required portions (or regions). Connected parts of 7a and 7b
A cover coat exposing 10a and 10b is formed.
Reference numeral 11 denotes an interlayer connecting portion connecting between the wiring patterns 7a and 7b formed on both surfaces of the core wiring board 9. As the perforation method, a method of irradiating excimer, YAG or semiconductor laser light to volatilize the liquid crystal polymer in a selected region is suitable. Of course, another method may be used. For example, a mask may be disposed in a selected region in advance, and after the cover film is bonded, the mask may be removed.

【0032】図2は、第2の実施例に係る配線基板の要
部構成を示す断面図である。この実施例は、コア配線板
9が多層配線パターン型で、配線パターン層間がスルホ
ール接続、ヴィア接続された構成を採っている。図2に
おいて、6a,6b,6cは融点 325℃程度、厚さ 100μm 程
度で、かつ積層・一体化した液晶ポリマーフィルム(絶
縁体層)、7a′,7b′は前記液晶ポリマーフィルム6a,
6b,6c面に形成された内層配線パターン、7a,7bは液晶
ポリマーフィルム6b,6c面に形成された外層配線パター
ンである。なお、前記内層配線パターン7a′,7b′およ
び外層配線パターン7a,7bはいずれも厚さ12μm 程度の
電解銅箔製でり、それら配線パターン7a,7b,7a′,7
b′間は導電性バンプ12で接続されている。
FIG. 2 is a cross-sectional view showing a main structure of a wiring board according to the second embodiment. This embodiment employs a configuration in which the core wiring board 9 is of a multilayer wiring pattern type, and through-hole connections and via connections are made between wiring pattern layers. In FIG. 2, 6a, 6b and 6c have a melting point of about 325 ° C. and a thickness of about 100 μm, and are laminated and integrated liquid crystal polymer films (insulator layers), and 7a ′ and 7b ′ are the liquid crystal polymer films 6a and 6b.
Inner layer wiring patterns formed on the surfaces 6b and 6c, and 7a and 7b are outer layer wiring patterns formed on the liquid crystal polymer films 6b and 6c. Each of the inner layer wiring patterns 7a 'and 7b' and the outer layer wiring patterns 7a and 7b is made of electrolytic copper foil having a thickness of about 12 .mu.m, and these wiring patterns 7a, 7b, 7a 'and 7b are formed.
The conductive bumps 12 are connected between b ′.

【0033】また、8a,8bは前記配線パターン7a,7b形
成面に一体化し、被覆する融点 285℃程度、厚さ25μm
程度の液晶ポリマーフィルムである。
Further, 8a and 8b are integrated with the surface on which the wiring patterns 7a and 7b are formed, and have a melting point of about 285 ° C. and a thickness of 25 μm.
It is a liquid crystal polymer film of a degree.

【0034】ここで、液晶ポリマーフィルム6a,6b,6
c、および配線パターン7a,7b,7a′,7b′は、コア配
線板9′を構成している。また、液晶ポリマーフィルム
8a,8bは、所要箇所(もしくは領域)を YAGレーザの高
調波で穿孔し、前記配線パターン7a,7bの被接続部 10
a, 10bを露出させたカバーコートを形成している。な
お、11はコア配線板9′の両面に形成されている配線パ
ターン7a,7b間を接続する層間接続部である。
Here, the liquid crystal polymer films 6a, 6b, 6
c and the wiring patterns 7a, 7b, 7a ', 7b' constitute a core wiring board 9 '. In addition, liquid crystal polymer film
8a and 8b are formed by drilling required portions (or regions) with harmonics of a YAG laser, and connecting portions 10a of the wiring patterns 7a and 7b.
A cover coat exposing a and 10b is formed. Reference numeral 11 denotes an interlayer connecting portion for connecting between the wiring patterns 7a and 7b formed on both surfaces of the core wiring board 9 '.

【0035】次に、上記コア配線板9′が多層配線パタ
ーン型の配線基板の製造方法例を説明する。
Next, an example of a method of manufacturing a wiring board in which the core wiring board 9 'is a multilayer wiring pattern type will be described.

