JP2000114109A - Solid electrolytic capacitor and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce ESR(equivalent series resistance) and enable improving capacity substantiality rate. SOLUTION: A foil in which an etched aluminum foil is subjected to the formation of at most 10V, by using aqueous solution of ammonium dihydrogenphosphate of 0.005-3%, and a TiN film, is formed on the surface of the aluminum foil by a cathode arc plasma vapor deposition method is used as a cathode foil. A foil in which the surface of the etched aluminum foil is subjected to forming the treatment and a dielectric coating film is formed is used as an anode foil. This anode foil is wound together with the cathode foil and a separator, and a capacitor element is formed. The capacitor element is impregnated with EDT(ethylene dioxithiophene) monomer and further with a butanol solution of ferric paratoluene sulfonic acid of 40-60% and heated to 20-180 deg.C for at least 30 minutes. After that, the surface of the capacitor element is covered with resin, and aging is performed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid electrolytic capacitor and a method for manufacturing the same, and more particularly, to an equivalent series resistance (hereinafter, referred to as "equivalent series resistance").
The present invention relates to a solid electrolytic capacitor improved in order to reduce the ESR) and to reduce the size of the capacitor, and to improve the capacitance appearance rate, and a method of manufacturing the same.

[0002]

2. Description of the Related Art In an electrolytic capacitor using a metal having a valve action such as tantalum or aluminum, a valve action metal as an anode-side counter electrode is formed into a shape of a sintered body or an etching foil to expand a dielectric material. By using such a structure, it is possible to obtain a large capacity with a small size. In particular, a solid electrolytic capacitor using a solid electrolyte as an electrolyte has characteristics that it is small, large-capacity, low equivalent series resistance, easy to chip, and suitable for surface mounting. It is indispensable for miniaturization, high performance, and low cost of electronic devices.

In this type of solid electrolytic capacitor, for small size and large capacity applications, generally, an anode foil and a cathode foil made of valve metal such as aluminum are wound with a separator interposed therebetween to form a capacitor element. The capacitor element is impregnated with a driving electrolyte, and the capacitor element is housed in a metal case such as aluminum or a synthetic resin case, and has a sealed structure. Note that as the anode material, aluminum, tantalum, niobium, titanium, or the like is used, and as the cathode material, the same kind of metal as the anode material is used.

Incidentally, in order to increase the capacitance of an electrolytic capacitor, it is important to improve the capacitance of a cathode material together with the anode material. The capacitance of each electrode in an electrolytic capacitor depends on the type and thickness of the insulating film formed thin on the electrode surface, the surface area of the electrode, and the like. Assuming that t is t and the surface area of the electrode is A, the capacitance C is expressed by the following equation.

C = ε (A / t) As is apparent from this equation, in order to increase the capacitance, it is necessary to increase the electrode surface area, select an insulating film material having a high dielectric constant, and form a thin insulating film. Is effective. Of these,
It is not preferable to simply use a large electrode in order to increase the surface area of the electrode, because this simply causes an increase in the size of the electrolytic capacitor. Therefore, conventionally, the surface area of an aluminum foil, which is a base material of an electrode material, is subjected to an etching process to form irregularities, thereby substantially increasing the surface area.

[0006] Japanese Patent Application Laid-Open No. Sho 59-16709 discloses that
As a substitute for the above-mentioned etching treatment, a cathode material in which a metal film is formed on the surface of a base material by utilizing a metal deposition technique is disclosed. According to this technology,
It is said that by selecting the film forming conditions, fine irregularities can be formed on the film surface to increase the surface area and obtain a large capacitance. Further, if a metal such as Ti, which exhibits a high dielectric constant when converted to an oxide, is used as the metal film, the dielectric constant of the insulating film formed on the surface of the cathode material is increased to obtain a larger capacitance. It has been shown that it can.

Further, Japanese Patent Application Laid-Open No.
In -150825, the capacitance of the electrolytic capacitor is
Considering that the capacitance on the anode side and the capacitance on the cathode side are a combined capacitance connected in series, high-purity aluminum used for the cathode electrode was used to increase the capacitance value on the cathode side. A technique is disclosed in which a vapor deposition layer made of titanium nitride is formed on the surface by a cathodic arc vapor deposition method.

