JP2000066397A5 - - Google Patents
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- Publication number
- JP2000066397A5 JP2000066397A5 JP1998229792A JP22979298A JP2000066397A5 JP 2000066397 A5 JP2000066397 A5 JP 2000066397A5 JP 1998229792 A JP1998229792 A JP 1998229792A JP 22979298 A JP22979298 A JP 22979298A JP 2000066397 A5 JP2000066397 A5 JP 2000066397A5
- Authority
- JP
- Japan
- Prior art keywords
- resin composition
- photosensitive resin
- acid
- solvent
- positive photosensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011342 resin composition Substances 0.000 claims 7
- 239000002904 solvent Substances 0.000 claims 7
- 239000002253 acid Substances 0.000 claims 5
- 229920000642 polymer Polymers 0.000 claims 3
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 claims 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 2
- -1 nitrogen-containing basic compound Chemical class 0.000 claims 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims 1
- KMTRUDSVKNLOMY-UHFFFAOYSA-N Ethylene carbonate Chemical compound O=C1OCCO1 KMTRUDSVKNLOMY-UHFFFAOYSA-N 0.000 claims 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000003513 alkali Substances 0.000 claims 1
- 150000001412 amines Chemical class 0.000 claims 1
- 150000003863 ammonium salts Chemical class 0.000 claims 1
- 238000009835 boiling Methods 0.000 claims 1
- 125000004432 carbon atom Chemical group C* 0.000 claims 1
- 238000004090 dissolution Methods 0.000 claims 1
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 claims 1
- 229940116333 ethyl lactate Drugs 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 230000002401 inhibitory effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000004094 surface-active agent Substances 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22979298A JP3810219B2 (ja) | 1998-08-14 | 1998-08-14 | ポジ型感光性樹脂組成物 |
| US09/295,329 US6806022B1 (en) | 1998-04-22 | 1999-04-21 | Positive photosensitive resin composition |
| KR1019990014184A KR100601078B1 (ko) | 1998-04-22 | 1999-04-21 | 포지티브 감광성 수지 조성물 |
| EP99107339.6A EP0952489B1 (en) | 1998-04-22 | 1999-04-21 | Positive photosensitive resin composition |
| US10/315,182 US6846610B2 (en) | 1998-04-22 | 2002-12-10 | Positive photosensitive resin composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22979298A JP3810219B2 (ja) | 1998-08-14 | 1998-08-14 | ポジ型感光性樹脂組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000066397A JP2000066397A (ja) | 2000-03-03 |
| JP2000066397A5 true JP2000066397A5 (enExample) | 2005-02-24 |
| JP3810219B2 JP3810219B2 (ja) | 2006-08-16 |
Family
ID=16897752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22979298A Expired - Fee Related JP3810219B2 (ja) | 1998-04-22 | 1998-08-14 | ポジ型感光性樹脂組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3810219B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002006483A (ja) * | 2000-06-20 | 2002-01-09 | Sumitomo Chem Co Ltd | フォトレジスト組成物 |
| JP4908816B2 (ja) * | 2005-10-06 | 2012-04-04 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
-
1998
- 1998-08-14 JP JP22979298A patent/JP3810219B2/ja not_active Expired - Fee Related
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