JP2000075118A5 - - Google Patents

Download PDF

Info

Publication number
JP2000075118A5
JP2000075118A5 JP1999097403A JP9740399A JP2000075118A5 JP 2000075118 A5 JP2000075118 A5 JP 2000075118A5 JP 1999097403 A JP1999097403 A JP 1999097403A JP 9740399 A JP9740399 A JP 9740399A JP 2000075118 A5 JP2000075118 A5 JP 2000075118A5
Authority
JP
Japan
Prior art keywords
lattice
diffraction
optical element
diffractive optical
portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999097403A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000075118A (ja
JP4336412B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP09740399A priority Critical patent/JP4336412B2/ja
Priority claimed from JP09740399A external-priority patent/JP4336412B2/ja
Priority to US09/327,474 priority patent/US6587272B2/en
Priority to EP99111594A priority patent/EP0965864B1/en
Priority to DE69926955T priority patent/DE69926955T2/de
Publication of JP2000075118A publication Critical patent/JP2000075118A/ja
Publication of JP2000075118A5 publication Critical patent/JP2000075118A5/ja
Application granted granted Critical
Publication of JP4336412B2 publication Critical patent/JP4336412B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP09740399A 1998-06-16 1999-04-05 回折光学素子及びそれを用いた光学系 Expired - Fee Related JP4336412B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP09740399A JP4336412B2 (ja) 1998-06-16 1999-04-05 回折光学素子及びそれを用いた光学系
US09/327,474 US6587272B2 (en) 1998-06-16 1999-06-08 Diffractive optical element
EP99111594A EP0965864B1 (en) 1998-06-16 1999-06-15 Diffractive optical element
DE69926955T DE69926955T2 (de) 1998-06-16 1999-06-15 Diffraktives optisches Element

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10-185680 1998-06-16
JP18568098 1998-06-16
JP09740399A JP4336412B2 (ja) 1998-06-16 1999-04-05 回折光学素子及びそれを用いた光学系

Publications (3)

Publication Number Publication Date
JP2000075118A JP2000075118A (ja) 2000-03-14
JP2000075118A5 true JP2000075118A5 (enExample) 2006-06-08
JP4336412B2 JP4336412B2 (ja) 2009-09-30

Family

ID=26438576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP09740399A Expired - Fee Related JP4336412B2 (ja) 1998-06-16 1999-04-05 回折光学素子及びそれを用いた光学系

Country Status (4)

Country Link
US (1) US6587272B2 (enExample)
EP (1) EP0965864B1 (enExample)
JP (1) JP4336412B2 (enExample)
DE (1) DE69926955T2 (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3530776B2 (ja) 1999-07-28 2004-05-24 キヤノン株式会社 回折光学素子及びそれを用いた光学系
JP3619165B2 (ja) * 2000-04-20 2005-02-09 キヤノン株式会社 回折光学素子を用いた撮像装置
JP2002062417A (ja) 2000-06-07 2002-02-28 Canon Inc 回折光学素子、該回折光学素子を有する光学系及び光学機器、回折光学素子の製造方法、回折光学素子製造用の金型
US6762880B2 (en) 2001-02-21 2004-07-13 Ibsen Photonics A/S Grating structures and methods of making the grating structures
AU2003221422A1 (en) * 2002-03-18 2003-09-29 Nikon Corporation Diffraction optical element and method for manufacturing the same, and optical device
DE60330521D1 (de) 2002-04-04 2010-01-28 Canon Kk Diffraktives optisches Element mit einer Vielzahl von Beugungsgittern und optisches System
WO2004025335A1 (de) 2002-08-24 2004-03-25 Carl Zeiss Smt Ag Binär geblazetes diffraktives optisches element
DE10322239B4 (de) 2003-05-17 2011-06-30 Carl Zeiss SMT GmbH, 73447 Geblazetes diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element
DE10322238B4 (de) 2003-05-17 2007-10-31 Carl Zeiss Smt Ag Diffraktives optisches Element sowie Projektionsobjektiv mit einem solchen Element
US6982838B2 (en) 2003-06-04 2006-01-03 Pentax Corporation Objective lens for optical pick-up
US7239598B2 (en) * 2003-06-17 2007-07-03 Pentax Corporation Objective lens for optical pick-up
US7038862B2 (en) 2003-06-17 2006-05-02 Pentax Corporation Objective lens for optical pick-up
US20070287202A1 (en) * 2004-08-31 2007-12-13 Kenzo Maehashi Method for Producing Nano-Scale Low-Dimensional Quantum Structure, and Method for Producing Integrated Circuit Using the Method for Producing the Structure
DE102005036633A1 (de) * 2005-08-04 2007-06-21 Carl Zeiss Ag Achromatisches diffraktives optisches Element sowie Verfahren zum Entwerfen eines solchen
EP2028520A3 (de) 2007-08-17 2010-01-20 Carl Zeiss Surgical GmbH Optische Einrichtung
DE102007044228A1 (de) 2007-08-17 2009-04-02 Carl Zeiss Surgical Gmbh Optische Einrichtung
CN101726771A (zh) * 2008-10-27 2010-06-09 深圳富泰宏精密工业有限公司 扩散透镜及具有该扩散透镜的光源组件
KR20110114972A (ko) * 2010-04-14 2011-10-20 삼성전자주식회사 레이저 빔을 이용한 기판의 가공 방법
JP5676930B2 (ja) * 2010-06-11 2015-02-25 キヤノン株式会社 回折光学素子、光学系および光学機器
JP5676929B2 (ja) 2010-06-11 2015-02-25 キヤノン株式会社 回折光学素子、光学系および光学機器
JP2012083382A (ja) * 2010-10-06 2012-04-26 Canon Inc 回折光学素子、光学系および光学機器
JP6278625B2 (ja) 2012-07-30 2018-02-14 キヤノン株式会社 測色装置及びそれを備える画像形成装置
US9644107B2 (en) * 2014-06-02 2017-05-09 Vadient Optics, LLC. Achromatic optical-dispersion corrected gradient refractive index optical-element
US10649119B2 (en) * 2018-07-16 2020-05-12 Facebook Technologies, Llc Duty cycle, depth, and surface energy control in nano fabrication
US11550083B2 (en) 2019-06-26 2023-01-10 Meta Platforms Technologies, Llc Techniques for manufacturing slanted structures
US11644683B2 (en) * 2020-06-17 2023-05-09 Himax Technologies Limited Optical element including at least two diffractive layers
CN115031925B (zh) * 2022-08-10 2022-12-09 歌尔光学科技有限公司 一种光栅检测方法、装置、系统以及计算机可读存储介质