[0008]

However, the solid electrolytic capacitor using the cathode foil formed by the above-described conventional technique has the following problems. That is, in the conventional solid electrolytic capacitor, in order to increase the capacitance of the electrolytic capacitor, the surface of the aluminum foil, which is the base material of the electrode material, is subjected to an etching treatment. There is a limit to the increase in the capacitance of the electrode material by the etching technique, for example, because the melting proceeds at the same time and the increase in the area coverage is rather hindered.

Conventionally, manganese dioxide formed mainly by thermal decomposition of manganese nitrate has been used as a solid electrolyte for a solid electrolytic capacitor. However, since manganese dioxide has a relatively high conductivity, it is used as a capacitor. ES
There was a limit to the reduction of R. Further, in the step of forming manganese dioxide, heat treatment at 200 to 300 ° C. must be performed several times, so that an oxide film is formed on the surface of the metal nitride film formed on the surface of the cathode foil. Of the electrolytic capacitor, and eventually the capacitance of the electrolytic capacitor.

The present invention has been proposed to solve the above-mentioned problems of the prior art, and an object of the present invention is to reduce the ESR and improve the capacitance appearance rate of a solid electrolytic capacitor. And a method for manufacturing the same.

[0011]

Means for Solving the Problems To solve the above-mentioned problems, the present inventors have made intensive studies on a solid electrolytic capacitor capable of reducing the ESR and improving the capacitance appearance rate and a method of manufacturing the same. Thus, the present invention has been completed. That is, in a wound solid electrolytic capacitor using a conductive polymer or lead dioxide as an electrolyte layer, a chemical conversion film is formed on the surface of the cathode foil, and a film made of metal nitride is formed thereon by vapor deposition. It has been found that this makes it possible to reduce the ESR and improve the capacity appearance rate.

First, the present inventor has proposed a wound type solid electrolytic capacitor using a conductive polymer having high conductivity and good adhesion to a dielectric film, which has recently attracted attention as an electrolyte layer. Various studies were conducted. Representative examples of the conductive polymer include polyethylene dioxythiophene (hereinafter referred to as PEDT), polypyrrole, polyaniline, TCNQ (7,7,8,8-tetracyanoquinodimethane), and dielectrics thereof. It has been known. Further, various studies were also conducted on a wound solid electrolytic capacitor using lead dioxide, which is known as an inorganic conductive compound.

Further, the present inventor has proposed that under various formation voltages,
A chemical conversion film was formed on the cathode foil, and TiN was further vapor-deposited thereon. A capacitor was formed using the cathode foil under the conditions described below, and the capacity of the cathode foil alone was measured. It became. That is, it was found that TiN formed on the chemical conversion film removed a part of the chemical conversion film formed on the surface of the cathode foil, and the TiN and the cathode foil metal were conducting. By the way, the capacitance C of the electrolytic capacitor
Is a combined capacitance in which the anode-side capacitance Ca and the cathode-side capacitance Cc are connected in series, as expressed by the following equation.

(Equation 1) As is clear from the above equation, as long as Cc has a value (the cathode foil has a capacitance), the capacitance C of the capacitor is smaller than the capacitance Ca on the anode side. In other words, when TiN deposited on the surface of the cathode foil and the cathode foil metal become conductive and the capacitance Cc of the cathode foil becomes infinite as in the present invention, the capacitance component of the cathode foil disappears and the anode foil loses its capacity. The capacitance C of the capacitor, which is the combined capacitance of the cathode foils connected in series, is the capacitance Ca of the anode.
Is equal to the maximum.

[0014] As the metal nitride, TiN, ZrN, TaN, NbN, on which an oxide film is hardly formed on the surface, can be used.
Etc. can be used. Further, the film formed on the surface of the cathode is not limited to the metal nitride, but may be another material as long as it is a conductive material that can form the film and is less likely to be oxidized. For example, Ti, Zr, Ta, Nb, etc. can be used.

As a method of forming a film made of metal nitride on a cathode made of a valve metal, a vapor deposition method is used in consideration of the strength of the film to be formed, adhesion to the cathode, control of film formation conditions, and the like. Of these, the cathodic arc plasma deposition method is more preferred. The application conditions of this cathodic arc plasma deposition method are as follows. That is, the current value is 8
0 to 300 A, and the voltage value is 15 to 20 V. In the case of metal nitride, a cathode made of a valve metal is used in a range of 200 to 45.
Heated to 0 ° C. and the total pressure including nitrogen is 1 × 10 ⁻¹ to 1 × 10
Performed in an atmosphere of ^-4 Torr.

