JP2000012427A5 - - Google Patents
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- Publication number
- JP2000012427A5 JP2000012427A5 JP1998171809A JP17180998A JP2000012427A5 JP 2000012427 A5 JP2000012427 A5 JP 2000012427A5 JP 1998171809 A JP1998171809 A JP 1998171809A JP 17180998 A JP17180998 A JP 17180998A JP 2000012427 A5 JP2000012427 A5 JP 2000012427A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- air
- supply device
- air supply
- processing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000758 substrate Substances 0.000 description 541
- 238000001035 drying Methods 0.000 description 135
- 230000001133 acceleration Effects 0.000 description 91
- 238000000576 coating method Methods 0.000 description 75
- 239000011248 coating agent Substances 0.000 description 71
- 239000007788 liquid Substances 0.000 description 57
- 238000004140 cleaning Methods 0.000 description 51
- 239000002245 particle Substances 0.000 description 34
- 238000000034 method Methods 0.000 description 13
- 230000006837 decompression Effects 0.000 description 11
- 230000002411 adverse Effects 0.000 description 10
- 239000002904 solvent Substances 0.000 description 9
- 238000001704 evaporation Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000007664 blowing Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 231100000989 no adverse effect Toxicity 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 239000013557 residual solvent Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000001291 vacuum drying Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17180998A JP4022315B2 (ja) | 1998-06-18 | 1998-06-18 | 基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17180998A JP4022315B2 (ja) | 1998-06-18 | 1998-06-18 | 基板処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000012427A JP2000012427A (ja) | 2000-01-14 |
| JP2000012427A5 true JP2000012427A5 (enExample) | 2005-10-06 |
| JP4022315B2 JP4022315B2 (ja) | 2007-12-19 |
Family
ID=15930136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17180998A Expired - Fee Related JP4022315B2 (ja) | 1998-06-18 | 1998-06-18 | 基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4022315B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3703703B2 (ja) * | 2000-10-04 | 2005-10-05 | 大日本スクリーン製造株式会社 | 基板処理装置 |
| JP4282493B2 (ja) | 2004-01-15 | 2009-06-24 | 株式会社東芝 | 膜形成方法及び基板処理装置 |
| JP2008051473A (ja) * | 2006-08-28 | 2008-03-06 | Denso Corp | 被乾燥物の乾燥方法および乾燥装置 |
| JPWO2010089936A1 (ja) * | 2009-02-04 | 2012-08-09 | シャープ株式会社 | インク乾燥装置 |
| KR101512560B1 (ko) * | 2012-08-31 | 2015-04-15 | 가부시키가이샤 스크린 홀딩스 | 기판처리장치 |
| JP6872328B2 (ja) * | 2016-09-06 | 2021-05-19 | 株式会社Ｓｃｒｅｅｎホールディングス | 減圧乾燥装置、減圧乾燥システム、減圧乾燥方法 |
-
1998
- 1998-06-18 JP JP17180998A patent/JP4022315B2/ja not_active Expired - Fee Related
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