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4426130A (en) 1981-02-19 1984-01-17 Rca Corporation Semi-thick transmissive and reflective sinusoidal phase grating structures
DE3303623A1 (de) * 1983-02-03 1984-08-09 Philips Patentverwaltung Gmbh, 2000 Hamburg Optische phasengitteranordnung und schaltvorrichtungen mit einer solchen anordnung
US5048925A (en) 1985-05-28 1991-09-17 Advanced Environmental Research Group Quasi volume diffracting structures
DE3938639A1 (de) * 1988-11-21 1990-05-23 Ricoh Kk Optische aufzeichnungs-/wiedergabeeinrichtung
JPH03152052A (ja) 1989-11-09 1991-06-28 Pilot Seiko Kk 長尺薄物材の位置自動矯正装置
US5044706A (en) 1990-02-06 1991-09-03 Hughes Aircraft Company Optical element employing aspherical and binary grating optical surfaces
US5175647A (en) * 1991-06-26 1992-12-29 Eastman Kodak Company Optical device
JPH06194123A (ja) * 1992-12-24 1994-07-15 Canon Inc 変位検出装置
JPH06324262A (ja) 1993-05-11 1994-11-25 Olympus Optical Co Ltd 撮像光学系
JP3152052B2 (ja) 1994-03-04 2001-04-03 住友電装株式会社 ワイヤハーネスのスプライス方法および構造
US5446588A (en) 1994-07-29 1995-08-29 The University Of Rochester Wide-angle eyepiece optical system employing refractive and diffractive optical elements
US5847877A (en) 1994-09-12 1998-12-08 Olympus Optical Co., Ltd. Diffractive optical element
IL111392A (en) * 1994-10-25 2000-02-17 Elop Electrooptics Ind Ltd Linear beam steering
US5737113A (en) 1995-08-04 1998-04-07 Canon Kabushiki Kaisha Optical modulators and color image display device employing the same
JP3618464B2 (ja) 1995-08-29 2005-02-09 オリンパス株式会社 回折光学素子、およびそれを用いる光学装置
US6157488A (en) 1995-08-29 2000-12-05 Olympus Optical Company Ltd. Diffractive optical element
JPH10133149A (ja) 1996-11-01 1998-05-22 Canon Inc 回折光学素子及びそれを用いた光学系
JP3472092B2 (ja) 1997-07-28 2003-12-02 キヤノン株式会社 回折光学素子及びそれを用いた光学系

Similar Documents

Publication Publication Date Title
JP2000075118A5 (enExample)
JPH1184118A5 (enExample)
US6822796B2 (en) Diffractive optical element
US6754006B2 (en) Hybrid metallic-dielectric grating
JPH1164616A5 (enExample)
JP2022166056A5 (enExample)
US5457573A (en) Diffraction element and an optical multiplexing/demultiplexing device incorporating the same
US7573638B2 (en) Diffractive optical element and method of its formation
JPH1144808A5 (enExample)
KR100464358B1 (ko) 분배 브락 반사경을 갖는 반도체 레이저의 제조 방법
JP5145516B2 (ja) 波長分波光学素子およびカプラー
JPH11223717A5 (enExample)
US7342254B2 (en) Light-emitting device having a diffractive film on its light-output face and manufacturing method therefor
JP2002006126A (ja) 回折格子および回折格子の使用法
US6788465B2 (en) Littrow grating and use of a littrow grating
JP5984111B2 (ja) 再帰反射性を有する波長選択フィルタ及び窓材
US6813080B2 (en) Metal-free gratings for wavelength-multiplexed optical communications
US6768589B2 (en) Method and apparatus providing reduced polarization-dependent loss
US6927891B1 (en) Tilt-able grating plane for improved crosstalk in 1×N blaze switches
EP0219845B1 (en) Phase grating of a combination pattern-refraction modification type
JP3412706B2 (ja) 光合分波装置
WO1995019585A1 (en) Agile beam steering using phased-array-like elements
Kaushik et al. Two-dimensional array of optical interference filters produced by lithographic alterations of the index of refraction
JP6457215B2 (ja) 外部共振器型半導体レーザ用回折格子
KR20210156457A (ko) 편광 의존성이 없는 유전체 다층박막 회절격자