The formation voltage applied to form a chemical conversion film on the surface of the cathode foil is desirably 10 V or less. The reason is that if the formation voltage is 10V or more,
This is because the thickness of the chemical conversion film formed on the surface of the cathode foil increases, the capacitance of the cathode foil decreases, and the capacitance of the capacitor, which is the combined capacitance of the anode foil and the cathode foil, decreases.

Further, as a chemical solution for forming the cathode foil, a phosphoric acid-based chemical solution such as ammonium dihydrogen phosphate and diammonium hydrogen phosphate, a boric acid-based chemical solution such as ammonium borate, an ammonium adipate and the like can be used. An adipic acid-based chemical solution or the like can be used, and among them, ammonium dihydrogen phosphate is preferably used. The concentration of the aqueous solution of ammonium dihydrogen phosphate is suitably 0.005 to 3%.

As described above, as the conductive polymer, PEDT, polypyrrole, polyaniline, TC
NQ or their dielectrics can be used. Among them, in the case of a small-sized and large-capacity wound type capacitor, polymerization can be performed at about 100 ° C., and temperature control and the like can be easily performed during the manufacturing process of the capacitor. Therefore, it is desirable to use PEDT which is excellent in heat resistance and has the largest capacitance per unit volume.

Next, a method of manufacturing a wound solid electrolytic capacitor using a conductive polymer as the electrolyte layer will be described. That is, as the cathode foil, an etched aluminum foil was converted into an aqueous solution of 0.005 to 3% ammonium dihydrogen phosphate at 10 V or less, and a TiN film was formed on the surface thereof by a cathode arc plasma deposition method. Use something. The conditions of the cathodic arc plasma deposition method are as follows: a cathode made of a valve metal is heated to 200 to 450 ° C. using a Ti target in a nitrogen atmosphere, and the total pressure including nitrogen is 1 × 10 ⁻¹ to 1 × 10 ^{−. 4} Torr, 80-30
The operation is performed at 0 A and 15 to 20 V. Further, as the anode foil, a foil obtained by subjecting a surface of an etched aluminum foil to a chemical conversion treatment by a conventionally used method to form a dielectric film is used. The anode foil is wound together with the cathode foil and the separator to form a capacitor element, ethylenedioxythiophene (hereinafter, referred to as EDT) is impregnated into the capacitor element, and 40 to 60% of ferric paratoluenesulfonate is added. Impregnated with a butanol solution, 20-180 ° C.,
Heat for at least 30 minutes. Thereafter, the surface of the capacitor element is covered with a resin, and aging is performed.

Here, EDT impregnated in the capacitor element
Can be used as an EDT monomer,
A monomer solution in which T and a volatile solvent are mixed at a volume ratio of 1: 1 to 1: 3 can also be used. As the volatile solvent, hydrocarbons such as pentane, ethers such as tetrahydrofuran, esters such as ethyl formate, ketones such as acetone, alcohols such as methanol, and nitrogen compounds such as acetonitrile can be used. Among them, methanol, ethanol, acetone and the like are preferable. As the oxidizing agent, ferric paratoluenesulfonate dissolved in butanol is used. In this case, the ratio between butanol and ferric paratoluenesulfonate may be arbitrary,
In the present invention, a 40 to 60% solution is used. The mixing ratio between EDT and oxidizing agent is preferably in the range of 1: 3 to 1: 6.

Further, similarly to the above-mentioned conductive polymer,
Various studies were also conducted on a wound solid electrolytic capacitor using lead dioxide, which can form a semiconductor layer at a low temperature, and as with solid electrolytic capacitors with an electrolyte layer made of a conductive polymer, resistance was as high. It has been found that voltage characteristics, leakage current characteristics, and the like are good, ESR can be reduced, and a high capacitance appearance rate can be obtained. Since this lead dioxide forms a highly conductive semiconductor layer, a solid electrolytic capacitor having low ESR characteristics can be formed. In addition, a semiconductor layer using lead dioxide can be formed by oxidizing lead acetate at room temperature with an oxidizing agent such as ammonium persulfate, so that the anodic oxide film is less damaged than manganese dioxide formed at a high temperature. It is considered that the film has good properties, withstand voltage characteristics, leakage current characteristics, and the like, and can obtain characteristics equivalent to those of the conductive polymer.