【0036】厚さ12μm の電解銅箔の一主面上に、メタ
ルマスクを位置決め配置し、導電性ペーストを印刷し、
乾燥後、同一のメタルマスクを用いて同一位置に導電性
ペーストを印刷、乾燥を繰り返して高さ 200μm 程度の
円錐型導電性バンプを形成した。なお、メタルマスク
は、厚さ約 250μm のステンレス鋼板の所要箇所に直径
250μm の孔を穿設したものであり、導電性ペースト
は、銀粉およびエポキシ樹脂からなる導電性組成物であ
る。
A metal mask is positioned and arranged on one main surface of an electrolytic copper foil having a thickness of 12 μm, and a conductive paste is printed.
After drying, a conductive paste was printed at the same position using the same metal mask, and drying was repeated to form a conical conductive bump having a height of about 200 μm. The metal mask has a diameter of about 250 μm
The conductive paste has a hole of 250 μm, and the conductive paste is a conductive composition composed of silver powder and epoxy resin.

【0037】上記導電性バンプを所要の位置に設けた電
解銅箔を、予め用意しておいた厚さ100μm 程度の液晶
ポリマーフィルムの片面側に、導電性バンプの先端側を
対向させる一方、他面に銅箔を配置する。この状態で、
真空熱プレス加工を施して、液晶ポリマーフィルムの両
面側に電解銅箔を圧着し、導電性バンプによって両面の
電解銅箔同士が電気的に接続された両面銅箔貼りシート
を作製した。
An electro-deposited copper foil having the conductive bumps provided at required positions is placed on one side of a liquid crystal polymer film having a thickness of about 100 μm, which is prepared in advance. Place copper foil on the surface. In this state,
Vacuum hot pressing was performed to press the electrolytic copper foil on both sides of the liquid crystal polymer film, thereby producing a double-sided copper foil-bonded sheet in which the electrolytic copper foils on both sides were electrically connected by conductive bumps.

【0038】その後、両面銅箔貼りシートの両銅箔面に
それぞれドライフィルム型の感光性レジストを貼り合
せ、配線パターンフィルムマスクを位置決めし、露光処
理を施してからエッチング処理を行って、配線パターニ
ングすることにより、両面配線型のコア配線板を作製す
る。次いで、前記コア配線板の両面に、厚さ50μm 程度
の液晶ポリマーフィルムおよび厚さ12μm の電解銅箔を
順次・積層配置し、真空熱プレス加工を施して両面銅箔
貼りの多層型素板を作製する。このとき、電解銅箔の一
主面子の所要箇所には、上記のような手段で導電性バン
プを予め設けておいたものを使用する。
Thereafter, a dry film type photosensitive resist is bonded to both copper foil surfaces of the double-sided copper foil-bonded sheet, a wiring pattern film mask is positioned, an exposure process is performed, and an etching process is performed to perform wiring patterning. By doing so, a double-sided wiring type core wiring board is manufactured. Next, on both sides of the core wiring board, a liquid crystal polymer film having a thickness of about 50 μm and an electrolytic copper foil having a thickness of 12 μm are sequentially laminated and arranged, and subjected to vacuum hot press processing to form a multilayer base plate having a double-sided copper foil. Make it. At this time, a conductive bump is provided in advance at a required portion of one principal face of the electrolytic copper foil by the above-described means.

【0039】その後、両面銅箔貼りの多層型素板の両銅
箔面にそれぞれ感光性レジストを貼り合せ、配線パター
ンフィルムマスクを位置決めし、露光処理を施してから
エッチング処理を行って、配線パターニングし、多層配
線パターン型のコア配線板を作製する。ここで、銅スル
ホールを併設する場合には、予め穿孔後、スルホールメ
ッキしてパターニングする方法も行える。
Thereafter, a photosensitive resist is stuck on each of the copper foil surfaces of the multi-layer base plate with a double-sided copper foil, a wiring pattern film mask is positioned, an exposure process is performed, and an etching process is performed. Then, a multilayer wiring pattern type core wiring board is manufactured. Here, in the case where a copper through hole is provided, a method in which a hole is formed in advance and then plated with a through hole and patterned.

【0040】次に、前記多層配線パターン型コア配線板
の主面に、厚さ30μm 程度の液晶ポリマーフィルムを接
合・一体化させカバーコート層を形成した。次いで、前
記カバーコートの所要箇所(位置)に、エキシマレーザ
ー光をメタライズ層を介して選択的に照射して穿孔を行
い、配線パターンの所要箇所を露出させ、スルホール内
壁面および配線パターン露出面に銅メッキ層を成長させ
ることによって配線基板が得られる。
Next, a liquid crystal polymer film having a thickness of about 30 μm was joined and integrated with the main surface of the multilayer wiring pattern type core wiring board to form a cover coat layer. Next, a required portion (position) of the cover coat is selectively irradiated with excimer laser light through a metallization layer to perform perforation, exposing a required portion of the wiring pattern, and forming a hole on the inner wall surface of the through hole and the exposed surface of the wiring pattern. The wiring board is obtained by growing the copper plating layer.

