JP2000056235A5 - - Google Patents

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Publication number
JP2000056235A5
JP2000056235A5 JP1998228160A JP22816098A JP2000056235A5 JP 2000056235 A5 JP2000056235 A5 JP 2000056235A5 JP 1998228160 A JP1998228160 A JP 1998228160A JP 22816098 A JP22816098 A JP 22816098A JP 2000056235 A5 JP2000056235 A5 JP 2000056235A5
Authority
JP
Japan
Prior art keywords
stage
magnification
low
inspection
observation system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998228160A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000056235A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10228160A priority Critical patent/JP2000056235A/ja
Priority claimed from JP10228160A external-priority patent/JP2000056235A/ja
Publication of JP2000056235A publication Critical patent/JP2000056235A/ja
Publication of JP2000056235A5 publication Critical patent/JP2000056235A5/ja
Pending legal-status Critical Current

Links

JP10228160A 1998-08-12 1998-08-12 検査顕微鏡システム Pending JP2000056235A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10228160A JP2000056235A (ja) 1998-08-12 1998-08-12 検査顕微鏡システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10228160A JP2000056235A (ja) 1998-08-12 1998-08-12 検査顕微鏡システム

Publications (2)

Publication Number Publication Date
JP2000056235A JP2000056235A (ja) 2000-02-25
JP2000056235A5 true JP2000056235A5 (enExample) 2005-10-27

Family

ID=16872181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10228160A Pending JP2000056235A (ja) 1998-08-12 1998-08-12 検査顕微鏡システム

Country Status (1)

Country Link
JP (1) JP2000056235A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002148526A (ja) * 2000-11-06 2002-05-22 Nikon Corp 顕微鏡装置
JP4525073B2 (ja) * 2003-12-24 2010-08-18 株式会社ニコン 顕微鏡装置
JP4664599B2 (ja) * 2004-01-15 2011-04-06 オリンパス株式会社 顕微鏡装置
DE102005032946A1 (de) * 2004-07-16 2006-02-02 Carl Zeiss Meditec Ag Vorrichtung zur Bearbeitung eines Objektes mittels Laserstrahlung
JP2007248360A (ja) * 2006-03-17 2007-09-27 Jeol Ltd 荷電粒子ビーム検査方法および装置
CN103630540B (zh) * 2013-11-15 2015-09-30 重庆大学 煤岩瓦斯吸附-膨胀变形光学计量仪
US10262404B2 (en) * 2016-06-14 2019-04-16 General Electric Company Method and system for articulation of a visual inspection device
JP7291027B2 (ja) * 2019-07-30 2023-06-14 三菱重工業株式会社 外観検査装置
KR102463020B1 (ko) * 2020-12-18 2022-11-03 주식회사 포스코 점상부식 결함 평가장치 및 평가방법

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