However, lead dioxide has a drawback that the rated voltage is lower than the formation voltage of the anode foil as compared with the above-mentioned PEDT. Therefore, in order to obtain the same rated voltage as that of PEDT, the formation voltage of the anode foil must be increased, and accordingly, the thickness of the chemical conversion film of the anode foil increases, and the capacitance of the anode foil decreases. The capacitance of the capacitor, which is a combined capacitance of the capacitance of the anode foil and the capacitance of the cathode foil, is reduced.

Next, a method of manufacturing a wound solid electrolytic capacitor using lead dioxide as the electrolyte layer will be described. That is, as the cathode foil, an etched aluminum foil was converted into an aqueous solution of 0.005 to 3% ammonium dihydrogen phosphate at 10 V or less, and a TiN film was formed on the surface thereof by a cathode arc plasma deposition method. Use something. The conditions of the cathodic arc plasma deposition method are as follows: a cathode made of a valve metal is heated to 200 to 450 ° C. using a Ti target in a nitrogen atmosphere, and the total pressure including nitrogen is 1 × 10 ⁻¹ to 1 × 10 ^{−. 4} Torr, 80-300A,
Perform at 15-20V. Further, as the anode foil, a foil obtained by subjecting a surface of an etched aluminum foil to a chemical conversion treatment by a conventionally used method to form a dielectric film is used. This anode foil is wound together with the cathode foil and the separator to form a capacitor element.
It is immersed in an aqueous solution of lead acetate in the range of 0.05 mol / liter to a concentration that gives a saturated solubility, and an aqueous solution of ammonium persulfate in the range of 0.1 to 5 mol per mol of lead acetate is added thereto. For 30 minutes to 2 hours to form a lead dioxide layer on the dielectric layer. Next, the capacitor element is washed with water and dried, and then sealed with a resin to form a solid electrolytic capacitor.

Even when the cathode foil according to the present invention is used for an electrolytic capacitor using a normal electrolytic solution, an electric double layer capacitor is formed at the interface between the electrolytic solution and the cathode foil and becomes a capacitance component. The capacity does not become zero and the maximum capacity as in the present invention cannot be obtained.

[0025]

Hereinafter, the present invention will be described in more detail with reference to examples.

[1. First Embodiment] The present embodiment relates to a wound solid electrolytic capacitor using a conductive polymer as an electrolyte layer. In addition, the cathode foil which formed the chemical conversion film on the surface which concerns on this invention, and also formed the film which consists of metal nitride on it was produced like Example 1 below. As Comparative Example 1, a cathode foil having only a chemical conversion film formed on the cathode surface at the same chemical conversion voltage as in Example 1 was used.
As a conventional example 1, a normal cathode foil was used.

Example 1 A high-purity aluminum foil (purity: 99%, thickness: 50 μm) cut into a size of 4 mm × 30 mm was used as a material to be processed, and after etching, 0.15% at a formation voltage of 2 V. And a TiN film was formed on the surface thereof by a cathodic arc plasma deposition method. The conditions of the cathodic arc plasma deposition method were as follows: using a Ti target in a nitrogen atmosphere, heating a high-purity aluminum foil to 200 ° C.
The test was performed at 5 × 10 ⁻³ Torr, 300 A, and 20 V. Then, this cathode foil is wound together with the anode foil and the separator to form a capacitor element having an element shape of 4φ × 7L,
This capacitor element was impregnated with an EDT monomer, further impregnated with a 45% ferric paratoluenesulfonate butanol solution as an oxidizing agent solution, and heated at 100 ° C. for 1 hour. After that, cover the surface of the capacitor element with resin,
Aging was performed to form a solid electrolytic capacitor.
The rated voltage of this solid electrolytic capacitor is 6.3 W
V, the rated capacity is 33 μF.

Comparative Example 1 The same material as in Example 1 was used as the material to be treated.
A cathode foil was prepared by chemical conversion with a 5% aqueous solution of ammonium dihydrogen phosphate. Then, using this cathode foil,
A solid electrolytic capacitor was formed in the same manner as described above.

(Conventional Example 1) The same material as in Example 1 was used as a material to be treated, and a material having no surface formed of a chemical conversion film and a metal nitride film was used as a cathode foil. Using this cathode foil, a solid electrolytic capacitor was formed in the same manner as in Example 1.