【0041】上記配線基板の製造方法においては、コア
配線板の製造時における銅箔の貼り合わせ、およびカバ
ーフィルムの貼り合わせに当たって、液晶ポリマーの特
性を利用して熱融されるので、着接着剤が不要となって
製造工程が大幅に簡略化する。また、配線基板の廃棄処
分などにおいては、燃焼によりハロゲンやリンを含む有
害物質の発生がないので、環境衛生面でも有利であると
ともに、熱可塑性樹脂と金属の組み合わせという簡単な
構成であるため、熱溶融で容易に樹脂分と金属分に分離
でき、樹脂と金属とを別けてリサイクルできるという特
長もある。
In the above-mentioned method of manufacturing a wiring board, the bonding and bonding of the copper foil and the cover film at the time of manufacturing the core wiring board is performed by utilizing the properties of the liquid crystal polymer and being melted by heat. Is unnecessary, and the manufacturing process is greatly simplified. Also, in the disposal of wiring boards, etc., there is no generation of harmful substances including halogen and phosphorus by combustion, so it is advantageous in terms of environmental hygiene and because it has a simple configuration of a combination of thermoplastic resin and metal, Another advantage is that the resin and metal can be easily separated by heat melting, and the resin and metal can be separated and recycled.

【0042】図3は第3の実施例に係る配線基板の要部
構成を示す断面図である。この実施例の配線基板は、基
本的に、前記第1の実施例の場合と同様で、配線パター
ン7a,7bを絶縁体層6に圧入し、コア配線板9の主面を
平坦面化した点で相違する。この構成を採った場合は、
カバーフィルム8a,8bが、平坦面に圧着・一体化されて
いるため、カバーコートの被覆操作が容易になるだけで
なく、パターン面に凹凸のない平坦性のすぐれた良好な
密着性の絶縁被覆が行われる。また、絶縁体層6および
カバーコート(絶縁被覆層)が、誘電率の低い液晶ポリ
マーで形成されていることに伴って、高周波特性のすぐ
れた、また、低吸湿性および良好な柔軟性によって、軽
薄・短小で信頼性の高い配線基板を構成する。
FIG. 3 is a sectional view showing the structure of a main part of a wiring board according to the third embodiment. The wiring board of this embodiment is basically the same as that of the first embodiment, in which the wiring patterns 7a and 7b are press-fitted into the insulator layer 6 and the main surface of the core wiring board 9 is flattened. Differs in that If you adopt this configuration,
The cover films 8a and 8b are pressure-bonded and integrated on a flat surface, which not only facilitates the coating operation of the cover coat, but also has excellent flatness and good adhesion insulating coating with no unevenness on the pattern surface. Is performed. In addition, since the insulator layer 6 and the cover coat (insulating coating layer) are formed of a liquid crystal polymer having a low dielectric constant, excellent high-frequency characteristics, low moisture absorption, and good flexibility are provided. A light, thin, short and highly reliable wiring board is constructed.

【0043】本発明は上記例示に限定されるものでな
く、発明の主旨を逸脱しない範囲でいろいろの変化を採
ることができる。たとえば絶縁体層(絶縁性支持体)の
厚さ、絶縁被覆層(カバーコート)の厚さ、配線パター
ンの材質、コア配線板の配線パターン層数、導電性バン
プの形成用素材などは、用途・目的に応じて適宜選択し
て用いることができる。
The present invention is not limited to the above examples, and various changes can be made without departing from the gist of the invention. For example, the thickness of the insulator layer (insulating support), the thickness of the insulating coating layer (cover coat), the material of the wiring pattern, the number of wiring pattern layers of the core wiring board, the material for forming the conductive bumps, etc. -It can be appropriately selected and used according to the purpose.

【0044】[0044]

【発明の効果】請求項1の発明によれば、接着剤層の介
挿が不要となるので、接着剤層を含むことによる難燃化
剤に起因する環境問題などが解消されるだけでなく、液
晶ポリマー本来の特長である耐湿性、すぐれた高周波特
性などが生かされた信頼性の高い配線基板が提供され
る。
According to the first aspect of the present invention, since there is no need to insert an adhesive layer, not only environmental problems caused by the flame retardant due to the inclusion of the adhesive layer are eliminated, but also In addition, a highly reliable wiring board utilizing the inherent characteristics of liquid crystal polymer such as moisture resistance and excellent high frequency characteristics is provided.

【0045】請求項2の発明によれば、液晶ポリマー本
来の特長である耐湿性、すぐれた高周波特性などが生か
されながら、高機能化された配線基板が提供される。
According to the second aspect of the present invention, a highly functional wiring board is provided while taking advantage of the inherent characteristics of the liquid crystal polymer such as moisture resistance and excellent high-frequency characteristics.

【0046】請求項3の発明によれば、液晶ポリマー本
来の特長である耐湿性、すぐれた高周波特性などが生か
され、かつ微細で信頼性の高い接続を備えた配線基板が
提供される。
According to the third aspect of the present invention, there is provided a wiring board having fine and highly reliable connections utilizing the inherent characteristics of the liquid crystal polymer such as moisture resistance and excellent high frequency characteristics.

【0047】請求項4の発明によれば、絶縁体層および
絶縁被覆層の緻密な一体性が確保され、より信頼性の高
い配線基板が提供される。
According to the fourth aspect of the present invention, the dense integration of the insulator layer and the insulating coating layer is ensured, and a more reliable wiring board is provided.

【0048】請求項5の発明によれば、設計仕様し易
く、かつ回路特性の良好な配線基板が提供される。
According to the fifth aspect of the present invention, there is provided a wiring board which can be easily designed and designed and has good circuit characteristics.

【0049】請求項6の発明によれば、コア配線板面に
対する絶縁被覆層の良好な密着性に伴い信頼性の高い配
線基板が提供される。
According to the sixth aspect of the present invention, a highly reliable wiring board is provided with good adhesion of the insulating coating layer to the core wiring board surface.

【0050】請求項7の発明によれば、液晶ポリマー本
来の特長である耐湿性、すぐれた高周波特性などが生か
され、高機能化された配線基板が容易、かつ歩留まりよ
く提供される。
According to the seventh aspect of the present invention, a moisture-resistant property and excellent high-frequency characteristics, which are inherent characteristics of the liquid crystal polymer, are utilized, and a highly functionalized wiring board can be easily provided with a high yield.

【0051】請求項8の発明によれば、より容易に、高
機能化された配線基板が容易、かつ歩留まりよく提供さ
れる。
According to the invention of claim 8, a highly functionalized wiring board can be provided more easily and with a higher yield.

【図面の簡単な説明】[Brief description of the drawings]

【図1】第1の実施例に係る配線基板の要部構成を示す
断面図。
FIG. 1 is a sectional view showing a configuration of a main part of a wiring board according to a first embodiment.

【図2】第2の実施例に係る配線基板の要部構成を示す
断面図。
FIG. 2 is a sectional view showing a configuration of a main part of a wiring board according to a second embodiment.

【図3】第3の実施例に係る配線基板の要部構成を示す
断面図。
FIG. 3 is a cross-sectional view illustrating a configuration of a main part of a wiring board according to a third embodiment.

【図4】従来の配線基板の要部構成を示す断面図。FIG. 4 is a cross-sectional view showing a main part configuration of a conventional wiring board.

【符号の説明】[Explanation of symbols]

6……液晶ポリマーからなる絶縁体層 7a,7b,7a′,7b′……配線パターン 8a,8b……液晶ポリマーからなる絶縁被覆層(カバーコ
ート) 9,9′……コア配線板 10a ,10b ……配線パターン露出部 11……スルホール接続部 12……ヴィア接続部(導電性バンプ)
6. Insulator layers 7a, 7b, 7a ', 7b' made of liquid crystal polymer. Wiring patterns 8a, 8b ... Insulating coating layer (cover coat) made of liquid crystal polymer 9, 9 '... Core wiring board 10a, 10b ... exposed wiring pattern 11 ... through-hole connection 12 ... via connection (conductive bump)

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H05K 3/46 H05K 3/46 T (72)発明者 米沢 章 東京都大田区中馬込3丁目28番7号 山一 電機株式会社内 Fターム(参考) 4F100 AB01B AB17B AB33B AK01A AK01C AR00A AR00C BA03 BA07 BA10A BA10C DC11C DC21B EA011 EA013 EG00A EG00B EJ15 EJ152 EJ17 EJ171 EJ173 EJ333 EJ42 EJ421 EJ423 EJ95 GB43 JG01B JG04 JG04A JG05 JL02 5E317 AA24 BB01 BB12 CC60 CD23 CD32 GG03 GG09 GG20 5E338 AA03 AA12 AA16 BB12 BB13 BB63 BB80 EE11 EE30 EE60 5E346 AA02 AA12 AA43 AA60 CC08 CC32 DD02 DD12 FF24 GG15 HH06 HH40 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme court ゛ (Reference) H05K 3/46 H05K 3/46 T (72) Inventor Akira Yonezawa 3-28-7 Nakamagome, Ota-ku, Tokyo No. Yamaichi Denki Co., Ltd. F-term (reference) 4F100 AB01B AB17B AB33B AK01A AK01C AR00A AR00C BA03 BA07 BA10A BA10C DC11C DC21B EA011 EA013 EG00A EG00B EJ15 EJ152 EJ17 EJ171 EJ173 J04 EJ42 J04 EJ42 EJ42 EJ42 EJ42 EJ421 CC60 CD23 CD32 GG03 GG09 GG20 5E338 AA03 AA12 AA16 BB12 BB13 BB63 BB80 EE11 EE30 EE60 5E346 AA02 AA12 AA43 AA60 CC08 CC32 DD02 DD12 FF24 GG15 HH06 HH40