[Comparative Results] Table 1 shows the electrical characteristics of the solid electrolytic capacitors of Example 1, Comparative Example 1 and Conventional Example 1 obtained by the above method.

[0031]

[Table 1]

As is apparent from Table 1, in the conventional example 1 in which neither a chemical conversion film nor a film made of metal nitride is formed on the surface of the cathode foil, the capacitance (Cap) is "30.2" and the equivalent series resistance (ES
R) was as high as "49" and tan δ was as high as "0.120". On the other hand, in Example 1, Cap is “4”.
6.8 ″, which is about 1.55 times that of the conventional example 1, and tan δ
Was "0.020", which was about 16.7% of that of Conventional Example 1. The ESR is "35", which is about 71.4% of the conventional example 1.
Has dropped.

On the other hand, in Comparative Example 1 in which only the chemical conversion film was formed on the surface of the cathode foil, Cap was "32.1", which was about 1.06 times that of Conventional Example 1, and tan δ was "0.08".
8 ", which is about 73.3% of that of Conventional Example 1. In addition, ES
R was "35", which was about 71.4% of that of Conventional Example 1.

It is considered that such a result was obtained for the following reason. That is, in Example 1, a film made of metal nitride was formed on the chemical conversion film formed on the surface of the cathode foil by a vapor deposition method, and this metal nitride was formed on the surface of the cathode foil. By removing a part of the coating, the metal nitride and the cathode foil metal are conducted. Further, in the present embodiment, since a conductive polymer is used as the electrolyte, it is not necessary to perform a high-temperature treatment in the process of forming the capacitor, and thus no oxide film is formed on the surface of the metal nitride.

As described above, according to the first embodiment, the metal nitride deposited on the surface of the cathode foil and the metal of the cathode foil are conducted, and the capacity of the cathode foil becomes infinite, and the capacitance component on the surface of the cathode foil disappears. As a result, the capacitance of the capacitor, which is the combined capacitance of the anode foil and the cathode foil, becomes equal to the capacitance of only the anode foil and increases. Further, since the capacitance component of the cathode foil is eliminated, the dielectric loss is also eliminated, so that tan δ is also reduced.

Further, since the metal nitride formed on the surface of the cathode foil is formed by a vapor deposition method, the metal nitride is not formed on the side surfaces of the concave portions of the etched cathode foil surface. Therefore, the conductive polymer and the cathode foil come into direct contact with each other in this portion, but since a chemical conversion film is formed on the surface of the cathode foil in advance, the adhesion between the cathode foil and the conductive polymer is improved. , ESR and ta
It is considered that nδ was reduced.

On the other hand, in Comparative Example 1 in which only the chemical conversion film was formed on the surface of the cathode foil, the increase rate of Cap was not large as compared with Example 1, but tan δ was about 73.3 of Conventional Example 1.
%, And the ESR was reduced to about 71.4% of the conventional example 1. This is presumably because the formation of a chemical conversion film on the surface of the cathode foil at a predetermined chemical conversion voltage improved the adhesion between the cathode foil and the conductive polymer, and reduced ESR and tan δ.

As described above, in a solid electrolytic capacitor using a cathode foil in which a chemical conversion film is formed on the surface and a film made of metal nitride is further formed thereon, the ESR and t
It has been clarified that an δ can be reduced and the capacity appearance rate can be significantly improved.

[2. Second Embodiment] The present embodiment relates to a wound solid electrolytic capacitor using lead dioxide as an electrolyte layer. The cathode foil having a chemical conversion film formed on the surface according to the present invention and further having a metal nitride film formed thereon was prepared as in Example 2 below. As Comparative Example 2, a cathode foil having only a chemical conversion film formed on the surface of the cathode at the same formation voltage as in Example 2 was used, and as Conventional Example 2, a normal cathode foil was used.

Example 2 A high-purity aluminum foil (purity: 99%, thickness: 50 μm) cut into a size of 4 mm × 30 mm was used as a material to be processed, and after etching, 0.15% at a formation voltage of 2 V. And a TiN film was formed on the surface thereof by a cathodic arc plasma deposition method. The conditions of the cathodic arc plasma deposition method were as follows: using a Ti target in a nitrogen atmosphere, heating a high-purity aluminum foil to 200 ° C.
The test was performed at 5 × 10 ⁻³ Torr, 300 A, and 20 V. Then, the cathode foil was wound together with the anode foil and the separator to form a capacitor element having an element shape of 4φ × 7L. This capacitor element was immersed in a 3 mol / l aqueous lead acetate solution, and the same amount of a 3 mol / l aqueous ammonium persulfate solution was added thereto, and left at room temperature for 1 hour. Next, after washing and drying this capacitor element,
In the same manner as in Example 1, a solid electrolytic capacitor having a rated voltage of 6.3 WV and a rated capacity of 22 μF was formed.