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】 液晶ポリマーから成る絶縁体層の少なく
とも一主面に配線パターンが形成されたコア配線板と、 前記コア配線板の配線パターン形成面に一体化され、か
つ配線パターンの所要箇所を露出するための穿孔を有す
る液晶ポリマーから成る絶縁被覆層とを備えていること
を特徴とする配線基板。
A core wiring board having a wiring pattern formed on at least one principal surface of an insulator layer made of a liquid crystal polymer; and a wiring pattern forming surface of the core wiring board integrated with a required portion of the wiring pattern. An insulating coating layer made of a liquid crystal polymer having perforations for exposure.
【請求項2】 コア配線板は、多層配線パターン型であ
ることを特徴とする請求項1記載の配線基板。
2. The wiring board according to claim 1, wherein the core wiring board is a multilayer wiring pattern type.
【請求項3】 コア配線板の配線パターン層間は、絶縁
体層を貫挿した導電性バンプで接合されていることを特
徴とする請求項1もしくは請求項2記載の配線基板。
3. The wiring board according to claim 1, wherein the wiring pattern layers of the core wiring board are joined by conductive bumps penetrating an insulator layer.
【請求項4】 絶縁被覆層を成す液晶ポリマーの融点
が、絶縁体層を成す液晶ポリマーの融点よりも低いこと
を特徴とする請求項1ないし請求項3いずれか一記載の
配線基板。
4. The wiring board according to claim 1, wherein the melting point of the liquid crystal polymer forming the insulating coating layer is lower than the melting point of the liquid crystal polymer forming the insulating layer.
【請求項5】 コア配線板の配線パターンは、銅箔製で
あることを特徴とする請求項1ないし請求項4いずれか
一記載の配線基板。
5. The wiring board according to claim 1, wherein the wiring pattern of the core wiring board is made of copper foil.
【請求項6】 絶縁被覆層に接するコア配線板の配線パ
ターンは、コア配線板面と平坦面を成していることを特
徴とする請求項1ないし請求項5いずれか一記載の配線
基板。
6. The wiring board according to claim 1, wherein the wiring pattern of the core wiring board in contact with the insulating coating layer has a flat surface with the surface of the core wiring board.
【請求項7】 液晶ポリマーから成る絶縁体層の少なく
とも一主面に導電性金属箔を載置し、加圧・加熱一体化
する工程と、 前記加圧一体化した導電性金属箔を配線パターニングし
てコア配線板化する工程と、 前記コア配線板の配線パターン形成面に液晶ポリマーか
ら成る絶縁体シートを位置決め配置して加圧・加熱一体
化する工程と、 前記配線パターン形成面の絶縁体シートの所定領域を穿
孔加工し、配線パターンの所要箇所を露出させる工程
と、 を有することを特徴とする配線基板の製造方法。
7. A step of placing a conductive metal foil on at least one main surface of an insulator layer made of a liquid crystal polymer, and pressurizing and heating and integrating the conductive metal foil; Forming an insulating sheet made of a liquid crystal polymer on the wiring pattern forming surface of the core wiring board, and pressing and heating and integrating the insulating sheet; and forming an insulator on the wiring pattern forming surface. Perforating a predetermined area of the sheet to expose a required portion of the wiring pattern.
【請求項8】 導電性金属箔は、銅箔であることを特徴
とする請求項7記載の配線基板の製造方法。
8. The method according to claim 7, wherein the conductive metal foil is a copper foil.
JP30904798A 1998-10-29 1998-10-29 Wiring board and method of manufacturing the same Expired - Lifetime JP3490309B2 (en)

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Application Number Priority Date Filing Date Title
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JP3490309B2 JP3490309B2 (en) 2004-01-26

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