In the second embodiment, the rated capacity is as small as 22 μF as compared with the first embodiment using PEDT, for the following reason. That is, lead dioxide has a lower rated voltage of the capacitor with respect to the formation voltage of the anode foil than PEDT. Therefore, for the same rated voltage, in the case of lead dioxide, the formation voltage of the anode foil must be increased. Therefore, the thickness of the anode foil increases, the capacitance of the anode foil decreases, and the capacitance of the capacitor, which is the combined capacitance of the capacitance of the anode foil and the capacitance of the cathode foil, decreases.

Comparative Example 2 The same material as in Example 2 was used as the material to be treated.
A cathode foil was prepared by chemical conversion with a 5% aqueous solution of ammonium dihydrogen phosphate. Using the cathode foil, Example 2
A solid electrolytic capacitor was formed in the same manner as described above.

(Conventional Example 2) The same material as in Example 2 was used as the material to be treated, and a material having no surface formed of a chemical conversion film and a metal nitride film was used as a cathode foil. Then, using this cathode foil, a solid electrolytic capacitor was formed in the same manner as in Example 2.

[Comparative Results] Table 2 shows the electrical characteristics of the solid electrolytic capacitors of Example 2, Comparative Example 2 and Conventional Example 2 obtained by the above method.

[0045]

[Table 2]

As is apparent from Table 2, in the conventional example 2 in which neither a chemical conversion film nor a film made of metal nitride is formed on the surface of the cathode foil, the capacitance (Cap) is "22.0" and the equivalent series resistance (ES
R) was as high as "157" and tan δ was as high as "0.129". On the other hand, in Example 2, Cap is “2”.
4.9 ", which is about 13% higher than that of Conventional Example 2, and tan δ is" 0.033 ", which is about 26% that of Conventional Example 2. ESR is" 136 ", which is about 87% of that of Conventional Example 2. Dropped.

On the other hand, in Comparative Example 2 in which only a chemical conversion film was formed on the surface of the cathode foil, Cap was "23.1", which was about 5% higher than in Conventional Example 2, and tan δ was "0.092". 2 to about 71%. The ESR is “13
8 ", which is about 88% of Conventional Example 2.

It is considered that such a result was obtained for the following reason. That is, in Example 2, a film made of a metal nitride was formed on the chemical conversion film formed on the surface of the cathode foil by a vapor deposition method, and this metal nitride was formed on the surface of the cathode foil. By removing a part of the coating, the metal nitride and the cathode foil metal are conducted. Further, in the present embodiment, since lead dioxide is used as the electrolyte, it is not necessary to perform high-temperature treatment in the process of forming the capacitor, so that no oxide film is formed on the surface of the metal nitride.

As described above, according to Example 2, the metal nitride deposited on the surface of the cathode foil and the metal of the cathode foil conduct, the capacity of the cathode foil becomes infinite, and the capacitance component on the surface of the cathode foil disappears. As a result, the capacitance of the capacitor, which is the combined capacitance of the anode foil and the cathode foil, becomes equal to the capacitance of only the anode foil and increases. Further, since the capacitance component of the cathode foil is eliminated, the dielectric loss is also eliminated, so that tan δ is also reduced.

Further, since the metal nitride formed on the surface of the cathode foil is formed by a vapor deposition method, the metal nitride is not formed on the side surfaces of the recesses on the etched cathode foil surface. For this reason, lead dioxide and the cathode foil come into direct contact with each other in this portion. However, since a chemical conversion film is formed in advance on the surface of the cathode foil, the adhesion between the cathode foil and the lead dioxide is improved, and the ESR is reduced. And tan δ are considered to have been reduced.

In the second embodiment, the rate of increase in capacitance (about 13%) is smaller than the rate of increase (about 55%) in Example 1 using PEDT. It is considered as follows. That is, as described above, in Example 2, when the same rated voltage as in Example 1 was used, the formation voltage of the anode foil had to be increased, so that the thickness of the anode foil was increased and the capacitance of the anode foil was increased. Becomes smaller. Therefore, even if the capacitance of the cathode foil becomes infinite due to the deposition of TiN, the contribution to the capacitance of the capacitor, which is a combined capacitance of the capacitance of the anode foil and the capacitance of the cathode foil, is expressed by PEDT. This is considered to be because the size is smaller than that in the first embodiment using.

On the other hand, in Comparative Example 2 in which only a chemical conversion film was formed on the surface of the cathode foil, the increase rate of Cap was not large as compared with Example 2, but tan δ was about 71.3 of Conventional Example 2.
%, And the ESR was reduced to about 87.9% of that of Conventional Example 2. This is presumably because the conversion film was formed on the surface of the cathode foil at a predetermined formation voltage, whereby the adhesion between the cathode foil and lead dioxide was improved, and the ESR and tan δ were reduced.

As described above, in a solid electrolytic capacitor using a cathode foil in which a chemical conversion film is formed on the surface and a film made of a metal nitride is further formed thereon, even when lead dioxide is used as an electrolyte, As in the case of a solid electrolytic capacitor provided with an electrolyte layer made of a conductive polymer, it has been found that ESR and tan δ can be reduced, and the capacitance appearance rate can be significantly improved.

[0054]

As described above, according to the present invention,
By forming a chemical conversion film on the surface of the cathode foil and further forming a film made of metal nitride thereon, this metal nitride removes a part of the chemical conversion film formed on the surface of the cathode foil, The metal nitride and the cathode foil metal conduct. As a result, the capacitance of the cathode foil becomes infinite and the capacitance component on the surface of the cathode foil disappears, and as a result, the capacitance of the capacitor, which is the combined capacitance of the anode foil and the cathode foil, is equal to the capacitance of only the anode foil. Become the largest. Further, since the capacitance component of the cathode foil is eliminated, the dielectric loss is also eliminated, so that tan δ is also reduced. Therefore, according to the present invention, E
It is possible to provide a solid electrolytic capacitor and a method of manufacturing the same, which can reduce the SR and improve the capacitance appearance rate.

Claims (9)

[Claims] 1. A capacitor element is formed by winding a cathode foil made of a valve metal and an anode foil made of a valve metal having an oxide film formed on a surface thereof through a separator, and forming a capacitor element between the cathode foil and the anode foil. A solid electrolytic capacitor having an electrolyte layer formed of a conductive polymer, wherein a conversion film is formed on the surface of the cathode foil, and a film made of a metal nitride is further formed thereon. 2. A capacitor element is formed by winding a cathode foil made of a valve metal and an anode foil made of a valve metal having an oxide film formed on a surface thereof through a separator, and forming a capacitor element between the cathode foil and the anode foil. A solid electrolytic capacitor having an electrolyte layer made of lead dioxide, wherein a conversion film is formed on the surface of the cathode foil, and a film made of metal nitride is further formed thereon. 3. The solid electrolytic capacitor according to claim 1, wherein the conductive polymer is polyethylene dioxythiophene. 4. The solid electrolytic capacitor according to claim 1, wherein the valve metal is aluminum. 5. The method according to claim 1, wherein the metal nitride is TiN, ZrN, T
The solid electrolytic capacitor according to any one of claims 1 to 4, wherein the capacitor is one of aN and NbN. 6. The solid electrolytic capacitor according to claim 1, wherein the metal nitride is formed by a vapor deposition method. 7. The solid electrolytic capacitor according to claim 6, wherein the vapor deposition method is a cathodic arc plasma vapor deposition method. 8. A capacitor element is formed by winding a cathode foil made of a valve metal and an anode foil made of a valve metal having an oxide film formed on the surface thereof through a separator to form a capacitor element. A method for producing a solid electrolytic capacitor for forming an electrolyte layer made of a conductive polymer, comprising: forming a chemical conversion film on the surface of the cathode foil; and forming a metal nitride film thereon. Manufacturing method. 9. A capacitor element is formed by winding a cathode foil made of a valve metal and an anode foil made of a valve metal having an oxide film formed on a surface thereof through a separator, thereby forming a capacitor element between the cathode foil and the anode foil. In a method for manufacturing a solid electrolytic capacitor for forming an electrolyte layer made of lead, a conversion film is formed on the surface of the cathode foil, and a film made of a metal nitride is further formed thereon. Production method.